WO2008117482A1 - 真空成膜装置用部品及び真空成膜装置 - Google Patents

真空成膜装置用部品及び真空成膜装置 Download PDF

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Publication number
WO2008117482A1
WO2008117482A1 PCT/JP2007/063812 JP2007063812W WO2008117482A1 WO 2008117482 A1 WO2008117482 A1 WO 2008117482A1 JP 2007063812 W JP2007063812 W JP 2007063812W WO 2008117482 A1 WO2008117482 A1 WO 2008117482A1
Authority
WO
WIPO (PCT)
Prior art keywords
film forming
forming apparatus
vacuum film
vacuum
suppressing
Prior art date
Application number
PCT/JP2007/063812
Other languages
English (en)
French (fr)
Inventor
Michio Sato
Takashi Nakamura
Original Assignee
Kabushiki Kaisha Toshiba
Toshiba Materials Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kabushiki Kaisha Toshiba, Toshiba Materials Co., Ltd. filed Critical Kabushiki Kaisha Toshiba
Priority to US12/532,550 priority Critical patent/US20100107982A1/en
Priority to JP2009506189A priority patent/JP5558807B2/ja
Publication of WO2008117482A1 publication Critical patent/WO2008117482A1/ja

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4404—Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/06—Metallic material
    • C23C4/08—Metallic material containing only metal elements
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/18—After-treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

　真空容器内で蒸発させた薄膜形成材料を基板上に蒸着せしめて薄膜を形成する真空成膜装置を構成する真空成膜装置用部品において、該真空成膜装置用部品１は部品本体２とその表面に一体に形成された溶射被膜３とから成り、この溶射被膜３の表面に複数のくぼみを有し、そのくぼみ深さが１０μｍ以下であることを特徴とする真空成膜装置用部品１である。上記構成によれば、成膜工程中に装置構成部品に付着する成膜材料の剥離脱落を安定的かつ有効に防止し、成膜装置のクリーニングや構成部品の頻繁な交換などに伴う膜製品の生産性の低下や成膜コストの増加を抑制すると共に、微細なパーティクルの発生を抑制することを可能にした真空成膜装置用部品を提供することができる。
PCT/JP2007/063812 2007-03-22 2007-07-11 真空成膜装置用部品及び真空成膜装置 WO2008117482A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/532,550 US20100107982A1 (en) 2007-03-22 2007-07-11 Vacuum deposition apparatus part and vacuum deposition apparatus using the part
JP2009506189A JP5558807B2 (ja) 2007-03-22 2007-07-11 真空成膜装置用部品及び真空成膜装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-075229 2007-03-22
JP2007075229 2007-03-22

Publications (1)

Publication Number Publication Date
WO2008117482A1 true WO2008117482A1 (ja) 2008-10-02

Family

ID=39788224

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/063812 WO2008117482A1 (ja) 2007-03-22 2007-07-11 真空成膜装置用部品及び真空成膜装置

Country Status (3)

Country Link
US (1) US20100107982A1 (ja)
JP (1) JP5558807B2 (ja)
WO (1) WO2008117482A1 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006104496A (ja) * 2004-09-30 2006-04-20 Toshiba Corp 真空成膜装置用部品及び真空成膜装置
JPWO2010027073A1 (ja) * 2008-09-05 2012-02-02 株式会社東芝 半導体製造装置用部品及び半導体製造装置
JP2013201203A (ja) * 2012-03-23 2013-10-03 Tokyo Electron Ltd 成膜装置のパーツ保護方法および成膜方法
WO2016051771A1 (ja) * 2014-09-30 2016-04-07 株式会社 東芝 スパッタリングターゲット構造体およびスパッタリングターゲット構造体の製造方法
JP2017500212A (ja) * 2013-10-22 2017-01-05 トーソー エスエムディー，インク． 最適化テクスチャ処理表面と最適化の方法

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JP2015012048A (ja) 2013-06-27 2015-01-19 三菱電機株式会社 アクティブマトリクス基板およびその製造方法
DE102013107400B4 (de) * 2013-07-12 2017-08-10 Ks Huayu Alutech Gmbh Verfahren zur Entfernung des Oversprays eines thermischen Spritzbrenners
US10730798B2 (en) * 2014-05-07 2020-08-04 Applied Materials, Inc. Slurry plasma spray of plasma resistant ceramic coating
CN110189988B (zh) * 2014-06-11 2023-10-03 高美科株式会社 用于薄膜沉积设备的内部材料及其制造方法
US11459481B2 (en) * 2014-10-07 2022-10-04 The Boeing Company Thermal spray for durable and large-area hydrophobic and superhydrophobic/icephobic coatings
US10604836B2 (en) 2015-05-15 2020-03-31 Materion Corporation Methods for surface preparation of sputtering target
KR20210150978A (ko) * 2020-06-03 2021-12-13 에이에스엠 아이피 홀딩 비.브이. 샤워 플레이트, 기판 처리 장치 및 기판 처리 방법

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JP2001152317A (ja) * 1999-11-19 2001-06-05 Shinryo Corp 表面処理された成膜装置用部品および成膜装置用部品の表面処理方法
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JP2001152317A (ja) * 1999-11-19 2001-06-05 Shinryo Corp 表面処理された成膜装置用部品および成膜装置用部品の表面処理方法
JP2006104496A (ja) * 2004-09-30 2006-04-20 Toshiba Corp 真空成膜装置用部品及び真空成膜装置
JP2006303158A (ja) * 2005-04-20 2006-11-02 Tosoh Corp 真空装置用部品

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006104496A (ja) * 2004-09-30 2006-04-20 Toshiba Corp 真空成膜装置用部品及び真空成膜装置
JPWO2010027073A1 (ja) * 2008-09-05 2012-02-02 株式会社東芝 半導体製造装置用部品及び半導体製造装置
JP5566891B2 (ja) * 2008-09-05 2014-08-06 株式会社東芝 半導体製造装置用部品及び半導体製造装置
JP2013201203A (ja) * 2012-03-23 2013-10-03 Tokyo Electron Ltd 成膜装置のパーツ保護方法および成膜方法
JP2017500212A (ja) * 2013-10-22 2017-01-05 トーソー エスエムディー，インク． 最適化テクスチャ処理表面と最適化の方法
US10792788B2 (en) 2013-10-22 2020-10-06 Tosoh Smd, Inc. Optimized textured surfaces and methods of optimizing
WO2016051771A1 (ja) * 2014-09-30 2016-04-07 株式会社 東芝 スパッタリングターゲット構造体およびスパッタリングターゲット構造体の製造方法

Also Published As

Publication number Publication date
US20100107982A1 (en) 2010-05-06
JPWO2008117482A1 (ja) 2010-07-08
JP5558807B2 (ja) 2014-07-23

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