JP5067034B2 - 音叉型振動子、発振器 - Google Patents

音叉型振動子、発振器 Download PDF

Info

Publication number
JP5067034B2
JP5067034B2 JP2007163084A JP2007163084A JP5067034B2 JP 5067034 B2 JP5067034 B2 JP 5067034B2 JP 2007163084 A JP2007163084 A JP 2007163084A JP 2007163084 A JP2007163084 A JP 2007163084A JP 5067034 B2 JP5067034 B2 JP 5067034B2
Authority
JP
Japan
Prior art keywords
film
piezoelectric
tuning fork
electrode film
arm portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007163084A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009005023A5 (enExample
JP2009005023A (ja
Inventor
司 舩坂
剛夫 舟川
隆 山崎
誠 古畑
知 藤井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2007163084A priority Critical patent/JP5067034B2/ja
Publication of JP2009005023A publication Critical patent/JP2009005023A/ja
Publication of JP2009005023A5 publication Critical patent/JP2009005023A5/ja
Application granted granted Critical
Publication of JP5067034B2 publication Critical patent/JP5067034B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
JP2007163084A 2007-06-20 2007-06-20 音叉型振動子、発振器 Expired - Fee Related JP5067034B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007163084A JP5067034B2 (ja) 2007-06-20 2007-06-20 音叉型振動子、発振器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007163084A JP5067034B2 (ja) 2007-06-20 2007-06-20 音叉型振動子、発振器

Publications (3)

Publication Number Publication Date
JP2009005023A JP2009005023A (ja) 2009-01-08
JP2009005023A5 JP2009005023A5 (enExample) 2010-07-29
JP5067034B2 true JP5067034B2 (ja) 2012-11-07

Family

ID=40320938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007163084A Expired - Fee Related JP5067034B2 (ja) 2007-06-20 2007-06-20 音叉型振動子、発振器

Country Status (1)

Country Link
JP (1) JP5067034B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5275054B2 (ja) * 2009-01-16 2013-08-28 セイコーインスツル株式会社 Ａｔカット水晶振動子
JP5622173B2 (ja) 2010-07-29 2014-11-12 セイコーエプソン株式会社 振動片、振動子、発振器、および電子機器
JP5685962B2 (ja) 2011-02-02 2015-03-18 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
US8581669B2 (en) 2011-02-02 2013-11-12 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
JP6102075B2 (ja) 2012-03-30 2017-03-29 セイコーエプソン株式会社 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置
JP6482169B2 (ja) 2013-07-19 2019-03-13 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器及び移動体
JP6311815B2 (ja) * 2017-03-02 2018-04-18 セイコーエプソン株式会社 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58150317A (ja) * 1982-03-02 1983-09-07 Citizen Watch Co Ltd 長さたて振動子
JPH0666631B2 (ja) * 1983-10-25 1994-08-24 シチズン時計株式会社 水晶振動子
JPS60126907A (ja) * 1983-12-12 1985-07-06 Nippon Telegr & Teleph Corp <Ntt> 単一応答複合圧電振動素子
JPH09105U (ja) * 1991-10-29 1997-02-25 東洋通信機株式会社 ガス圧力センサ
JPH085382A (ja) * 1994-06-23 1996-01-12 Nippondenso Co Ltd 角速度センサ
JPH11257965A (ja) * 1998-03-09 1999-09-24 Hitachi Ltd 角速度検出センサ
JP3514224B2 (ja) * 1999-11-11 2004-03-31 株式会社村田製作所 圧電共振子、フィルタ及び電子機器
JP3514222B2 (ja) * 1999-11-17 2004-03-31 株式会社村田製作所 圧電共振子、電子部品及び電子機器
JP2003051732A (ja) * 2001-08-08 2003-02-21 Murata Mfg Co Ltd 圧電共振子、フィルタおよび電子通信機器
JP4862639B2 (ja) * 2001-10-31 2012-01-25 有限会社ピエデック技術研究所 水晶振動子とその製造方法と水晶ユニットの製造方法
JP3896585B2 (ja) * 2001-12-18 2007-03-22 株式会社大真空 音叉型圧電振動子
JP2004251663A (ja) * 2003-02-18 2004-09-09 Fujitsu Media Device Kk 角速度センサ
US7362198B2 (en) * 2003-10-30 2008-04-22 Avago Technologies Wireless Ip (Singapore) Pte. Ltd Pass bandwidth control in decoupled stacked bulk acoustic resonator devices
JP2005249646A (ja) * 2004-03-05 2005-09-15 Matsushita Electric Ind Co Ltd 角速度センサ用音叉型振動子、この振動子を用いた角速度センサ及びこの角速度センサを用いた自動車
JP2007024810A (ja) * 2005-07-21 2007-02-01 Matsushita Electric Ind Co Ltd 角速度センサ素子およびその製造方法
JP2007096900A (ja) * 2005-09-29 2007-04-12 Seiko Epson Corp 圧電振動片および圧電デバイス

Also Published As

Publication number Publication date
JP2009005023A (ja) 2009-01-08

Similar Documents

Publication Publication Date Title
JP5067033B2 (ja) 音叉型振動子、発振器
JP5168002B2 (ja) 振動子及び発振器
JP5067035B2 (ja) 音叉型振動子、発振器
JP5067034B2 (ja) 音叉型振動子、発振器
US9640750B2 (en) Acoustic wave device with suppressed higher order transverse modes
US7999637B2 (en) Piezoelectric vibration piece and piezoelectric device
US8310137B2 (en) Resonator element and resonator
JP6268629B2 (ja) 水晶振動素子、及びこの水晶振動素子を備える水晶振動子
US8766515B2 (en) Flexural vibrating reed, flexural vibrator, and piezoelectric device
JP5699809B2 (ja) 圧電振動片
JP5233466B2 (ja) 振動子及び発振器、振動子の製造方法
JP4715652B2 (ja) 圧電振動片
WO2022158370A1 (ja) 弾性波装置
JP5074122B2 (ja) 弾性波フィルタ
JP2015033087A (ja) 音叉型振動片及び振動デバイス
JP2001068961A (ja) 厚み縦圧電共振子、ラダー型フィルタ及び圧電共振部品
JP2010206821A (ja) 圧電振動片
US12381535B2 (en) Acoustic wave device
JP6064342B2 (ja) 振動片および電子機器
JP5071023B2 (ja) 圧電振動装置、発振回路素子及び電子装置
US20240356528A1 (en) Crystal resonator
KR102755477B1 (ko) 탄성파 장치
JP2015027005A (ja) 音叉型振動片
JP5168470B2 (ja) 圧電共振子
JP2011254286A (ja) 積層構造体、屈曲振動片、振動子、発振器、電子機器

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100615

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100615

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20111109

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20111228

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120327

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120524

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120717

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120730

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150824

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees