JP2006202860A - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 61
- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 229910052785 arsenic Inorganic materials 0.000 claims abstract description 67
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims abstract description 63
- 229910021332 silicide Inorganic materials 0.000 claims abstract description 46
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims abstract description 45
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 19
- 239000010703 silicon Substances 0.000 claims abstract description 15
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 47
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 45
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 39
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 39
- 230000015572 biosynthetic process Effects 0.000 claims description 20
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 14
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 14
- 229920005591 polysilicon Polymers 0.000 claims description 14
- 239000012535 impurity Substances 0.000 claims description 12
- 238000000151 deposition Methods 0.000 claims description 10
- 150000002500 ions Chemical class 0.000 claims description 7
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 6
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 6
- -1 arsenic ions Chemical class 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 4
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000005468 ion implantation Methods 0.000 abstract description 22
- 150000003376 silicon Chemical class 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 81
- 238000009792 diffusion process Methods 0.000 description 56
- 238000000034 method Methods 0.000 description 35
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 32
- 230000008569 process Effects 0.000 description 20
- 230000001133 acceleration Effects 0.000 description 10
- 238000002955 isolation Methods 0.000 description 8
- 238000001020 plasma etching Methods 0.000 description 8
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 7
- HAYXDMNJJFVXCI-UHFFFAOYSA-N arsenic(5+) Chemical compound [As+5] HAYXDMNJJFVXCI-UHFFFAOYSA-N 0.000 description 7
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- 229910052698 phosphorus Inorganic materials 0.000 description 7
- 239000011574 phosphorus Substances 0.000 description 7
- 230000001788 irregular Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- 238000009826 distribution Methods 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 5
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 4
- 230000004913 activation Effects 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 238000001039 wet etching Methods 0.000 description 4
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical group [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 238000001015 X-ray lithography Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000005380 borophosphosilicate glass Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000004151 rapid thermal annealing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
- H01L21/26513—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically active species
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- H—ELECTRICITY
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- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/6653—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using the removal of at least part of spacer, e.g. disposable spacer
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- H—ELECTRICITY
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- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/6656—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using multiple spacer layers, e.g. multiple sidewall spacers
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- H—ELECTRICITY
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7833—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/665—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using self aligned silicidation, i.e. salicide
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66575—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate
- H01L29/6659—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate with both lightly doped source and drain extensions and source and drain self-aligned to the sides of the gate, e.g. lightly doped drain [LDD] MOSFET, double diffused drain [DDD] MOSFET
Abstract
【解決手段】 本発明の半導体装置は、半導体基板上の素子形成領域にゲート絶縁膜を介して形成された砒素を含むシリコン膜5とNiシリサイド層11の積層構造からなるゲート電極5と、ゲート電極5の側面に形成された絶縁膜6、7からなるサイドウォール8と、ゲート電極5の両側の素子形成領域に形成された砒素を含むソース及びドレイン層9、10と、ソース及びドレイン層9、10上に形成されたNiシリサイド層11′とを備えている。また、ゲート電極5内に含まれる砒素のピーク濃度が、ソース及びドレイン層9、10に含まれる砒素のピーク濃度の10分の1以下であることを特徴としている。
【選択図】 図1
Description
T.Ohguro, T. Morimoto, Y. Ushiku, and H. Iwai "Analysis of Anomalously Large Junction Leakage Current of Nickel Silicided N-Type Diffused Layer and Its Improvement" Extended Abstract of the 1993 International Conference on Solid State Devices and Materials, 1993, p.192-194.
2 素子分離領域
3 ウェル領域
4 ゲート絶縁膜(シリコン酸化膜)
5 ゲート電極(ポリシリコン膜)
6、6’ シリコン窒化膜
7、7’ シリコン酸化膜
8 サイドウォール
9 浅いソース/ドレイン拡散層
10 深いソース/ドレイン拡散層
11 Niシリサイド
12 シリコン窒化膜(キャップ膜)
13 シリコン酸化膜(キャップ膜)
Claims (6)
- 半導体基板上の素子形成領域にゲート絶縁膜を介して形成された砒素を含むポリシリコン膜と第1のNiシリサイド層の積層構造からなるゲート電極と、
前記ゲート電極の側面に形成された絶縁膜からなるサイドウォールと、
前記ゲート電極の両側の素子形成領域に形成された砒素を含むソース及びドレイン層と、
前記ソース及びドレイン層上に形成された第2のNiシリサイド層とを備え、
前記ゲート電極内に含まれる砒素のピーク濃度が、前記ソース及びドレイン層に含まれる砒素のピーク濃度の10分の1以下であることを特徴とする半導体装置。 - 前記ゲート電極内に含まれる砒素のピーク濃度が1E19cm−3以下で、前記ソース及びドレイン層に含まれる砒素のピーク濃度が1E20cm−3以上であることを特徴とする請求項1記載の半導体装置。
- 前記サイドウォールが、シリコン酸化膜又はシリコン窒化膜のうち少なくとも一つで形成され、少なくとも一つの層を形成していることを特徴とする請求項1又は請求項2記載の半導体装置。
- 半導体基板上に第1の絶縁膜及びシリコン膜を順次堆積させる工程と、
前記ポリシリコン膜に不純物イオンを注入する工程と、
前記ポリシリコン膜上に第2の絶縁膜を堆積させる工程と、
前記第1の絶縁膜及びポリシリコン膜、第2の絶縁膜をエッチングすることによって、第1の絶縁膜からなるゲート絶縁膜及びポリシリコン膜からなるゲート電極、第2の絶縁膜からなるキャップ膜を形成する工程と、
前記キャップ膜をマスクとして前記半導体基板中に砒素イオンを注入し、第1のソース及びドレイン層を形成する工程と、
少なくとも一種類の絶縁膜を堆積させ、エッチングによって前記ゲート電極の両側にサイドウォールを形成する工程と、
前記サイドウォール及びキャップ膜をマスクとして砒素イオンを注入し、第2のソース及びドレイン層を形成する工程と、
前記キャップ膜を除去する工程と、
前記ゲート電極及び前記第2のソース及びドレイン層上にNiを堆積させ、熱処理することによって前記ゲート電極及び前記第2のソース及びドレイン層上にNiシリサイドを形成する工程とを備え、
前記ゲート電極に注入される砒素のピーク濃度が前記第2のソース及びドレイン層のピーク濃度の10分の1以下になることを特徴とする半導体装置の製造方法。 - 前記キャップ膜としてシリコン窒化膜を用い、前記キャップ膜を除去する工程として、熱燐酸を用いることを特徴とする請求項4記載の半導体装置の製造方法。
- 前記キャップ膜としてシリコン酸化膜を用い、前記キャップ膜を除去する工程として、希フッ酸を用いることを特徴とする請求項4記載の半導体装置の製造方法。
Priority Applications (5)
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JP2005011047A JP2006202860A (ja) | 2005-01-19 | 2005-01-19 | 半導体装置及びその製造方法 |
TW095101392A TWI305054B (en) | 2005-01-19 | 2006-01-13 | Semiconductor device and fabricating method for thereof |
US11/333,532 US7714364B2 (en) | 2005-01-19 | 2006-01-18 | Semiconductor device comprising gate electrode having arsenic and phosphorus |
CNA2006100061547A CN1819267A (zh) | 2005-01-19 | 2006-01-19 | 半导体器件及其制造方法 |
US12/763,870 US8004050B2 (en) | 2005-01-19 | 2010-04-20 | Semiconductor device comprising gate electrode having arsenic and phosphorous |
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JP2005011047A JP2006202860A (ja) | 2005-01-19 | 2005-01-19 | 半導体装置及びその製造方法 |
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JP (1) | JP2006202860A (ja) |
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US8021950B1 (en) | 2010-10-26 | 2011-09-20 | International Business Machines Corporation | Semiconductor wafer processing method that allows device regions to be selectively annealed following back end of the line (BEOL) metal wiring layer formation |
US8133814B1 (en) * | 2010-12-03 | 2012-03-13 | Globalfoundries Inc. | Etch methods for semiconductor device fabrication |
CN102522327A (zh) * | 2011-12-22 | 2012-06-27 | 上海华虹Nec电子有限公司 | 自对准低电阻栅极rf ldmos的制造方法 |
US8748256B2 (en) * | 2012-02-06 | 2014-06-10 | Texas Instruments Incorporated | Integrated circuit having silicide block resistor |
JP6685870B2 (ja) * | 2016-09-15 | 2020-04-22 | 株式会社東芝 | 半導体装置 |
CN112635312A (zh) * | 2020-12-07 | 2021-04-09 | 华虹半导体(无锡)有限公司 | 侧墙的工艺方法 |
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JP4122167B2 (ja) | 2002-03-19 | 2008-07-23 | 富士通株式会社 | 半導体装置及びその製造方法 |
US20050040479A1 (en) * | 2003-08-20 | 2005-02-24 | Pdf Solutions | Oxide-Nitride-Oxide spacer with oxide layers free of nitridization |
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2005
- 2005-01-19 JP JP2005011047A patent/JP2006202860A/ja active Pending
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2006
- 2006-01-13 TW TW095101392A patent/TWI305054B/zh not_active IP Right Cessation
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- 2006-01-19 CN CNA2006100061547A patent/CN1819267A/zh active Pending
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Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH04230039A (ja) * | 1990-12-27 | 1992-08-19 | Toshiba Corp | 半導体装置及びその製造方法 |
JPH07135317A (ja) * | 1993-04-22 | 1995-05-23 | Texas Instr Inc <Ti> | 自己整合型シリサイドゲート |
JPH07263684A (ja) * | 1994-03-25 | 1995-10-13 | Mitsubishi Electric Corp | 電界効果トランジスタの製造方法 |
JPH10340962A (ja) * | 1997-06-06 | 1998-12-22 | Sony Corp | 半導体装置 |
JPH1197684A (ja) * | 1997-09-17 | 1999-04-09 | Fujitsu Ltd | 半導体装置の製造方法 |
JPH11220123A (ja) * | 1998-01-29 | 1999-08-10 | Sony Corp | 半導体装置の製造方法 |
JP2000114395A (ja) * | 1998-10-09 | 2000-04-21 | Sony Corp | 半導体装置およびその製造方法 |
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TW200629557A (en) | 2006-08-16 |
US8004050B2 (en) | 2011-08-23 |
US7714364B2 (en) | 2010-05-11 |
US20060163675A1 (en) | 2006-07-27 |
CN1819267A (zh) | 2006-08-16 |
TWI305054B (en) | 2009-01-01 |
US20100200935A1 (en) | 2010-08-12 |
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