JP5038137B2 - 半導体試験装置 - Google Patents
半導体試験装置 Download PDFInfo
- Publication number
- JP5038137B2 JP5038137B2 JP2007529472A JP2007529472A JP5038137B2 JP 5038137 B2 JP5038137 B2 JP 5038137B2 JP 2007529472 A JP2007529472 A JP 2007529472A JP 2007529472 A JP2007529472 A JP 2007529472A JP 5038137 B2 JP5038137 B2 JP 5038137B2
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- Prior art keywords
- driver
- signal
- signal line
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/3183—Generation of test inputs, e.g. test vectors, patterns or sequences
- G01R31/318314—Tools, e.g. program interfaces, test suite, test bench, simulation hardware, test compiler, test program languages
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0433—Sockets for IC's or transistors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/01—Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/319—Tester hardware, i.e. output processing circuits
- G01R31/31917—Stimuli generation or application of test patterns to the device under test [DUT]
- G01R31/31924—Voltage or current aspects, e.g. driver, receiver
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Environmental & Geological Engineering (AREA)
- Tests Of Electronic Circuits (AREA)
Description
(産業上の利用可能性)
本発明によれば、信号線路のインピーダンスを高くすることなく信号線路に複数の被試験デバイスを接続することが可能になるため、信号線路のインピーダンスによる制約がなくなり、同時に測定可能な被試験デバイスの数を増やすことができる。
12 テスタ制御部
14 タイミング発生器
16 パターン発生器
18 データセレクタ
20 フォーマット制御部
22 ピンエレクトロニクス
24、24A、24B ドライバチャネル(Dch)
26 IOチャネル(IOch)
28、28B 終端抵抗
30 マザーボード
32 同軸ケーブル
40 ソケットボード
60 ワークステーション
200 DUT(被試験デバイス)
Claims (4)
- 被試験デバイスのピンに、試験に供する印加信号を入力するドライバと、
前記ドライバの出力端子に一方端が接続されており、途中に設けられた複数の接続点を有する信号線路と、
前記信号線路の他方端に接続された終端抵抗と、
前記被試験デバイスの機能試験に必要な信号波形を生成する試験信号波形生成手段と、
前記複数の被試験デバイスのそれぞれのIOピンに接続された複数のIOチャネルと、
を備え、前記複数の接続点のそれぞれに、複数の前記被試験デバイスのそれぞれのドライバピンを接続し、
前記信号波形を受けて前記ドライバで印加信号を生成し、生成した印加信号を前記信号線路に接続された複数の前記被試験デバイスのそれぞれに対して入力し、
前記信号線路に前記印加信号を通したときに生じる信号の遅延時間に対応して前記複数のIOチャネルの遅延タイミングの調整が行われ、
前記IOチャネルに対する遅延タイミングの調整は、前記IOチャネルに備わった第2のドライバおよびコンパレータのそれぞれに対応する可変遅延素子の遅延量を調整することにより行われる半導体試験装置。 - 請求項1において、
前記ドライバの出力インピーダンス、前記終端抵抗のインピーダンス、前記信号線路のインピーダンスを一致させる半導体試験装置。 - 請求項2において、
前記ドライバと前記終端抵抗を有するドライバチャネルが搭載されたピンエレクトロニクスと、
前記ピンエレクトロニクスに接続され、前記ドライバと前記終端抵抗のそれぞれに接続される前記信号線路の一部を形成する同軸ケーブルによって配線がなされたマザーボードと、
前記マザーボードに接続され、複数の前記被試験デバイスが搭載されるとともに、前記信号線路の一部を形成する配線がなされたソケットボードと、
を備える半導体試験装置。 - 請求項1〜3のいずれかにおいて、
前記被試験デバイスのDC試験に必要な電圧、電流の少なくとも一方を生成するDC電源と、
前記DC電源を前記信号線路に対して接続する第1のスイッチと、
前記ドライバと前記信号線路との間に挿入されて線路を開閉する第2のスイッチと、
をさらに備える半導体試験装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007529472A JP5038137B2 (ja) | 2005-08-09 | 2006-07-20 | 半導体試験装置 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005230198 | 2005-08-09 | ||
JP2005230198 | 2005-08-09 | ||
JP2007529472A JP5038137B2 (ja) | 2005-08-09 | 2006-07-20 | 半導体試験装置 |
PCT/JP2006/314347 WO2007018020A1 (ja) | 2005-08-09 | 2006-07-20 | 半導体試験装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2007018020A1 JPWO2007018020A1 (ja) | 2009-02-19 |
JP5038137B2 true JP5038137B2 (ja) | 2012-10-03 |
Family
ID=37727209
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007529472A Active JP5038137B2 (ja) | 2005-08-09 | 2006-07-20 | 半導体試験装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5038137B2 (ja) |
KR (2) | KR20080014995A (ja) |
TW (1) | TWI317814B (ja) |
WO (1) | WO2007018020A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7797121B2 (en) * | 2007-06-07 | 2010-09-14 | Advantest Corporation | Test apparatus, and device for calibration |
US8326565B2 (en) * | 2007-08-22 | 2012-12-04 | Advantest (Singapore) Pte Ltd | Chip tester, method for providing timing information, test fixture set, apparatus for post-processing propagation delay information, method for post-processing delay information, chip test set up and method for testing devices under test |
JPWO2010001440A1 (ja) * | 2008-07-03 | 2011-12-15 | 株式会社アドバンテスト | 試験装置およびソケットボード |
TWI384240B (zh) * | 2008-07-15 | 2013-02-01 | Advantest Corp | 測試裝置 |
KR101151686B1 (ko) * | 2012-02-29 | 2012-06-14 | 주식회사 유니테스트 | 번인 테스터 |
TWI569278B (zh) * | 2015-04-28 | 2017-02-01 | 晨星半導體股份有限公司 | 記憶體測試資料產生電路與方法 |
CN109591658B (zh) * | 2018-10-23 | 2022-05-27 | 大唐恩智浦半导体有限公司 | 电池管理装置、方法及芯片 |
KR102440440B1 (ko) * | 2020-12-16 | 2022-09-06 | 와이아이케이 주식회사 | 반도체 소자 검사 장치 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0352686U (ja) * | 1989-09-29 | 1991-05-22 | ||
JP2000082300A (ja) * | 1998-06-24 | 2000-03-21 | Advantest Corp | 半導体メモリ試験装置及び試験方法 |
JP2000091893A (ja) * | 1998-09-14 | 2000-03-31 | Hitachi Ltd | パルス発生回路、およびそれを用いたテスタ |
JP2002323539A (ja) * | 2001-04-26 | 2002-11-08 | Advantest Corp | 半導体試験装置とその補正方法 |
JP2003315411A (ja) * | 2002-04-24 | 2003-11-06 | Ando Electric Co Ltd | Ic試験装置及びその出力信号のタイミング調整方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100294021B1 (ko) * | 1998-09-08 | 2001-07-12 | 윤종용 | 메모리모듈의테스트장치 |
JP2000292502A (ja) * | 1999-02-03 | 2000-10-20 | Hitachi Electronics Eng Co Ltd | 半導体装置試験装置および半導体装置試験方法 |
JP2002005999A (ja) * | 2000-06-20 | 2002-01-09 | Advantest Corp | 半導体試験装置 |
JP2002040108A (ja) * | 2000-07-27 | 2002-02-06 | Advantest Corp | 半導体デバイス試験装置のタイミング校正方法・半導体デバイス試験装置 |
JP2002107406A (ja) * | 2000-09-29 | 2002-04-10 | Advantest Corp | 半導体試験装置 |
JP2003043066A (ja) * | 2001-07-26 | 2003-02-13 | Hoya Corp | コンタクトプローブ部材及びその製造方法 |
-
2006
- 2006-07-20 KR KR1020077028618A patent/KR20080014995A/ko not_active Application Discontinuation
- 2006-07-20 JP JP2007529472A patent/JP5038137B2/ja active Active
- 2006-07-20 WO PCT/JP2006/314347 patent/WO2007018020A1/ja active Application Filing
- 2006-07-20 KR KR1020097010892A patent/KR101088203B1/ko active IP Right Grant
- 2006-07-26 TW TW095127295A patent/TWI317814B/zh not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0352686U (ja) * | 1989-09-29 | 1991-05-22 | ||
JP2000082300A (ja) * | 1998-06-24 | 2000-03-21 | Advantest Corp | 半導体メモリ試験装置及び試験方法 |
JP2000091893A (ja) * | 1998-09-14 | 2000-03-31 | Hitachi Ltd | パルス発生回路、およびそれを用いたテスタ |
JP2002323539A (ja) * | 2001-04-26 | 2002-11-08 | Advantest Corp | 半導体試験装置とその補正方法 |
JP2003315411A (ja) * | 2002-04-24 | 2003-11-06 | Ando Electric Co Ltd | Ic試験装置及びその出力信号のタイミング調整方法 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2007018020A1 (ja) | 2009-02-19 |
TWI317814B (en) | 2009-12-01 |
WO2007018020A1 (ja) | 2007-02-15 |
KR101088203B1 (ko) | 2011-11-30 |
TW200712521A (en) | 2007-04-01 |
KR20080014995A (ko) | 2008-02-15 |
KR20090061083A (ko) | 2009-06-15 |
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