JP4962929B2 - プローバ装置及びこれに用いるプローブ組立体 - Google Patents
プローバ装置及びこれに用いるプローブ組立体 Download PDFInfo
- Publication number
- JP4962929B2 JP4962929B2 JP2005304993A JP2005304993A JP4962929B2 JP 4962929 B2 JP4962929 B2 JP 4962929B2 JP 2005304993 A JP2005304993 A JP 2005304993A JP 2005304993 A JP2005304993 A JP 2005304993A JP 4962929 B2 JP4962929 B2 JP 4962929B2
- Authority
- JP
- Japan
- Prior art keywords
- probe
- resin film
- vertical
- vertical probe
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005304993A JP4962929B2 (ja) | 2005-09-19 | 2005-09-19 | プローバ装置及びこれに用いるプローブ組立体 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005304993A JP4962929B2 (ja) | 2005-09-19 | 2005-09-19 | プローバ装置及びこれに用いるプローブ組立体 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007086044A JP2007086044A (ja) | 2007-04-05 |
JP2007086044A5 JP2007086044A5 (enrdf_load_stackoverflow) | 2008-12-04 |
JP4962929B2 true JP4962929B2 (ja) | 2012-06-27 |
Family
ID=37973153
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005304993A Expired - Fee Related JP4962929B2 (ja) | 2005-09-19 | 2005-09-19 | プローバ装置及びこれに用いるプローブ組立体 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4962929B2 (enrdf_load_stackoverflow) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009025267A (ja) * | 2007-07-24 | 2009-02-05 | Micronics Japan Co Ltd | 電気的接続装置 |
JP5240827B2 (ja) * | 2008-04-15 | 2013-07-17 | Necカシオモバイルコミュニケーションズ株式会社 | フレキシブル配線基板、及び電子機器 |
CN103529252B (zh) * | 2013-10-18 | 2016-09-28 | 上海华力微电子有限公司 | 直插式通用电气连接装置 |
CN110662972B (zh) * | 2017-07-21 | 2021-12-14 | 吉佳蓝科技股份有限公司 | 探针卡用薄膜电阻器 |
CN114089068B (zh) * | 2021-11-17 | 2024-07-02 | 歌尔科技有限公司 | 通讯模组、测试结构以及测试设备 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07105416B2 (ja) * | 1987-10-21 | 1995-11-13 | 松下電器産業株式会社 | 測定装置 |
JP4323055B2 (ja) * | 2000-03-22 | 2009-09-02 | 富士通マイクロエレクトロニクス株式会社 | 半導体装置試験用コンタクタ及びその製造方法 |
JP4391717B2 (ja) * | 2002-01-09 | 2009-12-24 | 富士通マイクロエレクトロニクス株式会社 | コンタクタ及びその製造方法並びにコンタクト方法 |
JP2004274010A (ja) * | 2003-03-11 | 2004-09-30 | Isao Kimoto | プローバ装置 |
-
2005
- 2005-09-19 JP JP2005304993A patent/JP4962929B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2007086044A (ja) | 2007-04-05 |
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