JP4851075B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP4851075B2 JP4851075B2 JP2004246783A JP2004246783A JP4851075B2 JP 4851075 B2 JP4851075 B2 JP 4851075B2 JP 2004246783 A JP2004246783 A JP 2004246783A JP 2004246783 A JP2004246783 A JP 2004246783A JP 4851075 B2 JP4851075 B2 JP 4851075B2
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- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004246783A JP4851075B2 (ja) | 2004-08-26 | 2004-08-26 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004246783A JP4851075B2 (ja) | 2004-08-26 | 2004-08-26 | 半導体装置の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006066606A JP2006066606A (ja) | 2006-03-09 |
| JP2006066606A5 JP2006066606A5 (cg-RX-API-DMAC7.html) | 2006-07-20 |
| JP4851075B2 true JP4851075B2 (ja) | 2012-01-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004246783A Expired - Fee Related JP4851075B2 (ja) | 2004-08-26 | 2004-08-26 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4851075B2 (cg-RX-API-DMAC7.html) |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4595144B2 (ja) * | 1999-09-21 | 2010-12-08 | 株式会社デンソー | 炭化珪素半導体装置及びその製造方法 |
| JP4924781B2 (ja) * | 1999-10-13 | 2012-04-25 | 株式会社豊田中央研究所 | 縦型半導体装置 |
| JP4528460B2 (ja) * | 2000-06-30 | 2010-08-18 | 株式会社東芝 | 半導体素子 |
| JP3539417B2 (ja) * | 2001-11-14 | 2004-07-07 | 日産自動車株式会社 | 炭化珪素半導体装置及びその製造方法 |
| JP3914852B2 (ja) * | 2002-04-09 | 2007-05-16 | 新電元工業株式会社 | ダイオード素子とトランジスタ素子 |
| JP4133565B2 (ja) * | 2002-06-05 | 2008-08-13 | 新電元工業株式会社 | トランジスタとその製造方法、及びダイオード |
| JP3966151B2 (ja) * | 2002-10-10 | 2007-08-29 | 富士電機デバイステクノロジー株式会社 | 半導体素子 |
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2004
- 2004-08-26 JP JP2004246783A patent/JP4851075B2/ja not_active Expired - Fee Related
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| Publication number | Publication date |
|---|---|
| JP2006066606A (ja) | 2006-03-09 |
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