JP5168547B2 - エポキシ樹脂組成物、半導体封止材料及び半導体装置 - Google Patents
エポキシ樹脂組成物、半導体封止材料及び半導体装置 Download PDFInfo
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- JP5168547B2 JP5168547B2 JP2008049831A JP2008049831A JP5168547B2 JP 5168547 B2 JP5168547 B2 JP 5168547B2 JP 2008049831 A JP2008049831 A JP 2008049831A JP 2008049831 A JP2008049831 A JP 2008049831A JP 5168547 B2 JP5168547 B2 JP 5168547B2
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- ACVYVLVWPXVTIT-UHFFFAOYSA-N phosphinic acid Chemical class O[PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-N 0.000 description 1
- 150000003009 phosphonic acids Chemical class 0.000 description 1
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- 239000002685 polymerization catalyst Substances 0.000 description 1
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- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- JIYNFFGKZCOPKN-UHFFFAOYSA-N sbb061129 Chemical compound O=C1OC(=O)C2C1C1C=C(C)C2C1 JIYNFFGKZCOPKN-UHFFFAOYSA-N 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
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- 229910052710 silicon Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
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- 239000004945 silicone rubber Substances 0.000 description 1
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- KCNSDMPZCKLTQP-UHFFFAOYSA-N tetraphenylen-1-ol Chemical compound C12=CC=CC=C2C2=CC=CC=C2C2=CC=CC=C2C2=C1C=CC=C2O KCNSDMPZCKLTQP-UHFFFAOYSA-N 0.000 description 1
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- FOZHTJJTSSSURD-UHFFFAOYSA-J titanium(4+);dicarbonate Chemical compound [Ti+4].[O-]C([O-])=O.[O-]C([O-])=O FOZHTJJTSSSURD-UHFFFAOYSA-J 0.000 description 1
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- BIKXLKXABVUSMH-UHFFFAOYSA-N trizinc;diborate Chemical compound [Zn+2].[Zn+2].[Zn+2].[O-]B([O-])[O-].[O-]B([O-])[O-] BIKXLKXABVUSMH-UHFFFAOYSA-N 0.000 description 1
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Description
(式中、R1及びR2は、それぞれ独立的に水素原子、メチル基、エチル基、又はフェニル基を表し、nは0〜10の整数である。)
で表される構造を有するものであって、かつ、GPC測定による該一般式1中n=0の分子構造を有する化合物のエポキシ樹脂(A)中の含有率が70〜93質量%であり、かつ、GPC測定において、一般式1中n=0の化合物のピーク面積(X)と、一般式1中n=0の化合物のピークとn=1の化合物のピークとの間に出現する全てのピークの総面積(Y)との比率(Y/X)が0.07以下となるものであることを特徴とするエポキシ樹脂組成物に関する。
本発明は、更に、前記エポキシ樹脂組成物を用いることを特徴とする半導体封止材料に関する。
本発明は、更に、前記半導体封止材料を用いることを特徴とする半導体装置に関する。
(式中、R1及びR2は、それぞれ独立的に水素原子、メチル基、エチル基、又はフェニル基を表し、nは0〜10の整数である。)
で表される構造を有するものであって、かつ、GPC測定による該一般式1中n=0の分子構造を有する化合物のエポキシ樹脂(A)中の含有率が70〜93質量%であり、かつ、GPC測定において、一般式1中n=0の化合物のピーク面積(X)と、一般式1中n=0の化合物のピークとn=1の化合物のピークとの間に出現する全てのピークの総面積(Y)との比率(Y/X)が0.07以下となるものである。
このような観点から、本発明では、該一般式1中n=0の分子構造を有する化合物のエポキシ樹脂(A)中の含有率が70〜93質量%であって、かつ、前記比率(Y/X)の値が0.07〜0.01の範囲であることが特に好ましい。
1)ビナフトール類のフェノール性水酸基とエピハロヒドリンの反応モル比率:ビナフトール類のフェノール性水酸基1モルに対して1.1〜7.0モル
2)反応温度:40℃〜60℃
3)アルカリ金属水酸化物の使用量:ビナフトール類のフェノール性水酸基1モルに対して0.95〜1.3モル
4)溶剤の使用量:5質量%〜40質量%
5)反応時間:2〜5時間
その他下記一般式2
(一般式2中、X1はベンゼン骨格、ナフタレン骨格であり、Ar1ベンゼン骨格、ビフェニル骨格、ナフタレン骨格であり、R3は同一でも異なっていてもよい水素原子、炭素数1〜2のアルキル基、又はフェニル基である。)
で表されるアラルキル型フェノール樹脂、
アルコキシ基含有縮合多環式芳香族炭化水素基(b)、及び
メチレン基、アルキリデン基、芳香族炭化水素構造含有メチレン基、下記構造式
(式中、Ar1ベンゼン骨格、ビフェニル骨格、ナフタレン骨格であり、R3は同一でも異なっていてもよい水素原子、炭素数1〜2のアルキル基、又はフェニル基である。)
で表されるアラルキル基から選択される2価の炭化水素基(x)
の各構造部位を有しており、かつ、前記フェノール性水酸基含有芳香族炭化水素基(p)及び前記アルコキシ基含有縮合多環式芳香族炭化水素基(b)が、前記メチレン基、アルキリデン基、及び芳香族炭化水素構造含有メチレン基から選択される2価の炭化水素基(x)を介して結合した構造を分子構造内に有するアルコキシ基含有フェノール樹脂
が挙げられる。
また、前記アルコキシ基含有フェノール樹脂は、ICI粘度計で測定した150℃における溶融粘度が0.1〜5.0dPa・sの範囲であるのものが、成形時の流動性や硬化物の耐熱性などが優れる点で好ましい。
150℃における溶融粘度:ASTM D4287に準拠
GPC:
装置 東ソー株式会社製 HLC−8220 GPC
カラム:東ソー株式会社製 TSK−GEL G2000HXL+G2000HXL+G3000HXL+G4000HXL
溶媒 :テトラヒドロフラン
流速 :1ml/min
検出器:RI
温度計、滴下ロート、冷却管、撹拌機を取り付けたフラスコに、窒素ガスパージを施しながら、1,1'−ビ−2−ナフトール143g(1.0モル)、エピクロルヒドリン555g(6.0モル)、n−ブタノール53g、テトラエチルベンジルアンモニウムクロライド2.3gを仕込み溶解させた。55℃に昇温した後、共沸する圧力まで減圧して、49%水酸化ナトリウム水溶液82g(1.0モル)を5時間かけて滴下した。その後、同条件で0.5時間撹拌を続けた。この間、共沸によって留出してきた留出分をディーンスタークトラップで分離し、水層を除去し、油層を反応系内に戻しながら、反応を行った。その後、未反応のエピクロルヒドリンを減圧蒸留によって留去させた。それで得られた粗エポキシ樹脂にメチルイソブチルケトン550gとn−ブタノール55gとを加え溶解した。更にこの溶液に10%水酸化ナトリウム水溶液15gを添加して80℃で2時間反応させた後に洗浄液のpHが中性となるまで水150gで水洗を3回繰り返した。次いで共沸によって系内を脱水し、精密濾過を経た後に、溶媒を減圧下で留去してエポキシ樹脂(A−1)180gを得た。得られたエポキシ樹脂の軟化点は59℃(B&R法)、溶融粘度(測定法:ICI粘度計法、測定温度:150℃)は0.3dPa・s、エポキシ当量は222g/eq.であった。
合成例1において、エピクロルヒドリン370g(4.0モル)を用いる以外は合成例1と同様にしてエポキシ樹脂178gを得た。得られたエポキシ樹脂の軟化点は59℃(B&R法)、溶融粘度(測定法:ICI粘度計法、測定温度:150℃)は0.4dPa・s、エポキシ当量は225g/eq.であった。
合成例1において、エピクロルヒドリン111g(1.2モル)を用いる以外は合成例1と同様にしてエポキシ樹脂171gを得た。得られたエポキシ樹脂の軟化点は76℃(B&R法)、溶融粘度(測定法:ICI粘度計法、測定温度:150℃)は1.2dPa・s、エポキシ当量は287g/eq.であった。
温度計、滴下ロート、冷却管、撹拌機を取り付けたフラスコに、1,1'−ビ−2−ナフトール286g(1.0モル)、エピクロルヒドリン925g(10モル)をいれ溶解する。それに80℃で20%NaOH440g(2.2モル)を3時間かけて攪拌しながら滴下し、さらに30分間攪拌を続けてその後静置した。下層の食塩水を棄却し、エピクロルヒドリンを150℃で蒸留回収した後、粗樹脂にMIBK600gを加え、さらに水250gを加え80℃にて水洗した。そして下層の水洗水を棄却した後、脱水、濾過を経てMIBKを150℃で脱溶剤してエポキシ樹脂(A−4)374gを得た。得られたエポキシ樹脂の軟化点は61℃(B&R法)、溶融粘度(測定法:ICI粘度計法、測定温度:150℃)は0.4dPa・s、エポキシ当量は223g/eq.であった。
温度計,攪拌機をとりつけたフラスコに、合成例1で得られたエポキシ樹脂A−1 222gと1,1'−ビ−2−ナフトール54gを入れ100℃で加熱溶融した。それにトリフェニルホスフィン0.1gを加えた後、150℃まで2時間で昇温した後,150℃で7時間しエポキシ樹脂(A−5)を265gを得た。得られたエポキシ樹脂の軟化点は106℃(B&R法)、溶融粘度(測定法:ICI粘度計法、測定温度:150℃)は31dPa・s、エポキシ当量は450g/eq.であった。
温度計、コンデンサ−、油水分離器を取り付けたフラスコに1,1'−ビ−2−ナフト−ル200g、エピクロルヒドリン750g、トルエン35g、ジエチレングリコ−ルジメチルエ−テル75gを加えて110mmHgの減圧下、58〜60℃の温度に保ちながら49質量%水酸化ナトリウム55.3gを4時間で滴下し反応を行った。反応中、エピクロルヒドリンを水と共沸させて、油水分離器を通して水を系外へ除去した。反応終了後、5mmHg、170℃なる条件でエピクロルヒドリン及び溶剤を回収し、メチルイソブチルケトン350gを加え生成物を溶解した。その後10質量%水酸化ナトリウム30gを加えて、85℃で2時間反応させ、250gの水を加えて副生した食塩を溶解し、静置して下層の食塩水を分離除去した。リン酸溶液にて中和後水洗液が中性になるまで樹脂溶液を水洗し、瀘過した。5mmHg、170℃なる条件下でメチルイソブチルケトンを除去し目的とする樹脂250gを得た。得られたエポキシ樹脂の軟化点は57℃(B&R法)、溶融粘度(測定法:ICI粘度計法、測定温度:150℃)は0.4dPa・s、エポキシ当量は215g/eq.であった。
表2〜3に示す配合に従い、2本ロールを用いて100℃の温度で10分間溶融混練して目的の組成物を得た。得られたエポキシ樹脂組成物について、下記手法によりゲルタイムを測定し、硬化性を試験した。また、これを180℃で10分間プレス成形し、その後180℃で5時間さらに硬化せしめた後に、UL−94試験法に準拠した厚さ1.6mmの試験片を作成し、下記方法により、硬化物の物性を確認した。
得られた硬化物の物性は表2〜4にまとめた。尚、実施例及び比較例に用いた材料は表5,6の通りである。
ガラス転移温度:粘弾性測定装置(レオメトリック社製 固体粘弾性測定装置RSAII、二重カレンチレバー法;周波数1Hz、昇温速度3℃/min)を用いて測定した。
熱時弾性率:粘弾性測定装置(レオメトリック社製 固体粘弾性測定装置RSAII、二重カレンチレバー法;周波数1Hz、昇温速度3℃/min)を用いて測定し、得られたチャートの貯蔵弾性率を測定した。
線膨張係数:
硬化物を約5mm各の試験片とし、熱機械分析装置(TMA:セイコーインスツルメント社製SS−6100)を用いて、圧縮モードで熱機械分析を行った。(測定架重:88.8mN、昇温速度:3℃/分で2回、測定温度範囲:室温から250℃)2回目の測定におけるガラス領域(40〜60℃)における線膨張係数を測定した。
難燃性:UL−94試験法に準拠し、厚さ1.6mmの試験片5本を用いて、燃焼試験を行った。
Claims (8)
- エポキシ樹脂(A)と硬化剤(B)を必須成分とするエポキシ樹脂組成物において、エポキシ樹脂(A)が下記一般式1
で表される構造を有するものであって、かつ、GPC測定による該一般式1中n=0の分子構造を有する化合物のエポキシ樹脂(A)中の含有率が70〜93質量%であり、かつ、GPC測定において、一般式1中n=0の化合物のピーク面積(X)と、一般式1中n=0の化合物のピークとn=1の化合物のピークとの間に出現する全てのピークの総面積(Y)との比率(Y/X)が0.07以下となるものであることを特徴とするエポキシ樹脂組成物。 - エポキシ樹脂(A)のエポキシ当量が217〜300g/eq.である請求項1記載のエポキシ樹脂組成物。
- 硬化剤(B)が、
フェノール性水酸基含有芳香族炭化水素基(p)、
アルコキシ基含有縮合多環式芳香族炭化水素基(b)、及び
メチレン基、アルキリデン基、芳香族炭化水素構造含有メチレン基、下記構造式
で表されるアラルキル基から選択される2価の炭化水素基(x)
の各構造部位を有しており、かつ、前記フェノール性水酸基含有芳香族炭化水素基(p)及び前記アルコキシ基含有縮合多環式芳香族炭化水素基(b)が、前記メチレン基、アルキリデン基、芳香族炭化水素構造含有メチレン基及び前記アラルキル基から選択される2価の炭化水素基(x)を介して結合した構造を分子構造内に有するアルコキシ基含有フェノール樹脂である請求項1又は2記載のエポキシ樹脂組成物。 - 更に非ハロゲン系難燃剤(C)を含有する請求項1〜3の何れか一項記載のエポキシ樹脂組成物。
- 更に無機充填材(D)を含有する請求項1〜5の何れか一項記載のエポキシ樹脂組成物。
- 請求項6記載のエポキシ樹脂組成物を用いることを特徴とする半導体封止材料。
- 請求項7記載の半導体封止材料を用いることを特徴とする半導体装置。
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WO2023100722A1 (ja) * | 2021-11-30 | 2023-06-08 | 味の素株式会社 | エポキシ樹脂 |
CN115806653A (zh) * | 2022-12-21 | 2023-03-17 | 江苏扬农锦湖化工有限公司 | 一种萘系无卤阻燃型环氧树脂及其制备方法和应用 |
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