CN101059586B - 光波导器件及其制造方法 - Google Patents
光波导器件及其制造方法 Download PDFInfo
- Publication number
- CN101059586B CN101059586B CN2007100904839A CN200710090483A CN101059586B CN 101059586 B CN101059586 B CN 101059586B CN 2007100904839 A CN2007100904839 A CN 2007100904839A CN 200710090483 A CN200710090483 A CN 200710090483A CN 101059586 B CN101059586 B CN 101059586B
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- CN
- China
- Prior art keywords
- coating
- core layer
- base piece
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- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
- Optical Couplings Of Light Guides (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006113349 | 2006-04-17 | ||
| JP2006113349A JP4796884B2 (ja) | 2006-04-17 | 2006-04-17 | 光導波路デバイスの製造方法 |
| JP2006-113349 | 2006-04-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101059586A CN101059586A (zh) | 2007-10-24 |
| CN101059586B true CN101059586B (zh) | 2010-04-07 |
Family
ID=38328223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007100904839A Expired - Fee Related CN101059586B (zh) | 2006-04-17 | 2007-04-12 | 光波导器件及其制造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US7492984B2 (enExample) |
| EP (1) | EP1847860B1 (enExample) |
| JP (1) | JP4796884B2 (enExample) |
| CN (1) | CN101059586B (enExample) |
| TW (1) | TW200804883A (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007298770A (ja) * | 2006-04-28 | 2007-11-15 | Nec Corp | 光導波路デバイス及びその製造方法 |
| JP5186785B2 (ja) * | 2007-03-23 | 2013-04-24 | 日本電気株式会社 | 光導波路デバイス、光導波路デバイス用光素子実装システム、光素子実装方法、及びそのプログラム |
| JP5229617B2 (ja) * | 2008-07-11 | 2013-07-03 | 日本電気株式会社 | 光導波路デバイスとその製造方法 |
| JPWO2010106995A1 (ja) * | 2009-03-17 | 2012-09-20 | 日本電気株式会社 | 光導波路デバイス及びその製造方法 |
| KR101199302B1 (ko) | 2009-10-13 | 2012-11-09 | 한국전자통신연구원 | 광 소자 및 그 제조 방법 |
| US10009106B2 (en) | 2012-05-14 | 2018-06-26 | Acacia Communications, Inc. | Silicon photonics multicarrier optical transceiver |
| US9217836B2 (en) * | 2012-10-23 | 2015-12-22 | Kotura, Inc. | Edge coupling of optical devices |
| TWI565985B (zh) * | 2012-12-14 | 2017-01-11 | 鴻海精密工業股份有限公司 | 脊型光波導的製造方法 |
| JP6286853B2 (ja) * | 2013-04-04 | 2018-03-07 | 富士通株式会社 | 電子装置とその製造方法、及び電子機器 |
| US9099145B1 (en) * | 2013-12-24 | 2015-08-04 | Western Digital (Fremont), Llc | High contrast alignment marker |
| KR102604742B1 (ko) | 2015-12-23 | 2023-11-22 | 삼성전자주식회사 | 광 소자 및 그 제조 방법 |
| JP6820671B2 (ja) | 2016-06-02 | 2021-01-27 | 富士通株式会社 | 光回路デバイスとこれを用いた光トランシーバ |
| US12471598B2 (en) | 2020-10-07 | 2025-11-18 | Newleaf Symbiotics, Inc. | Methylobacterium strains for enhancing plant production and methods related thereto |
| US12481109B2 (en) * | 2021-01-29 | 2025-11-25 | Kyocera Corporation | Optical circuit board and electronic component mounting structure using the same |
| US20250102751A1 (en) * | 2023-09-25 | 2025-03-27 | Ciena Corporation | Managing co-packaging of photonic integrated circuits |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5907646A (en) * | 1996-05-14 | 1999-05-25 | Nec Corporation | Optical coupling circuit and fabrication process therefor |
| CN1375070A (zh) * | 1999-07-16 | 2002-10-16 | 混合微技术有限公司 | 硅板上有源与无源光学部件的混合集成 |
| US6804444B2 (en) * | 2002-03-30 | 2004-10-12 | Electronics And Telecommunications Research Institute | Optical waveguide platform and manufacturing method thereof |
| CN1690747A (zh) * | 2004-04-20 | 2005-11-02 | 中国科学院半导体研究所 | 光纤定位槽、光斑转换器和光波导器件的一体化制作方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3117107B2 (ja) * | 1993-08-03 | 2000-12-11 | シャープ株式会社 | 光集積回路素子の組立構造 |
| JPH09145965A (ja) * | 1995-11-22 | 1997-06-06 | Hitachi Ltd | 光モジュール及びその製造方法 |
| JP2000075153A (ja) * | 1998-08-31 | 2000-03-14 | Fujitsu Ltd | 光学部品付基板及び光学装置の製造方法 |
| JP2000098157A (ja) * | 1998-09-25 | 2000-04-07 | Japan Aviation Electronics Industry Ltd | 光分岐装置およびその製造方法 |
| JP3698601B2 (ja) * | 1999-10-08 | 2005-09-21 | 日本電信電話株式会社 | 光モジュール |
| KR100442609B1 (ko) * | 2002-03-05 | 2004-08-02 | 삼성전자주식회사 | 플립칩 본딩구조 및 본딩방법 |
| KR100427582B1 (ko) * | 2002-08-08 | 2004-04-28 | 한국전자통신연구원 | 광도파로 플랫폼 및 그 제조 방법 |
| JP2004294655A (ja) * | 2003-03-26 | 2004-10-21 | Nec Corp | 光導波路の製造方法 |
| JP2007298770A (ja) * | 2006-04-28 | 2007-11-15 | Nec Corp | 光導波路デバイス及びその製造方法 |
-
2006
- 2006-04-17 JP JP2006113349A patent/JP4796884B2/ja not_active Expired - Fee Related
-
2007
- 2007-04-03 TW TW096111742A patent/TW200804883A/zh unknown
- 2007-04-09 US US11/733,044 patent/US7492984B2/en not_active Expired - Fee Related
- 2007-04-11 EP EP07007461.2A patent/EP1847860B1/en active Active
- 2007-04-12 CN CN2007100904839A patent/CN101059586B/zh not_active Expired - Fee Related
-
2009
- 2009-01-02 US US12/348,205 patent/US7778504B2/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5907646A (en) * | 1996-05-14 | 1999-05-25 | Nec Corporation | Optical coupling circuit and fabrication process therefor |
| CN1375070A (zh) * | 1999-07-16 | 2002-10-16 | 混合微技术有限公司 | 硅板上有源与无源光学部件的混合集成 |
| US6804444B2 (en) * | 2002-03-30 | 2004-10-12 | Electronics And Telecommunications Research Institute | Optical waveguide platform and manufacturing method thereof |
| CN1690747A (zh) * | 2004-04-20 | 2005-11-02 | 中国科学院半导体研究所 | 光纤定位槽、光斑转换器和光波导器件的一体化制作方法 |
Non-Patent Citations (1)
| Title |
|---|
| JP特开平9-304663A 1997.11.28 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20070274653A1 (en) | 2007-11-29 |
| JP4796884B2 (ja) | 2011-10-19 |
| EP1847860A2 (en) | 2007-10-24 |
| US20090116803A1 (en) | 2009-05-07 |
| CN101059586A (zh) | 2007-10-24 |
| EP1847860A3 (en) | 2011-11-30 |
| TW200804883A (en) | 2008-01-16 |
| JP2007286340A (ja) | 2007-11-01 |
| US7492984B2 (en) | 2009-02-17 |
| EP1847860B1 (en) | 2013-06-26 |
| US7778504B2 (en) | 2010-08-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100407 Termination date: 20180412 |
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| CF01 | Termination of patent right due to non-payment of annual fee |