200839220 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種表面形態缺陷檢測裝置，特別是 指一種光學式表面形態缺陷檢測裝置及方法。 【先前技術】 當製造出的物品對於表面平整度的要求很高時，通常 會以快速且有效的光學方式對該表面進行非破壞性檢測， 將表面上的缺陷位置檢出，以作為調整製程或執行品管的 依據。 參閱圖1 ’ 一種習知用於檢測偏光片之表面缺陷的光學 檢測裝置，是將光源11所發出的光線投射在偏光片2上形 成知明區’以藉由透鏡12及取像單元13擷取照明區之 影像，將照明區中具有對比差異處的缺陷位置檢出。並且 ，藉由使照明區於偏光片2上相對移動，依序掃描整片偏 光片2，將整片偏光片2上的所有缺陷位置完整檢出。 ;、二而由於偏光片2上之缺陷種類繁多，上述檢測裝 置可有效檢出異物（particle)、氣泡（bubble)，以及較深的刮 痕專夫卩曰但疋’對於表面形態（morphology)變異如波紋、 壓痕或疋彳政幅凹凸專缺陷而言，由於在光線照射下之對 比差異度不高，導致其檢出率相對不高。 【發明内容】 本t明之一目的，是在提供一種用以檢測表面形態缺 陷之檢測裝置。 本 < 月之另一目的，是在提供一種用以檢測表面形態 200839220 缺陷之檢測方法。 於是，本發明提供-種表面形態缺陷檢測裝置，適用 於檢測-待測物之-待測表面的形態，待測表面至少可反 射部分光線’㈣裝置包含—設於待測物之待測表面側之 透明圖案單元’透明圖案單元形成有一圖案紋路，圖案纹 路於待測表面相反側所產生的—虛像會受到待測表面之形 態影響而產生形變，藉以判斷表面形態之缺陷處。 此外，本發明提供一種表面形態缺陷檢測方法，適用 於檢測-待測物之-待測表面的形態，待測表面至少可反 f部分光線，檢測方法將一形成有一圖案紋路之透明圖案 早7G設於待測物之待測表面側，使圖案紋路於待測表面相 反側產生的一虛像受到待測表面之形態影響而產生形變， 藉以判斷表面形態之缺陷處。 本發明藉由圖案紋路之影像經由待測表面形態缺陷處 而產生之形變，以判斷待測表面上之缺陷處的相對位置。 【實施方式】 有關本發明之前述及其他技術内容、特點與功效，在 以下配合參考圖式之一較佳實施例的詳細說明中，將可清 楚的呈現。 參閱圖2,本發明表面形態缺陷檢測裝置的較佳實施例 ，應用於檢測一待測物之一待測表面4之表面形態的缺陷 ，本實施例以偏光片之表面作為待測表面4進行說明，實 際應用時待測表面4之種類不限於此，惟該待測表面4需 至少可反射部分光線。 200839220 檢測裝置3設於待測物之待測表面4側，包含有一光 源單元31、一透鏡單元32、一取像單元33、一顯示單元 34，以及一透明圖案單元35。 光源單元31包含有鹵素燈或螢光燈等光源。並且，為 有效使用光線，在本實施例中，光源單元31更包含一圍繞 光源之封閉殼體，殼體上形成有一供光線出射之出光口 3ιι 〇 透鏡單元32於圖中以一凸透鏡為例示意，實際實施時 ，可為至少一片以上之聚焦透鏡，或是更具有消除像差、 色像差等功效之透鏡組合，用以使光線成像於取像單元33 上。 取像單元3 3用以擷取影像，以一面陣型電荷搞合式影 像擷取裝置（area CCD)為例。此外，亦可採用CM〇s感測陣 列裝置等其他種類之影像擷取裝置。 顯示單元34用以接收並顯示取像單元34所擷取之影 像。其型式可為陰極射線管（CRT)、或液晶顯示器（lcd)等 各種顯示器。 如圖2及圖3所示，透明圖案單元35設置於出光口 31ι處，為一其上形成有圖案紋路351之透明片35〇。本實 施例中，圖案紋路351以一由多數條黑色線條垂直交錯構 成之網格（grid)圖案為例，實際實施時不以此限，可為平行 ，條、同心圓線、螺旋線’或是具有任何可清楚辨識之圖 紋或圖案。線條顏色也不以黑色為限，以可供清楚辨識為 '、、本Λ施例中，格線寬度為ΙΟΟμιη，格線間距為 200839220 25〇μΐη ’實際實施時，亦可使格線寬度為0.5mm，格線間距 為1mm，並且，不以此為限。 藉光源單元31之光線照射，提高圖案單元35之透明 部分相對於圖案紋路351之對比度，並且，使透鏡單元32 透過待測表面4反射並對焦於圖案紋路351上，使圖案紋 路351經由待測表面4的反射後，藉透鏡單元32成像於取 像單70 33上；換句話說，也就是透鏡單元32是對焦於圖 案紋路351於待測表面4相反側所形成的虛像351，上。 如圖2及圖4所示，若待測表面4之表面形態具有缺 陷處如圖4所示之突起部41，則如圖中右側之部分原始圖 案紋路351在經由突起部41及其鄰近區域表面的反射時， 會叉到突起部41之輪廓的影響而改變其行進路線，導致藉 透鏡單元32而成像於取像單元33之影像會呈現如圖中左 側之部分扭曲形變的影像351，，。換個角度來說，圖案紋路 351於待測表面4相反側所產生的虛像，是在經過待測表面 4時，受到突起部41之輪廓的影響而產生了形變。 其中，由於形變部分的位置會對應於待測表面4之突 起部41的位置，因此，使本發明表面形態缺陷檢測裝置可 藉此判斷表面形態缺陷處之所在位置。實際以本發明表面 形態缺陷檢測裝置檢測偏光片之一表面之網格影像照片列 舉如附件所示，其中包含了習知之檢測裝置難以檢測其位 置的波紋、壓痕，以及微幅突起等表面形態缺陷。 歸納上述，藉由設置具有圖案紋路351之透明圖案單 元35於光源單元31之出光口 311處，並使透鏡單元μ透 200839220 過待測表面4之反射並對焦於圖案紋路351上，使圖案紋 路351之影像經過待測表面4形態變異處而產生形變，藉 以判斷缺陷處於待測表面4上之相對位置，確實達成本發 明的功效。 惟以上所述者’僅為本發明之較佳實施例而已，當不 月匕以此限疋本發明實施之範圍，即大凡依本發明申請專利 範圍及發明說明内容所作之簡單的等效變化與修飾，皆仍 屬本發明專利涵蓋之範圍内。 【圖式簡單說明】 圖1是習知表面缺陷檢測裝置之示意圖； 圖2是本發明表面形態缺陷檢測裝置之較佳實施例之 示意圖； 圖3是本較佳實施例之透明圖案單元的示意圖；及 圖4是本較佳實施例之示意圖。 200839220 〜 【主要元件符號說明】 3 ··.· 表面形態缺陷檢測 350 · 裝置 351 · 31 ·"· 光源單元 35,… 311 ·· 出光口 351， 32···· 透鏡單元 351，， 3 3 — 取像單元 4 •… 34···· 顯示單元 41 — 3 5 — 透明圖案單元 透明片 圖案紋路 圖案單元虛像 圖案紋路虛像 圖案紋路影像 待測表面 突起部 10200839220 IX. Description of the Invention: [Technical Field] The present invention relates to a surface morphology defect detecting device, and more particularly to an optical surface shape defect detecting device and method. [Prior Art] When the manufactured article has high requirements for surface flatness, the surface is usually non-destructively detected in a fast and effective optical manner, and the defect position on the surface is detected as an adjustment process. Or the basis for the implementation of quality control. Referring to FIG. 1 'an optical detecting device for detecting a surface defect of a polarizer, a light emitted from a light source 11 is projected onto a polarizer 2 to form a known region' to be captured by the lens 12 and the image capturing unit 13. The image of the illumination area is detected by detecting the position of the defect in the illumination area. Further, by relatively moving the illumination region on the polarizer 2, the entire polarizer 2 is sequentially scanned, and all the defect positions on the entire polarizer 2 are completely detected. 2, and because of the wide variety of defects on the polarizer 2, the above detection device can effectively detect foreign particles, bubbles, and deep scratches, but 疋 'for surface morphology (morphology) In the case of variations such as ripples, indentations, or eccentricities, the detection rate is relatively low due to the low contrast difference under light illumination. SUMMARY OF THE INVENTION One object of the present invention is to provide a detecting device for detecting surface shape defects. Another purpose of this < month is to provide a detection method for detecting surface morphology 200839220 defects. Therefore, the present invention provides a surface morphology defect detecting device, which is suitable for detecting the shape of a surface to be tested, which is to be tested, and the surface to be tested can reflect at least part of the light. (4) The device comprises - the surface to be tested is to be tested The transparent pattern unit of the side is formed with a pattern pattern, and the pattern texture is generated on the opposite side of the surface to be tested. The virtual image is deformed by the shape of the surface to be tested, thereby determining the defect of the surface shape. In addition, the present invention provides a surface morphology defect detecting method, which is suitable for detecting the shape of a surface to be tested, which is to be tested, and the surface to be tested can at least partially reflect the light of the f portion, and the detecting method will form a transparent pattern of a pattern grain as early as 7G. It is disposed on the side of the surface to be tested of the object to be tested, so that a virtual image generated on the opposite side of the surface to be tested is deformed by the shape of the surface to be tested, thereby determining the defect of the surface morphology. The present invention determines the relative position of the defect on the surface to be tested by deforming the image of the pattern texture through the defect of the surface shape to be tested. The above and other technical contents, features and effects of the present invention will be apparent from the following detailed description of the preferred embodiments. Referring to FIG. 2, a preferred embodiment of the surface morphology defect detecting apparatus of the present invention is applied to detect a defect of a surface morphology of a surface 4 to be tested of a test object. In this embodiment, the surface of the polarizer is used as the surface 4 to be tested. It should be noted that the type of the surface to be tested 4 in actual application is not limited thereto, but the surface to be tested 4 needs to reflect at least part of the light. The detection device 3 is disposed on the side of the surface 4 to be tested of the object to be tested, and includes a light source unit 31, a lens unit 32, an image capturing unit 33, a display unit 34, and a transparent pattern unit 35. The light source unit 31 includes a light source such as a halogen lamp or a fluorescent lamp. In the present embodiment, the light source unit 31 further includes a closed casing surrounding the light source, and a light exiting opening for the light is formed on the casing. The lens unit 32 is exemplified by a convex lens in the figure. It is shown that, in actual implementation, it may be at least one or more focusing lenses, or a combination of lenses having effects of eliminating aberrations, chromatic aberrations, and the like for imaging light onto the image capturing unit 33. The image capturing unit 3 3 is used for capturing images, and an array type charge-capturing image capturing device (area CCD) is taken as an example. In addition, other types of image capturing devices such as CM〇s sensing array devices can also be used. The display unit 34 is configured to receive and display the image captured by the image capturing unit 34. The type can be various displays such as a cathode ray tube (CRT) or a liquid crystal display (lcd). As shown in Fig. 2 and Fig. 3, the transparent pattern unit 35 is disposed at the light exit opening 31, and is a transparent sheet 35A on which the pattern lines 351 are formed. In this embodiment, the pattern pattern 351 is exemplified by a grid pattern in which a plurality of black lines are vertically staggered, and the actual implementation is not limited thereto, and may be parallel, strip, concentric line, spiral 'or It has any clearly visible pattern or pattern. The color of the line is not limited to black, so that it can be clearly identified as ',, in this embodiment, the grid width is ΙΟΟμιη, and the grid spacing is 200839220 25〇μΐη 'In actual implementation, the grid width can also be 0.5mm, the grid spacing is 1mm, and is not limited to this. The light of the light source unit 31 is irradiated to improve the contrast of the transparent portion of the pattern unit 35 with respect to the pattern line 351, and the lens unit 32 is reflected by the surface to be tested 4 and focused on the pattern line 351, so that the pattern line 351 is tested. After the reflection of the surface 4, the lens unit 32 is imaged on the image taking unit 70 33; in other words, the lens unit 32 is focused on the virtual image 351 formed on the opposite side of the pattern surface 351 on the surface 4 to be tested. As shown in FIG. 2 and FIG. 4, if the surface morphology of the surface 4 to be tested has a protrusion 41 as shown in FIG. 4, a portion of the original pattern line 351 on the right side in the figure passes through the protrusion 41 and its adjacent area. When the surface is reflected, the influence of the contour of the protrusion 41 is changed to change its traveling path, so that the image formed by the lens unit 32 and imaged on the image capturing unit 33 exhibits a partially deformed image 351 on the left side of the figure, . In other words, the virtual image produced by the pattern line 351 on the opposite side of the surface 4 to be tested is deformed by the contour of the protrusion 41 when passing through the surface 4 to be tested. Here, since the position of the deformed portion corresponds to the position of the protruding portion 41 of the surface 4 to be tested, the surface form defect detecting device of the present invention can thereby determine the position of the surface shape defect. Actually, the grid image of the surface of one of the polarizers is detected by the surface shape defect detecting device of the present invention as shown in the attached table, and includes surface shapes such as ripples, indentations, and micro-protrusions which are difficult to detect by the conventional detecting device. defect. In summary, the pattern is textured by providing a transparent pattern unit 35 having a pattern pattern 351 at the light exit opening 311 of the light source unit 31, and causing the lens unit to pass through the reflection of the surface 4 to be tested and focus on the pattern line 351. The image of 351 is deformed by the morphological variation of the surface 4 to be tested, thereby judging the relative position of the defect on the surface 4 to be tested, and the effect of the present invention is indeed achieved. However, the above description is only a preferred embodiment of the present invention, and is not limited to the scope of the present invention, that is, simple equivalent changes made according to the scope of the present invention and the description of the invention. And modifications are still within the scope of the invention patent. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of a conventional surface defect detecting device; FIG. 2 is a schematic view of a preferred embodiment of a surface shape defect detecting device of the present invention; FIG. 3 is a schematic view of a transparent pattern unit of the preferred embodiment. And Figure 4 is a schematic view of the preferred embodiment. 200839220 ~ [Description of main component symbols] 3 ···· Surface shape defect detection 350 · Device 351 · 31 ·"· Light source unit 35,... 311 ·· Light exit 351, 32···· Lens unit 351,, 3 3 — Image capturing unit 4 •... 34···· Display unit 41 — 3 5 — Transparent pattern unit Transparent sheet pattern Grain pattern unit Virtual image pattern Grain virtual image pattern Grain image surface to be tested 10