JP4815444B2 - 脆性材料の割断加工システム及びその方法 - Google Patents

脆性材料の割断加工システム及びその方法 Download PDF

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Publication number
JP4815444B2
JP4815444B2 JP2007530956A JP2007530956A JP4815444B2 JP 4815444 B2 JP4815444 B2 JP 4815444B2 JP 2007530956 A JP2007530956 A JP 2007530956A JP 2007530956 A JP2007530956 A JP 2007530956A JP 4815444 B2 JP4815444 B2 JP 4815444B2
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Japan
Prior art keywords
substrate
processed
cleaving
cutting line
planned cutting
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Expired - Fee Related
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JP2007530956A
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English (en)
Japanese (ja)
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JPWO2007020835A1 (ja
Inventor
正 和 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
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Shibaura Mechatronics Corp
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Priority to JP2007530956A priority Critical patent/JP4815444B2/ja
Publication of JPWO2007020835A1 publication Critical patent/JPWO2007020835A1/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0052—Means for supporting or holding work during breaking
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/10—Devices involving relative movement between laser beam and workpiece using a fixed support, i.e. involving moving the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033—Apparatus for opening score lines in glass sheets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/09—Severing cooled glass by thermal shock
    • C03B33/091—Severing cooled glass by thermal shock using at least one focussed radiation beam, e.g. laser beam
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/09—Severing cooled glass by thermal shock
    • C03B33/091—Severing cooled glass by thermal shock using at least one focussed radiation beam, e.g. laser beam
    • C03B33/093—Severing cooled glass by thermal shock using at least one focussed radiation beam, e.g. laser beam using two or more focussed radiation beams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/40—Semiconductor devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Toxicology (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Thermal Sciences (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
JP2007530956A 2005-08-12 2006-08-08 脆性材料の割断加工システム及びその方法 Expired - Fee Related JP4815444B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007530956A JP4815444B2 (ja) 2005-08-12 2006-08-08 脆性材料の割断加工システム及びその方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2005234431 2005-08-12
JP2005234431 2005-08-12
PCT/JP2006/315658 WO2007020835A1 (ja) 2005-08-12 2006-08-08 脆性材料の割断加工システム及びその方法
JP2007530956A JP4815444B2 (ja) 2005-08-12 2006-08-08 脆性材料の割断加工システム及びその方法

Publications (2)

Publication Number Publication Date
JPWO2007020835A1 JPWO2007020835A1 (ja) 2009-02-26
JP4815444B2 true JP4815444B2 (ja) 2011-11-16

Family

ID=37757497

Family Applications (1)

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JP2007530956A Expired - Fee Related JP4815444B2 (ja) 2005-08-12 2006-08-08 脆性材料の割断加工システム及びその方法

Country Status (4)

Country Link
JP (1) JP4815444B2 (zh)
KR (1) KR100971042B1 (zh)
TW (1) TW200726559A (zh)
WO (1) WO2007020835A1 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105171938A (zh) * 2015-09-19 2015-12-23 哈尔滨奥瑞德光电技术有限公司 c向蓝宝石晶棒a向平边的快速确定与加工方法
CN105512400A (zh) * 2015-12-09 2016-04-20 大连理工大学 一种脆性材料切削过程仿真方法

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007055000A (ja) * 2005-08-23 2007-03-08 Japan Steel Works Ltd:The 非金属材料製の被加工物の切断方法及びその装置
JP5221560B2 (ja) * 2007-11-27 2013-06-26 三星ダイヤモンド工業株式会社 レーザ加工装置
WO2009084276A1 (ja) * 2007-12-27 2009-07-09 Mitsuboshi Diamond Industrial Co., Ltd. レーザ加工装置
WO2009084489A1 (ja) * 2007-12-28 2009-07-09 Mitsuboshi Diamond Industrial Co., Ltd. レーザ加工装置およびレーザ加工方法
JP5590642B2 (ja) * 2009-02-02 2014-09-17 独立行政法人国立高等専門学校機構 スクライブ加工装置及びスクライブ加工方法
JP2011131229A (ja) * 2009-12-24 2011-07-07 Hitachi High-Technologies Corp レーザ加工方法及びレーザ加工装置並びにソーラパネル製造方法
CN104647840B (zh) 2011-05-13 2017-06-06 日本电气硝子株式会社 层叠体、层叠体的切断方法和层叠体的加工方法、以及脆性板状物的切断装置和切断方法
JP6379392B2 (ja) * 2013-05-28 2018-08-29 Ａｇｃ株式会社 ガラス基板の切断方法及びガラス基板の製造方法
CN105328353B (zh) * 2015-10-30 2017-03-22 安徽江淮汽车集团股份有限公司 激光切割机的切割平台

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03489A (ja) * 1989-05-24 1991-01-07 Nippon Sekigaisen Kogyo Kk 被加工材料に発生する集中熱応力を用いたレーザーを熱源とする脆性材料の割断加工方法及び割断加工装置
JPH07323384A (ja) * 1994-06-02 1995-12-12 Souei Tsusho Kk 脆性材料の割断方法
JPH10116801A (ja) * 1996-10-09 1998-05-06 Rohm Co Ltd 基板分割方法及びその基板分割を用いた発光素子製造 方法
JP2000247671A (ja) * 1999-03-04 2000-09-12 Takatori Corp ガラスの分断方法
JP2002178179A (ja) * 2000-12-12 2002-06-25 Sony Corp 割断装置及びその方法
JP2003002676A (ja) * 2001-06-19 2003-01-08 Seiko Epson Corp 基板の分割方法及び液晶装置の製造方法
JP2003534132A (ja) * 1999-11-24 2003-11-18 アプライド・フォトニクス・インコーポレーテッド 非金属材料を分離する方法及び装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002100590A (ja) * 2000-09-22 2002-04-05 Sony Corp 割断装置及びその方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03489A (ja) * 1989-05-24 1991-01-07 Nippon Sekigaisen Kogyo Kk 被加工材料に発生する集中熱応力を用いたレーザーを熱源とする脆性材料の割断加工方法及び割断加工装置
JPH07323384A (ja) * 1994-06-02 1995-12-12 Souei Tsusho Kk 脆性材料の割断方法
JPH10116801A (ja) * 1996-10-09 1998-05-06 Rohm Co Ltd 基板分割方法及びその基板分割を用いた発光素子製造 方法
JP2000247671A (ja) * 1999-03-04 2000-09-12 Takatori Corp ガラスの分断方法
JP2003534132A (ja) * 1999-11-24 2003-11-18 アプライド・フォトニクス・インコーポレーテッド 非金属材料を分離する方法及び装置
JP2002178179A (ja) * 2000-12-12 2002-06-25 Sony Corp 割断装置及びその方法
JP2003002676A (ja) * 2001-06-19 2003-01-08 Seiko Epson Corp 基板の分割方法及び液晶装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105171938A (zh) * 2015-09-19 2015-12-23 哈尔滨奥瑞德光电技术有限公司 c向蓝宝石晶棒a向平边的快速确定与加工方法
CN105512400A (zh) * 2015-12-09 2016-04-20 大连理工大学 一种脆性材料切削过程仿真方法

Also Published As

Publication number Publication date
KR20080023265A (ko) 2008-03-12
JPWO2007020835A1 (ja) 2009-02-26
TWI340054B (zh) 2011-04-11
WO2007020835A1 (ja) 2007-02-22
TW200726559A (en) 2007-07-16
KR100971042B1 (ko) 2010-07-16

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