JP5032949B2 - マイクロアクチュエータ、ヘッド・ジンバル・アセンブリ及びディスク・ドライブ装置 - Google Patents

マイクロアクチュエータ、ヘッド・ジンバル・アセンブリ及びディスク・ドライブ装置 Download PDF

Info

Publication number
JP5032949B2
JP5032949B2 JP2007296152A JP2007296152A JP5032949B2 JP 5032949 B2 JP5032949 B2 JP 5032949B2 JP 2007296152 A JP2007296152 A JP 2007296152A JP 2007296152 A JP2007296152 A JP 2007296152A JP 5032949 B2 JP5032949 B2 JP 5032949B2
Authority
JP
Japan
Prior art keywords
silicon substrate
head slider
fixed
head
path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007296152A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009123282A (ja
JP2009123282A5 (enExample
Inventor
延昌 西山
敏樹 平野
亮 吉田
治英 高橋
忍 萩谷
Original Assignee
エイチジーエスティーネザーランドビーブイ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エイチジーエスティーネザーランドビーブイ filed Critical エイチジーエスティーネザーランドビーブイ
Priority to JP2007296152A priority Critical patent/JP5032949B2/ja
Priority to US12/271,820 priority patent/US8068313B2/en
Publication of JP2009123282A publication Critical patent/JP2009123282A/ja
Publication of JP2009123282A5 publication Critical patent/JP2009123282A5/ja
Application granted granted Critical
Publication of JP5032949B2 publication Critical patent/JP5032949B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/4806—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives
    • G11B5/4826—Mounting, aligning or attachment of the transducer head relative to the arm assembly, e.g. slider holding members, gimbals, adhesive
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/4806—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives
    • G11B5/4873—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives the arm comprising piezoelectric or other actuators for adjustment of the arm
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/54—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head into or out of its operative position or across tracks
    • G11B5/55—Track change, selection or acquisition by displacement of the head
    • G11B5/5521—Track change, selection or acquisition by displacement of the head across disk tracks
    • G11B5/5552—Track change, selection or acquisition by displacement of the head across disk tracks using fine positioning means for track acquisition separate from the coarse (e.g. track changing) positioning means

Landscapes

  • Supporting Of Heads In Record-Carrier Devices (AREA)
  • Moving Of The Head To Find And Align With The Track (AREA)
  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
JP2007296152A 2007-11-14 2007-11-14 マイクロアクチュエータ、ヘッド・ジンバル・アセンブリ及びディスク・ドライブ装置 Expired - Fee Related JP5032949B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007296152A JP5032949B2 (ja) 2007-11-14 2007-11-14 マイクロアクチュエータ、ヘッド・ジンバル・アセンブリ及びディスク・ドライブ装置
US12/271,820 US8068313B2 (en) 2007-11-14 2008-11-14 Microactuator, head gimbal assembly, and disk drive device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007296152A JP5032949B2 (ja) 2007-11-14 2007-11-14 マイクロアクチュエータ、ヘッド・ジンバル・アセンブリ及びディスク・ドライブ装置

Publications (3)

Publication Number Publication Date
JP2009123282A JP2009123282A (ja) 2009-06-04
JP2009123282A5 JP2009123282A5 (enExample) 2010-11-11
JP5032949B2 true JP5032949B2 (ja) 2012-09-26

Family

ID=40669494

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007296152A Expired - Fee Related JP5032949B2 (ja) 2007-11-14 2007-11-14 マイクロアクチュエータ、ヘッド・ジンバル・アセンブリ及びディスク・ドライブ装置

Country Status (2)

Country Link
US (1) US8068313B2 (enExample)
JP (1) JP5032949B2 (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8279557B2 (en) * 2009-08-04 2012-10-02 Seagate Technology Llc Commonly-poled piezoelectric device
JP5453052B2 (ja) 2009-10-27 2014-03-26 日本発條株式会社 ディスク装置用サスペンション
US8264797B2 (en) * 2009-12-21 2012-09-11 Western Digital (Fremont), Llc Head gimbal assembly having a radial rotary piezoelectric microactuator between a read head and a flexure tongue
US8542465B2 (en) 2010-03-17 2013-09-24 Western Digital Technologies, Inc. Suspension assembly having a microactuator electrically connected to a gold coating on a stainless steel surface
US8885299B1 (en) 2010-05-24 2014-11-11 Hutchinson Technology Incorporated Low resistance ground joints for dual stage actuation disk drive suspensions
US8665567B2 (en) 2010-06-30 2014-03-04 Western Digital Technologies, Inc. Suspension assembly having a microactuator grounded to a flexure
JP5896846B2 (ja) * 2011-08-22 2016-03-30 日東電工株式会社 回路付サスペンション基板
WO2013138619A1 (en) 2012-03-16 2013-09-19 Hutchinson Technology Incorporated Mid-loadbeam dual stage actuated (dsa) disk drive head suspension
CN104205216A (zh) 2012-03-22 2014-12-10 哈特奇桑科技公司 用于磁盘驱动器磁头悬架挠性件的接地特征
WO2014043498A2 (en) 2012-09-14 2014-03-20 Hutchinson Technology Incorporated Co-located gimbal-based dual stage actuation disk drive suspensions
JP6356682B2 (ja) 2012-10-10 2018-07-11 ハッチンソン テクノロジー インコーポレイテッドＨｕｔｃｈｉｎｓｏｎ Ｔｅｃｈｎｏｌｏｇｙ Ｉｎｃｏｒｐｏｒａｔｅｄ 二段作動構造を有するサスペンション
US8941951B2 (en) 2012-11-28 2015-01-27 Hutchinson Technology Incorporated Head suspension flexure with integrated strain sensor and sputtered traces
US8891206B2 (en) 2012-12-17 2014-11-18 Hutchinson Technology Incorporated Co-located gimbal-based dual stage actuation disk drive suspensions with motor stiffener
US8896969B1 (en) 2013-05-23 2014-11-25 Hutchinson Technology Incorporated Two-motor co-located gimbal-based dual stage actuation disk drive suspensions with motor stiffeners
US8717712B1 (en) 2013-07-15 2014-05-06 Hutchinson Technology Incorporated Disk drive suspension assembly having a partially flangeless load point dimple
US8896970B1 (en) 2013-12-31 2014-11-25 Hutchinson Technology Incorporated Balanced co-located gimbal-based dual stage actuation disk drive suspensions
US8867173B1 (en) 2014-01-03 2014-10-21 Hutchinson Technology Incorporated Balanced multi-trace transmission in a hard disk drive flexure
JP6392085B2 (ja) * 2014-11-10 2018-09-19 日東電工株式会社 回路付サスペンション基板
US9070392B1 (en) 2014-12-16 2015-06-30 Hutchinson Technology Incorporated Piezoelectric disk drive suspension motors having plated stiffeners
US9318136B1 (en) 2014-12-22 2016-04-19 Hutchinson Technology Incorporated Multilayer disk drive motors having out-of-plane bending
US9296188B1 (en) 2015-02-17 2016-03-29 Hutchinson Technology Incorporated Partial curing of a microactuator mounting adhesive in a disk drive suspension
JP6689294B2 (ja) 2015-06-30 2020-04-28 ハッチンソン テクノロジー インコーポレイテッドＨｕｔｃｈｉｎｓｏｎ Ｔｅｃｈｎｏｌｏｇｙ Ｉｎｃｏｒｐｏｒａｔｅｄ 金誘電体接合部の信頼性を向上させたディスクドライブヘッドサスペンション構造
US9646638B1 (en) 2016-05-12 2017-05-09 Hutchinson Technology Incorporated Co-located gimbal-based DSA disk drive suspension with traces routed around slider pad
CN116524702B (zh) * 2023-06-29 2023-09-08 广州市科锐达光电技术股份有限公司 一种无人机遥控器防盗装置

Family Cites Families (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4789914A (en) * 1986-10-28 1988-12-06 International Business Machines Corporation Thin film magnetic read-write head/arm assemblies
JPH08111015A (ja) * 1994-09-01 1996-04-30 Tdk Corp 磁気ヘッドスライダの支持装置及び磁気ヘッド装置
JP3290569B2 (ja) * 1995-09-14 2002-06-10 富士通株式会社 薄膜磁気ヘッドスライダ
TW374211B (en) * 1995-08-03 1999-11-11 Ibm Machine structures fabricated of multiple microstructure layers
JPH1049849A (ja) * 1996-07-30 1998-02-20 Mitsumi Electric Co Ltd 磁気ディスク用磁気ヘッド及び磁気ヘッド装置
US5856895A (en) * 1997-07-02 1999-01-05 Seagate Technology, Inc. Internal accelerometer for improved servo performance and shock sensing on high performance disc drive heads
JP3933762B2 (ja) * 1997-08-29 2007-06-20 富士通株式会社 ヘッドアクチュエータ及びディスク装置
US6008969A (en) * 1997-12-18 1999-12-28 Read-Rite Corporation Planar recording head having formed yokes
US6239947B1 (en) * 1998-05-11 2001-05-29 International Business Machines Corporation Milliactuator with integrated sensor and drivers and method of manufacturing the same
JP2004047077A (ja) * 1998-11-13 2004-02-12 Tdk Corp 記録／再生ヘッド支持機構および記録／再生装置
JP2000215428A (ja) 1999-01-27 2000-08-04 Tdk Corp ヘッドスライダ支持体およびヘッド装置、ならびにそれらの製造方法
JP2000348321A (ja) * 1999-06-03 2000-12-15 Nec Corp 磁気ディスク装置，磁気ヘッド，磁気ヘッドの製造方法および磁気ディスク装置の製造方法
JP4072303B2 (ja) * 2000-04-11 2008-04-09 株式会社日立グローバルストレージテクノロジーズ ヘッド支持機構及び磁気ディスク装置
US6587314B1 (en) * 2000-05-16 2003-07-01 International Business Machines Corporation Enhanced silicon and ceramic magnetoresistive read/write head and a method for producing the same
JP4566439B2 (ja) * 2001-03-30 2010-10-20 日本碍子株式会社 圧電／電歪デバイスおよびその製造方法
US6618220B2 (en) * 2000-07-04 2003-09-09 Matsushita Electric Industrial Co., Ltd. Head actuator and hard disc drive including the same
JP2002033349A (ja) * 2001-06-07 2002-01-31 Matsushita Electric Ind Co Ltd 半導体素子の実装方法、及び回路基板
JP4904656B2 (ja) * 2001-09-27 2012-03-28 パナソニック株式会社 薄膜圧電体素子およびその製造方法
JP2003123416A (ja) * 2001-10-17 2003-04-25 Fujitsu Ltd ヘッドアセンブリおよび記録媒体駆動装置
JP3846271B2 (ja) * 2001-11-05 2006-11-15 松下電器産業株式会社 薄膜圧電体素子およびその製造方法
CN1273959C (zh) * 2002-02-02 2006-09-06 新科实业有限公司 具有准确定位致动器的磁头万向架组件及具有该组件的磁盘驱动装置
WO2003067576A1 (en) * 2002-02-02 2003-08-14 Sae Magnetics (H.K.) Ltd. Head gimbal assembly with precise positioning actuator for head element, disk drive apparatus with the head gimbal assembly, and manufacturing method of the head gimbal assembly
JP2003243823A (ja) * 2002-02-13 2003-08-29 Daiken Kagaku Kogyo Kk 回路基板における感光ペースト２段塗着方法及び回路基板の製造方法
JP4110802B2 (ja) 2002-03-07 2008-07-02 Ｔｄｋ株式会社 ヘッド素子の微小位置決め用アクチュエータ、該アクチュエータを備えたヘッドジンバルアセンブリ及び該ヘッドジンバルアセンブリを備えたディスク装置
KR100757163B1 (ko) * 2002-05-31 2007-09-07 다츠다 덴센 가부시키가이샤 도전성 페이스트, 이를 이용한 다층기판과 그 제조방법
US6853517B2 (en) * 2003-02-13 2005-02-08 Hitachi Global Storage Technologies Netherlands B.V. Electrostatic microactuator with electrically isolated movable portion and associated drive circuitry
JP3696596B2 (ja) * 2003-02-07 2005-09-21 アルプス電気株式会社 磁気ヘッドアクチュエータ及びその製造方法
US7064401B2 (en) * 2003-03-06 2006-06-20 Matsushita Electric Industrial Co., Ltd. Thin film piezoelectric element, method of manufacturing the same, and actuator
JP4401965B2 (ja) * 2003-04-16 2010-01-20 富士通株式会社 圧電アクチュエータを使用したヘッドアセンブリ
US7239488B2 (en) * 2004-03-09 2007-07-03 Sae Magnetics (H.K.), Ltd. MR sensor on an insulating substrate and method of manufacture
JP4113143B2 (ja) * 2004-03-15 2008-07-09 Ｔｄｋ株式会社 薄膜圧電体素子、サスペンション、及びハードディスク装置
JP2005297104A (ja) * 2004-04-08 2005-10-27 Ricoh Co Ltd 静電アクチュエータ、該静電アクチュエータを備えたインクジェットヘッドおよび画像形成装置
US7382583B2 (en) * 2004-08-26 2008-06-03 Hitachi Global Storage Technologies Netherlands B.V. Rotary piezoelectric microactuator and disk drive head-suspension assembly
US7345851B2 (en) * 2004-08-26 2008-03-18 Hitachi Global Storage Technologies Netherlands B.V. Disk drive with rotary piezoelectric microactuator
JP4126308B2 (ja) * 2005-03-23 2008-07-30 アンリツ株式会社 静電駆動型アクチュエータ
JP2007043789A (ja) * 2005-08-02 2007-02-15 Shinka Jitsugyo Kk マイクロアクチュエータ、それを用いたヘッドジンバルアッセンブリ、ハードディスクドライブ、その製造方法
JP2007287190A (ja) * 2006-04-12 2007-11-01 Hitachi Global Storage Technologies Netherlands Bv 薄膜磁気ヘッド
US7830638B1 (en) * 2007-08-13 2010-11-09 Magnecomp Corporation Structure and method for localizing solder ball strain on hard disk drive suspension gimbal

Also Published As

Publication number Publication date
JP2009123282A (ja) 2009-06-04
US8068313B2 (en) 2011-11-29
US20090135523A1 (en) 2009-05-28

Similar Documents

Publication Publication Date Title
JP5032949B2 (ja) マイクロアクチュエータ、ヘッド・ジンバル・アセンブリ及びディスク・ドライブ装置
KR101534343B1 (ko) 플렉셔 통합형 마이크로액추에이터용 시스템, 방법 및 장치
JP5869200B2 (ja) ヘッド・ジンバル・アセンブリ及びディスク・ドライブ
US7345851B2 (en) Disk drive with rotary piezoelectric microactuator
US7382583B2 (en) Rotary piezoelectric microactuator and disk drive head-suspension assembly
US7411764B2 (en) Head gimbal assembly with precise positioning actuator for read/write head and disk drive device with the head gimbal assembly
US20080198511A1 (en) Suspension for a hard disk drive microactuator
US11308982B1 (en) Curved outer gimbal strut
JP5979768B2 (ja) 電気的短絡を最小限にするための二段マイクロアクチュエータフレキシャの特徴
WO2000030080A1 (en) Support mechanism for recording/reproducing head, and recording/reproducing device
JP2010123195A (ja) ヘッド・ジンバル・アセンブリ、マイクロアクチュエータ及びマイクロアクチュエータの製造方法
CN113393867B (zh) 悬架组件以及盘装置
US11900974B2 (en) Hard drive flexure including a trace overlapping a base layer feature
US7417831B2 (en) Micro-actuator and head gimbal assembly for a disk drive device
JP5890856B2 (ja) ハード・ディスク・ドライブ用の単板差動ポーリング圧電マイクロアクチュエータ
US20030235012A1 (en) Load torque variation preventing apparatus, magnetic disk apparatus, flat wiring cable and magnetic recording apparatus
US8982513B1 (en) Disk drive head suspension with dual piezoelectric elements adhered to rotary-actuated and non-actuated portions of a structural layer of a tongue of a laminated flexure
JP2009016027A (ja) 重量平衡構造を有するヘッドジンバルアセンブリ、ディスクドライブユニット及びその製造方法
US8018686B2 (en) Head gimbal assembly for use in disk drive devices and method of making the same
JP2008152908A (ja) ディスク装置用ヘッドジンバルアセンブリ及びその製造方法
US7265945B2 (en) Head drive device including head support mechanism having support arm rotatable relative to base arm via rotation support part, and disk apparatus including the head drive device
WO2021201899A1 (en) Piezoelectric-based micro actuator arrangement for mitigating out-of-plane force and phase variation of flexure vibration
US12322421B2 (en) Disk device
JP2009099168A (ja) ヘッド・ジンバル・アセンブリ及びその製造方法
JP4806667B2 (ja) ヘッド・ジンバル・アセンブリ及びディスク・ドライブ装置

Legal Events

Date Code Title Description
RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20100510

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100922

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100922

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20111101

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20111108

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120120

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120306

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120516

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120605

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120629

R150 Certificate of patent or registration of utility model

Ref document number: 5032949

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150706

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees