JP4881575B2 - 基板の搬送装置 - Google Patents
基板の搬送装置 Download PDFInfo
- Publication number
- JP4881575B2 JP4881575B2 JP2005132907A JP2005132907A JP4881575B2 JP 4881575 B2 JP4881575 B2 JP 4881575B2 JP 2005132907 A JP2005132907 A JP 2005132907A JP 2005132907 A JP2005132907 A JP 2005132907A JP 4881575 B2 JP4881575 B2 JP 4881575B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- transport
- shaft
- upper roller
- roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G60/00—Simultaneously or alternatively stacking and de-stacking of articles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
- Liquid Crystal (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005132907A JP4881575B2 (ja) | 2005-04-28 | 2005-04-28 | 基板の搬送装置 |
TW095114207A TWI376344B (en) | 2005-04-28 | 2006-04-20 | Apparatus for carrying substrates |
KR1020060036741A KR101232695B1 (ko) | 2005-04-28 | 2006-04-24 | 기판 반송 장치 |
CN2006101006091A CN1868839B (zh) | 2005-04-28 | 2006-04-28 | 基板输送装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005132907A JP4881575B2 (ja) | 2005-04-28 | 2005-04-28 | 基板の搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006306596A JP2006306596A (ja) | 2006-11-09 |
JP4881575B2 true JP4881575B2 (ja) | 2012-02-22 |
Family
ID=37442649
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005132907A Expired - Fee Related JP4881575B2 (ja) | 2005-04-28 | 2005-04-28 | 基板の搬送装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4881575B2 (zh) |
KR (1) | KR101232695B1 (zh) |
CN (1) | CN1868839B (zh) |
TW (1) | TWI376344B (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101177201B (zh) * | 2007-12-12 | 2012-07-25 | 友达光电股份有限公司 | 传动装置 |
CN101875441B (zh) * | 2009-04-28 | 2013-07-24 | 株式会社太星技研 | 平板玻璃用闸门式输送机 |
JP5502443B2 (ja) * | 2009-12-05 | 2014-05-28 | 芝浦メカトロニクス株式会社 | 基板の搬送装置 |
JP6320849B2 (ja) * | 2014-06-04 | 2018-05-09 | 芝浦メカトロニクス株式会社 | 基板搬送装置および基板処理装置 |
KR102351697B1 (ko) * | 2017-09-14 | 2022-01-17 | 주식회사 디엠에스 | 기판처리장치 |
CN108170089A (zh) * | 2018-01-29 | 2018-06-15 | 鹤山市泰利诺电子有限公司 | 一种智能控制pcb输送装置 |
CN110970337A (zh) * | 2018-09-28 | 2020-04-07 | 芝浦机械电子株式会社 | 基板输送装置以及基板处理装置 |
JP7332391B2 (ja) * | 2018-09-28 | 2023-08-23 | 芝浦メカトロニクス株式会社 | 基板搬送装置および基板処理装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2043969U (zh) * | 1987-01-09 | 1989-09-06 | 机械工业部第四设计研究院 | 具有密封条的双带垂直输送机 |
JPH09129702A (ja) * | 1995-11-01 | 1997-05-16 | Dainippon Screen Mfg Co Ltd | 基板表面処理装置 |
JP4079579B2 (ja) * | 2000-06-23 | 2008-04-23 | Nec液晶テクノロジー株式会社 | ウェット処理装置 |
JP3960087B2 (ja) * | 2001-05-30 | 2007-08-15 | 東京エレクトロン株式会社 | 搬送装置 |
JP2004196482A (ja) * | 2002-12-18 | 2004-07-15 | Maruyasu Kikai Kk | ローラコンベア |
JP4219195B2 (ja) * | 2003-03-14 | 2009-02-04 | 大日本スクリーン製造株式会社 | 基板搬送装置およびそれを備えた基板処理装置 |
CN1326757C (zh) * | 2003-07-11 | 2007-07-18 | 友达光电股份有限公司 | 传送机构及其湿式处理设备 |
-
2005
- 2005-04-28 JP JP2005132907A patent/JP4881575B2/ja not_active Expired - Fee Related
-
2006
- 2006-04-20 TW TW095114207A patent/TWI376344B/zh not_active IP Right Cessation
- 2006-04-24 KR KR1020060036741A patent/KR101232695B1/ko active IP Right Grant
- 2006-04-28 CN CN2006101006091A patent/CN1868839B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
TWI376344B (en) | 2012-11-11 |
KR101232695B1 (ko) | 2013-02-13 |
CN1868839A (zh) | 2006-11-29 |
TW200704575A (en) | 2007-02-01 |
CN1868839B (zh) | 2012-04-04 |
KR20060113430A (ko) | 2006-11-02 |
JP2006306596A (ja) | 2006-11-09 |
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