JP4895518B2 - 基板保持装置及び基板の保持方法 - Google Patents

基板保持装置及び基板の保持方法 Download PDF

Info

Publication number
JP4895518B2
JP4895518B2 JP2005081608A JP2005081608A JP4895518B2 JP 4895518 B2 JP4895518 B2 JP 4895518B2 JP 2005081608 A JP2005081608 A JP 2005081608A JP 2005081608 A JP2005081608 A JP 2005081608A JP 4895518 B2 JP4895518 B2 JP 4895518B2
Authority
JP
Japan
Prior art keywords
substrate
suction
glass substrate
suction pad
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005081608A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006269498A5 (enrdf_load_stackoverflow
JP2006269498A (ja
Inventor
洋 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2005081608A priority Critical patent/JP4895518B2/ja
Publication of JP2006269498A publication Critical patent/JP2006269498A/ja
Publication of JP2006269498A5 publication Critical patent/JP2006269498A5/ja
Application granted granted Critical
Publication of JP4895518B2 publication Critical patent/JP4895518B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2005081608A 2005-03-22 2005-03-22 基板保持装置及び基板の保持方法 Expired - Fee Related JP4895518B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005081608A JP4895518B2 (ja) 2005-03-22 2005-03-22 基板保持装置及び基板の保持方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005081608A JP4895518B2 (ja) 2005-03-22 2005-03-22 基板保持装置及び基板の保持方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010117895A Division JP2010251769A (ja) 2010-05-24 2010-05-24 基板保持装置及び基板の保持方法

Publications (3)

Publication Number Publication Date
JP2006269498A JP2006269498A (ja) 2006-10-05
JP2006269498A5 JP2006269498A5 (enrdf_load_stackoverflow) 2008-05-01
JP4895518B2 true JP4895518B2 (ja) 2012-03-14

Family

ID=37205179

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005081608A Expired - Fee Related JP4895518B2 (ja) 2005-03-22 2005-03-22 基板保持装置及び基板の保持方法

Country Status (1)

Country Link
JP (1) JP4895518B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI776228B (zh) * 2019-12-27 2022-09-01 日商川崎重工業股份有限公司 基板吸引保持構造及基板搬送機器人

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5084356B2 (ja) * 2007-06-11 2012-11-28 Ｎｓｋテクノロジー株式会社 露光装置用基板搬送機構及びそれを用いた基板位置調整方法
JP5279207B2 (ja) * 2007-06-11 2013-09-04 Ｎｓｋテクノロジー株式会社 露光装置用基板搬送機構
KR100920934B1 (ko) 2007-07-10 2009-10-12 한미반도체 주식회사 반도체 패키지 안착용 테이블
DE102007052183A1 (de) * 2007-10-31 2009-06-25 Grenzebach Maschinenbau Gmbh Vorrichtung und Verfahren zum Ausrichten stoßempfindlicher Glasplatten in Reinsträumen
JP5081710B2 (ja) * 2008-04-28 2012-11-28 株式会社アルバック 成膜装置
JP2010040788A (ja) * 2008-08-05 2010-02-18 Olympus Corp リフト装置、及び、基板検査装置
JP5550882B2 (ja) * 2009-10-19 2014-07-16 東京応化工業株式会社 塗布装置
JP4896236B2 (ja) * 2010-01-21 2012-03-14 東京エレクトロン株式会社 基板搬送装置及び基板搬送方法
TWI462215B (zh) * 2010-03-29 2014-11-21 Dainippon Screen Mfg 基板處理裝置、轉換方法、及轉移方法
JP5254269B2 (ja) * 2010-03-29 2013-08-07 大日本スクリーン製造株式会社 基板処理装置および移載方法
JP2012076877A (ja) * 2010-10-01 2012-04-19 Nitto Denko Corp ワーク搬送方法およびワーク搬送装置
JP2012146783A (ja) * 2011-01-11 2012-08-02 Murata Mfg Co Ltd 基板吸着装置
US10381256B2 (en) * 2015-03-12 2019-08-13 Kla-Tencor Corporation Apparatus and method for chucking warped wafers
JP6874314B2 (ja) * 2016-09-30 2021-05-19 株式会社ニコン 物体保持装置、露光装置、フラットパネルディスプレイの製造方法、及びデバイス製造方法
JP6842948B2 (ja) * 2017-02-24 2021-03-17 リンテック株式会社 位置決め装置および位置決め方法
CN108426897B (zh) * 2018-05-07 2021-03-12 芜湖良匠机械制造有限公司 一种玻璃基板缺陷检测装置
JP6568986B1 (ja) * 2018-06-28 2019-08-28 平田機工株式会社 アライメント装置、半導体ウエハ処理装置、およびアライメント方法
CN114641827B (zh) * 2019-11-12 2023-03-07 松下知识产权经营株式会社 定位装置
CN115258689B (zh) * 2022-08-16 2025-08-15 合肥工业大学 一种气浮支承的气孔结构
CN118486634B (zh) * 2024-07-11 2024-10-18 迈为技术(珠海)有限公司 用于晶圆加工的气浮台

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI226303B (en) * 2002-04-18 2005-01-11 Olympus Corp Substrate carrying device
JP4175988B2 (ja) * 2002-10-25 2008-11-05 東京エレクトロン株式会社 基板アライメント装置及び基板処理装置及び基板搬送装置
CN1697768B (zh) * 2003-04-30 2011-03-30 奥林巴斯株式会社 基板上浮装置
TWI327986B (en) * 2003-05-06 2010-08-01 Olympus Corp Substrate absorption device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI776228B (zh) * 2019-12-27 2022-09-01 日商川崎重工業股份有限公司 基板吸引保持構造及基板搬送機器人

Also Published As

Publication number Publication date
JP2006269498A (ja) 2006-10-05

Similar Documents

Publication Publication Date Title
JP4895518B2 (ja) 基板保持装置及び基板の保持方法
JP2010251769A (ja) 基板保持装置及び基板の保持方法
JP4418428B2 (ja) 基板浮上装置
JP4724562B2 (ja) 真空吸着ヘッド、その真空吸着ヘッドを用いた真空吸着装置及びテーブル
JP5056339B2 (ja) 基板搬送装置用基板把持機構
JP2010076929A (ja) 基板搬送アーム
CN102763209A (zh) 搬送装置、搬送方法、曝光装置、以及元件制造方法
JP4661716B2 (ja) 基板貼合装置
KR20120046084A (ko) 기판 반송용 핸드 및 그것을 구비한 기판 반송 장치
JP2008063020A (ja) 基板搬送装置およびそれを用いた基板検査システム
KR20140098008A (ko) 패턴 형성 장치 및 패턴 형성 방법
JP2008302487A (ja) 基板吸着装置及び基板搬送装置並びに外観検査装置
TWI743614B (zh) 基板處理裝置及基板處理方法
KR102668030B1 (ko) 링 프레임의 유지 기구
WO2017163887A1 (ja) 基板浮上搬送装置
JP2008159784A (ja) ステージ装置
JP4842748B2 (ja) 基板搬送システム
JP2012038874A (ja) 液晶露光装置
TW201827934A (zh) 工件台基板交接裝置與預對準方法
JP2018152447A (ja) 基板浮上搬送装置
JP6595276B2 (ja) 基板処理装置および基板処理方法
JP4704756B2 (ja) 基板搬送装置
KR101793021B1 (ko) 기판 반송 장치
JP5888891B2 (ja) 基板搬送装置
JP2012023104A (ja) 基板載置装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080317

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080317

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20100318

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100323

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100524

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20100525

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20101109

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110209

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20110210

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20110221

A912 Re-examination (zenchi) completed and case transferred to appeal board

Free format text: JAPANESE INTERMEDIATE CODE: A912

Effective date: 20110415

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20110712

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20111031

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20111101

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20111220

R151 Written notification of patent or utility model registration

Ref document number: 4895518

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150106

Year of fee payment: 3

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees