JP5095084B2 - 試料の表面形状の測定方法及び装置 - Google Patents

試料の表面形状の測定方法及び装置 Download PDF

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JP5095084B2
JP5095084B2 JP2005044427A JP2005044427A JP5095084B2 JP 5095084 B2 JP5095084 B2 JP 5095084B2 JP 2005044427 A JP2005044427 A JP 2005044427A JP 2005044427 A JP2005044427 A JP 2005044427A JP 5095084 B2 JP5095084 B2 JP 5095084B2
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probe
sample
surface shape
measured
measuring
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JP2006226964A (ja
JP2006226964A5 (enExample
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直樹 水谷
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Ulvac Inc
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Ulvac Inc
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  • A Measuring Device Byusing Mechanical Method (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP2005044427A 2005-02-21 2005-02-21 試料の表面形状の測定方法及び装置 Expired - Fee Related JP5095084B2 (ja)

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JP2006226964A5 JP2006226964A5 (enExample) 2008-04-10
JP5095084B2 true JP5095084B2 (ja) 2012-12-12

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103033122A (zh) * 2012-12-20 2013-04-10 北京小米科技有限责任公司 一种平面误差度测量设备及测量方法
CN105180786A (zh) * 2015-09-22 2015-12-23 苏州润吉驱动技术有限公司 一种电梯曳引机制动轮跳动检具
CN105737708A (zh) * 2015-12-21 2016-07-06 芜湖市甬微制冷配件制造有限公司 一种轴杆偏摆检测仪

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008122254A (ja) * 2006-11-13 2008-05-29 Ulvac Japan Ltd 触針式段差計における変位センサ用差動トランス
JP5036420B2 (ja) * 2007-06-21 2012-09-26 株式会社東京精密 表面形状測定装置及び異常検出方法
JP5173292B2 (ja) * 2007-07-13 2013-04-03 株式会社アルバック 試料の表面形状の測定方法
JP5124249B2 (ja) * 2007-11-30 2013-01-23 株式会社アルバック 表面形状測定用触針式段差計を用いた段差測定方法及び装置
JP5713659B2 (ja) * 2010-12-21 2015-05-07 キヤノン株式会社 形状測定方法及び形状測定装置
JP2013007669A (ja) * 2011-06-24 2013-01-10 Ulvac Japan Ltd 表面形状測定用触針式段差計における針飛び抑制方法
JP5782863B2 (ja) * 2011-06-24 2015-09-24 株式会社アルバック 表面形状測定用触針式段差計の性能改善方法及び該方法を実施した表面形状測定用触針式段差計
JP5998501B2 (ja) * 2012-02-07 2016-09-28 凸版印刷株式会社 紙カップフランジ段差測定器と測定方法
IT201800005610A1 (it) 2018-05-23 2019-11-23 Metodo e apparecchiatura per il controllo o la misura di dimensioni di una parte meccanica
CN109115081B (zh) * 2018-10-12 2023-08-22 烟台华孚制冷设备有限公司 冰淇淋机搅拌器检测装置及其检测方法
CN112146701B (zh) * 2020-09-17 2022-09-30 五邑大学 一种触觉测量装置及方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4669300A (en) * 1984-03-30 1987-06-02 Sloan Technology Corporation Electromagnetic stylus force adjustment mechanism
JPH05340706A (ja) * 1992-06-08 1993-12-21 Tokyo Seimitsu Co Ltd 変位検出器
JP3459710B2 (ja) * 1995-09-29 2003-10-27 キヤノン株式会社 触針式プローブ
JP3943939B2 (ja) * 2002-01-23 2007-07-11 株式会社東芝 厚さ検知装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103033122A (zh) * 2012-12-20 2013-04-10 北京小米科技有限责任公司 一种平面误差度测量设备及测量方法
CN105180786A (zh) * 2015-09-22 2015-12-23 苏州润吉驱动技术有限公司 一种电梯曳引机制动轮跳动检具
CN105737708A (zh) * 2015-12-21 2016-07-06 芜湖市甬微制冷配件制造有限公司 一种轴杆偏摆检测仪

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