JP5058378B2 - 複合ルツボ - Google Patents
複合ルツボ Download PDFInfo
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- JP5058378B2 JP5058378B2 JP2011530795A JP2011530795A JP5058378B2 JP 5058378 B2 JP5058378 B2 JP 5058378B2 JP 2011530795 A JP2011530795 A JP 2011530795A JP 2011530795 A JP2011530795 A JP 2011530795A JP 5058378 B2 JP5058378 B2 JP 5058378B2
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5022—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with vitreous materials
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/02—Other methods of shaping glass by casting molten glass, e.g. injection moulding
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- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
- C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
- C03B5/02—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture in electric furnaces, e.g. by dielectric heating
- C03B5/025—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture in electric furnaces, e.g. by dielectric heating by arc discharge or plasma heating
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/003—General methods for coating; Devices therefor for hollow ware, e.g. containers
- C03C17/004—Coating the inside
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/02—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/16—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay
- C04B35/18—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay rich in aluminium oxide
- C04B35/185—Mullite 3Al2O3-2SiO2
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- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
- C04B41/86—Glazes; Cold glazes
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
- C30B35/002—Crucibles or containers
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/213—SiO2
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/13—Deposition methods from melts
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/17—Deposition methods from a solid phase
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/602—Making the green bodies or pre-forms by moulding
- C04B2235/6027—Slip casting
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Structural Engineering (AREA)
- Metallurgy (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Glass Melting And Manufacturing (AREA)
Description
透明シリカガラス層12の形成では、回転可能なカーボンモールド内にムライト材料からなるルツボ本体をセットし、ルツボ本体11を一定速度で回転させながらその内壁面に沿ってシリカ粉を投入し、ほぼ均一な厚さを有するシリカ粉の層を形成する。このとき、シリカ粉は遠心力によってルツボ本体の内表面に張り付いたまま一定位置に留まっている。その後、真空引きしながらアーク溶融して透明シリカガラス層12を形成する。カーボンモールドには真空引き用の通気孔が設けられており、通気孔から吸引することでシリカ粉の層内の気体をルツボの外表面側に引き寄せる。また、カーボンモールドの中心軸(回転軸)上には昇降可能なアーク電極が設けられており、アーク溶融前にはアーク電極は上方の退避位置にあるが、加熱時にはアーク電極をルツボ内部まで降下させて、シリカ粉を真空引きしながらアーク電極によってアーク溶融し、シリカ粉を溶融して透明シリカガラス層12を形成する。減圧法によって透明シリカガラス層12を形成する場合、ルツボ本体11の外表面側からの減圧が可能になるように、ルツボ本体11は多孔質になるように形成することが好ましい。ルツボ本体11の気孔率は、例えば、1〜30%である。気孔率が小さいほど、アーク溶融時にルツボの外面側から減圧してもその効果がルツボの内面側にまで及びにくくなる一方で、ルツボ本体11の強度が高くなる。気孔率は、原料となるアルミナ粉とシリカ粉の粒径を変化させることによって調節可能である。気孔率は、例えば、1、2、5、10、15、20、25、30%であり、ここで例示した何れか2つの値の範囲内であってもよい。
また、透明シリカガラス層12は散布法によって形成することも可能である。散布法とは、ルツボ本体11の内表面に向けてアーク放電を行いながらルツボ本体の内表面に対してシリカ粉を散布することによって透明シリカガラス層12を形成する方法である。この方法では、アーク放電によって加熱されたルツボ本体11の内表面にシリカ粉が付着すると直ちにシリカ粉が溶融されてシリカガラス層が形成される。この方法によれば、ルツボ本体11の外表面側から減圧を行う必要がないので、ルツボ本体11を多孔質にする必要がなく、ルツボ本体11の強度を高めることができる。
図1に示す複合ルツボのサンプルA1〜A3を用意した。ルツボのサイズは、直径16インチ(口径約400mm)、高さ250mm、肉厚は直銅部で6.5mm、湾曲部で8mmm、底部で5mmとした。直胴部における透明シリカガラス層の厚さは0.5mmとし、直胴部におけるルツボ本体の厚さは6mmとした。サンプルA1では、スリップキャスト法によってルツボ本体を形成し、プラズマ溶射法によって透明シリカガラス層を形成した。サンプルA2では、スリップキャスト法によってルツボ本体を形成し、アーク溶融法の散布法によって透明シリカガラス層を形成した。サンプルA3は、アーク溶融法の減圧法によってルツボ本体及び透明シリカガラス層を形成した。
次に、ルツボサンプルA1〜A3を炉内で長時間加熱し続けた後、炉から取り出し、ルツボの変形状態を肉眼で確認した。加熱温度は1500℃、加熱時間は120時間とした。その結果を表1に示す。
内層が透明シリカガラス層、外層が不透明シリカガラス層で構成された一般的なシリカガラスルツボのサンプルB1を用意した。ルツボのサイズは、直径16インチ(口径約400mm)、高さ250mm、肉厚は直銅部で6.5mm、湾曲部で8mmm、底部で5mmであった。直胴部の透明シリカガラス層の厚さは0.5mmとし、直胴部の不透明シリカガラス層の厚さは6mmとした。サンプルB1は、アーク溶融法の減圧法によって形成した。次に、ルツボサンプルB1を炉内で長時間加熱し続けた後、炉から取り出し、ルツボの変形状態を肉眼で確認した。上記実施例と同様、加熱温度は1500℃、加熱時間は120時間とした。その結果を表2に示す。
ルツボの外表面近傍に高濃度のAl含有層が形成された点以外は上記ルツボサンプルB1と同一構成を有するシリカガラスルツボ(Al強化シリカガラスルツボ)のサンプルB2を用意した。Al含有層の厚さは直胴部において0.5mmとし、そのAl濃度は100ppmとした。なお、Al含有層は不透明シリカガラス層の外表面近傍に形成された層であり、不透明シリカガラス層の一部である。サンプルB2は、アーク溶融法の減圧法によって形成した。次に、ルツボサンプルB2を炉内で長時間加熱し続けた後、炉から取り出し、ルツボの変形状態を肉眼で確認した。上記実施例と同様、加熱温度は1500℃、加熱時間は120時間とした。その結果を表2に示す。
10A 直胴部
10B 底部
10C 湾曲部
11 ルツボ本体
12 透明シリカガラス層
100 シリコン単結晶引き上げ装置
101 チャンバー
102 支持軸
103 グラファイトサセプタ
105 ヒーター
106 支持軸駆動機構
107 シードチャック
108 ワイヤー
109 ワイヤー巻き取り機構
110 遮熱部材
111 制御装置
200 シリコン単結晶
201 シリコン融液
Claims (3)
- 直胴部及び底部を有し、シリコン融液を支持するための複合ルツボであって、アルミナとシリカを主成分とするムライト質なルツボ本体と、前記ルツボ本体の内表面側に形成された透明石英ガラス層とを備え、前記透明石英ガラス層の厚さは前記ルツボ本体の厚さよりも薄く、前記ルツボ本体はムライトを少なくとも50%含み、前記ルツボ本体に含まれるアルミニウムの濃度は、外表面側から内表面側に向かって低下する濃度勾配を有することを特徴とする複合ルツボ。
- 前記ルツボ本体の厚さは5mm以上であり、透明石英ガラス層の厚さは0.5mm以上であって前記ルツボ本体の厚さよりも薄いことを特徴とする請求項1に記載の複合ルツボ。
- 前記ルツボ本体と前記透明石英ガラス層との間に設けられた多数の微小な気泡を含む不透明石英ガラス層をさらに備えることを特徴とする請求項1又は2に記載の複合ルツボ。
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JP2011530795A JP5058378B2 (ja) | 2009-09-09 | 2010-08-20 | 複合ルツボ |
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JP2009208606 | 2009-09-09 | ||
JP2009208606 | 2009-09-09 | ||
PCT/JP2010/064056 WO2011030658A1 (ja) | 2009-09-09 | 2010-08-20 | 複合ルツボ及びその製造方法並びにシリコン結晶の製造方法 |
JP2011530795A JP5058378B2 (ja) | 2009-09-09 | 2010-08-20 | 複合ルツボ |
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JP5058378B2 true JP5058378B2 (ja) | 2012-10-24 |
JPWO2011030658A1 JPWO2011030658A1 (ja) | 2013-02-07 |
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US (2) | US9133063B2 (ja) |
EP (1) | EP2484813B1 (ja) |
JP (1) | JP5058378B2 (ja) |
KR (1) | KR101457504B1 (ja) |
CN (1) | CN102471926B (ja) |
TW (1) | TWI423937B (ja) |
WO (1) | WO2011030658A1 (ja) |
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KR101048586B1 (ko) * | 2009-10-06 | 2011-07-12 | 주식회사 엘지실트론 | 고강도 석영 도가니 및 그 제조방법 |
CN102586856B (zh) * | 2012-02-01 | 2015-03-11 | 江西赛维Ldk太阳能高科技有限公司 | 一种提高硅锭利用率和籽晶使用次数的坩埚及其制备方法 |
JP2013177267A (ja) * | 2012-02-28 | 2013-09-09 | Mitsubishi Materials Corp | 石英るつぼ、石英るつぼの製造方法及び鋳造装置 |
KR101323096B1 (ko) | 2012-04-13 | 2013-10-30 | 한국세라믹기술원 | 이차전지 양극활물질 합성용 내화갑 및 그 제조방법 |
WO2015099001A1 (ja) * | 2013-12-28 | 2015-07-02 | 株式会社Sumco | 石英ガラスルツボ及びその歪み測定装置 |
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US20150337456A1 (en) | 2015-11-26 |
KR101457504B1 (ko) | 2014-11-03 |
JPWO2011030658A1 (ja) | 2013-02-07 |
TW201125830A (en) | 2011-08-01 |
CN102471926A (zh) | 2012-05-23 |
EP2484813B1 (en) | 2014-11-26 |
US9133063B2 (en) | 2015-09-15 |
EP2484813A1 (en) | 2012-08-08 |
TWI423937B (zh) | 2014-01-21 |
WO2011030658A1 (ja) | 2011-03-17 |
EP2484813A4 (en) | 2013-01-09 |
US20120160155A1 (en) | 2012-06-28 |
KR20120055592A (ko) | 2012-05-31 |
CN102471926B (zh) | 2015-05-06 |
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