JP5207663B2 - 露光システムおよびデバイス製造方法 - Google Patents

露光システムおよびデバイス製造方法 Download PDF

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Publication number
JP5207663B2
JP5207663B2 JP2007146347A JP2007146347A JP5207663B2 JP 5207663 B2 JP5207663 B2 JP 5207663B2 JP 2007146347 A JP2007146347 A JP 2007146347A JP 2007146347 A JP2007146347 A JP 2007146347A JP 5207663 B2 JP5207663 B2 JP 5207663B2
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JP
Japan
Prior art keywords
temperature
fluid
exposure apparatus
adjusting means
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007146347A
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English (en)
Japanese (ja)
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JP2008300702A5 (https=
JP2008300702A (ja
Inventor
芳幸 岡田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2007146347A priority Critical patent/JP5207663B2/ja
Priority to US12/118,254 priority patent/US7760325B2/en
Priority to TW097119912A priority patent/TWI399619B/zh
Priority to KR1020080050548A priority patent/KR101037227B1/ko
Publication of JP2008300702A publication Critical patent/JP2008300702A/ja
Publication of JP2008300702A5 publication Critical patent/JP2008300702A5/ja
Priority to KR1020110014567A priority patent/KR20110036022A/ko
Application granted granted Critical
Publication of JP5207663B2 publication Critical patent/JP5207663B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70991—Connection with other apparatus, e.g. multiple exposure stations, particular arrangement of exposure apparatus and pre-exposure and/or post-exposure apparatus; Shared apparatus, e.g. having shared radiation source, shared mask or workpiece stage, shared base-plate; Utilities, e.g. cable, pipe or wireless arrangements for data, power, fluids or vacuum

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  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Physics & Mathematics (AREA)
  • Toxicology (AREA)
  • Atmospheric Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2007146347A 2007-05-31 2007-05-31 露光システムおよびデバイス製造方法 Expired - Fee Related JP5207663B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2007146347A JP5207663B2 (ja) 2007-05-31 2007-05-31 露光システムおよびデバイス製造方法
US12/118,254 US7760325B2 (en) 2007-05-31 2008-05-09 Exposure system and method for manufacturing device
TW097119912A TWI399619B (zh) 2007-05-31 2008-05-29 曝光系統及製造裝置的方法
KR1020080050548A KR101037227B1 (ko) 2007-05-31 2008-05-30 노광 시스템 및 디바이스 제조방법
KR1020110014567A KR20110036022A (ko) 2007-05-31 2011-02-18 노광 시스템 및 디바이스 제조방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007146347A JP5207663B2 (ja) 2007-05-31 2007-05-31 露光システムおよびデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2008300702A JP2008300702A (ja) 2008-12-11
JP2008300702A5 JP2008300702A5 (https=) 2010-07-15
JP5207663B2 true JP5207663B2 (ja) 2013-06-12

Family

ID=40173899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007146347A Expired - Fee Related JP5207663B2 (ja) 2007-05-31 2007-05-31 露光システムおよびデバイス製造方法

Country Status (4)

Country Link
US (1) US7760325B2 (https=)
JP (1) JP5207663B2 (https=)
KR (2) KR101037227B1 (https=)
TW (1) TWI399619B (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101581673B1 (ko) * 2008-02-05 2015-12-31 어플라이드 머티어리얼스, 인코포레이티드 제조 프로세스들로부터의 가연성 폐기물 가스들을 처리하기 위한 시스템 및 방법
WO2009100163A1 (en) * 2008-02-05 2009-08-13 Applied Materials, Inc. Methods and apparatus for operating an electronic device manufacturing system
JP2010182834A (ja) * 2009-02-04 2010-08-19 Nikon Corp 露光方法及び装置、並びにデバイス製造方法
JP5641709B2 (ja) * 2009-04-23 2014-12-17 キヤノン株式会社 デバイス製造装置およびデバイス製造方法
US9075408B2 (en) * 2009-11-16 2015-07-07 Applied Materials, Inc. Energy savings and global gas emissions monitoring and display
US9207270B2 (en) * 2012-08-31 2015-12-08 Elwha Llc Method and apparatus for measuring negawatt usage of an appliance
KR102247922B1 (ko) * 2019-04-29 2021-05-04 강용훈 경화장치 냉각 시스템
JP7541841B2 (ja) * 2020-03-18 2024-08-29 株式会社Kelk 温度制御システム
JP7807939B2 (ja) * 2022-02-25 2026-01-28 キヤノン株式会社 冷凍装置、リソグラフィ装置、物品製造方法、ならびに、冷凍装置の制御装置および制御方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61160934A (ja) * 1985-01-10 1986-07-21 Canon Inc 投影光学装置
WO1999012194A1 (en) 1997-08-29 1999-03-11 Nikon Corporation Temperature adjusting method and aligner to which this method is applied
JPH11135429A (ja) 1997-08-29 1999-05-21 Nikon Corp 温度制御方法及び該方法を使用する露光装置
JP2001244179A (ja) * 2000-02-29 2001-09-07 Canon Inc 温度調節装置を備えた露光装置およびデバイス製造方法
JP2002158170A (ja) * 2000-09-08 2002-05-31 Nikon Corp 露光装置及びデバイス製造方法
JP3709338B2 (ja) 2000-11-22 2005-10-26 日本電気株式会社 携帯電話のユーザー設定情報管理方法とユーザー設定情報管理システム
JP2003067058A (ja) * 2001-08-30 2003-03-07 Canon Inc 温度調節装置、およびこれを有するデバイス製造装置
JP2003115440A (ja) * 2001-10-03 2003-04-18 Canon Inc 温度調節装置および非干渉化温調制御装置並びにこれらの装置を備えた露光装置
JP2003133211A (ja) * 2001-10-26 2003-05-09 Canon Inc デバイス製造装置およびその温調制御方法
JP2004128213A (ja) * 2002-10-02 2004-04-22 Canon Inc 温調システム及びそれを組み込んだ露光装置
JP2005142382A (ja) 2003-11-07 2005-06-02 Canon Inc 露光装置
JP2006005135A (ja) * 2004-06-17 2006-01-05 Canon Inc 温度調節装置およびデバイス製造装置
JP2006041251A (ja) * 2004-07-28 2006-02-09 Canon Inc 露光装置
JP4418724B2 (ja) * 2004-09-17 2010-02-24 キヤノン株式会社 露光装置
JP2006222165A (ja) * 2005-02-08 2006-08-24 Canon Inc 露光装置
JP4835970B2 (ja) * 2005-05-24 2011-12-14 株式会社ニコン 調整方法

Also Published As

Publication number Publication date
KR20080106074A (ko) 2008-12-04
TWI399619B (zh) 2013-06-21
US20090011376A1 (en) 2009-01-08
JP2008300702A (ja) 2008-12-11
US7760325B2 (en) 2010-07-20
KR20110036022A (ko) 2011-04-06
TW200912554A (en) 2009-03-16
KR101037227B1 (ko) 2011-05-25

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