JP4907297B2 - 微小構造体及び微小電気機械式装置の作製方法 - Google Patents

微小構造体及び微小電気機械式装置の作製方法 Download PDF

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JP4907297B2
JP4907297B2 JP2006284910A JP2006284910A JP4907297B2 JP 4907297 B2 JP4907297 B2 JP 4907297B2 JP 2006284910 A JP2006284910 A JP 2006284910A JP 2006284910 A JP2006284910 A JP 2006284910A JP 4907297 B2 JP4907297 B2 JP 4907297B2
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JP2007152546A5 (enExample
JP2007152546A (ja
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文則 立石
小波 泉
真弓 山口
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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JP2006284910A 2005-11-11 2006-10-19 微小構造体及び微小電気機械式装置の作製方法 Expired - Fee Related JP4907297B2 (ja)

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JP2006284910A JP4907297B2 (ja) 2005-11-11 2006-10-19 微小構造体及び微小電気機械式装置の作製方法

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JP2005327538 2005-11-11
JP2005327538 2005-11-11
JP2006284910A JP4907297B2 (ja) 2005-11-11 2006-10-19 微小構造体及び微小電気機械式装置の作製方法

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JP2007152546A JP2007152546A (ja) 2007-06-21
JP2007152546A5 JP2007152546A5 (enExample) 2009-09-03
JP4907297B2 true JP4907297B2 (ja) 2012-03-28

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Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009078190A1 (ja) * 2007-12-17 2009-06-25 Toppan Printing Co., Ltd. パターン形成方法およびパターン形成体
JP5374077B2 (ja) 2008-06-16 2013-12-25 ローム株式会社 Ｍｅｍｓセンサ
JP2010098518A (ja) * 2008-10-16 2010-04-30 Rohm Co Ltd Ｍｅｍｓセンサの製造方法およびｍｅｍｓセンサ
JP2010251396A (ja) * 2009-04-13 2010-11-04 Toyota Central R&D Labs Inc 可動部分と配線路を備えている装置
JP2011005556A (ja) * 2009-06-23 2011-01-13 Semiconductor Energy Lab Co Ltd 半導体装置及びその作製方法
JP5918292B2 (ja) * 2014-03-26 2016-05-18 株式会社半導体エネルギー研究所 半導体装置
KR20170047321A (ko) 2014-08-28 2017-05-04 마이크로도스 테라퓨특스, 인코포레이티드 소형 압력 센서 활성화를 동반하는 주기적 건조 분말 흡입기

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3348786B2 (ja) * 2000-01-11 2002-11-20 日本電気株式会社 フォトマスク、パターン形成方法、半導体集積回路
JP2001277197A (ja) * 2000-03-30 2001-10-09 Seiko Epson Corp 微細構造体の製造方法
JP2002200599A (ja) * 2000-10-30 2002-07-16 Sony Corp 三次元構造体の作製方法
US7060522B2 (en) * 2001-11-07 2006-06-13 Xerox Corporation Membrane structures for micro-devices, micro-devices including same and methods for making same
JP2004012668A (ja) * 2002-06-05 2004-01-15 Nippon Telegr & Teleph Corp <Ntt> 光スイッチ装置及びその製造方法
WO2004037713A1 (en) * 2002-10-24 2004-05-06 Koninklijke Philips Electronics N.V. Method for manufacturing a micro-electromechanical device and micro-electromechanical device obtained therewith

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