JP5148807B2 - Al2O3−希土類酸化物−ZrO2/HfO2材料およびその製造方法ならびに使用方法 - Google Patents
Al2O3−希土類酸化物−ZrO2/HfO2材料およびその製造方法ならびに使用方法 Download PDFInfo
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- JP5148807B2 JP5148807B2 JP2003516978A JP2003516978A JP5148807B2 JP 5148807 B2 JP5148807 B2 JP 5148807B2 JP 2003516978 A JP2003516978 A JP 2003516978A JP 2003516978 A JP2003516978 A JP 2003516978A JP 5148807 B2 JP5148807 B2 JP 5148807B2
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Description
少なくともAl2O3と、REOと、ZrO2またはHfO2のうちの少なくとも一方と、のソースを溶融して溶湯を提供し、
この溶湯を冷却して非晶質材料を含むセラミックを提供することを含む製造方法を提供するものである。
「非晶質材料」とは、X線回折で測定した場合に長距離結晶秩序を持たないおよび/または本願明細書の「示差熱分析」の項で説明する試験で求められるようなDTA(示差熱分析)で測定した場合に非晶質材料の結晶化に対応する発熱ピークのある、溶湯および/または気相から得られる材料を示し、
「セラミック」には、非晶質材料、ガラス、結晶質セラミック、ガラス−セラミック、これらの組み合わせを含み、
「複合金属酸化物」とは、2種類以上の金属元素と酸素とを含む金属酸化物(CeAl11O18、Dy3Al5O12、MgAl2O4、Y3Al5O12など)を示し、
「複合Al2O3・金属酸化物」とは、理論酸化物基準でAl2O3とAl以外の1以上の金属元素とを含む複合金属酸化物(CeAl11O18、Dy3Al5O12、MgAl2O4、Y3Al5O12など)を示し、
「複合Al2O3・Y2O3」とは、理論酸化物基準でAl2O3とY2O3とを含む複合金属酸化物(Y3Al5O12など)を示し、
「複合Al2O3・REO」とは、理論酸化物基準でAl2O3と希土類酸化物とを含む複合金属酸化物(CeAl11O18およびDy3Al5O12など)を示し、
「ガラス」とは、ガラス転移点を持つ非晶質材料を示し、
「ガラス−セラミック」とは、非晶質材料の熱処理によって形成される結晶を含むセラミックを示し、
「Tg」とは、本願明細書の「示差熱分析」の項で説明する試験で求められるようなガラス転移点を示し、
「Tx」とは、本願明細書の「示差熱分析」の項で説明する試験で求められるような結晶化温度を示し、
「希土類酸化物」とは、酸化セリウム(CeO2など)、酸化ジスプロシウム(Dy2O3など)、酸化エルビウム(Er2O3など)、酸化ユーロピウム(Eu2O3など)、ガドリニウム(Gd2O3など)、酸化ホルミウム(Ho2O3など)、酸化ランタン(La2O3など)、酸化ルテチウム(Lu2O3など)、酸化ネオジム(Nd2O3など)、酸化プラセオジム(Pr6O11など)、酸化サマリウム(Sm2O3など)、テルビウム(Tb2O3など)、酸化トリウム(Th4O7など)、ツリウム(Tm2O3など)、酸化イッテルビウム(Yb2O3など)、これらの組み合わせを示し、
「REO」とは、希土類酸化物を示す。
本発明による研磨粒子または被接触表面のうちの少なくとも一方を移動させ、本発明による研磨粒子のうちの少なくとも1つで表面の少なくとも一部分を研磨することを含む、表面の研磨方法を提供するものである。
アルミナ粒子(アリゾナ州トゥーソン(Tucson)のコンディア・ヴィスタ(Condea Vista)から商品名「APA−0.5」で入手)132.36グラム(g)と、酸化ランタン粒子(モリコープ・インコーポレイテッド(Molycorp,Inc.)から入手)122.64グラムと、酸化ジルコニウム粒子(公称組成はZrO2(+HfO2)が100wt−%、ジョージア州マリエッタ(Marietta)のジルコニア・セールス・インコーポレイテッド(Zirconia Sales,Inc.)から商品名「DK−2」で入手)45グラムと、蒸留水150.6グラムとをポリエチレンボトルに装入した。粉砕分散用アルミナメディア(直径10mm、アルミナ99.9%、オハイオ州アクロン(Akron)のユニオン・プロセス(Union Process)から入手)約450グラムをボトルに加え、混合物を1分あたり120回転(rpm)で4時間かけて微粉砕し、成分同士を完全に混合した。微粉砕後、微粉砕メディアを取り除き、ガラス(「パイレックス (登録商標) (PYREX (登録商標) )」)皿にスラリーを注いで、ここでヒートガンを用いてスラリーを乾燥させた。乳鉢と乳棒とを使って乾燥混合物を砕き、70メッシュの篩(篩の目開きサイズ212マイクロメートル)で篩い分けした。
アルミナ粒子(「APA−0.5」)229.5グラムと、酸化ランタン粒子(モリコープ・インコーポレイテッド(Molycorp, Inc.)から入手)40.5グラムと、酸化ジルコニウム粒子(「DK−2」)30グラムと、分散剤(「デュラマックス (登録商標) (DURAMAX (登録商標) ) D−30005」)0.6グラムと、蒸留水145グラムとをポリエチレンボトルに装入したこと以外は実施例1で説明したようにして、比較例Aの融解させた材料を調製した。
アルミナ粒子(「APA−0.5」)109グラムと、酸化ランタン粒子(モリコープ・インコーポレイテッド(Molycorp Inc.)から入手)101グラムと、酸化イットリウム粒子(マサチューセッツ州ニュートン(Newton)のエイチ・シー・スターク(H.C.Stark)から入手)9グラムと、酸化ジルコニウム粒子(「DK−2」)81グラムと、分散剤(「デュラマックス (登録商標) (DURAMAX (登録商標) ) D−30005」)0.6グラムと、蒸留水145グラムとをポリエチレンボトルに装入したこと以外は実施例1で説明したようにして、実施例2の融解させた材料を調製した。得られた融解材料は透明で緑色を帯びたガラスであった。
アルミナ粒子(「APA−0.5」)20.49グラムと、酸化ランタン粒子(モリコープ・インコーポレイテッド(Molycorp Inc.)から入手)20.45グラムと、イットリア安定化酸化ジルコニウム粒子(公称組成はZrO2(+HfO2)が94.6重量パーセント(wt−%)とY2O3が5.4wt−%、ジョージア州マリエッタ(Marietta)のジルコニア・セールス・インコーポレイテッド(Zirconia Sales,Inc.)から商品名「HSY−3」で入手)9.06グラムと、蒸留水80グラムとをポリエチレンボトルに装入したこと以外は実施例1で説明したようにして、実施例3の融解させた材料を調製した。得られた融解材料は透明なガラスであった。
アルミナ粒子(「APA−0.5」)21.46グラムと、酸化セリウム(IV)(CeO2)粒子(ウィスコンシン州ミルウォーキー(Milwaukee)のアルドリッチ・ケミカル・カンパニー(Aldrich Chemical Company)から入手)21.03グラムと、酸化ジルコニウム粒子(「DK−2」)7.5グラムと、蒸留水145グラムとをポリエチレンボトルに装入したこと以外は実施例1で説明したようにして、実施例4の融解させた材料を調製した。得られた融解材料は暗褐色でやや透明であった。
アルミナ粒子(「APA−0.5」)20.4グラムと、酸化イッテルビウム粒子(ウィスコンシン州ミルウォーキー(Milwaukee)のアルドリッチ・ケミカル・カンパニー(Aldrich Chemical Company)から入手)22.1グラムと、酸化ジルコニウム粒子(「DK−2」)7.5グラムと、蒸留水24.16グラムとをポリエチレンボトルに装入したこと以外は実施例1で説明したようにして、実施例5の融解させた材料を調製した。得られた融解材料は透明であった。
アルミナ粒子(「APA−0.5」)819.6グラムと、酸化ランタン粒子(モリコープ・インコーポレイテッド(Molycorp, Inc.)から入手)818グラムと、イットリア安定化酸化ジルコニウム粒子(公称組成はZrO2(+HfO2)が94.6wt−%とY2O3が5.4wt−%、ジョージア州マリエッタ(Marietta)のジルコニア・セールス・インコーポレイテッド(Zirconia Sales,Inc.)から商品名「HSY−3」で入手)362.4グラムと、蒸留水1050グラムと、粉砕分散用ジルコニアメディア(トーソー・セラミックス(Tosoh Ceramics)、ニュージャージー州バウンド・ブルック支店(Division of Bound Brook)から商品名「YTZ」で入手)約2000グラムとを、ポリウレタンを内張りしたミルに装入したものをポリエチレンボトルの代わりに用いたこと以外は実施例1で説明したようにして、実施例6の材料を調製した。
KIC=0.016(E/H)1/2(P/c)3/2
(式中、E=材料のヤング率、
H=ビッカース硬度、
P=圧子のニュートン力、
c=圧痕の中心から端までの亀裂長である。)
原料と使用した原料の量とを以下の表1に示すとおりとし、ジルコニアメディア(トーソー・セラミックス(Tosoh Ceramics)、ニュージャージー州バウンド・ブルック支店(Division of Bound Brook)から、商品名「YTZ」で入手)200グラムを用いて、イソプロピルアルコール90ミリリットル(ml)中にて、120rpmで24時間かけて原料の微粉砕を実施したこと以外は、実施例6で説明したようにして、実施例7〜40のガラスビーズを作製した。使用した原料のソースを以下の表2に示す。
アルミナ粒子(「APA−0.5」)20.49グラムと、酸化ランタン粒子(モリコープ・インコーポレイテッド(Molycorp, Inc.)から入手)20.45グラムと、イットリア安定化酸化ジルコニウム粒子(公称組成はZrO2(+HfO2)が94.6wt−%とY2O3が5.4wt−%、ジョージア州マリエッタ(Marietta)のジルコニア・セールス・インコーポレイテッド(Zirconia Sales,Inc.)から商品名「HSY−3」で入手)9.06グラムと、蒸留水80グラムとをポリエチレンボトルに装入したこと以外は実施例5で説明したようにして、実施例41の融解させた材料を調製した。
実施例5で説明したようにして実施例42の溶融非晶質ビーズを作製した。グラファイトダイ底部の孔を深さ2mmの溝にしたこと以外は実施例5で説明したようにして、ビーズ約15グラムをホットプレスした。得られた材料には溝が再現されていたことから、印加圧下での加熱時にガラスが極めて良好に流動していたことが分かる。
アルミナ粒子(「APA−0.5」)27グラムと、イットリア安定化酸化ジルコニウム粒子(公称組成はZrO2(+HfO2)が94.6wt−%とY2O3が5.4wt−%、ジョージア州マリエッタ(Marietta)のジルコニア・セールス・インコーポレイテッド(Zirconia Sales,Inc.)から商品名「HSY−3」で入手)23グラムと、蒸留水80グラムとをポリエチレンボトルに装入したこと以外は実施例5で説明したようにして、比較例Bの融解させた材料を調製した。この実施例の組成物はAl2O3−ZrO2二成分系の共晶組成物に対応している。得られた直径100〜150マイクロメートルの球は、X線回折分析から明らかなように部分的に非晶質であり、大部分が結晶性であった。
実施例6で説明したようにして作製した非晶質ビーズの試料(31.25グラム)と、比較例Bで説明したようにして作製したビーズ18.75グラムとを、ポリエチレンボトルに装入した。蒸留水80グラムと粉砕分散用ジルコニアメディア(ニュージャージー州バウンド・ブルック(Bound Brook)のトーソー・セラミックス(Tosoh Ceramics)から商品名「YTZ」で入手)300グラムとをボトルに加えた後、24時間かけて120rpmで混合物を微粉砕した。微粉砕後の材料をヒートガンで乾燥させた。乾燥粒子20グラムを実施例6で説明したようにしてホットプレスした。実施例43の材料のポリッシュした断面(実施例6で説明したようにして作製した)のSEM顕微鏡写真を図7に示す。比較例Bの材料(暗い部分)と実施例6の材料(明るい部分)との界面に亀裂がないことから、良好な結合状態が得られていることが分かる。
比較例Bのビーズの代わりにさまざまな添加剤(以下の表4参照)を使用したこと以外は、実施例43で説明したホットプレス処理を含む実施例44〜48を調製した。使用した原料の提供元を以下の表5にあげておく。
実施例6のビーズの15グラムのバッチを空気中にて1000℃から1300℃の温度で60分間熱処理し、実施例49〜53を調製した。この熱処理については、電気加熱炉(カリフォルニア州ピコ・リベラ(Pico Rivera)のキース・ファーニスィーズ(Keith Furnaces)から商品名「モデルKKSK−666−3100」で入手)中で行った。得られた熱処理材料を、実施例6〜40で上述したようにして粉末X線回折で分析した。結果を以下の表6にまとめておく。
実施例6のホットプレス材料を、「チップムンク(Chipmunk)」ジョークラッシャー(タイプVD、カリフォルニア州バーバンク(Burbank)のビーアイシーオー・インコーポレイテッド(BICO Inc.)製)で破砕して(研磨材)粒子にし、分級してメッシュが−25+30の画分(すなわちシーブの目開き25マイクロメートルから目開きサイズ30マイクロメートルで回収される画分)とメッシュが−30+35の画分(すなわちシーブの目開きサイズ30マイクロメートルから目開きサイズ35マイクロメートルで回収される画分)(USA標準試験シーブ)とを保持した。これらの2種類のメッシュの画分を混合し、50/50のブレンドを得た。このブレンド材料を実施例6で説明したようにして熱処理した。得られたガラス−セラミック研磨粒子30グラムを、被覆砥粒研磨円板に組み入れた。被覆砥粒研磨円板に関しては、従来の手順で作製した。従来の炭酸カルシウム充填フェノールメイク樹脂(レゾールフェノール樹脂48%、炭酸カルシウム52%、水とグリコールエーテルとを用いて固形分81%まで希釈)と従来の氷晶石充填フェノールサイズ樹脂(レゾールフェノール樹脂32%、酸化鉄2%、氷晶石66%、水とグリコールエーテルとを用いて固形分78%まで希釈)とを使用して、直径17.8cm、厚さ0.8mmのヴァルカナイズドファイバー裏材(直径2.2cmの中心穴を有する)にガラス−セラミック研磨粒子を結合した。メイク樹脂の湿重量は約185g/m2であった。メイクコートの塗布直後に、ガラス−セラミック研磨粒子を静電塗布した。メイク樹脂を88℃にて120分かけて予備硬化させた。次に、氷晶石充填フェノールサイズコートをメイクコートおよび研磨粒子の上に塗布した。サイズの湿重量は約850g/m2であった。サイズ樹脂を99℃にて12時間かけて硬化させた。試験の前に被覆砥粒研磨円板を屈曲させた。
Claims (3)
- Al2O3と、希土類酸化物REOと、ZrO2とを含有するガラスであって、該ガラスの総重量に対して、該ガラスの少なくとも85重量パーセントが、Al2O3と、希土類酸化物REOと、ZrO2とを合わせて構成され、少なくとも30重量%のAl2O3、少なくとも20重量%の希土類酸化物REO、及び15〜30重量%の範囲のZrO2を含有する研磨材用ガラス。
- Al2O3と、希土類酸化物REOと、ZrO2またはHfO2のうちの少なくとも一方とを含むガラス−セラミックであって、該ガラス−セラミックの総重量に対して、該ガラス−セラミックの少なくとも85重量パーセントが、Al2O3と、希土類酸化物REOと、ZrO2またはHfO2のうちの少なくとも一方とを合わせて構成される研磨材用ガラス−セラミック。
- Al2O3と、希土類酸化物REOと、ZrO2またはHfO2のうちの少なくとも一方とを含むガラスであって、該ガラスの総重量に対して、前記ガラスの少なくとも85重量パーセントが、Al2O3と、希土類酸化物REOと、ZrO2またはHfO2のうちの少なくとも一方とを合わせて構成され、該ガラスはそれぞれ垂直であるx、yおよびz寸法を有し、各x、yおよびz寸法は少なくとも5mmである研磨材用ガラス。
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US7563293B2 (en) | 2009-07-21 |
US20120035046A1 (en) | 2012-02-09 |
EP1430003A2 (en) | 2004-06-23 |
KR20040024607A (ko) | 2004-03-20 |
JP2004536766A (ja) | 2004-12-09 |
JP2013049627A (ja) | 2013-03-14 |
US20030126803A1 (en) | 2003-07-10 |
RU2004103084A (ru) | 2005-06-27 |
CN100522856C (zh) | 2009-08-05 |
WO2003011781A2 (en) | 2003-02-13 |
CN1537085A (zh) | 2004-10-13 |
US20100261003A1 (en) | 2010-10-14 |
US20070249482A1 (en) | 2007-10-25 |
JP5623488B2 (ja) | 2014-11-12 |
US7737063B2 (en) | 2010-06-15 |
KR100885329B1 (ko) | 2009-02-26 |
CA2454068A1 (en) | 2003-02-13 |
BR0211577A (pt) | 2004-07-13 |
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