JP4881575B2 - 基板の搬送装置 - Google Patents

基板の搬送装置 Download PDF

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Publication number
JP4881575B2
JP4881575B2 JP2005132907A JP2005132907A JP4881575B2 JP 4881575 B2 JP4881575 B2 JP 4881575B2 JP 2005132907 A JP2005132907 A JP 2005132907A JP 2005132907 A JP2005132907 A JP 2005132907A JP 4881575 B2 JP4881575 B2 JP 4881575B2
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JP
Japan
Prior art keywords
substrate
transport
shaft
upper roller
roller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005132907A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006306596A (ja
Inventor
尊彦 和歌月
幸伸 西部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Priority to JP2005132907A priority Critical patent/JP4881575B2/ja
Priority to TW095114207A priority patent/TWI376344B/zh
Priority to KR1020060036741A priority patent/KR101232695B1/ko
Priority to CN2006101006091A priority patent/CN1868839B/zh
Publication of JP2006306596A publication Critical patent/JP2006306596A/ja
Application granted granted Critical
Publication of JP4881575B2 publication Critical patent/JP4881575B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G60/00—Simultaneously or alternatively stacking and de-stacking of articles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
  • Liquid Crystal (AREA)
JP2005132907A 2005-04-28 2005-04-28 基板の搬送装置 Expired - Fee Related JP4881575B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2005132907A JP4881575B2 (ja) 2005-04-28 2005-04-28 基板の搬送装置
TW095114207A TWI376344B (en) 2005-04-28 2006-04-20 Apparatus for carrying substrates
KR1020060036741A KR101232695B1 (ko) 2005-04-28 2006-04-24 기판 반송 장치
CN2006101006091A CN1868839B (zh) 2005-04-28 2006-04-28 基板输送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005132907A JP4881575B2 (ja) 2005-04-28 2005-04-28 基板の搬送装置

Publications (2)

Publication Number Publication Date
JP2006306596A JP2006306596A (ja) 2006-11-09
JP4881575B2 true JP4881575B2 (ja) 2012-02-22

Family

ID=37442649

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005132907A Expired - Fee Related JP4881575B2 (ja) 2005-04-28 2005-04-28 基板の搬送装置

Country Status (4)

Country Link
JP (1) JP4881575B2 (zh)
KR (1) KR101232695B1 (zh)
CN (1) CN1868839B (zh)
TW (1) TWI376344B (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101177201B (zh) * 2007-12-12 2012-07-25 友达光电股份有限公司 传动装置
CN101875441B (zh) * 2009-04-28 2013-07-24 株式会社太星技研 平板玻璃用闸门式输送机
JP5502443B2 (ja) * 2009-12-05 2014-05-28 芝浦メカトロニクス株式会社 基板の搬送装置
JP6320849B2 (ja) * 2014-06-04 2018-05-09 芝浦メカトロニクス株式会社 基板搬送装置および基板処理装置
KR102351697B1 (ko) * 2017-09-14 2022-01-17 주식회사 디엠에스 기판처리장치
CN108170089A (zh) * 2018-01-29 2018-06-15 鹤山市泰利诺电子有限公司 一种智能控制pcb输送装置
CN110970337A (zh) * 2018-09-28 2020-04-07 芝浦机械电子株式会社 基板输送装置以及基板处理装置
JP7332391B2 (ja) * 2018-09-28 2023-08-23 芝浦メカトロニクス株式会社 基板搬送装置および基板処理装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2043969U (zh) * 1987-01-09 1989-09-06 机械工业部第四设计研究院 具有密封条的双带垂直输送机
JPH09129702A (ja) * 1995-11-01 1997-05-16 Dainippon Screen Mfg Co Ltd 基板表面処理装置
JP4079579B2 (ja) * 2000-06-23 2008-04-23 Ｎｅｃ液晶テクノロジー株式会社 ウェット処理装置
JP3960087B2 (ja) * 2001-05-30 2007-08-15 東京エレクトロン株式会社 搬送装置
JP2004196482A (ja) * 2002-12-18 2004-07-15 Maruyasu Kikai Kk ローラコンベア
JP4219195B2 (ja) * 2003-03-14 2009-02-04 大日本スクリーン製造株式会社 基板搬送装置およびそれを備えた基板処理装置
CN1326757C (zh) * 2003-07-11 2007-07-18 友达光电股份有限公司 传送机构及其湿式处理设备

Also Published As

Publication number Publication date
TWI376344B (en) 2012-11-11
KR101232695B1 (ko) 2013-02-13
CN1868839A (zh) 2006-11-29
TW200704575A (en) 2007-02-01
CN1868839B (zh) 2012-04-04
KR20060113430A (ko) 2006-11-02
JP2006306596A (ja) 2006-11-09

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