JP5058816B2 - 層状にコーティングされたプロセスチャンバのコンポーネント及び方法 - Google Patents
層状にコーティングされたプロセスチャンバのコンポーネント及び方法 Download PDFInfo
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- JP5058816B2 JP5058816B2 JP2007543282A JP2007543282A JP5058816B2 JP 5058816 B2 JP5058816 B2 JP 5058816B2 JP 2007543282 A JP2007543282 A JP 2007543282A JP 2007543282 A JP2007543282 A JP 2007543282A JP 5058816 B2 JP5058816 B2 JP 5058816B2
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Description
Claims (12)
- (a)下地の構造と、
(b)前記下地の構造の上にあり、(i)10%未満のポロシティと、(ii)25マイクロメーター未満の平均表面粗さを有する第1の表面を含む第1のコーティング層と、
(c)前記第1のコーティング層の上にあり、(i)少なくとも12%のポロシティと、(ii)少なくとも50マイクロメーターの平均表面粗さを有する、第2の表面を含む第2のコーティング層とを含み、
処理される基板のコンタミネーションを少なくするために、プロセスの残渣物を前記第2の表面に付着させるプロセスチャンバ内で活性化されたガスに露出しうる基板プロセスチャンバのコンポーネント。 - (1)溶射されたアルミニウムのコーティング層を含む前記第1及び第2のコーティング層と、
(2) アルミニウム、チタン、タンタル、ステンレススティール、銅及びクロムのうちの少なくとも1つを含む下地の構造の少なくとも1つを含む請求項1記載のコンポーネント。 - 前記第2のコーティング層は、少なくとも15%のポロシティを含む請求項1記載のコンポーネント。
- 前記第1のコーティング層は0.1mmから0.25mmの厚さを有し、前記第2のコーティング層は0.15mmから0.3mmの厚さを有する請求項1記載のコンポーネント。
- 前記コンポーネントはチャンバの包囲壁、シールド、プロセスキット、基板支持体、ガス分配システム、ガスエナジャイザー、及びガス排出口のうちの少なくとも1つの少なくとも一部分を含む請求項1記載のコンポーネント。
- 請求項1記載のコンポーネントを含み、基板支持体、ガス分配システム、ガスエナジャイザー、及びガス排出部を含む基板処理チャンバ。
- (a)下地の構造を提供し、
(b)(i)10%未満のポロシティを有する第1のコーティング層の上に、(ii)25マイクロメーター未満の平均表面粗さを有する第1の表面を形成するために、第1の溶射パラメータを維持しながら、前記下地の構造の上に前記第1のコーティング層を溶射し、
(c)(i)少なくとも12%のポロシティを有する、第2のコーティング層の上に、(ii)少なくとも50マイクロメーターの平均表面粗さを有する、第2の表面を形成するために、第2の溶射パラメータを維持しながら、前記第1のコーティング層の上に第2のコーティング層を溶射することを含む基板処理チャンバのコンポーネントを製造するための方法。 - (b)及び(c)は加圧ガスによりノズルを通してコーティング材料を溶射することを含み、前記ノズルは、ノズルの入口の所での直径の大きさの少なくとも1.5倍の大きさの直径をノズルの出口の所で有する円錐形状の流路を含む請求項7記載の方法。
- (b)は少なくとも200kPaの第1の圧力により前記ノズルを介してコーティング材料を溶射することを含み、(c)は前記第1の圧力より低い第2の圧力により同じノズルを介してコーティング材料を溶射することを含み、前記第2の圧力は175kPa未満である請求項8記載の方法。
- (a) 電気的アークを生成するためにバイアスされうることができる第1及び第2の電極であって、前記電極のうちの少なくとも1つは消耗可能な電極を含む第1及び第2の電極と、
(b) 前記電極を通る加圧ガスを方向付けるための加圧ガスの供給源と、
(c) 前記加圧されたガスが流れるノズルとを含む構造の上にコーティングを形成することができるツインワイヤーアーク溶射器であって、
前記ノズルは、
(i)前記加圧されたガスを受ける導管と、
(ii)前記導管に取り付けられた入口及び前記加圧されたガスを放出する出口を有する円錐形状部分であって、前記円錐形状部分は前記入口から前記出口の方向に外側に広がる傾斜を有する円錐形状の側壁を含み、前記入口は第1の直径を有し、前記出口は第2の直径を有し、前記第2の直径は少なくとも前記第1の直径の大きさの少なくとも1.5倍である円錐形状部分とを含み、前記ノズルを通る加圧されたガスの圧力は前記コーティングの所定の表面粗さの平均をもたらすために選択され、
前記消耗可能な電極は溶融材料を形成するために電気的アークにより少なくとも部分的に溶融され、溶融された材料はコーティングを形成するために前記構造の上に前記ノズルを介して加圧されたガスにより溶射される、構造の上にコーティングを形成することができるツインワイヤーアーク溶射器によって請求項7の(b)及び(c)が実行される請求項7記載の方法。 - 前記ツインワイヤーアーク溶射器の前記傾斜を有する円錐形状の側壁は60度から120度の角度をなす請求項10記載の方法。
- 前記ツインワイヤーアーク溶射器の前記第1の直径は5mmから23mmであり、前記ツインワイヤーアーク溶射器の前記第2の直径は20mmから35mmである請求項10記載の方法。
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JP2008522031A (ja) | 2008-06-26 |
KR20070089955A (ko) | 2007-09-04 |
US20060110620A1 (en) | 2006-05-25 |
TW200932953A (en) | 2009-08-01 |
WO2006073585A3 (en) | 2006-09-08 |
CN101065510B (zh) | 2011-04-06 |
US20100086805A1 (en) | 2010-04-08 |
EP1815038B1 (en) | 2017-03-01 |
KR101274057B1 (ko) | 2013-06-12 |
EP1815038A2 (en) | 2007-08-08 |
US8021743B2 (en) | 2011-09-20 |
TWI326315B (en) | 2010-06-21 |
KR101281708B1 (ko) | 2013-07-03 |
CN101065510A (zh) | 2007-10-31 |
TWI326314B (en) | 2010-06-21 |
US7579067B2 (en) | 2009-08-25 |
TW200619421A (en) | 2006-06-16 |
WO2006073585A2 (en) | 2006-07-13 |
KR20130018957A (ko) | 2013-02-25 |
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