JP4954217B2 - 板ガラスを検査するための傾斜型透過照明検査システム及び方法 - Google Patents
板ガラスを検査するための傾斜型透過照明検査システム及び方法 Download PDFInfo
- Publication number
- JP4954217B2 JP4954217B2 JP2008542319A JP2008542319A JP4954217B2 JP 4954217 B2 JP4954217 B2 JP 4954217B2 JP 2008542319 A JP2008542319 A JP 2008542319A JP 2008542319 A JP2008542319 A JP 2008542319A JP 4954217 B2 JP4954217 B2 JP 4954217B2
- Authority
- JP
- Japan
- Prior art keywords
- image
- light source
- light
- defect
- inspection system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/4788—Diffraction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8822—Dark field detection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
・位相コントラスト照明。
・差分干渉コントラスト照明。
・単側波帯エッジ強調顕微鏡法。
206 光源
208 CCDカメラ
209 カメラレンズ
300 傾斜照明検査システム
306a 一次的な光源
306b 二次的な光源
308 CCDカメラ
309 カメラレンズ
Claims (5)
- 傾斜照明系を用いて、板ガラスの少なくとも一部分を照らす工程と、
カメラを用いて、前記板ガラスの前記照らされた部分の少なくとも一部分の画像を生成する工程と、
前記画像を解析し、前記板ガラス内の欠陥の検出、特徴付け及び分類を行う工程と
を備え、
前記傾斜照明系が、前記画像が前記欠陥を三次元的に表示するように設けられた二重光源の軸外透過光系であり、前記二重光源のうち一方の光源を、生成される前記画像のコントラストを高めるように、他方の光源より前記カメラの光軸の近くに配置し、該他方の光源を、生成される前記画像のエッジを強調するように、前記一方の光源よりも前記光軸から離して配置することを特徴とする板ガラスを検査する方法。 - 前記欠陥が、内包物、表面付着物、傷、染み、気泡、すじ又は不連続性表面であることを特徴とする請求項1記載の方法。
- 前記欠陥が前記板ガラス内に埋め込まれている場合に生じる表面の不連続性の高さを間接的に測定するために、前記画像を解析する工程を更に備え、
該解析する工程が、
前記画像中の欠陥の第1の側における第1の光の強度を判定する工程と、
前記画像中の欠陥の第2の側における第2の光の強度を判定する工程と、
前記第1の強度と前記第2の強度とを比較して、前記表面の不連続性の前記高さに直接関係する強度の差を判定する工程と
を含むことを特徴とする請求項1または2記載の方法。 - 板ガラスの少なくとも一部分を照らす傾斜照明系と、
前記板ガラスの前記照らされた部分の少なくとも一部分の画像を生成するカメラと
を備える検査システムにおいて、
前記画像が、前記板ガラス内の欠陥の検出、特徴付け及び分類を可能にするものであり、
前記傾斜照明系が、前記画像が前記欠陥を三次元的に表示するように設けられた二重光源の軸外透過光系であり、前記二重光源のうち一方の光源が、生成される前記画像のコントラストを高めるように、他方の光源より前記カメラの光軸の近くに配置され、該他方の光源が、生成される前記画像のエッジを強調するように、前記一方の光源よりも前記光軸から離れて配置されることを特徴とする検査システム。 - 前記欠陥が、内包物、表面付着物、傷、染み、気泡、すじ又は不連続性表面であることを特徴とする請求項4記載の検査システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/284,754 | 2005-11-21 | ||
US11/284,754 US7283227B2 (en) | 2005-11-21 | 2005-11-21 | Oblique transmission illumination inspection system and method for inspecting a glass sheet |
PCT/US2006/041480 WO2007061557A2 (en) | 2005-11-21 | 2006-10-24 | Oblique transmission illumination inspection system and method for inspecting a glass sheet |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009516852A JP2009516852A (ja) | 2009-04-23 |
JP4954217B2 true JP4954217B2 (ja) | 2012-06-13 |
Family
ID=38053124
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008542319A Expired - Fee Related JP4954217B2 (ja) | 2005-11-21 | 2006-10-24 | 板ガラスを検査するための傾斜型透過照明検査システム及び方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7283227B2 (ja) |
EP (1) | EP1969343A4 (ja) |
JP (1) | JP4954217B2 (ja) |
KR (1) | KR101263973B1 (ja) |
CN (1) | CN101360985B (ja) |
TW (1) | TWI332574B (ja) |
WO (1) | WO2007061557A2 (ja) |
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KR101068364B1 (ko) * | 2007-07-11 | 2011-09-28 | 엘지디스플레이 주식회사 | 액정표시장치 검사장비 및 그 검사방법 |
GB0721060D0 (en) * | 2007-10-29 | 2007-12-05 | Pilkington Group Ltd | Optical inspection |
JP5200667B2 (ja) * | 2007-11-13 | 2013-06-05 | 株式会社リコー | 透過光量測定装置、媒体識別装置、媒体搬送装置及び画像形成装置 |
JP5521332B2 (ja) * | 2009-01-21 | 2014-06-11 | 三星ダイヤモンド工業株式会社 | 観察装置、位置決め装置、レーザー加工装置および観察方法 |
US20100195096A1 (en) * | 2009-02-04 | 2010-08-05 | Applied Materials, Inc. | High efficiency multi wavelength line light source |
CN101887030A (zh) * | 2009-05-15 | 2010-11-17 | 圣戈本玻璃法国公司 | 用于检测透明基板表面和/或其内部的缺陷的方法及系统 |
WO2012142967A1 (en) * | 2011-04-21 | 2012-10-26 | Ati-China Co., Ltd. | Apparatus and method for photographing glass defects in multiple layers |
JP5708385B2 (ja) * | 2011-09-02 | 2015-04-30 | 富士通セミコンダクター株式会社 | 表面検査方法及び表面検査装置 |
JP5796430B2 (ja) * | 2011-09-15 | 2015-10-21 | 日本電気硝子株式会社 | 板ガラス検査装置、板ガラス検査方法、板ガラス製造装置、及び板ガラス製造方法 |
JP5854370B2 (ja) * | 2012-02-13 | 2016-02-09 | 日本電気硝子株式会社 | 蛍光体含有ガラス部材の検査装置及び検査方法 |
CN102944564A (zh) * | 2012-11-26 | 2013-02-27 | 中国科学院长春光学精密机械与物理研究所 | 一种便携式双远心倾斜照明结构杂散光检测装置 |
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US20140240489A1 (en) * | 2013-02-26 | 2014-08-28 | Corning Incorporated | Optical inspection systems and methods for detecting surface discontinuity defects |
CN104406988A (zh) * | 2014-11-18 | 2015-03-11 | 浙江大学 | 一种玻璃内部缺陷的检测方法 |
EP3076164A1 (fr) * | 2015-04-03 | 2016-10-05 | AGC Glass Europe | Procédé de contrôle de verre plat |
US20170066673A1 (en) | 2015-09-09 | 2017-03-09 | Corning Incorporated | Glass manufacturing apparatuses and methods for operating the same |
TWI674475B (zh) * | 2015-10-22 | 2019-10-11 | 特銓股份有限公司 | 微塵檢測機構 |
US10120111B2 (en) * | 2016-12-14 | 2018-11-06 | Google Llc | Thin ceramic imaging screen for camera systems |
TWI644098B (zh) * | 2017-01-05 | 2018-12-11 | 國立臺灣師範大學 | 透明基板之瑕疵檢測方法與裝置 |
JP2020524123A (ja) * | 2017-05-31 | 2020-08-13 | ニプロ株式会社 | ガラス容器の評価方法 |
KR102580389B1 (ko) * | 2018-02-13 | 2023-09-19 | 코닝 인코포레이티드 | 유리 시트 검사 장치 및 방법 |
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-
2005
- 2005-11-21 US US11/284,754 patent/US7283227B2/en not_active Expired - Fee Related
-
2006
- 2006-10-24 CN CN2006800514634A patent/CN101360985B/zh not_active Expired - Fee Related
- 2006-10-24 WO PCT/US2006/041480 patent/WO2007061557A2/en active Application Filing
- 2006-10-24 EP EP06826561A patent/EP1969343A4/en not_active Withdrawn
- 2006-10-24 JP JP2008542319A patent/JP4954217B2/ja not_active Expired - Fee Related
- 2006-11-19 TW TW095142800A patent/TWI332574B/zh not_active IP Right Cessation
-
2008
- 2008-06-20 KR KR1020087015033A patent/KR101263973B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
KR101263973B1 (ko) | 2013-05-13 |
KR20080075197A (ko) | 2008-08-14 |
WO2007061557A2 (en) | 2007-05-31 |
TW200732652A (en) | 2007-09-01 |
EP1969343A2 (en) | 2008-09-17 |
WO2007061557A3 (en) | 2007-10-04 |
JP2009516852A (ja) | 2009-04-23 |
EP1969343A4 (en) | 2010-01-13 |
TWI332574B (en) | 2010-11-01 |
CN101360985A (zh) | 2009-02-04 |
US7283227B2 (en) | 2007-10-16 |
US20070115463A1 (en) | 2007-05-24 |
CN101360985B (zh) | 2011-05-11 |
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