JP5052630B2 - 表面実装型ダイオードとその製造方法 - Google Patents
表面実装型ダイオードとその製造方法 Download PDFInfo
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- JP5052630B2 JP5052630B2 JP2010019681A JP2010019681A JP5052630B2 JP 5052630 B2 JP5052630 B2 JP 5052630B2 JP 2010019681 A JP2010019681 A JP 2010019681A JP 2010019681 A JP2010019681 A JP 2010019681A JP 5052630 B2 JP5052630 B2 JP 5052630B2
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- 238000000034 method Methods 0.000 title claims description 40
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 230000002093 peripheral effect Effects 0.000 claims description 10
- 238000005520 cutting process Methods 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims description 3
- 229920001187 thermosetting polymer Polymers 0.000 claims description 2
- 239000010949 copper Substances 0.000 description 20
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 16
- 229910052802 copper Inorganic materials 0.000 description 16
- 238000007747 plating Methods 0.000 description 13
- 238000000206 photolithography Methods 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/782—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, each consisting of a single circuit element
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/561—Batch processing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/94—Batch processes at wafer-level, i.e. with connecting carried out on a wafer comprising a plurality of undiced individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/44—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/93—Batch processes
- H01L2224/94—Batch processes at wafer-level, i.e. with connecting carried out on a wafer comprising a plurality of undiced individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electrodes Of Semiconductors (AREA)
- Led Device Packages (AREA)
Description
2…ダイオードチップ
3,103…カソード電極
3a…カソード電極の内部電極部
3b…カソード電極の外部電極部
4,104…アノード電極
4a…アノード電極の内部電極部
4b…アノード電極の外部電極部
104a…凹状
5…第1被覆部材
6…第2被覆部材
7…めっき膜
102…パッケージ
W…ウェハ
A1…第1主面
A2…第2主面
S1…第1シード層
S2…第2シード層
R1…第1レジスト
R2…第2レジスト
R3…第3レジスト
M1…第1マスク
M2…第2マスク
M3…第3マスク
M4…第4マスク
H1…第1孔
H2…第2孔
H3…第3孔
H4…第4孔
G…溝
B…ブレード
Claims (7)
- 相対向する第1及び第2主面を有するダイオードチップと、
前記第1主面表面に設けられた内部電極部と前記内部電極部表面に設けられた外部電極部とを有するカソード電極と、
前記第2主面表面に設けられた内部電極部と当該内部電極部表面に設けられ、且つ前記カソード電極の外部電極部と同じの厚みの外部電極部とを有するアノード電極と、
前記カソード電極及び前記アノード電極のいずれか一方の前記内部電極部の外周面及び前記ダイオードチップの外周面を被覆し、前記ダイオードチップの第1主面表面及び第2主面表面のいずれか一方の主面表面と面一となるように形成されている第1被覆部材と、
面一となるように形成されている前記第1被覆部材と接するように設けられ、前記カソード電極及び前記アノード電極のうちの他方の前記内部電極部の外周面を被覆し、前記第1被覆部材と異なる色を有する第2被覆部材と、
を備えることを特徴とする表面実装型ダイオード。 - 前記第2被覆部材は、前記ダイオードチップの第1主面表面及び第2主面表面のいずれか一方の主面表面からの厚みと、前記第1被覆部材と接している領域からの厚みとがほぼ同じ厚みとなるように形成されていることを特徴とする請求項1に記載の表面実装型ダイオード。
- 前記カソード電極及び前記アノード電極のうちの他方の前記内部電極部は、前記ダイオードチップ側の幅が前記外部電極部側の幅よりも狭いテーパー形状を有することを特徴とする請求項1または請求項2に記載の表面実装型ダイオード。
- 前記第1被覆部材が、黒色の熱硬化性樹脂からなり、前記第2被覆部材が、白色レジストからなることを特徴とする請求項1乃至請求項3のいずれかに記載の表面実装型ダイオード。
- 相対向する第1及び第2主面を有するウェハの前記第1主面表面に互いに間隔を置いてカソード電極及びアノード電極の一方の内部電極部を複数形成する第1内部電極形成工程と、
隣接する前記内部電極部間の前記ウェハ部分に溝をそれぞれ形成する溝形成工程と、
隣接する前記内部電極部間及び前記溝内に第1被覆部材を形成する第1被覆部材形成工程と、
前記ウェハの前記第2主面側の部分を除去して個々のダイオードチップに分割するウェハ分割工程と、
前記ダイオードチップの前記第2主面表面及び前記第1被覆部材表面に、前記第2主面の一部を露出させる孔を有し、且つ前記第1被覆部材と異なる色の第2被覆部材を形成する第2被覆部材形成工程と、
前記第2被覆部材の孔内に前記カソード電極及び前記アノード電極のうちの他方の内部電極部をそれぞれ形成する第2内部電極部形成工程と、
前記カソード電極及び前記アノード電極のうちの他方の内部電極部の表面に外部電極部をそれぞれ形成する第2外部電極形成工程と、
前記カソード電極及び前記アノード電極の一方の前記内部電極上に、前記カソード電極及び前記アノード電極のうちの他方の前記外部電極部と同じ厚みを有する外部電極部をそれぞれ形成する第1外部電極形成工程と、
隣接する前記ダイオードチップ間の前記第1及び第2被覆部材を切断して個々の表面実装型ダイオードに個片化する個片化工程と、
を含むことを特徴とする表面実装型ダイオードの製造方法。 - 前記第2内部電極形成工程と前記第2外部電極形成工程とが同一工程により行われることを特徴とする請求項5に記載の表面実装型ダイオードの製造方法。
- 前記カソード電極及び前記アノード電極のうちの他方の前記内部電極部は、前記ダイオードチップ側の幅が前記外部電極部側の幅よりも狭いテーパー形状に形成することを特徴とする請求項5または請求項6に記載の表面実装型ダイオードの製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010019681A JP5052630B2 (ja) | 2010-01-29 | 2010-01-29 | 表面実装型ダイオードとその製造方法 |
TW100102859A TW201143103A (en) | 2010-01-29 | 2011-01-26 | Surface mounting type diode and method for manufacturing the same |
US13/016,239 US20110186982A1 (en) | 2010-01-29 | 2011-01-28 | Surface mount diode and method of fabricating the same |
KR1020110008696A KR20110089085A (ko) | 2010-01-29 | 2011-01-28 | 표면 실장형 다이오드와 그 제조 방법 |
CN201110030782XA CN102142464A (zh) | 2010-01-29 | 2011-01-28 | 表面安装型二极管及其制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010019681A JP5052630B2 (ja) | 2010-01-29 | 2010-01-29 | 表面実装型ダイオードとその製造方法 |
Publications (2)
Publication Number | Publication Date |
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JP2011159761A JP2011159761A (ja) | 2011-08-18 |
JP5052630B2 true JP5052630B2 (ja) | 2012-10-17 |
Family
ID=44340890
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2010019681A Expired - Fee Related JP5052630B2 (ja) | 2010-01-29 | 2010-01-29 | 表面実装型ダイオードとその製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20110186982A1 (ja) |
JP (1) | JP5052630B2 (ja) |
KR (1) | KR20110089085A (ja) |
CN (1) | CN102142464A (ja) |
TW (1) | TW201143103A (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9373609B2 (en) | 2012-10-18 | 2016-06-21 | Infineon Technologies Ag | Bump package and methods of formation thereof |
DE102019116103B4 (de) * | 2019-06-13 | 2021-04-22 | Notion Systems GmbH | Verfahren zum Beschriften einer Leiterplatte durch Erzeugen von Schattierungen in einer funktionalen Lackschicht |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000077450A (ja) * | 1998-08-31 | 2000-03-14 | Hitachi Ltd | 半導体装置およびその製造方法 |
JP2001257211A (ja) * | 2000-03-14 | 2001-09-21 | Hitachi Ltd | ダイオードの製造方法 |
DE10131698A1 (de) * | 2001-06-29 | 2003-01-30 | Osram Opto Semiconductors Gmbh | Oberflächenmontierbares strahlungsemittierendes Bauelement und Verfahren zu dessen Herstellung |
KR100444228B1 (ko) * | 2001-12-27 | 2004-08-16 | 삼성전기주식회사 | 칩 패키지 및 그 제조방법 |
JP2004186478A (ja) * | 2002-12-04 | 2004-07-02 | Matsushita Electric Ind Co Ltd | 超小型半導体装置およびその製造方法 |
JP2005217166A (ja) * | 2004-01-29 | 2005-08-11 | Matsushita Electric Ind Co Ltd | 電子素子とその製造方法 |
JP3886054B2 (ja) * | 2006-06-09 | 2007-02-28 | シチズン電子株式会社 | 表面実装型発光ダイオ−ド |
JP4503046B2 (ja) * | 2007-05-30 | 2010-07-14 | 株式会社東芝 | 半導体装置の製造方法 |
JP2009152408A (ja) * | 2007-12-20 | 2009-07-09 | Toshiba Corp | 半導体装置およびその製造方法 |
-
2010
- 2010-01-29 JP JP2010019681A patent/JP5052630B2/ja not_active Expired - Fee Related
-
2011
- 2011-01-26 TW TW100102859A patent/TW201143103A/zh unknown
- 2011-01-28 KR KR1020110008696A patent/KR20110089085A/ko not_active Application Discontinuation
- 2011-01-28 CN CN201110030782XA patent/CN102142464A/zh active Pending
- 2011-01-28 US US13/016,239 patent/US20110186982A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
CN102142464A (zh) | 2011-08-03 |
US20110186982A1 (en) | 2011-08-04 |
JP2011159761A (ja) | 2011-08-18 |
KR20110089085A (ko) | 2011-08-04 |
TW201143103A (en) | 2011-12-01 |
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