JP4822982B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP4822982B2 JP4822982B2 JP2006224367A JP2006224367A JP4822982B2 JP 4822982 B2 JP4822982 B2 JP 4822982B2 JP 2006224367 A JP2006224367 A JP 2006224367A JP 2006224367 A JP2006224367 A JP 2006224367A JP 4822982 B2 JP4822982 B2 JP 4822982B2
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- 239000004065 semiconductor Substances 0.000 title claims description 106
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 238000009792 diffusion process Methods 0.000 claims description 96
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 70
- 229910021332 silicide Inorganic materials 0.000 claims description 69
- 239000000758 substrate Substances 0.000 claims description 32
- 238000002955 isolation Methods 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 13
- 238000000638 solvent extraction Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 134
- 239000002019 doping agent Substances 0.000 description 21
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 17
- 229910052710 silicon Inorganic materials 0.000 description 17
- 239000010703 silicon Substances 0.000 description 17
- 239000002184 metal Substances 0.000 description 14
- 229910052751 metal Inorganic materials 0.000 description 14
- 238000005468 ion implantation Methods 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000001020 plasma etching Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000003071 parasitic effect Effects 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
- H01L21/28518—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table the conductive layers comprising silicides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823418—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the source or drain structures, e.g. specific source or drain implants or silicided source or drain structures or raised source or drain structures
- H01L21/823425—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the source or drain structures, e.g. specific source or drain implants or silicided source or drain structures or raised source or drain structures manufacturing common source or drain regions between a plurality of conductor-insulator-semiconductor structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823814—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the source or drain structures, e.g. specific source or drain implants or silicided source or drain structures or raised source or drain structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/665—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using self aligned silicidation, i.e. salicide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/6656—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using multiple spacer layers, e.g. multiple sidewall spacers
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Electrodes Of Semiconductors (AREA)
- Element Separation (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Description
Claims (3)
- 第1導電型の半導体基板表面を第1の半導体領域及び第2の半導体領域に区画し、その上部が前記半導体基板から突き出している素子分離を形成する工程と、
前記第1の半導体領域の前記半導体基板上に第1の絶縁膜を介して複数の第1のゲート電極を形成し、前記第2の半導体領域の前記半導体基板上に複数の第2の絶縁膜を介して第2のゲート電極を形成する工程であって、前記複数の第1のゲート電極間の間隔を前記複数の第2のゲート電極間の間隔より狭く形成する工程と、
前記第1のゲート電極を挟んで前記第1の半導体領域の前記半導体基板中に、第1の接合深さを有する第2導電型の第1の拡散層を形成し、前記第2のゲート電極を挟んで前記第2の半導体領域の前記半導体基板中に、前記第1の接合深さをよりも深い第2の接合深さを有する第2導電型の第2の拡散層を形成する工程と、
前記第1及び第2のゲート電極の側面にそれぞれ第1の側壁絶縁膜を形成する工程と、
前記第1のゲート電極及び前記第1の側壁絶縁膜を挟んで前記第1の半導体領域の前記半導体基板中に、前記第1の接合深さよりも深い第3の接合深さを有する第2導電型の第3の拡散層を形成し、前記第2のゲート電極及び前記第1の側壁絶縁膜を挟んで前記第2の半導体領域の前記半導体基板中に、前記第2及び第3の接合深さよりも深い第4の接合深さを有する第2導電型の第4の拡散層を形成する工程と、
少なくとも前記第1の半導体領域において前記第1の側壁絶縁膜及び前記素子分離のそれぞれの側面に第2の側壁絶縁膜を形成する工程と、
前記第1のゲート電極及び前記第1及び第2の側壁絶縁膜をマスクとして前記第3の拡散層中に第1の厚さを有する第1のシリサイド層を形成し、少なくとも前記第2のゲート電極及び前記第1の側壁絶縁膜をマスクとして前記第4の拡散層中に前記第1の厚さよりも厚い第2の厚さを有する第2のシリサイド層を形成する工程と
を具備することを特徴とする半導体装置の製造方法。 - 前記第1のシリサイド層を形成する工程は、前記第3の拡散層の接合界面と前記第1のシリサイド層との下面との距離を、70nm以上に形成するものであることを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記複数の第1のゲート電極間の間隔は、0.4μm以下に形成するものであることを特徴とする請求項1若しくは2に記載の半導体装置の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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JP2006224367A JP4822982B2 (ja) | 2006-08-21 | 2006-08-21 | 半導体装置の製造方法 |
US11/889,576 US7723231B2 (en) | 2006-08-21 | 2007-08-14 | Semiconductor device and method of fabricating the same |
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JP2006224367A JP4822982B2 (ja) | 2006-08-21 | 2006-08-21 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
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JP2008047824A JP2008047824A (ja) | 2008-02-28 |
JP4822982B2 true JP4822982B2 (ja) | 2011-11-24 |
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JP2006224367A Expired - Fee Related JP4822982B2 (ja) | 2006-08-21 | 2006-08-21 | 半導体装置の製造方法 |
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US (1) | US7723231B2 (ja) |
JP (1) | JP4822982B2 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4822982B2 (ja) * | 2006-08-21 | 2011-11-24 | 株式会社東芝 | 半導体装置の製造方法 |
JP5324849B2 (ja) * | 2008-07-18 | 2013-10-23 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
JP5463811B2 (ja) * | 2009-09-09 | 2014-04-09 | 富士通セミコンダクター株式会社 | 半導体装置の製造方法 |
TWI471946B (zh) * | 2010-11-17 | 2015-02-01 | Innolux Corp | 薄膜電晶體 |
JP6509673B2 (ja) * | 2015-08-10 | 2019-05-08 | 株式会社東芝 | 半導体装置 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0227736A (ja) * | 1988-06-29 | 1990-01-30 | Ind Technol Res Inst | 半導体装置及びその製法 |
JPH07273330A (ja) * | 1994-03-31 | 1995-10-20 | Toshiba Corp | 半導体装置及びその製造方法 |
JPH09172063A (ja) * | 1995-12-19 | 1997-06-30 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
US6060387A (en) * | 1995-11-20 | 2000-05-09 | Compaq Computer Corporation | Transistor fabrication process in which a contact metallization is formed with different silicide thickness over gate interconnect material and transistor source/drain regions |
JPH09199720A (ja) * | 1996-01-22 | 1997-07-31 | Oki Electric Ind Co Ltd | Mos型半導体装置とその製造方法 |
JP3064943B2 (ja) * | 1997-02-28 | 2000-07-12 | 日本電気株式会社 | 半導体装置の製造方法 |
JPH11345966A (ja) * | 1998-06-01 | 1999-12-14 | Denso Corp | 半導体装置及びその製造方法 |
TW429411B (en) | 1998-12-21 | 2001-04-11 | Toshiba Corp | Semiconductor device and its manufacture |
JP3400737B2 (ja) | 1999-03-18 | 2003-04-28 | 松下電器産業株式会社 | 半導体装置の製造方法 |
US6451693B1 (en) * | 2000-10-05 | 2002-09-17 | Advanced Micro Device, Inc. | Double silicide formation in polysicon gate without silicide in source/drain extensions |
US6657244B1 (en) * | 2002-06-28 | 2003-12-02 | International Business Machines Corporation | Structure and method to reduce silicon substrate consumption and improve gate sheet resistance during silicide formation |
JP2004072039A (ja) * | 2002-08-09 | 2004-03-04 | Renesas Technology Corp | 半導体装置およびその製造方法 |
JP2004274025A (ja) * | 2003-02-21 | 2004-09-30 | Renesas Technology Corp | 半導体装置及び半導体装置の製造方法 |
JP4308625B2 (ja) * | 2003-11-07 | 2009-08-05 | パナソニック株式会社 | メモリ混載半導体装置及びその製造方法 |
JP4415177B2 (ja) * | 2003-12-10 | 2010-02-17 | ソニー株式会社 | 半導体装置の製造方法 |
KR100607798B1 (ko) * | 2003-12-31 | 2006-08-02 | 동부일렉트로닉스 주식회사 | 반도체 소자의 실리사이드 형성방법 |
FR2881575B1 (fr) * | 2005-01-28 | 2007-06-01 | St Microelectronics Crolles 2 | Transistor mos a grille totalement siliciuree |
US7622387B2 (en) * | 2005-08-29 | 2009-11-24 | Freescale Semiconductor, Inc. | Gate electrode silicidation process |
KR100642648B1 (ko) * | 2005-09-13 | 2006-11-10 | 삼성전자주식회사 | 실리사이드막들을 갖는 콘택 구조체, 이를 채택하는반도체소자, 및 이를 제조하는 방법들 |
JP4822982B2 (ja) * | 2006-08-21 | 2011-11-24 | 株式会社東芝 | 半導体装置の製造方法 |
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- 2006-08-21 JP JP2006224367A patent/JP4822982B2/ja not_active Expired - Fee Related
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US7723231B2 (en) | 2010-05-25 |
JP2008047824A (ja) | 2008-02-28 |
US20080044991A1 (en) | 2008-02-21 |
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