JP4998274B2 - セラミック多層基板の製造方法 - Google Patents
セラミック多層基板の製造方法 Download PDFInfo
- Publication number
- JP4998274B2 JP4998274B2 JP2008002923A JP2008002923A JP4998274B2 JP 4998274 B2 JP4998274 B2 JP 4998274B2 JP 2008002923 A JP2008002923 A JP 2008002923A JP 2008002923 A JP2008002923 A JP 2008002923A JP 4998274 B2 JP4998274 B2 JP 4998274B2
- Authority
- JP
- Japan
- Prior art keywords
- green sheet
- multilayer substrate
- wiring
- fine particles
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 title claims description 88
- 239000000919 ceramic Substances 0.000 title claims description 53
- 238000004519 manufacturing process Methods 0.000 title claims description 41
- 239000000463 material Substances 0.000 claims description 67
- 239000010419 fine particle Substances 0.000 claims description 48
- 239000007788 liquid Substances 0.000 claims description 36
- 238000010304 firing Methods 0.000 claims description 31
- 238000001035 drying Methods 0.000 claims description 28
- 238000000859 sublimation Methods 0.000 claims description 19
- 230000008022 sublimation Effects 0.000 claims description 19
- 229910052751 metal Inorganic materials 0.000 claims description 17
- 239000002184 metal Substances 0.000 claims description 17
- 230000015572 biosynthetic process Effects 0.000 claims description 15
- 239000011230 binding agent Substances 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 13
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 11
- 229910052709 silver Inorganic materials 0.000 claims description 11
- 239000004332 silver Substances 0.000 claims description 11
- 238000007599 discharging Methods 0.000 claims description 9
- 239000004020 conductor Substances 0.000 claims description 5
- 238000011049 filling Methods 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 description 62
- 230000008569 process Effects 0.000 description 44
- 239000000843 powder Substances 0.000 description 9
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 8
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 8
- 238000002788 crimping Methods 0.000 description 8
- DOIRQSBPFJWKBE-UHFFFAOYSA-N dibutyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCCCC DOIRQSBPFJWKBE-UHFFFAOYSA-N 0.000 description 8
- 238000010030 laminating Methods 0.000 description 8
- 239000004014 plasticizer Substances 0.000 description 8
- -1 acrylate compound Chemical class 0.000 description 7
- 239000002612 dispersion medium Substances 0.000 description 7
- 239000002241 glass-ceramic Substances 0.000 description 7
- 238000009461 vacuum packaging Methods 0.000 description 7
- 230000006837 decompression Effects 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 238000004080 punching Methods 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 5
- 230000002706 hydrostatic effect Effects 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 238000003475 lamination Methods 0.000 description 4
- 238000004806 packaging method and process Methods 0.000 description 4
- 238000012858 packaging process Methods 0.000 description 4
- 229910052763 palladium Inorganic materials 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- MQIUGAXCHLFZKX-UHFFFAOYSA-N Di-n-octyl phthalate Natural products CCCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCCC MQIUGAXCHLFZKX-UHFFFAOYSA-N 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- 229920005822 acrylic binder Polymers 0.000 description 3
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- ZTQSAGDEMFDKMZ-UHFFFAOYSA-N Butyraldehyde Chemical compound CCCC=O ZTQSAGDEMFDKMZ-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 125000004183 alkoxy alkyl group Chemical group 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
- 150000001735 carboxylic acids Chemical class 0.000 description 2
- 239000001913 cellulose Substances 0.000 description 2
- 229920002678 cellulose Polymers 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 125000000753 cycloalkyl group Chemical group 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000006112 glass ceramic composition Substances 0.000 description 2
- 229920001519 homopolymer Polymers 0.000 description 2
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 229920000620 organic polymer Polymers 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229920001515 polyalkylene glycol Polymers 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- BGHCVCJVXZWKCC-UHFFFAOYSA-N tetradecane Chemical compound CCCCCCCCCCCCCC BGHCVCJVXZWKCC-UHFFFAOYSA-N 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 239000006087 Silane Coupling Agent Substances 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229910052839 forsterite Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
- 230000005499 meniscus Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Images
Landscapes
- Production Of Multi-Layered Print Wiring Board (AREA)
- Structure Of Printed Boards (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008002923A JP4998274B2 (ja) | 2008-01-10 | 2008-01-10 | セラミック多層基板の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008002923A JP4998274B2 (ja) | 2008-01-10 | 2008-01-10 | セラミック多層基板の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009164507A JP2009164507A (ja) | 2009-07-23 |
| JP2009164507A5 JP2009164507A5 (enExample) | 2011-02-10 |
| JP4998274B2 true JP4998274B2 (ja) | 2012-08-15 |
Family
ID=40966740
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008002923A Expired - Fee Related JP4998274B2 (ja) | 2008-01-10 | 2008-01-10 | セラミック多層基板の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4998274B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5574038B2 (ja) | 2011-03-07 | 2014-08-20 | 株式会社村田製作所 | セラミック多層基板およびその製造方法 |
| JP7579051B2 (ja) * | 2019-07-18 | 2024-11-07 | 日本特殊陶業株式会社 | 中空構造部材の作製方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04116892A (ja) * | 1990-09-06 | 1992-04-17 | Fujitsu Ltd | 多層セラミック基板およびその製造方法 |
| JPH04219993A (ja) * | 1990-12-20 | 1992-08-11 | Fujitsu Ltd | 多層セラミック基板およびその製造方法 |
| JPH0521958A (ja) * | 1991-07-17 | 1993-01-29 | Nec Corp | 多層配線基板の積層体及びその製造方法 |
| JP3762095B2 (ja) * | 1998-03-31 | 2006-03-29 | 京セラ株式会社 | 多層回路基板 |
| JP3973402B2 (ja) * | 2001-10-25 | 2007-09-12 | 株式会社日立製作所 | 高周波回路モジュール |
| JP2003304064A (ja) * | 2002-04-08 | 2003-10-24 | Sumitomo Metal Ind Ltd | 空気層を内蔵したセラミック多層回路基板及びその製造方法 |
| JP2005057140A (ja) * | 2003-08-06 | 2005-03-03 | Seiko Epson Corp | 多層配線基板とその製造方法 |
| JP4874644B2 (ja) * | 2005-12-22 | 2012-02-15 | 京セラ株式会社 | セラミック構造体の製造方法 |
-
2008
- 2008-01-10 JP JP2008002923A patent/JP4998274B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009164507A (ja) | 2009-07-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4998274B2 (ja) | セラミック多層基板の製造方法 | |
| JP5103206B2 (ja) | セラミック多層基板の製造方法 | |
| JP2009123765A (ja) | 多層基板の製造方法 | |
| JP2005057140A (ja) | 多層配線基板とその製造方法 | |
| JP2009123731A (ja) | セラミック多層基板の製造方法 | |
| US7875140B2 (en) | Method for manufacturing multilayer ceramic substrate | |
| JP2007084387A (ja) | セラミックス回路基板の製造方法 | |
| KR100927364B1 (ko) | 패턴 형성 방법, 액적 토출 장치, 회로 기판 및 다층 기판 | |
| JP5103146B2 (ja) | セラミック多層基板の製造方法 | |
| JP2009158847A (ja) | セラミック多層基板の製造方法 | |
| JP4508277B2 (ja) | セラミック多層基板の製造方法 | |
| JP2009170683A (ja) | 多層基板の製造方法 | |
| JP2004207510A (ja) | 多層回路基板およびその製造方法 | |
| JP2009182132A (ja) | グリーンシート及びグリーンシートの製造方法 | |
| JP4953626B2 (ja) | セラミック電子部品の製造方法 | |
| JP2009182184A (ja) | セラミック多層基板の製造方法 | |
| JP2009146983A (ja) | 多層基板の製造方法 | |
| JP2009182292A (ja) | 積層シート、及びセラミック多層基板の製造方法 | |
| JP4985336B2 (ja) | セラミック多層基板の製造装置、及びセラミック多層基板の製造方法 | |
| JP2009129986A (ja) | セラミック多層基板の製造方法 | |
| JP2009182146A (ja) | 絶縁性シート基板の製造方法、及び多層回路基板の製造方法 | |
| JP4683891B2 (ja) | 導体形成用シートおよび導体の形成方法ならびに電子部品の製造方法 | |
| JP2009105319A (ja) | セラミック多層基板の製造方法 | |
| JP2009182293A (ja) | 積層シート、及びセラミック多層基板の製造方法 | |
| JP2009105318A (ja) | セラミック多層基板の製造装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20101216 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20101216 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120406 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120417 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120430 |
|
| R150 | Certificate of patent (=grant) or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150525 Year of fee payment: 3 |
|
| LAPS | Cancellation because of no payment of annual fees |