JP5134588B2 - アルゴン精製方法、アルゴン精製装置、目的ガス精製方法、および目的ガス精製装置 - Google Patents
アルゴン精製方法、アルゴン精製装置、目的ガス精製方法、および目的ガス精製装置 Download PDFInfo
- Publication number
- JP5134588B2 JP5134588B2 JP2009140969A JP2009140969A JP5134588B2 JP 5134588 B2 JP5134588 B2 JP 5134588B2 JP 2009140969 A JP2009140969 A JP 2009140969A JP 2009140969 A JP2009140969 A JP 2009140969A JP 5134588 B2 JP5134588 B2 JP 5134588B2
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- JP
- Japan
- Prior art keywords
- adsorption
- gas
- adsorbent
- adsorption tower
- tsa
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B23/00—Noble gases; Compounds thereof
- C01B23/001—Purification or separation processes of noble gases
- C01B23/0036—Physical processing only
- C01B23/0052—Physical processing only by adsorption in solids
- C01B23/0057—Physical processing only by adsorption in solids characterised by the adsorbent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Separation Of Gases By Adsorption (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009140969A JP5134588B2 (ja) | 2009-06-12 | 2009-06-12 | アルゴン精製方法、アルゴン精製装置、目的ガス精製方法、および目的ガス精製装置 |
KR1020100053904A KR101699524B1 (ko) | 2009-06-12 | 2010-06-08 | 아르곤 정제 방법, 아르곤 정제장치, 목적 가스 정제방법 및 목적 가스 정제장치 |
TW99118867A TWI468337B (zh) | 2009-06-12 | 2010-06-10 | An argon refining method, an argon refining apparatus, an argon refining method, and an argon purifying apparatus |
CN201010280683.2A CN101962179B (zh) | 2009-06-12 | 2010-06-11 | 氩精制方法、氩精制装置、目标气体精制方法和目标气体精制装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009140969A JP5134588B2 (ja) | 2009-06-12 | 2009-06-12 | アルゴン精製方法、アルゴン精製装置、目的ガス精製方法、および目的ガス精製装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2010285317A JP2010285317A (ja) | 2010-12-24 |
JP2010285317A5 JP2010285317A5 (ko) | 2012-05-31 |
JP5134588B2 true JP5134588B2 (ja) | 2013-01-30 |
Family
ID=43509067
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009140969A Expired - Fee Related JP5134588B2 (ja) | 2009-06-12 | 2009-06-12 | アルゴン精製方法、アルゴン精製装置、目的ガス精製方法、および目的ガス精製装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5134588B2 (ko) |
KR (1) | KR101699524B1 (ko) |
CN (1) | CN101962179B (ko) |
TW (1) | TWI468337B (ko) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5729765B2 (ja) * | 2011-01-21 | 2015-06-03 | 住友精化株式会社 | ヘリウムガスの精製方法および精製装置 |
KR101800031B1 (ko) * | 2011-04-12 | 2017-11-21 | 스미또모 세이까 가부시키가이샤 | 아르곤 가스의 정제 방법 및 정제 장치 |
JP5791113B2 (ja) * | 2011-04-12 | 2015-10-07 | 住友精化株式会社 | アルゴンガスの精製方法および精製装置 |
JP5761751B2 (ja) * | 2011-05-30 | 2015-08-12 | 住友精化株式会社 | アルゴンガスの精製方法および精製装置 |
CN102423601B (zh) * | 2011-10-31 | 2013-10-16 | 重庆华峰化工有限公司 | 环己烷氧化系统尾气处理装置及处理方法 |
JP5743215B2 (ja) * | 2011-12-13 | 2015-07-01 | 住友精化株式会社 | ヘリウムガスの精製方法および精製装置 |
JP6235794B2 (ja) | 2013-05-28 | 2017-11-22 | 住友精化株式会社 | アルゴン精製方法およびアルゴン精製装置 |
CN114370601B (zh) * | 2021-12-17 | 2023-08-08 | 华能核能技术研究院有限公司 | 一种液氮注入系统及方法和应用 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5964510A (ja) * | 1982-10-05 | 1984-04-12 | Toyo Soda Mfg Co Ltd | アルゴンガスの精製法 |
AU659759B2 (en) * | 1992-10-01 | 1995-05-25 | Boc Group, Inc., The | Purification of argon by cryogenic adsorption |
JPH06182136A (ja) * | 1992-12-17 | 1994-07-05 | Sumitomo Seika Chem Co Ltd | アルゴンガスの精製方法 |
JP3385053B2 (ja) * | 1992-12-22 | 2003-03-10 | 大陽東洋酸素株式会社 | 希ガスの高収率回収精製方法及び希ガスの高収率回収精製装置 |
JP3496079B2 (ja) | 1993-11-17 | 2004-02-09 | 日本酸素株式会社 | アルゴンガスの精製方法及び装置 |
US5614000A (en) * | 1995-10-04 | 1997-03-25 | Air Products And Chemicals, Inc. | Purification of gases using solid adsorbents |
JPH08245202A (ja) * | 1996-01-31 | 1996-09-24 | Nippon Sanso Kk | 高濃度オゾンの供給装置 |
JPH1067501A (ja) * | 1996-08-22 | 1998-03-10 | Nippon Sanso Kk | 低酸素濃度オゾンの供給方法 |
ATE228101T1 (de) * | 1996-08-27 | 2002-12-15 | Boc Group Inc | Rückgewinnung von edelgasen |
JPH1183309A (ja) * | 1997-09-04 | 1999-03-26 | Nippon Air Rikiide Kk | アルゴン精製方法及び装置 |
JP4070399B2 (ja) * | 2000-10-30 | 2008-04-02 | エア・ウォーター株式会社 | ヘリウムガスの精製方法 |
JP3742304B2 (ja) * | 2001-02-14 | 2006-02-01 | 株式会社神戸製鋼所 | 希ガス回収方法及びその装置 |
JP4031238B2 (ja) * | 2001-12-19 | 2008-01-09 | 住友精化株式会社 | ヘリウム精製装置 |
JP4056264B2 (ja) * | 2002-03-08 | 2008-03-05 | 三井造船プラントエンジニアリング株式会社 | 物質の分離方法、および物質分離装置 |
FR2856607B1 (fr) * | 2003-06-27 | 2006-08-18 | Air Liquide | Procede de purification d'air par cycle tsa accelere |
JP4733960B2 (ja) | 2004-10-18 | 2011-07-27 | 大陽日酸株式会社 | 熱スイング吸着方式による不純物含有アルゴンガスの精製方法および精製装置 |
CN101249368A (zh) * | 2008-04-07 | 2008-08-27 | 刘昂峰 | 旋转式变压吸附气体分离方法 |
-
2009
- 2009-06-12 JP JP2009140969A patent/JP5134588B2/ja not_active Expired - Fee Related
-
2010
- 2010-06-08 KR KR1020100053904A patent/KR101699524B1/ko active IP Right Grant
- 2010-06-10 TW TW99118867A patent/TWI468337B/zh not_active IP Right Cessation
- 2010-06-11 CN CN201010280683.2A patent/CN101962179B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR20100133894A (ko) | 2010-12-22 |
TWI468337B (zh) | 2015-01-11 |
JP2010285317A (ja) | 2010-12-24 |
CN101962179A (zh) | 2011-02-02 |
TW201043571A (en) | 2010-12-16 |
KR101699524B1 (ko) | 2017-01-24 |
CN101962179B (zh) | 2014-06-18 |
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