JP5014581B2 - 電荷転送イメージ素子の製造方法 - Google Patents
電荷転送イメージ素子の製造方法 Download PDFInfo
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- JP5014581B2 JP5014581B2 JP2005039111A JP2005039111A JP5014581B2 JP 5014581 B2 JP5014581 B2 JP 5014581B2 JP 2005039111 A JP2005039111 A JP 2005039111A JP 2005039111 A JP2005039111 A JP 2005039111A JP 5014581 B2 JP5014581 B2 JP 5014581B2
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- 238000000034 method Methods 0.000 title claims description 23
- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 239000000758 substrate Substances 0.000 claims description 31
- 150000002500 ions Chemical class 0.000 claims description 27
- 230000002093 peripheral effect Effects 0.000 claims description 25
- 238000010438 heat treatment Methods 0.000 claims description 8
- 229920002120 photoresistant polymer Polymers 0.000 claims description 4
- 230000003252 repetitive effect Effects 0.000 claims 1
- 239000011295 pitch Substances 0.000 description 23
- 238000005468 ion implantation Methods 0.000 description 9
- 238000000137 annealing Methods 0.000 description 6
- 238000001444 catalytic combustion detection Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
- H01L21/26513—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically active species
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/266—Bombardment with radiation with high-energy radiation producing ion implantation using masks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14687—Wafer level processing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14689—MOS based technologies
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
- H01L27/14806—Structural or functional details thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
- H01L27/14887—Blooming suppression
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- High Energy & Nuclear Physics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Manufacturing & Machinery (AREA)
- Solid State Image Pick-Up Elements (AREA)
Description
200:垂直転送チャネル
300:水平転送チャネル
A:画素領域
B:周辺回路領域
OFD:オーバーフロードレーン
PR:感光膜パターン
Claims (8)
- 周辺回路領域と画素領域とを有するサブ基板の全面に感光膜を形成する段階と、
前記周辺回路領域のサブ基板上部の感光膜は除去し、前記画素領域のサブ基板上部の感光膜は一定したピッチの開口部が反復されて形成されるように感光膜パターンを形成する段階と、
前記感光膜パターンをドーピングマスクとして前記サブ基板の全面に同一な濃度のイオンを注入する段階と、
熱処理工程により前記注入されたイオンを拡散させ、前記周辺回路に第1ウェルを形成し、前記画素領域に第2ウェルを形成する段階を含み、
前記周辺回路領域と前記画素領域は直接接し、
前記第1ウェル及び第2ウェルは直接接し、相違なるイオン濃度を有していること、
を含むことを特徴とする電荷転送イメージ素子の製造方法。 - 前記感光膜パターンは、前記画素領域で、ライン形開口部が一定したピッチを有し、反復されて形成された構造を有することを特徴とする請求項1に記載の電荷転送イメージ素子の製造方法。
- 前記感光膜パターンは、前記画素領域で、前記開口部が上下左右それぞれ一定したピッチを有し、反復的に形成されて、格子形状の構造を有することを特徴とする請求項1に記載の電荷転送イメージ素子の製造方法。
- 前記感光膜パターンは、前記上下ピッチ及び前記左右ピッチが同一なことを特徴とする請求項3に記載の電荷転送イメージ素子の製造方法。
- 前記感光膜パターンは、正方格子形状に形成されることを特徴とする請求項4に記載の電荷転送イメージ素子の製造方法。
- 前記感光膜パターンは、前記画素領域で、前記開口部が上下左右それぞれ一定したピッチを有し、ジグザグ形状で行き違って反復的に形成されることを特徴とする請求項1に記載の電荷転送イメージ素子の製造方法。
- 前記一定したピッチ内で、前記開口部の幅を調整してドーピング濃度を調節することを特徴とする請求項1〜6のうちいずれか一つの項に記載の電荷転送イメージ素子の製造方法。
- 前記ピッチは、前記ドーピングマスクを通じて注入されたイオンが拡散されて隣り合う前記開口部を通じて注入されたイオンが互いに繋がってウェルを形成することができる幅であることを特徴とする請求項1〜7のうちいずれか一つの項に記載の電荷転送イメージ素子の製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2004-012196 | 2004-02-24 | ||
KR1020040012196A KR100598035B1 (ko) | 2004-02-24 | 2004-02-24 | 전하 전송 이미지 소자의 제조 방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005244217A JP2005244217A (ja) | 2005-09-08 |
JP5014581B2 true JP5014581B2 (ja) | 2012-08-29 |
Family
ID=34858808
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005039111A Expired - Fee Related JP5014581B2 (ja) | 2004-02-24 | 2005-02-16 | 電荷転送イメージ素子の製造方法 |
Country Status (3)
Country | Link |
---|---|
US (2) | US7208381B2 (ja) |
JP (1) | JP5014581B2 (ja) |
KR (1) | KR100598035B1 (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100668867B1 (ko) * | 2005-12-28 | 2007-01-16 | 주식회사 하이닉스반도체 | 반도체 소자의 센스 엠프 형성방법 |
KR100764426B1 (ko) | 2005-12-30 | 2007-10-05 | 주식회사 하이닉스반도체 | 이온 주입용 마스크 패턴 제조방법을 포함하는 반도체 소자제조방법 |
US8101927B2 (en) | 2009-06-08 | 2012-01-24 | Varian Semiconductor Equipment Associates, Inc. | Masking apparatus for an ion implanter |
JP5601849B2 (ja) * | 2010-02-09 | 2014-10-08 | 三菱電機株式会社 | 炭化珪素半導体装置の製造方法 |
US8629026B2 (en) * | 2010-11-12 | 2014-01-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Source tip optimization for high voltage transistor devices |
US9577134B2 (en) | 2013-12-09 | 2017-02-21 | Sunpower Corporation | Solar cell emitter region fabrication using self-aligned implant and cap |
US9401450B2 (en) | 2013-12-09 | 2016-07-26 | Sunpower Corporation | Solar cell emitter region fabrication using ion implantation |
US9263625B2 (en) | 2014-06-30 | 2016-02-16 | Sunpower Corporation | Solar cell emitter region fabrication using ion implantation |
US9754791B2 (en) | 2015-02-07 | 2017-09-05 | Applied Materials, Inc. | Selective deposition utilizing masks and directional plasma treatment |
US20160284913A1 (en) | 2015-03-27 | 2016-09-29 | Staffan WESTERBERG | Solar cell emitter region fabrication using substrate-level ion implantation |
CN107004723B (zh) | 2015-06-17 | 2021-03-09 | 富士电机株式会社 | 半导体装置及半导体装置的制造方法 |
JP6655907B2 (ja) * | 2015-08-11 | 2020-03-04 | キヤノン株式会社 | 撮像素子及び撮像装置 |
Family Cites Families (20)
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JPS6376370A (ja) * | 1986-09-18 | 1988-04-06 | Mitsubishi Electric Corp | 固体撮像素子 |
JPS63129618A (ja) * | 1986-11-20 | 1988-06-02 | Fuji Electric Co Ltd | 半導体装置の製造方法 |
FR2653851B1 (fr) | 1989-11-02 | 1992-02-14 | Framatome Sa | Dispositif d'obturation d'un conduit vertical de support et de guidage d'un element de forme allongee. |
DE69209678T2 (de) * | 1991-02-01 | 1996-10-10 | Philips Electronics Nv | Halbleiteranordnung für Hochspannungsverwendung und Verfahren zur Herstellung |
JPH06118622A (ja) * | 1992-10-01 | 1994-04-28 | Hitachi Ltd | マスク及びそれを用いた半導体装置の製造方法 |
US5300454A (en) * | 1992-11-24 | 1994-04-05 | Motorola, Inc. | Method for forming doped regions within a semiconductor substrate |
US5528048A (en) * | 1994-03-15 | 1996-06-18 | Fujitsu Limited | Charged particle beam exposure system and method |
US5444007A (en) * | 1994-08-03 | 1995-08-22 | Kabushiki Kaisha Toshiba | Formation of trenches having different profiles |
JPH11111855A (ja) * | 1997-09-30 | 1999-04-23 | Nec Corp | フォトマスク及び半導体装置の製造方法 |
JPH11121394A (ja) * | 1997-10-16 | 1999-04-30 | Toshiba Corp | 半導体装置の製造方法 |
JP4634546B2 (ja) * | 1998-02-09 | 2011-02-16 | エヌエックスピー ビー ヴィ | 半導体デバイスの製造方法 |
JP2000031466A (ja) | 1998-07-09 | 2000-01-28 | Sony Corp | 電荷転送装置の製造方法 |
US6144076A (en) * | 1998-12-08 | 2000-11-07 | Lsi Logic Corporation | Well formation For CMOS devices integrated circuit structures |
JP2001036062A (ja) * | 1999-07-23 | 2001-02-09 | Sony Corp | 固体撮像素子の製造方法および固体撮像素子 |
US6526278B1 (en) * | 2000-03-03 | 2003-02-25 | Motorola, Inc. | Mobile satellite communication system utilizing polarization diversity combining |
JP2001311964A (ja) * | 2000-04-27 | 2001-11-09 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
KR20020012907A (ko) | 2000-08-09 | 2002-02-20 | 박종섭 | 라인형태의 마스크를 이용한 반도체소자의 콘택 전극제조방법 |
KR100376406B1 (ko) | 2001-02-01 | 2003-03-17 | 주식회사 에이스조립시스템 | 인쇄회로기판의 라우팅 장치 |
US20030064550A1 (en) * | 2001-09-28 | 2003-04-03 | Layman Paul Arthur | Method of ion implantation for achieving desired dopant concentration |
JP3778061B2 (ja) * | 2001-11-19 | 2006-05-24 | 富士電機デバイステクノロジー株式会社 | 高耐圧icの製造方法 |
-
2004
- 2004-02-24 KR KR1020040012196A patent/KR100598035B1/ko not_active IP Right Cessation
-
2005
- 2005-01-14 US US11/036,260 patent/US7208381B2/en not_active Expired - Fee Related
- 2005-02-16 JP JP2005039111A patent/JP5014581B2/ja not_active Expired - Fee Related
-
2007
- 2007-02-20 US US11/708,259 patent/US7595518B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR100598035B1 (ko) | 2006-07-07 |
KR20050087013A (ko) | 2005-08-31 |
US7208381B2 (en) | 2007-04-24 |
US7595518B2 (en) | 2009-09-29 |
US20070155108A1 (en) | 2007-07-05 |
US20050186745A1 (en) | 2005-08-25 |
JP2005244217A (ja) | 2005-09-08 |
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