JP4903987B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP4903987B2 JP4903987B2 JP2004079597A JP2004079597A JP4903987B2 JP 4903987 B2 JP4903987 B2 JP 4903987B2 JP 2004079597 A JP2004079597 A JP 2004079597A JP 2004079597 A JP2004079597 A JP 2004079597A JP 4903987 B2 JP4903987 B2 JP 4903987B2
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Description
また、本発明の半導体装置は、上記の方法により製造されたことを特徴とする。
本方法では、半導体装置を金型中に載置して、該金型と該半導体装置との間に供給した硬化性液状シリコーン組成物を所定の成形温度で圧縮成形することにより、半導体装置をシリコーン硬化物で封止する。このような金型を有する圧縮成形機としては、一般に使用されている圧縮成形機を用いることができ、半導体装置を挟持して、金型と半導体装置のキャビティに供給された硬化性液状シリコーン組成物を圧縮成形することのできる上型と下型、これらを加圧するためのクランプ、硬化性液状シリコーン組成物を加熱により硬化させるためのヒーター等を備えていればよい。このような圧縮成形機としては、特開平8−244064号公報、特開平11−77733号公報、あるいは特開2000−277551号公報に記載されている圧縮成形機が例示され、特に、装置が簡単であることから、特開2000−277551号公報により記載されている圧縮成形機であることが好ましい。
硬化性液状シリコーン組成物の室温(25℃)における粘度を、E型回転粘度計(株式会社トキメック社製、コーン:3°、28mmφ)により測定した。
硬化性液状シリコーン組成物を、キュラストメーター(オリエンテック社製のJSRキュラストメーターIII―NPS型)を用いて、各成形温度(70℃、120℃)における、トルク値(kgf・cm)と経過時間(分)を測定した。なお、測定は、硬化性液状シリコーン組成物5mlを下側ダイスに載せ、上側ダイスが閉まった時点を測定開始とした。なお、ゴム用R型ダイスを用い、振幅角度は3°、振動数は100回/分、トルクレンジを最小の10kgf・cmにして測定した。
硬化性液状シリコーン組成物を120℃で30kgf/cm2の荷重を掛けて5分間圧縮成形した後、さらに120℃のオーブン中で1時間加熱処理することによりシリコーン硬化物を作製した。このシリコーン硬化物の25℃における複素弾性率を、粘弾性測定機(せん断周波数:1Hz、歪み率:0.5%)により測定した。
[成形物外観]
シリコーン硬化物あるいはエポキシ樹脂硬化物で封止した半導体装置について、中心部の厚みと外周部の厚みの差が5%未満であるものを○、5%以上、10%未満である場合を△、10%以上である場合を×とした。
目視により、シリコーン硬化物あるいはエポキシ樹脂硬化物で封止した半導体装置の表面を観察し、ボイドがなく末端まで均一に充填されているものを○、少しでもボイドや未未充填部分があるものを×とした。
半導体装置を個片に切断する前の、シリコーン硬化物あるいはエポキシ樹脂硬化物で封止した回路基板の長辺側を固定した時の他端長辺側の高さを測定し、これを反りとして示した。
図3に示す半導体装置を作製した。すなわち、70mm×160mmサイズのBT樹脂製回路基板12(厚さ200μmのBT樹脂フィルムの片面に、厚さ17μmのエポキシ樹脂製接着剤層を介して厚さ18μmの銅箔が積層されており、この銅箔により回路パターンが形成され、この回路パターンのワイヤボンディングするための部分を除き、回路基板12の表面は感光性ソルダーマスクにより被覆されている。)に厚さ35μmのエポキシ樹脂製ダイボンド剤層を介して8mm×14mmサイズの半導体チップ10を接合した。次に、この半導体チップ10のバンプ(図示せず)と回路パターンとを電気的に接続するため48本の金製ボンディングワイヤによりワイヤボンディングした。この回路基板12には、合わせて54個の半導体チップが18個ずつ3ブロックに分けて実装されており、それぞれ回路パターンにワイヤーボンディングされている。
実施例1において、ヒドロシリル化反応硬化性液状シリコーンゴム組成物(A)の代わりにヒドロシリル化反応硬化性液状シリコーンゴム組成物(B)を用いた以外は実施例1と同様にして半導体装置を作製した。この半導体装置の特性を表2に示した。
実施例1において、ヒドロシリル化反応硬化性シリコーンゴム組成物(A)の代わりにヒドロシリル化反応硬化性シリコーンゴム組成物(C)を用い、70℃で35kgf/cm2の荷重をかけて15分間圧縮成形した以外は、実施例1と同様にして半導体装置を作製した。この半導体装置の特性を表2に示した。
比較例1において、ヒドロシリル化反応硬化性液状シリコーンゴム組成物(C)の代わりにヒドロシリル化反応硬化性液状シリコーンゴム組成物(D)を用いた以外は比較例1と同様にして半導体装置を作製した。この半導体装置の特性を表2に示した。
実施例1において、ヒドロシリル化反応硬化性シリコーンゴム組成物(A)の代わりにヒドロシリル化反応硬化性シリコーンゴム組成物(C)を用い、120℃で50kgf/cm2の荷重をかけて3分間圧縮成形した以外は、実施例1と同様にして半導体装置を作製した。この半導体装置の特性を表2に示した。
比較例3において、ヒドロシリル化反応硬化性液状シリコーンゴム組成物(C)の代わりにヒドロシリル化反応硬化性液状シリコーンゴム組成物(D)を用いた以外は比較例3と同様にして半導体装置を作製した。この半導体装置の特性を表2に示した。
12 回路基板
14 シリコーン硬化物
16 半導体装置
20 固定プラテン
22 下型ベース
23 下型
24 ヒータ
26 下クランプストッパ
30 可動プラテン
32 上型ベース
33 上型ホルダ
34 上型
34a キャビティ凹部
36 クランパ
36a、36b エア孔
37 スプリング
38 ヒータ
39 上クランプストッパ
40a、40b 剥離性フィルム
42a、42b 供給ロール
44a、44b 巻取りロール
46 ガイドローラ
48 静電除去装置
50 硬化性液状シリコーン組成物
70 シリコーン硬化物で封止した半導体装置
72 シリコーン硬化物
Claims (7)
- 半導体装置を金型中に載置して、該金型と該半導体装置との間に供給したヒドロシリル化反応硬化性液状シリコーン組成物を50℃〜150℃の成形温度で圧縮成形することにより、複素弾性率1GPa以下のシリコーン硬化物で封止した半導体装置を製造する方法であって、前記硬化性液状シリコーン組成物が、室温(25℃)で90Pa・s以下の粘度を有し、キュラストメーターで測定した、前記成形温度における測定直後から1kgf・cmのトルクに達するまでの時間が1分以上であり、かつ1kgf・cmのトルクから5kgf・cmのトルクに達するまでの時間が1分以内であることを特徴とする半導体装置の製造方法。
- 下型に半導体装置を載置して、上型と半導体装置との間に硬化性液状シリコーン組成物を供給した後、上型と下型とで半導体装置を挟持して前記硬化性液状シリコーン組成物を圧縮成形することを特徴とする、請求項1記載の半導体装置の製造方法。
- 少なくとも2つの半導体装置をシリコーン硬化物で封止した後、個片の半導体装置に切断することを特徴とする、請求項1記載の半導体装置の製造方法。
- 半導体装置が、回路基板上に半導体チップがボンディングワイヤにより電気的に接続されているものであることを特徴とする、請求項1記載の半導体装置の製造方法。
- 回路基板の半導体チップを搭載した面に硬化性液状シリコーン組成物を供給して、半導体チップおよび該チップのボンディングワイヤーとの接続部をシリコーン硬化物で封止したことを特徴とする、請求項4記載の半導体装置の製造方法。
- 金型の内面に剥離性フィルムが密着していることを特徴とする、請求項1記載の半導体装置の製造方法。
- 剥離性フィルムがエア吸引により金型の内面に密着していることを特徴とする、請求項6記載の半導体装置の製造方法。
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JP2004079597A JP4903987B2 (ja) | 2004-03-19 | 2004-03-19 | 半導体装置の製造方法 |
TW094106803A TWI383429B (zh) | 2004-03-19 | 2005-03-07 | 半導體裝置及其製法 |
US10/599,041 US8262970B2 (en) | 2004-03-19 | 2005-03-08 | Semiconductor device and method of manufacturing thereof |
PCT/JP2005/004410 WO2005091361A1 (en) | 2004-03-19 | 2005-03-08 | Semiconductor device and method of manufacturing thereof |
EP05720681A EP1730775B1 (en) | 2004-03-19 | 2005-03-08 | Semiconductor device and method of manufacturing thereof |
CNB200580008837XA CN100539092C (zh) | 2004-03-19 | 2005-03-08 | 半导体器件及其制造方法 |
KR1020067019279A KR101168861B1 (ko) | 2004-03-19 | 2005-03-08 | 반도체 장치 및 이의 제조방법 |
MYPI20051177A MY146873A (en) | 2004-03-19 | 2005-03-18 | Semiconductor device and method of manufacturing therof. |
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JP4931366B2 (ja) | 2005-04-27 | 2012-05-16 | 東レ・ダウコーニング株式会社 | 硬化性シリコーン組成物および電子部品 |
JP5207591B2 (ja) | 2006-02-23 | 2013-06-12 | 東レ・ダウコーニング株式会社 | 半導体装置の製造方法および半導体装置 |
JP5285846B2 (ja) | 2006-09-11 | 2013-09-11 | 東レ・ダウコーニング株式会社 | 硬化性シリコーン組成物および電子部品 |
CN102290170A (zh) * | 2010-06-17 | 2011-12-21 | 台湾双羽电机股份有限公司 | 薄型电阻及其制造方法 |
KR20150022990A (ko) * | 2012-06-08 | 2015-03-04 | 히타치가세이가부시끼가이샤 | 반도체 장치의 제조 방법 |
US8997342B2 (en) * | 2012-10-15 | 2015-04-07 | Zhuhai Advanced Chip Carriers & Electronic Substrate Solutions Technologies Co. Ltd. | Method of fabrication, a multilayer electronic structure and structures in accordance with the method |
JP2014082284A (ja) | 2012-10-15 | 2014-05-08 | Dow Corning Toray Co Ltd | 凸状硬化物及び基材を備える一体化物の製造方法 |
US9470395B2 (en) | 2013-03-15 | 2016-10-18 | Abl Ip Holding Llc | Optic for a light source |
CA2911523C (en) | 2013-05-10 | 2018-10-02 | Abl Ip Holding Llc | Silicone optics |
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JP3516764B2 (ja) | 1995-03-08 | 2004-04-05 | アピックヤマダ株式会社 | リリースフィルムを用いる樹脂モールド装置及び樹脂モールド方法 |
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US6080605A (en) * | 1998-10-06 | 2000-06-27 | Tessera, Inc. | Methods of encapsulating a semiconductor chip using a settable encapsulant |
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WO2005091361A1 (en) | 2005-09-29 |
TWI383429B (zh) | 2013-01-21 |
KR20060123643A (ko) | 2006-12-01 |
MY146873A (en) | 2012-10-15 |
CN100539092C (zh) | 2009-09-09 |
KR101168861B1 (ko) | 2012-07-30 |
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