JP4939844B2 - ZnO系半導体素子 - Google Patents
ZnO系半導体素子 Download PDFInfo
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- JP4939844B2 JP4939844B2 JP2006160273A JP2006160273A JP4939844B2 JP 4939844 B2 JP4939844 B2 JP 4939844B2 JP 2006160273 A JP2006160273 A JP 2006160273A JP 2006160273 A JP2006160273 A JP 2006160273A JP 4939844 B2 JP4939844 B2 JP 4939844B2
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- 239000004065 semiconductor Substances 0.000 title claims description 60
- 239000000758 substrate Substances 0.000 claims description 83
- 239000011701 zinc Substances 0.000 description 41
- 239000013078 crystal Substances 0.000 description 25
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 20
- 238000010586 diagram Methods 0.000 description 12
- 229910052757 nitrogen Inorganic materials 0.000 description 10
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 8
- 150000001875 compounds Chemical class 0.000 description 7
- 238000005530 etching Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000000137 annealing Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910002704 AlGaN Inorganic materials 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- -1 GaN Chemical compound 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical group [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000003776 cleavage reaction Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 238000001027 hydrothermal synthesis Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000005191 phase separation Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
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- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
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- H01L29/76—Unipolar devices, e.g. field effect transistors
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- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
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- H01L29/7787—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT with wide bandgap charge-carrier supplying layer, e.g. direct single heterostructure MODFET
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- H01S5/00—Semiconductor lasers
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- H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
- H01S5/3202—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures grown on specifically orientated substrates, or using orientation dependent growth
- H01S5/320275—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures grown on specifically orientated substrates, or using orientation dependent growth semi-polar orientation
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- Optics & Photonics (AREA)
- Inorganic Chemistry (AREA)
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- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
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- Semiconductor Lasers (AREA)
Description
70≦{90−(180/π)arctan(tan(πΦ a /180)/tan(πΦ m /180))}≦110の条件を満たしていることを特徴とする請求項1又は請求項2のいずれか1項に記載のZnO系半導体素子である。
α=arctan(tanΦa/tanΦm) と表され、
θS=(π/2)−α=(π/2)−arctan(tanΦa/tanΦm)となる。
ここで、θSをラジアンから度(deg)に変換すると
θS=90−(180/π)arctan(tanΦa/tanΦm)となるので、
70≦{90−(180/π)arctan(tanΦa/tanΦm)}≦110 と表せる。ここで、良く知られているように、tanは、正接(tangent)を表し、arctanは逆正接(arctangent)を表す。なお、θS=90度の場合が、a軸方向への傾きがなく、m軸方向にのみ傾いている場合である。
2 n型バッファ層
3 n型層
4 活性層
5 p型層
6 p型コンタクト層
7 発光層形成部
8 半導体積層部
9 n電極
10 p電極
Claims (3)
- 主面がC面を有するMgxZn1−xO(0≦x<1)基板において、前記主面のc軸を主面の法線方向に一致させた場合のc軸m軸平面に、前記主面のc軸を投影した投影軸が、m軸方向にΦm度傾斜し、前記Φmは
0<Φm≦3の条件を満たすものであって、前記主面にZnO系半導体層を形成したことを特徴とするZnO系半導体素子。 - 前記C面は+C面で構成されていることを特徴とする請求項1記載のZnO系半導体素子。
- 前記主面のc軸を主面の法線方向に一致させた場合のc軸a軸平面に、前記主面のc軸を投影した投影軸が、a軸方向にΦa度傾斜し、前記Φaは
70≦{90−(180/π)arctan(tan(πΦ a /180)/tan(πΦ m /180))}≦110
の条件を満たしていることを特徴とする請求項1又は請求項2のいずれか1項に記載のZnO系半導体素子。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006160273A JP4939844B2 (ja) | 2006-06-08 | 2006-06-08 | ZnO系半導体素子 |
KR1020097000196A KR20090023672A (ko) | 2006-06-08 | 2007-06-08 | ZnO계 반도체 소자 |
TW096120834A TW200810155A (en) | 2006-06-08 | 2007-06-08 | ZnO-based semiconductor element |
CN2007800211852A CN101473454B (zh) | 2006-06-08 | 2007-06-08 | ZnO系半导体元件 |
US12/308,064 US7741637B2 (en) | 2006-06-08 | 2007-06-08 | ZnO-based semiconductor device |
PCT/JP2007/061662 WO2008004405A1 (fr) | 2006-06-08 | 2007-06-08 | ÉLÉMENT SEMI-CONDUCTEUR À BASE DE ZnO |
EP07828138A EP2037508A1 (en) | 2006-06-08 | 2007-06-08 | ZnO-BASED SEMICONDUCTOR ELEMENT |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006160273A JP4939844B2 (ja) | 2006-06-08 | 2006-06-08 | ZnO系半導体素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007329353A JP2007329353A (ja) | 2007-12-20 |
JP4939844B2 true JP4939844B2 (ja) | 2012-05-30 |
Family
ID=38894377
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006160273A Expired - Fee Related JP4939844B2 (ja) | 2006-06-08 | 2006-06-08 | ZnO系半導体素子 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7741637B2 (ja) |
EP (1) | EP2037508A1 (ja) |
JP (1) | JP4939844B2 (ja) |
KR (1) | KR20090023672A (ja) |
CN (1) | CN101473454B (ja) |
TW (1) | TW200810155A (ja) |
WO (1) | WO2008004405A1 (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009065050A (ja) * | 2007-09-07 | 2009-03-26 | Rohm Co Ltd | ZnO系半導体素子 |
JP5392885B2 (ja) * | 2007-11-22 | 2014-01-22 | ローム株式会社 | ZnO系半導体素子 |
JP2009179534A (ja) * | 2008-01-31 | 2009-08-13 | Rohm Co Ltd | ZnO系基板及びZnO系基板の処理方法 |
JP5019326B2 (ja) * | 2008-02-23 | 2012-09-05 | シチズンホールディングス株式会社 | MgaZn1−aO単結晶薄膜の作製方法 |
JP2010050432A (ja) * | 2008-07-24 | 2010-03-04 | Rohm Co Ltd | 紫外検出装置 |
US8642369B2 (en) * | 2009-03-03 | 2014-02-04 | Zn Technology, Inc. | Vertically structured LED by integrating nitride semiconductors with Zn(Mg,Cd,Be)O(S,Se) and method for making same |
JP2011049448A (ja) * | 2009-08-28 | 2011-03-10 | Mitsubishi Chemicals Corp | 酸化亜鉛系基板及び酸化亜鉛系基板の製造方法 |
JP5716737B2 (ja) * | 2010-03-01 | 2015-05-13 | 富士通株式会社 | 化合物半導体装置及びその製造方法 |
US9171912B2 (en) | 2010-11-11 | 2015-10-27 | Zn Technology, Inc. | Group IV element doped P-type Zn(Mg,Cd,Be)O(S,Se) semiconductor |
US8883556B2 (en) * | 2010-12-28 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
JP5800291B2 (ja) * | 2011-04-13 | 2015-10-28 | ローム株式会社 | ZnO系半導体素子およびその製造方法 |
CN103972310B (zh) * | 2014-04-30 | 2016-04-27 | 中国科学院长春光学精密机械与物理研究所 | 一种氧化锌基p型材料的制备方法 |
US10741724B2 (en) * | 2015-10-02 | 2020-08-11 | Seoul Viosys Co., Ltd. | Light emitting diode devices with zinc oxide layer |
TWI716986B (zh) * | 2018-09-03 | 2021-01-21 | 國立大學法人大阪大學 | 氮化物半導體裝置與其基板及添加稀土類元素之氮化物層的形成方法,以及紅色發光裝置 |
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US7002179B2 (en) | 2003-03-14 | 2006-02-21 | Rohm Co., Ltd. | ZnO system semiconductor device |
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CN101473454B (zh) | 2011-09-07 |
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JP2007329353A (ja) | 2007-12-20 |
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