TW200704575A - Apparatus for carrying substrates - Google Patents

Apparatus for carrying substrates

Info

Publication number
TW200704575A
TW200704575A TW095114207A TW95114207A TW200704575A TW 200704575 A TW200704575 A TW 200704575A TW 095114207 A TW095114207 A TW 095114207A TW 95114207 A TW95114207 A TW 95114207A TW 200704575 A TW200704575 A TW 200704575A
Authority
TW
Taiwan
Prior art keywords
conveying
over
substrate
roller
shaft
Prior art date
Application number
TW095114207A
Other languages
Chinese (zh)
Other versions
TWI376344B (en
Inventor
Takahiko Wakatsuki
Yukinobu Nishibe
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Publication of TW200704575A publication Critical patent/TW200704575A/en
Application granted granted Critical
Publication of TWI376344B publication Critical patent/TWI376344B/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G60/00—Simultaneously or alternatively stacking and de-stacking of articles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Nonlinear Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
  • Liquid Crystal (AREA)

Abstract

To provide a conveying device capable of holding an upper and a lower surfaces of a substrate in both cross directional ends thereof with an end support roller and an over-placed roller at the same force. This conveying device is provided with a plurality of conveying shafts 3 arranged with the predetermined interval, while making the axes thereof cross the substrate conveying direction, a plurality of conveying rollers 21 provided in the conveying shafts to support lower surfaces of parts of the substrate except the cross directional both ends, an end support roller 22 for supporting a lower surface of the cross directional both ends of the substrate, a pair of over-placed roller shafts 25 arranged over the one end and the other end of the conveying shaft so that the axes thereof are arranged in parallel with the conveying shaft and supported freely to turn in one end thereof corresponding to both the ends of the conveying shaft, a pair of over-placed rollers 27 provided in the other end of an over-placed roller shaft to push the top surface of cross directional ends of the substrate, and a weight 29 provided in the over-placed roller shaft to adjust pushing force of the over-placed roller for pushing the top surface of the substrate.
TW095114207A 2005-04-28 2006-04-20 Apparatus for carrying substrates TWI376344B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005132907A JP4881575B2 (en) 2005-04-28 2005-04-28 Substrate transfer device

Publications (2)

Publication Number Publication Date
TW200704575A true TW200704575A (en) 2007-02-01
TWI376344B TWI376344B (en) 2012-11-11

Family

ID=37442649

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095114207A TWI376344B (en) 2005-04-28 2006-04-20 Apparatus for carrying substrates

Country Status (4)

Country Link
JP (1) JP4881575B2 (en)
KR (1) KR101232695B1 (en)
CN (1) CN1868839B (en)
TW (1) TWI376344B (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101177201B (en) * 2007-12-12 2012-07-25 友达光电股份有限公司 Transmission device
CN101875441B (en) * 2009-04-28 2013-07-24 株式会社太星技研 Gate-type conveyor for flat glass
JP5502443B2 (en) * 2009-12-05 2014-05-28 芝浦メカトロニクス株式会社 Substrate transfer device
JP6320849B2 (en) * 2014-06-04 2018-05-09 芝浦メカトロニクス株式会社 Substrate transfer apparatus and substrate processing apparatus
KR102351697B1 (en) * 2017-09-14 2022-01-17 주식회사 디엠에스 Apparatus for treating substrate
CN108170089A (en) * 2018-01-29 2018-06-15 鹤山市泰利诺电子有限公司 A kind of intelligent control PCB conveying devices
JP7332391B2 (en) * 2018-09-28 2023-08-23 芝浦メカトロニクス株式会社 Substrate transfer device and substrate processing device
CN110970337A (en) * 2018-09-28 2020-04-07 芝浦机械电子株式会社 Substrate conveying device and substrate processing device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2043969U (en) * 1987-01-09 1989-09-06 机械工业部第四设计研究院 Double belt vertical conveyer with sealing strip
JPH09129702A (en) * 1995-11-01 1997-05-16 Dainippon Screen Mfg Co Ltd Substrate-surface processing apparatus
JP4079579B2 (en) * 2000-06-23 2008-04-23 Ｎｅｃ液晶テクノロジー株式会社 Wet processing equipment
JP3960087B2 (en) * 2001-05-30 2007-08-15 東京エレクトロン株式会社 Transport device
JP2004196482A (en) * 2002-12-18 2004-07-15 Maruyasu Kikai Kk Roller conveyor
JP4219195B2 (en) * 2003-03-14 2009-02-04 大日本スクリーン製造株式会社 Substrate transport apparatus and substrate processing apparatus having the same
CN1326757C (en) * 2003-07-11 2007-07-18 友达光电股份有限公司 Transport mechanism and wet type processing device thereof

Also Published As

Publication number Publication date
JP2006306596A (en) 2006-11-09
CN1868839A (en) 2006-11-29
KR101232695B1 (en) 2013-02-13
JP4881575B2 (en) 2012-02-22
TWI376344B (en) 2012-11-11
KR20060113430A (en) 2006-11-02
CN1868839B (en) 2012-04-04

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees