JP5192622B2 - ダイシング用基体フィルム - Google Patents

ダイシング用基体フィルム Download PDF

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Publication number
JP5192622B2
JP5192622B2 JP2001029331A JP2001029331A JP5192622B2 JP 5192622 B2 JP5192622 B2 JP 5192622B2 JP 2001029331 A JP2001029331 A JP 2001029331A JP 2001029331 A JP2001029331 A JP 2001029331A JP 5192622 B2 JP5192622 B2 JP 5192622B2
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JP
Japan
Prior art keywords
film
layer
dicing
polypropylene
ethylene
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2001029331A
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English (en)
Japanese (ja)
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JP2002226803A (ja
JP2002226803A5 (enExample
Inventor
貴裕 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Achilles Corp
Original Assignee
Achilles Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Achilles Corp filed Critical Achilles Corp
Priority to JP2001029331A priority Critical patent/JP5192622B2/ja
Publication of JP2002226803A publication Critical patent/JP2002226803A/ja
Publication of JP2002226803A5 publication Critical patent/JP2002226803A5/ja
Application granted granted Critical
Publication of JP5192622B2 publication Critical patent/JP5192622B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Laminated Bodies (AREA)
  • Adhesive Tapes (AREA)
  • Dicing (AREA)
JP2001029331A 2001-02-06 2001-02-06 ダイシング用基体フィルム Expired - Lifetime JP5192622B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001029331A JP5192622B2 (ja) 2001-02-06 2001-02-06 ダイシング用基体フィルム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001029331A JP5192622B2 (ja) 2001-02-06 2001-02-06 ダイシング用基体フィルム

Publications (3)

Publication Number Publication Date
JP2002226803A JP2002226803A (ja) 2002-08-14
JP2002226803A5 JP2002226803A5 (enExample) 2008-03-06
JP5192622B2 true JP5192622B2 (ja) 2013-05-08

Family

ID=18893693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001029331A Expired - Lifetime JP5192622B2 (ja) 2001-02-06 2001-02-06 ダイシング用基体フィルム

Country Status (1)

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JP (1) JP5192622B2 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050031822A1 (en) 2003-08-07 2005-02-10 Mitsui Chemicals, Inc. Adhesive sheet
US6911618B1 (en) 2004-02-03 2005-06-28 Hitachi Metals, Ltd. Method of producing minute metal balls
JP4563257B2 (ja) * 2005-05-31 2010-10-13 電気化学工業株式会社 粘着シート及び電子部品製造方法
JP4748518B2 (ja) * 2005-07-20 2011-08-17 古河電気工業株式会社 ダイシングダイボンドテープおよびダイシングテープ
JP2007109808A (ja) * 2005-10-12 2007-04-26 Furukawa Electric Co Ltd:The 半導体ウエハダイシング−ダイボンド用粘接着テープ
JP4927393B2 (ja) * 2005-11-30 2012-05-09 古河電気工業株式会社 ダイシングテープ
JP5457703B2 (ja) * 2008-03-31 2014-04-02 三井化学株式会社 ダイシングフィルム
JP5356748B2 (ja) * 2008-07-31 2013-12-04 アキレス株式会社 ウエハ研削テープ用基材フィルム
JP5432853B2 (ja) * 2010-07-30 2014-03-05 日東電工株式会社 ダイシングテープ一体型半導体裏面用フィルム及びその製造方法並びに半導体装置の製造方法
JP5689269B2 (ja) * 2010-09-16 2015-03-25 日東電工株式会社 粘着テープ
JP5963411B2 (ja) * 2011-09-01 2016-08-03 グンゼ株式会社 ダイシング用基体フィルム
KR101539133B1 (ko) * 2012-07-10 2015-07-23 (주)엘지하우시스 반도체 웨이퍼 표면보호 점착필름 및 그의 제조방법
KR102457313B1 (ko) 2014-09-29 2022-10-20 린텍 가부시키가이샤 반도체 웨이퍼 가공용 시트용 기재, 반도체 웨이퍼 가공용 시트 및 반도체 장치의 제조 방법
JP2022158902A (ja) * 2021-03-31 2022-10-17 リンテック株式会社 ワーク加工用シート

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6216543A (ja) * 1985-07-15 1987-01-24 Mitsubishi Plastics Ind Ltd ダイシングフイルム
JP2651856B2 (ja) * 1988-11-09 1997-09-10 東燃化学株式会社 粘着性フィルム及びその製造方法
JP2618491B2 (ja) * 1989-08-05 1997-06-11 古河電気工業株式会社 放射線硬化性粘着テープ
DE4317979A1 (de) * 1993-05-28 1994-12-01 Minnesota Mining & Mfg Kunststoffband, dessen Verwendung sowie Verfahren zur Herstellung eines mit einem Kunststoffband umwickelten Körpers
JPH07196992A (ja) * 1993-12-28 1995-08-01 Nippon Autom Kk 制振シート
JP3889859B2 (ja) * 1997-07-29 2007-03-07 リンテック株式会社 ウェハ貼着用粘着シート
JPH11246830A (ja) * 1998-02-27 1999-09-14 Dainippon Printing Co Ltd 化粧シートおよびその製造方法
JP4540150B2 (ja) * 1998-09-30 2010-09-08 日東電工株式会社 熱剥離型粘着シート
JP2000173951A (ja) * 1998-12-02 2000-06-23 Okura Ind Co Ltd ダイシング用基材フィルム

Also Published As

Publication number Publication date
JP2002226803A (ja) 2002-08-14

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