JP4768904B2 - 光学素子又は光学系の物理量測定方法 - Google Patents
光学素子又は光学系の物理量測定方法 Download PDFInfo
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- JP4768904B2 JP4768904B2 JP2000236748A JP2000236748A JP4768904B2 JP 4768904 B2 JP4768904 B2 JP 4768904B2 JP 2000236748 A JP2000236748 A JP 2000236748A JP 2000236748 A JP2000236748 A JP 2000236748A JP 4768904 B2 JP4768904 B2 JP 4768904B2
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- 230000003287 optical effect Effects 0.000 title claims description 592
- 238000000034 method Methods 0.000 title claims description 137
- 238000009826 distribution Methods 0.000 claims description 71
- 230000004075 alteration Effects 0.000 claims description 10
- 238000012360 testing method Methods 0.000 description 112
- 238000005259 measurement Methods 0.000 description 53
- 238000001514 detection method Methods 0.000 description 50
- 238000013461 design Methods 0.000 description 25
- 238000012545 processing Methods 0.000 description 22
- 238000004364 calculation method Methods 0.000 description 21
- 238000010586 diagram Methods 0.000 description 19
- 238000011156 evaluation Methods 0.000 description 17
- 230000004907 flux Effects 0.000 description 17
- 238000003384 imaging method Methods 0.000 description 17
- 230000008569 process Effects 0.000 description 16
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000005457 optimization Methods 0.000 description 7
- 230000005484 gravity Effects 0.000 description 6
- 238000003672 processing method Methods 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 2
- 210000001747 pupil Anatomy 0.000 description 2
- 108700028516 Lan-7 Proteins 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000236748A JP4768904B2 (ja) | 2000-08-04 | 2000-08-04 | 光学素子又は光学系の物理量測定方法 |
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| Application Number | Priority Date | Filing Date | Title |
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| JP2000236748A JP4768904B2 (ja) | 2000-08-04 | 2000-08-04 | 光学素子又は光学系の物理量測定方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002048673A JP2002048673A (ja) | 2002-02-15 |
| JP2002048673A5 JP2002048673A5 (enrdf_load_stackoverflow) | 2007-09-27 |
| JP4768904B2 true JP4768904B2 (ja) | 2011-09-07 |
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| Application Number | Title | Priority Date | Filing Date |
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| JP2000236748A Expired - Fee Related JP4768904B2 (ja) | 2000-08-04 | 2000-08-04 | 光学素子又は光学系の物理量測定方法 |
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| JP (1) | JP4768904B2 (enrdf_load_stackoverflow) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4000086B2 (ja) * | 2003-04-17 | 2007-10-31 | 株式会社トーメーコーポレーション | レンズの基礎データの測定方法及び測定装置 |
| JP2004325880A (ja) * | 2003-04-25 | 2004-11-18 | Olympus Corp | 光学系の設計方法 |
| JP5721420B2 (ja) * | 2010-12-17 | 2015-05-20 | キヤノン株式会社 | 計測方法及び計測装置 |
| JP6029429B2 (ja) * | 2012-11-19 | 2016-11-24 | キヤノン株式会社 | 波面収差測定方法、波面収差測定装置、及び光学系の製造方法 |
| WO2022224344A1 (ja) * | 2021-04-20 | 2022-10-27 | オリンパス株式会社 | 偏心測定方法および偏心測定装置 |
| CN115436016B (zh) * | 2022-07-29 | 2024-04-12 | 中国人民解放军32181部队 | 激光销毁设备变焦与穿透能力的一体化测试评估方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05226228A (ja) * | 1992-02-14 | 1993-09-03 | Fujitsu Ltd | Ｘ線発生装置及びｘ線反射鏡光軸合わせ方法 |
| JP3597222B2 (ja) * | 1993-09-01 | 2004-12-02 | オリンパス株式会社 | レンズ，反射鏡等の偏心測定法及びそれを利用した機械 |
| US6747702B1 (en) * | 1998-12-23 | 2004-06-08 | Eastman Kodak Company | Apparatus and method for producing images without distortion and lateral color aberration |
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- 2000-08-04 JP JP2000236748A patent/JP4768904B2/ja not_active Expired - Fee Related
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| Publication number | Publication date |
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| JP2002048673A (ja) | 2002-02-15 |
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