JP5169023B2 - 搬送システム - Google Patents
搬送システム Download PDFInfo
- Publication number
- JP5169023B2 JP5169023B2 JP2007136494A JP2007136494A JP5169023B2 JP 5169023 B2 JP5169023 B2 JP 5169023B2 JP 2007136494 A JP2007136494 A JP 2007136494A JP 2007136494 A JP2007136494 A JP 2007136494A JP 5169023 B2 JP5169023 B2 JP 5169023B2
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- Prior art date
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- Expired - Fee Related
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- 230000008878 coupling Effects 0.000 claims description 44
- 238000010168 coupling process Methods 0.000 claims description 44
- 238000005859 coupling reaction Methods 0.000 claims description 44
- 230000007246 mechanism Effects 0.000 claims description 43
- 230000001105 regulatory effect Effects 0.000 claims description 10
- 230000032258 transport Effects 0.000 description 77
- 238000011144 upstream manufacturing Methods 0.000 description 17
- 239000000725 suspension Substances 0.000 description 11
- 230000008859 change Effects 0.000 description 7
- 229910000831 Steel Inorganic materials 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 230000002452 interceptive effect Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Intermediate Stations On Conveyors (AREA)
- Chain Conveyers (AREA)
- Branching, Merging, And Special Transfer Between Conveyors (AREA)
- Building Environments (AREA)
- Power-Operated Mechanisms For Wings (AREA)
Description
図1は、建屋内に設置された本発明の第1実施形態に係る搬送システムを示した側面図である。図2は、図1に示した搬送システムの拡大図である。図3は、建屋間の相互位置の変動前の搬送システムの状態と変動後の搬送システムの状態とを示した模式図である。図4は、図1に示した搬送システムのコンベアユニットの連結機構の平面図である。まず、図1〜図4を参照して、本発明の第1実施形態に係る搬送システム1について説明する。
図5は、本発明の第2実施形態に係る搬送システムのコンベアユニットの連結機構の平面図である。この第2実施形態では、上記第1実施形態の搬送システム1の連結機構とは異なる連結機構120を備える搬送システムについて説明する。なお、この第2実施形態では、連結機構120以外の構成は、第1実施形態と同様であるのでその説明を省略する。
図6は、本発明の第3実施形態に係る搬送システムのコンベアユニットの連結機構の平面図であり、図7は、本発明の第3実施形態に係る搬送システムのコンベアユニットの連結機構の側面図である。この第3実施形態では、上記第1実施形態及び第2実施形態の搬送システムの連結機構とは異なる連結機構220を備える搬送システムについて説明する。なお、この第3実施形態では、連結機構220以外の構成は、第1実施形態及び第2実施形態と同様であるのでその説明を省略する。
2a 井桁
10、A1、A2、A3、A4、B1 コンベアユニット
20、120、220 連結機構
21、22、121、122、221、222 連結板
21a、121a、223 カムピン
22a カム溝
30 連結部材
123 回転規制部材
221a 突出片
222a ピン取付穴
Claims (5)
- 第1建屋から第2建屋に渡って被搬送物を搬送する搬送システムであって、
前記第1建屋内及び前記第2建屋内に搬送方向に沿って敷設される複数の搬送装置と、
前記第1建屋及び前記第2建屋の相互位置が変動する際に、複数の搬送装置が蛇行して配置するように、第1の搬送装置に設けられる第1連結部材と、前記第1の搬送装置に隣接する第2の搬送装置に設けられる第2連結部材とにより、隣接する前記第1の搬送装置及び前記第2の搬送装置のそれぞれを連結する複数の連結機構とを備え、
前記連結機構は、前記第2連結部材が前記第1連結部材と上下方向に重ねて設けられると共に、前記第1連結部材に設けられ、前記搬送方向に沿って形成されるカム溝と、前記第2連結部材に設けられ、前記カム溝内を前記搬送方向又はその逆方向及び前記搬送方向と交差する方向に移動可能に挿入される少なくとも2つのカムピンとを有していることを特徴とする、搬送システム。 - 第1建屋から第2建屋に渡って被搬送物を搬送する搬送システムであって、
前記第1建屋内及び前記第2建屋内に搬送方向に沿って敷設される複数の搬送装置と、
前記第1建屋及び前記第2建屋の相互位置が変動する際に、複数の搬送装置が蛇行して配置するように、第1の搬送装置に設けられる第1連結部材と、前記第1の搬送装置に隣接する第2の搬送装置に設けられる第2連結部材とにより、隣接する前記第1の搬送装置及び前記第2の搬送装置のそれぞれを連結する複数の連結機構とを備え、
前記連結機構は、前記第2連結部材が前記第1連結部材と上下方向に重ねて設けられると共に、前記第1連結部材に設けられ、前記搬送方向に沿って形成されるカム溝と、前記第2連結部材に設けられ、前記カム溝内を前記搬送方向又はその逆方向及び前記搬送方向と交差する方向に移動可能に挿入される1つのカムピンと、前記第1連結部材又は前記第2連結部材の一方に取り付けられ、前記カムピンを中心として回転する前記第1連結部材又は前記第2連結部材の他方と当接することにより回転を規制する回転規制部材とを有していることを特徴とする、搬送システム。 - 第1建屋から第2建屋に渡って被搬送物を搬送する搬送システムであって、
前記第1建屋内及び前記第2建屋内に搬送方向に沿って敷設される複数の搬送装置と、
前記第1建屋及び前記第2建屋の相互位置が変動する際に、複数の搬送装置が蛇行して配置するように、第1の搬送装置に設けられる第1連結部材と、前記第1の搬送装置に隣接する第2の搬送装置に設けられる第2連結部材とにより、隣接する前記第1の搬送装置及び前記第2の搬送装置のそれぞれを連結する複数の連結機構とを備え、
前記連結機構は、前記第2連結部材側に延びるように前記第1連結部材と一体的に設けられた一対の突出片に前記搬送方向に沿って形成される一対のカム溝と、前記第2連結部材の前記カム溝に対応する箇所に形成されるピン取付部と、前記カム溝内を移動可能に挿入されると共に前記ピン取付部に所定の隙間を有した状態で取り付けられるカムピンとを有していることを特徴とする、搬送システム。 - 前記カムピンは、前記第1連結部材と前記第2連結部材とが所定の間隔以上離間又は近接する場合に折れることを特徴とする、請求項1〜3のいずれか1項に記載の搬送システム。
- 前記複数の搬送装置は、前記第1建屋及び前記第2建屋に固定される敷設部材上で移動可能、且つ、回転可能に載置されていることを特徴とする請求項1〜4のいずれか1項に記載の搬送システム。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007136494A JP5169023B2 (ja) | 2007-05-23 | 2007-05-23 | 搬送システム |
US12/125,562 US7934592B2 (en) | 2007-05-23 | 2008-05-22 | Conveying system which conveys an object from a first building to a second building |
CN2008100982372A CN101311083B (zh) | 2007-05-23 | 2008-05-23 | 输送系统 |
TW097119182A TWI405702B (zh) | 2007-05-23 | 2008-05-23 | 運送系統 |
KR1020080048129A KR101196169B1 (ko) | 2007-05-23 | 2008-05-23 | 반송 시스템 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007136494A JP5169023B2 (ja) | 2007-05-23 | 2007-05-23 | 搬送システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008290824A JP2008290824A (ja) | 2008-12-04 |
JP5169023B2 true JP5169023B2 (ja) | 2013-03-27 |
Family
ID=40099948
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007136494A Expired - Fee Related JP5169023B2 (ja) | 2007-05-23 | 2007-05-23 | 搬送システム |
Country Status (5)
Country | Link |
---|---|
US (1) | US7934592B2 (ja) |
JP (1) | JP5169023B2 (ja) |
KR (1) | KR101196169B1 (ja) |
CN (1) | CN101311083B (ja) |
TW (1) | TWI405702B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103832824A (zh) * | 2012-11-23 | 2014-06-04 | 上海保隆汽车科技股份有限公司 | 生产流水线设备及其生产机台 |
CN112589508A (zh) * | 2020-12-21 | 2021-04-02 | 武义聚创自动化科技有限公司 | 一种自动化生产结构 |
Family Cites Families (35)
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US2232081A (en) * | 1939-07-19 | 1941-02-18 | Goodman Mfg Co | Conveyer |
US2679314A (en) * | 1953-01-05 | 1954-05-25 | Stamicarbon | Conveyer for conveying loose material such as coal in coal mines |
US2722409A (en) * | 1954-03-11 | 1955-11-01 | Goodman Mfg Co | Continuous miner with conveying means |
US2910191A (en) * | 1956-05-15 | 1959-10-27 | Joy Mfg Co | Hydraulic equalizing connections |
US3735952A (en) * | 1970-02-13 | 1973-05-29 | Mechanics Research Inc Los Ang | Energy absorbing shock isolation stabilizing arrangement |
US3754638A (en) * | 1972-04-27 | 1973-08-28 | Lipe Rollway Corp | Conveyor junction |
US3911830A (en) * | 1972-12-07 | 1975-10-14 | Clarence R Adams | Pneumatic roll stabilizing suspension system |
US4139087A (en) * | 1977-04-13 | 1979-02-13 | Marathon Steel Company | Shiftable conveyor |
US4269011A (en) * | 1979-06-08 | 1981-05-26 | Ikonomou Aristarchos S | Earthquake guarding system |
US4538722A (en) * | 1983-03-30 | 1985-09-03 | Mcnally Pittsburg, Inc. | Conveyor shifting apparatus and process |
US4775047A (en) * | 1983-04-21 | 1988-10-04 | Metko, Inc. | Decline belt conveyor |
US4618057A (en) * | 1984-10-24 | 1986-10-21 | Production Systems, Inc. | Chain-link belt conveyor with adjustable parallel offset and variable radius guide |
JPH065471Y2 (ja) * | 1987-07-29 | 1994-02-09 | 鹿島建設株式会社 | 免震用フロアパネルの端部構造 |
US4972940A (en) * | 1989-09-11 | 1990-11-27 | Gleason Newton J | Confined area loadout conveyor system |
US5215422A (en) * | 1991-06-24 | 1993-06-01 | Snead Edwin D | Training idler assembly for self-unloading trains |
US5377910A (en) * | 1993-02-18 | 1995-01-03 | Newton; Alan R. | Railroad system |
US5588790A (en) * | 1993-11-01 | 1996-12-31 | Lichti Robert D | High speed storage system |
US5749452A (en) * | 1995-07-27 | 1998-05-12 | R.A. Hanson Company, Inc. | Mobile conveyor including alignment system |
JP3939435B2 (ja) * | 1997-06-25 | 2007-07-04 | 株式会社奥村組 | 免震装置 |
US6227377B1 (en) * | 1997-09-09 | 2001-05-08 | United Parcel Service Of America, Inc. | Automated array sorter for conveyors |
US6321657B1 (en) * | 1998-03-03 | 2001-11-27 | William E. Owen | Rail transit system |
US6155400A (en) * | 1998-03-23 | 2000-12-05 | Rahco International, Inc. | Mobile conveyor including adaptive alignment system |
JP3647643B2 (ja) * | 1998-04-03 | 2005-05-18 | 株式会社竹中工務店 | 免震床接続用フレキシブルシェルターコンベア |
US6223886B1 (en) * | 1998-06-24 | 2001-05-01 | Asyst Technologies, Inc. | Integrated roller transport pod and asynchronous conveyor |
JP2000344323A (ja) | 1999-05-31 | 2000-12-12 | Sanwa Konbea Kk | フレキシブルコンベヤー |
JP4681758B2 (ja) | 2001-05-21 | 2011-05-11 | 住友ゴム工業株式会社 | ファーストカバー搬送装置 |
JP3821273B2 (ja) | 2001-08-28 | 2006-09-13 | 株式会社ダイフク | 物品搬送設備 |
US6827024B2 (en) * | 2002-03-22 | 2004-12-07 | Kasgro Rail Corp. | Multiple truck rail vehicle with unified bolster-car body |
JP3620029B2 (ja) * | 2002-08-19 | 2005-02-16 | 伊東電機株式会社 | 搬送設備、並びに、搬送設備の設置方法 |
US20040225421A1 (en) * | 2003-05-05 | 2004-11-11 | Hengning Wu | Personal transportation system |
JP4468043B2 (ja) * | 2004-03-30 | 2010-05-26 | 株式会社S&Sエンジニアリング | コンベア型搬送設備の免震機構 |
US7472518B2 (en) * | 2005-12-05 | 2009-01-06 | Chong-Shien Tsai | Anti-shock device |
US7409799B2 (en) * | 2005-12-13 | 2008-08-12 | Chong-Shien Tsai | Anti shock device |
DE102006025517B4 (de) * | 2006-05-30 | 2022-02-24 | Caterpillar Global Mining Europe Gmbh | Streckenförderer und Rinnenschuß hierfür |
JP5126880B2 (ja) * | 2006-08-31 | 2013-01-23 | 東芝エレベータ株式会社 | コンベア装置 |
-
2007
- 2007-05-23 JP JP2007136494A patent/JP5169023B2/ja not_active Expired - Fee Related
-
2008
- 2008-05-22 US US12/125,562 patent/US7934592B2/en not_active Expired - Fee Related
- 2008-05-23 CN CN2008100982372A patent/CN101311083B/zh not_active Expired - Fee Related
- 2008-05-23 TW TW097119182A patent/TWI405702B/zh not_active IP Right Cessation
- 2008-05-23 KR KR1020080048129A patent/KR101196169B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CN101311083A (zh) | 2008-11-26 |
CN101311083B (zh) | 2012-11-28 |
TWI405702B (zh) | 2013-08-21 |
KR101196169B1 (ko) | 2012-11-01 |
JP2008290824A (ja) | 2008-12-04 |
US20090127073A1 (en) | 2009-05-21 |
TW200911656A (en) | 2009-03-16 |
KR20080103466A (ko) | 2008-11-27 |
US7934592B2 (en) | 2011-05-03 |
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