JP5114919B2 - 半導体装置とその製造方法 - Google Patents
半導体装置とその製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 61
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 239000000758 substrate Substances 0.000 claims description 46
- 125000006850 spacer group Chemical group 0.000 claims description 31
- 238000005530 etching Methods 0.000 claims description 28
- 239000012535 impurity Substances 0.000 claims description 25
- 229910052710 silicon Inorganic materials 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 15
- 229910021332 silicide Inorganic materials 0.000 claims description 13
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical group [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 12
- 239000012212 insulator Substances 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 claims description 6
- 229910008310 Si—Ge Inorganic materials 0.000 claims 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 46
- 229910052814 silicon oxide Inorganic materials 0.000 description 46
- 229910052581 Si3N4 Inorganic materials 0.000 description 32
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 32
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 18
- 239000013078 crystal Substances 0.000 description 15
- 239000007789 gas Substances 0.000 description 15
- 238000005468 ion implantation Methods 0.000 description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 14
- 239000010703 silicon Substances 0.000 description 14
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 10
- 238000002955 isolation Methods 0.000 description 10
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 10
- 229920005591 polysilicon Polymers 0.000 description 10
- 230000008569 process Effects 0.000 description 9
- 238000005229 chemical vapour deposition Methods 0.000 description 8
- 230000001133 acceleration Effects 0.000 description 7
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 238000009826 distribution Methods 0.000 description 4
- 238000001020 plasma etching Methods 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 102100029095 Exportin-1 Human genes 0.000 description 3
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 3
- 108700002148 exportin 1 Proteins 0.000 description 3
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 102100029091 Exportin-2 Human genes 0.000 description 2
- 101710147878 Exportin-2 Proteins 0.000 description 2
- 229910005742 Ge—C Inorganic materials 0.000 description 2
- 229910005883 NiSi Inorganic materials 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- XUKUURHRXDUEBC-SXOMAYOGSA-N (3s,5r)-7-[2-(4-fluorophenyl)-3-phenyl-4-(phenylcarbamoyl)-5-propan-2-ylpyrrol-1-yl]-3,5-dihydroxyheptanoic acid Chemical compound C=1C=CC=CC=1C1=C(C=2C=CC(F)=CC=2)N(CC[C@@H](O)C[C@H](O)CC(O)=O)C(C(C)C)=C1C(=O)NC1=CC=CC=C1 XUKUURHRXDUEBC-SXOMAYOGSA-N 0.000 description 1
- 229910018098 Ni-Si Inorganic materials 0.000 description 1
- 229910018529 Ni—Si Inorganic materials 0.000 description 1
- HMDDXIMCDZRSNE-UHFFFAOYSA-N [C].[Si] Chemical compound [C].[Si] HMDDXIMCDZRSNE-UHFFFAOYSA-N 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
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Description
第1導電型の第1の活性領域、第2導電型の第2の活性領域を含む半導体基板と、
前記第1の活性領域上に形成された第1のゲート電極構造と、前記第1のゲート電極構造両側の前記第1の活性領域に形成された第2導電型の第1のソース/ドレイン領域と、前記第1のソース/ドレイン領域の表面から掘り下げられた凹部と、前記凹部に形成され、前記第1のゲート電極構造下方の第1のチャネルに第1の応力を印加する第2導電型の半導体埋め込み領域とを有する第1のMOSトランジスタと、
前記第2の活性領域上に形成された第2のゲート電極構造と、前記第2のゲート電極構造両側の前記第2の活性領域に形成され、平坦な上面を有する第1導電型の第2のソース/ドレイン領域と、前記第2のソース/ドレイン領域上に形成され、前記第2のゲート電極構造下方の第2のチャネルに前記第1の応力とは反対の第2の応力を印加する第1導電型の半導体エピタキシャル層とを有する第2のMOSトランジスタと、
を有し、
前記第1導電型がn型、前記第2導電型がp型であるときは、前記第1の応力は圧縮応力、前記第2の応力は引張応力であり、
前記第1の導電型がp型、前記第2の導電型がn型であるときは、前記第1の応力は引張応力、前記第2の応力は圧縮応力である半導体装置
が提供される。
(a)半導体基板に、第1導電型の第1の活性領域、第2導電型の第2の活性領域を形成する工程と、
(b)前記第1、第2の活性領域上に、第1、第2のゲート電極構造をそれぞれ形成する工程と、
(c)前記第1のゲート電極構造両側の前記第1の活性領域、及び前記第2のゲート電極構造両側の第2の活性領域の平坦な上面上に、第1導電型の半導体エピタキシャル層を形成する工程と、
(d)前記エピタキシャル層を介して、前記第1の活性領域に第2導電型の不純物、前記第2の活性領域に第1導電型の不純物をイオン注入して、前記第1の活性領域に第1のソース/ドレイン領域、前記第2の活性領域に第2のソース/ドレイン領域を形成する工程と、
(e)前記第1のソース/ドレイン領域及び前記第2のソースドレイン領域を形成する工程の後、前記第1の活性領域に形成された前記エピタキシャル層及び前記第1のソース/ドレイン領域の少なくとも一部を除去して、凹部を形成する工程と、
(f)前記凹部に、前記第1のゲート電極構造下方の第1のチャネルに第1の応力を印加する第2導電型の半導体埋め込み領域を形成する工程と、
を有し、
前記半導体エピタキシャル層は、前記第2のゲート電極構造下方の第2のチャネルに前記第1の応力とは反対の第2の応力を印加し、
前記第1導電型がn型、前記第2導電型がp型であるときは、前記第1の応力は圧縮応力、前記第2の応力は引張応力であり、
前記第1導電型がp型、前記第2導電型がn型であるときは、前記第1の応力は引張応力、前記第2の応力は圧縮応力である半導体装置の製造方法
が提供される。
2 素子分離領域(STI)
4 ゲート絶縁膜
5 ポリシリコン層
6 窒化シリコン膜(キャップ膜)
7 酸化シリコン膜
8 窒化シリコン膜
9 Si−Cエピタキシャル層
10 Siエピタキシャル層
11 酸化シリコン膜
12 凹部
13 Si−Geエピタキシャル層
14 窒化シリコン膜
16 シリサイド層
21 酸化シリコン膜
22 酸化シリコン膜
PW p型ウェル
NW n型ウェル
Ex エクステンション領域
Pk ポケット領域
S/Dソース/ドレイン領域
SW サイドウォールスペーサ
Claims (10)
- 第1導電型の第1の活性領域、第2導電型の第2の活性領域を含む半導体基板と、
前記第1の活性領域上に形成された第1のゲート電極構造と、前記第1のゲート電極構造両側の前記第1の活性領域に形成された第2導電型の第1のソース/ドレイン領域と、前記第1のソース/ドレイン領域の表面から掘り下げられた凹部と、前記凹部に形成され、前記第1のゲート電極構造下方の第1のチャネルに第1の応力を印加する第2導電型の半導体埋め込み領域とを有する第1のMOSトランジスタと、
前記第2の活性領域上に形成された第2のゲート電極構造と、前記第2のゲート電極構造両側の前記第2の活性領域に形成され、平坦な上面を有する第1導電型の第2のソース/ドレイン領域と、前記第2のソース/ドレイン領域上に形成され、前記第2のゲート電極構造下方の第2のチャネルに前記第1の応力とは反対の第2の応力を印加する第1導電型の半導体エピタキシャル層とを有する第2のMOSトランジスタと、
を有し、
前記第1導電型がn型、前記第2導電型がp型であるときは、前記第1の応力は圧縮応力、前記第2の応力は引張応力であり、
前記第1導電型がp型、前記第2導電型がn型であるときは、前記第1の応力は引張応力、前記第2の応力は圧縮応力である半導体装置。 - 前記半導体埋め込み領域が、Si−Ge,またはCを添加したSiである請求項1記載の半導体装置。
- 前記第1導電型がn型、前記第2導電型がp型であり、
前記半導体埋め込み領域がSi−Geで形成され、
前記半導体エピタキシャル層がCを添加したSiで形成され、
前記第1の応力が圧縮応力であり、前記第2の応力が引張応力である請求項2記載の半導体装置。 - 前記第1導電型がp型、前記第2導電型がn型であり、
前記半導体埋め込み領域がCを添加したSiで形成され、
前記半導体エピタキシャル層がSi−Geで形成され、
前記第1の応力が引張応力であり、前記第2の応力が圧縮応力である請求項2記載の半導体装置。 - 前記第1及び第2のゲート電極構造両側の活性領域中、かつ前記第1及び第2のソース/ドレイン領域の内側に、それぞれ形成されたソース/ドレインのエクステンション領域と、
前記エクステンション領域の上方で、前記第1及び第2のゲート電極構造の側壁上に形成された第1サイドウォールスペーサと、
をさらに有する請求項1〜4のいずれか1項記載の半導体装置。 - 前記半導体埋め込み領域及び前記半導体エピタキシャル層の上方、かつ前記第1サイドウォールスペーサの側壁上に形成された第2サイドウォールスペーサと、
前記第2サイドウォールスペーサの外側の、前記半導体埋め込み領域及び前記半導体エピタキシャル層上に形成されたシリサイド領域と、
をさらに有する請求項5記載の半導体装置。 - 前記半導体エピタキシャル層が、前記第2のゲート電極構造に近い領域に形成された第1の厚さを有する第1部分と、前記第2のゲート電極構造からより離れた領域に形成され、前記第1の厚さより厚い第2の厚さを有する第2の部分とを含み、
前記半導体埋め込み領域の前記第1のゲート電極構造側で、前記第1の活性領域上に形成され、前記半導体エピタキシャル層と同じ組成を有し、前記第1の厚さと同じ厚さを有する付随半導体エピタキシャル層をさらに有する請求項1〜4のいずれか1項記載の半導体装置。 - (a)半導体基板に、第1導電型の第1の活性領域、第2導電型の第2の活性領域を形成する工程と、
(b)前記第1、第2の活性領域上に、第1、第2のゲート電極構造をそれぞれ形成する工程と、
(c)前記第1のゲート電極構造両側の前記第1の活性領域、及び前記第2のゲート電極構造両側の第2の活性領域の平坦な上面上に、第1導電型の半導体エピタキシャル層を形成する工程と、
(d)前記エピタキシャル層を介して、前記第1の活性領域に第2導電型の不純物、前記第2の活性領域に第1導電型の不純物をイオン注入して、前記第1の活性領域に第1のソース/ドレイン領域、前記第2の活性領域に第2のソース/ドレイン領域を形成する工程と、
(e)前記第1のソース/ドレイン領域及び前記第2のソースドレイン領域を形成する工程の後、前記第1の活性領域に形成された前記エピタキシャル層及び前記第1のソース/ドレイン領域の少なくとも一部を除去して、凹部を形成する工程と、
(f)前記凹部に、前記第1のゲート電極構造下方の第1のチャネルに第1の応力を印加する第2導電型の半導体埋め込み領域を形成する工程と、
を有し、
前記半導体エピタキシャル層は、前記第2のゲート電極構造下方の第2のチャネルに前記第1の応力とは反対の第2の応力を印加し、
前記第1導電型がn型、前記第2導電型がp型であるときは、前記第1の応力は圧縮応力、前記第2の応力は引張応力であり、
前記第1導電型がp型、前記第2導電型がn型であるときは、前記第1の応力は引張応力、前記第2の応力は圧縮応力である半導体装置の製造方法。 - 前記工程(c)が、
前記第1、第2のゲート電極構造の側壁上に第1のサイドウォールスペーサを形成する工程と、
前記第1、第2の活性領域上に前記半導体エピタキシャル層を形成する工程と、
を含む請求項8記載の半導体装置の製造方法。 - 前記工程(b)が、ゲート絶縁膜、ゲート電極層、絶縁性キャップ層の積層を含むゲート電極構造を形成し、
前記工程(c)が、
前記第1、第2のゲート電極構造を覆って、前記半導体基板の上に、エッチング特性の異なる第1の絶縁体膜、第2の絶縁体膜を積層する工程と、
異方性エッチングして前記第1、第2のゲート電極構造側壁上に第1のサイドウォールスペーサを形成する工程と、
前記第1のサイドウォールスペーサの下部で露出する前記第1の絶縁体膜の少なくとも一部を側方からエッチングする工程と、
前記第1の絶縁体膜をエッチングする工程の後に、前記第1、第2の活性領域上に前記半導体エピタキシャル層を形成する工程と、
を含む請求項8記載の半導体装置の製造方法。
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