JP4986509B2 - 紫外連続スペクトルランプおよび点灯装置 - Google Patents
紫外連続スペクトルランプおよび点灯装置 Download PDFInfo
- Publication number
- JP4986509B2 JP4986509B2 JP2006162986A JP2006162986A JP4986509B2 JP 4986509 B2 JP4986509 B2 JP 4986509B2 JP 2006162986 A JP2006162986 A JP 2006162986A JP 2006162986 A JP2006162986 A JP 2006162986A JP 4986509 B2 JP4986509 B2 JP 4986509B2
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- electrode
- continuous spectrum
- slit
- ultraviolet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001228 spectrum Methods 0.000 title claims description 45
- 239000007789 gas Substances 0.000 claims description 29
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 claims description 28
- 229910052805 deuterium Inorganic materials 0.000 claims description 28
- 229910052739 hydrogen Inorganic materials 0.000 claims description 24
- 239000001257 hydrogen Substances 0.000 claims description 24
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 15
- 238000005192 partition Methods 0.000 claims description 15
- 150000002431 hydrogen Chemical class 0.000 claims description 6
- 239000010453 quartz Substances 0.000 description 20
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 20
- 230000004888 barrier function Effects 0.000 description 7
- 238000010891 electric arc Methods 0.000 description 6
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- 230000002159 abnormal effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 230000007704 transition Effects 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000008034 disappearance Effects 0.000 description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 3
- -1 hydrogen ions Chemical class 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000006552 photochemical reaction Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011231 conductive filler Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- HEPLMSKRHVKCAQ-UHFFFAOYSA-N lead nickel Chemical compound [Ni].[Pb] HEPLMSKRHVKCAQ-UHFFFAOYSA-N 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
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- 238000012544 monitoring process Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/10—Shields, screens, or guides for influencing the discharge
Description
2 遮蔽箱
3 耐熱性の隔壁(遮蔽箱の一部分)
4,15,16,4a〜4f スリット
5,6,11,12,30 細い石英管(放電容器の一部分)
7,8,13,14,33 電極
10,20 ステム
17 仕切り板
21,22 コの字断面の電極
23,35 囲い
21',22',31',32' 電流導入線
31,32 リード線
34a〜34f 熱電子放出型電極
Claims (4)
- 紫外線を透過する放電容器と、放電を発生させるように電圧を印加するための電極対と、上記電極対のそれぞれを隔離し、上記電極対間の放電路を狭めるためのスリットを有する隔壁とを備え、上記スリットは上記放電路が順に通るように、上記スリットの長手方向に直交する横方向に並んで2本設け、上記放電容器内には重水素または水素または重水素を含む混合ガスまたは水素を含む混合ガスが放電ガスとして封入されていることを特徴とする紫外連続スペクトルランプ。
- 紫外線を透過する放電容器と、放電を発生させるように電圧を印加するための電極対と、上記電極対の一方を隔離し、上記電極対間の放電路を狭めるためのスリットを有する隔壁とを備え、上記電極対の一方は誘電体で覆われ、上記電極対の他方は、2本のリード線に両端を接続した複数のフィラメントからなり、上記スリットは、上記放電路がそれぞれ通るように、上記フィラメントにそれぞれに対応して上記スリットの長手方向に縦に並んで複数個設け、上記放電容器内には重水素または水素または重水素を含む混合ガスまたは水素を含む混合ガスが放電ガスとして封入されていることを特徴とする紫外連続スペクトルランプ。
- 請求項1または2に記載の紫外連続スペクトルランプを点灯する点灯装置において、周波数が1kHzから500kHzの点灯電圧を発生して上記電極対に印加する手段を備えることを特徴とする点灯装置。
- 請求項1に記載の紫外連続スペクトルランプを点灯する点灯装置において、周波数が500kHzから100MHzの点灯電圧を発生して上記電極対に印加し高周波点灯する手段を備えることを特徴とする点灯装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006162986A JP4986509B2 (ja) | 2006-06-13 | 2006-06-13 | 紫外連続スペクトルランプおよび点灯装置 |
US11/749,744 US7619364B2 (en) | 2006-06-13 | 2007-05-16 | UV continuous spectrum lamp and its lighting device |
DE102007027176A DE102007027176A1 (de) | 2006-06-13 | 2007-06-13 | Lampe mit kontinuierlichem UV-Spektrum sowie zugehörige Ansteuerungseinrichtung |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006162986A JP4986509B2 (ja) | 2006-06-13 | 2006-06-13 | 紫外連続スペクトルランプおよび点灯装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007335130A JP2007335130A (ja) | 2007-12-27 |
JP4986509B2 true JP4986509B2 (ja) | 2012-07-25 |
Family
ID=38690458
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006162986A Expired - Fee Related JP4986509B2 (ja) | 2006-06-13 | 2006-06-13 | 紫外連続スペクトルランプおよび点灯装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7619364B2 (ja) |
JP (1) | JP4986509B2 (ja) |
DE (1) | DE102007027176A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102009014425B4 (de) * | 2009-03-26 | 2011-02-03 | Heraeus Noblelight Gmbh | Deuteriumlampe |
US8164263B2 (en) * | 2009-04-10 | 2012-04-24 | Ushio Denki Kabushiki Kaisha | Excimer discharge lamp |
US8390197B1 (en) * | 2011-05-12 | 2013-03-05 | Alta Advanced Technologies, Inc. | Long arc column gas discharge tube |
JP6121667B2 (ja) | 2012-08-22 | 2017-04-26 | 浜松ホトニクス株式会社 | 放電ランプ及び光源装置 |
JP6670570B2 (ja) * | 2015-09-25 | 2020-03-25 | ウシオ電機株式会社 | エキシマ放電ユニット |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2862125D1 (en) * | 1977-08-10 | 1983-01-20 | Hitachi Ltd | Low pressure metal vapour discharge lamp |
JPS5763763A (en) * | 1980-10-03 | 1982-04-17 | Hitachi Ltd | Light source device |
JPH0797045B2 (ja) * | 1986-11-12 | 1995-10-18 | 日本分光工業株式会社 | ホロ−カソ−ドランプ及び該ランプを光源とした原子吸光/螢光分光光度計 |
JPH01137554A (ja) * | 1987-11-24 | 1989-05-30 | Hitachi Ltd | 重水素放電ランプ |
JPH0515720Y2 (ja) * | 1989-04-05 | 1993-04-26 | ||
JPH04262359A (ja) * | 1990-06-22 | 1992-09-17 | Toshiba Corp | 真空紫外光源 |
US5610477A (en) * | 1994-04-26 | 1997-03-11 | Mra Technology Group | Low breakdown voltage gas discharge device and methods of manufacture and operation |
DE19547813C2 (de) | 1995-12-20 | 1997-10-16 | Heraeus Noblelight Gmbh | Elektrodenlose Entladungslampe mit Blendenkörper |
JP2000173546A (ja) * | 1998-12-09 | 2000-06-23 | Hamamatsu Photonics Kk | ガス放電管及び光学装置 |
US6690111B1 (en) | 1999-06-15 | 2004-02-10 | Imaging & Sensing Technology Corporation | Lamp with anode support structure and anode surface configuration having improved heat dissipation properties |
JP5371166B2 (ja) * | 2000-02-11 | 2013-12-18 | コーニンクレッカ フィリップス エヌ ヴェ | 高圧放電ランプ及びイグニッションアンテナを有するユニット |
AU764833B2 (en) * | 2000-06-30 | 2003-09-04 | Toshiba Lighting & Technology Corporation | A glow starter for a high-pressure discharge lamp |
US6858988B1 (en) * | 2001-10-31 | 2005-02-22 | Old Dominion University Research Foundation | Electrodeless excimer UV lamp |
JP3800166B2 (ja) * | 2002-11-01 | 2006-07-26 | ウシオ電機株式会社 | 放電ランプ |
DE60318899T2 (de) * | 2002-12-19 | 2009-01-22 | Koninklijke Philips Electronics N.V. | Hochdruck-entladungslampe, mit einer einen gasgefüllten hohlraum beinhaltenden einschmelzung |
US7446477B2 (en) * | 2004-07-06 | 2008-11-04 | General Electric Company | Dielectric barrier discharge lamp with electrodes in hexagonal arrangement |
JP2006093083A (ja) * | 2004-08-27 | 2006-04-06 | Masafumi Jinno | 無水銀ランプおよびランプ装置 |
US7495396B2 (en) * | 2005-12-14 | 2009-02-24 | General Electric Company | Dielectric barrier discharge lamp |
-
2006
- 2006-06-13 JP JP2006162986A patent/JP4986509B2/ja not_active Expired - Fee Related
-
2007
- 2007-05-16 US US11/749,744 patent/US7619364B2/en active Active
- 2007-06-13 DE DE102007027176A patent/DE102007027176A1/de not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
US7619364B2 (en) | 2009-11-17 |
US20070285015A1 (en) | 2007-12-13 |
DE102007027176A1 (de) | 2007-12-20 |
JP2007335130A (ja) | 2007-12-27 |
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