JP4796884B2 - 光導波路デバイスの製造方法 - Google Patents

光導波路デバイスの製造方法 Download PDF

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Publication number
JP4796884B2
JP4796884B2 JP2006113349A JP2006113349A JP4796884B2 JP 4796884 B2 JP4796884 B2 JP 4796884B2 JP 2006113349 A JP2006113349 A JP 2006113349A JP 2006113349 A JP2006113349 A JP 2006113349A JP 4796884 B2 JP4796884 B2 JP 4796884B2
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JP
Japan
Prior art keywords
optical waveguide
layer
film
waveguide device
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006113349A
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English (en)
Japanese (ja)
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JP2007286340A (ja
JP2007286340A5 (enExample
Inventor
真也 渡邊
直樹 佐久間
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
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NEC Corp
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Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP2006113349A priority Critical patent/JP4796884B2/ja
Priority to TW096111742A priority patent/TW200804883A/zh
Priority to US11/733,044 priority patent/US7492984B2/en
Priority to EP07007461.2A priority patent/EP1847860B1/en
Priority to CN2007100904839A priority patent/CN101059586B/zh
Publication of JP2007286340A publication Critical patent/JP2007286340A/ja
Priority to US12/348,205 priority patent/US7778504B2/en
Publication of JP2007286340A5 publication Critical patent/JP2007286340A5/ja
Application granted granted Critical
Publication of JP4796884B2 publication Critical patent/JP4796884B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)
JP2006113349A 2006-04-17 2006-04-17 光導波路デバイスの製造方法 Expired - Fee Related JP4796884B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2006113349A JP4796884B2 (ja) 2006-04-17 2006-04-17 光導波路デバイスの製造方法
TW096111742A TW200804883A (en) 2006-04-17 2007-04-03 Optical waveguide device and manufacturing method thereof
US11/733,044 US7492984B2 (en) 2006-04-17 2007-04-09 Optical waveguide device and manufacturing method thereof
EP07007461.2A EP1847860B1 (en) 2006-04-17 2007-04-11 Optical waveguide device with optical component and its manufacturing method
CN2007100904839A CN101059586B (zh) 2006-04-17 2007-04-12 光波导器件及其制造方法
US12/348,205 US7778504B2 (en) 2006-04-17 2009-01-02 Optical waveguide device and manufacturing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006113349A JP4796884B2 (ja) 2006-04-17 2006-04-17 光導波路デバイスの製造方法

Publications (3)

Publication Number Publication Date
JP2007286340A JP2007286340A (ja) 2007-11-01
JP2007286340A5 JP2007286340A5 (enExample) 2009-01-22
JP4796884B2 true JP4796884B2 (ja) 2011-10-19

Family

ID=38328223

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006113349A Expired - Fee Related JP4796884B2 (ja) 2006-04-17 2006-04-17 光導波路デバイスの製造方法

Country Status (5)

Country Link
US (2) US7492984B2 (enExample)
EP (1) EP1847860B1 (enExample)
JP (1) JP4796884B2 (enExample)
CN (1) CN101059586B (enExample)
TW (1) TW200804883A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025071897A1 (en) * 2023-09-25 2025-04-03 Ciena Corporation Managing co-packaging of photonic integrated circuits

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007298770A (ja) * 2006-04-28 2007-11-15 Nec Corp 光導波路デバイス及びその製造方法
JP5186785B2 (ja) * 2007-03-23 2013-04-24 日本電気株式会社 光導波路デバイス、光導波路デバイス用光素子実装システム、光素子実装方法、及びそのプログラム
JP5229617B2 (ja) * 2008-07-11 2013-07-03 日本電気株式会社 光導波路デバイスとその製造方法
JPWO2010106995A1 (ja) * 2009-03-17 2012-09-20 日本電気株式会社 光導波路デバイス及びその製造方法
KR101199302B1 (ko) 2009-10-13 2012-11-09 한국전자통신연구원 광 소자 및 그 제조 방법
US10009106B2 (en) 2012-05-14 2018-06-26 Acacia Communications, Inc. Silicon photonics multicarrier optical transceiver
US9217836B2 (en) * 2012-10-23 2015-12-22 Kotura, Inc. Edge coupling of optical devices
TWI565985B (zh) * 2012-12-14 2017-01-11 鴻海精密工業股份有限公司 脊型光波導的製造方法
JP6286853B2 (ja) * 2013-04-04 2018-03-07 富士通株式会社 電子装置とその製造方法、及び電子機器
US9099145B1 (en) * 2013-12-24 2015-08-04 Western Digital (Fremont), Llc High contrast alignment marker
KR102604742B1 (ko) 2015-12-23 2023-11-22 삼성전자주식회사 광 소자 및 그 제조 방법
JP6820671B2 (ja) 2016-06-02 2021-01-27 富士通株式会社 光回路デバイスとこれを用いた光トランシーバ
US12471598B2 (en) 2020-10-07 2025-11-18 Newleaf Symbiotics, Inc. Methylobacterium strains for enhancing plant production and methods related thereto
US12481109B2 (en) * 2021-01-29 2025-11-25 Kyocera Corporation Optical circuit board and electronic component mounting structure using the same

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3117107B2 (ja) * 1993-08-03 2000-12-11 シャープ株式会社 光集積回路素子の組立構造
JPH09145965A (ja) * 1995-11-22 1997-06-06 Hitachi Ltd 光モジュール及びその製造方法
JP2823044B2 (ja) * 1996-05-14 1998-11-11 日本電気株式会社 光結合回路及びその製造方法
JP2000075153A (ja) * 1998-08-31 2000-03-14 Fujitsu Ltd 光学部品付基板及び光学装置の製造方法
JP2000098157A (ja) * 1998-09-25 2000-04-07 Japan Aviation Electronics Industry Ltd 光分岐装置およびその製造方法
JP2003517630A (ja) * 1999-07-16 2003-05-27 ハイブリッド マイクロ テクノロジーズ アンパーツゼルスカブ Ｓｉ基板上の能動光学素子および受動光学素子のハイブリッド集積
JP3698601B2 (ja) * 1999-10-08 2005-09-21 日本電信電話株式会社 光モジュール
KR100442609B1 (ko) * 2002-03-05 2004-08-02 삼성전자주식회사 플립칩 본딩구조 및 본딩방법
KR100456672B1 (ko) * 2002-03-30 2004-11-10 한국전자통신연구원 광도파로 플랫폼 및 그 제조 방법
KR100427582B1 (ko) * 2002-08-08 2004-04-28 한국전자통신연구원 광도파로 플랫폼 및 그 제조 방법
JP2004294655A (ja) * 2003-03-26 2004-10-21 Nec Corp 光導波路の製造方法
CN1690747A (zh) * 2004-04-20 2005-11-02 中国科学院半导体研究所 光纤定位槽、光斑转换器和光波导器件的一体化制作方法
JP2007298770A (ja) * 2006-04-28 2007-11-15 Nec Corp 光導波路デバイス及びその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025071897A1 (en) * 2023-09-25 2025-04-03 Ciena Corporation Managing co-packaging of photonic integrated circuits

Also Published As

Publication number Publication date
US20070274653A1 (en) 2007-11-29
EP1847860A2 (en) 2007-10-24
US20090116803A1 (en) 2009-05-07
CN101059586A (zh) 2007-10-24
CN101059586B (zh) 2010-04-07
EP1847860A3 (en) 2011-11-30
TW200804883A (en) 2008-01-16
JP2007286340A (ja) 2007-11-01
US7492984B2 (en) 2009-02-17
EP1847860B1 (en) 2013-06-26
US7778504B2 (en) 2010-08-17

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