JP4746814B2 - 集積回路を製造するための装置および方法 - Google Patents

集積回路を製造するための装置および方法 Download PDF

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Publication number
JP4746814B2
JP4746814B2 JP2002292236A JP2002292236A JP4746814B2 JP 4746814 B2 JP4746814 B2 JP 4746814B2 JP 2002292236 A JP2002292236 A JP 2002292236A JP 2002292236 A JP2002292236 A JP 2002292236A JP 4746814 B2 JP4746814 B2 JP 4746814B2
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JP
Japan
Prior art keywords
layer
region
integrated circuit
slot
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2002292236A
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English (en)
Japanese (ja)
Other versions
JP2003218353A (ja
JP2003218353A5 (enExample
Inventor
サイモン・ドッド
フランク・ランドルフ・ブライアント
ポール・アイ・ミクラン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HP Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of JP2003218353A publication Critical patent/JP2003218353A/ja
Publication of JP2003218353A5 publication Critical patent/JP2003218353A5/ja
Application granted granted Critical
Publication of JP4746814B2 publication Critical patent/JP4746814B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/13—Heads having an integrated circuit

Landscapes

  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Facsimile Heads (AREA)
JP2002292236A 2001-10-26 2002-10-04 集積回路を製造するための装置および方法 Expired - Lifetime JP4746814B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/055161 2001-10-26
US10/055,161 US6740536B2 (en) 2001-10-26 2001-10-26 Devices and methods for integrated circuit manufacturing

Publications (3)

Publication Number Publication Date
JP2003218353A JP2003218353A (ja) 2003-07-31
JP2003218353A5 JP2003218353A5 (enExample) 2005-11-17
JP4746814B2 true JP4746814B2 (ja) 2011-08-10

Family

ID=21996024

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002292236A Expired - Lifetime JP4746814B2 (ja) 2001-10-26 2002-10-04 集積回路を製造するための装置および方法

Country Status (7)

Country Link
US (2) US6740536B2 (enExample)
EP (1) EP1306214B1 (enExample)
JP (1) JP4746814B2 (enExample)
KR (1) KR100962888B1 (enExample)
CN (2) CN101444993B (enExample)
DE (1) DE60231462D1 (enExample)
TW (2) TWI315904B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6740536B2 (en) * 2001-10-26 2004-05-25 Hewlett-Packard Develpment Corporation, L.P. Devices and methods for integrated circuit manufacturing
JP2003224269A (ja) * 2001-10-26 2003-08-08 Hewlett Packard Co <Hp> 集積回路を製造するための装置および方法
US20050236358A1 (en) * 2004-04-26 2005-10-27 Shen Buswell Micromachining methods and systems
US7767103B2 (en) * 2004-09-14 2010-08-03 Lexmark International, Inc. Micro-fluid ejection assemblies
US7150516B2 (en) * 2004-09-28 2006-12-19 Hewlett-Packard Development Company, L.P. Integrated circuit and method for manufacturing
US8029105B2 (en) 2007-10-17 2011-10-04 Eastman Kodak Company Ambient plasma treatment of printer components
JP5539895B2 (ja) 2007-12-02 2014-07-02 ヒューレット−パッカード デベロップメント カンパニー エル．ピー． 電気的に絶縁されるプリントヘッドダイ接地ネットワークをフレキシブル回路で電気的に接続する方法
JP5777762B2 (ja) * 2014-03-20 2015-09-09 ヒューレット−パッカード デベロップメント カンパニー エル．ピー．Ｈｅｗｌｅｔｔ‐Ｐａｃｋａｒｄ Ｄｅｖｅｌｏｐｍｅｎｔ Ｃｏｍｐａｎｙ， Ｌ．Ｐ． 電気的に絶縁されるプリントヘッドダイ接地ネットワークをフレキシブル回路で電気的に接続する方法
EP3468803A4 (en) * 2016-07-12 2020-06-17 Hewlett-Packard Development Company, L.P. Multi-layered nozzle fluid ejection device

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4719477A (en) * 1986-01-17 1988-01-12 Hewlett-Packard Company Integrated thermal ink jet printhead and method of manufacture
DE69214548T2 (de) * 1991-08-01 1997-03-13 Canon Kk Aufzeichnungskopfherstellungsverfahren
US6406740B1 (en) 1992-06-23 2002-06-18 Canon Kabushiki Kaisha Method of manufacturing a liquid jet recording apparatus and such a liquid jet recording apparatus
US5448273A (en) 1993-06-22 1995-09-05 Xerox Corporation Thermal ink jet printhead protective layers
JP2909796B2 (ja) * 1993-12-28 1999-06-23 ローム株式会社 サーマルプリントヘッドおよびその製造方法
JP3380836B2 (ja) * 1995-07-04 2003-02-24 松下電器産業株式会社 Ｍｉｓ半導体装置及びその製造方法
US5903031A (en) * 1995-07-04 1999-05-11 Matsushita Electric Industrial Co., Ltd. MIS device, method of manufacturing the same, and method of diagnosing the same
JP3315321B2 (ja) * 1996-08-29 2002-08-19 株式会社東芝 半導体装置とその製造方法および不揮発性半導体記憶装置とその製造方法
GB9622177D0 (en) * 1996-10-24 1996-12-18 Xaar Ltd Passivation of ink jet print heads
US6290337B1 (en) 1996-10-31 2001-09-18 Hewlett-Packard Company Print head for ink-jet printing and a method for making print heads
JPH1126757A (ja) * 1997-06-30 1999-01-29 Toshiba Corp 半導体装置及びその製造方法
US6284147B1 (en) 1997-07-15 2001-09-04 Silverbrook Research Pty Ltd Method of manufacture of a stacked electrostatic ink jet printer
US6286939B1 (en) 1997-09-26 2001-09-11 Hewlett-Packard Company Method of treating a metal surface to increase polymer adhesion
US6039438A (en) 1997-10-21 2000-03-21 Hewlett-Packard Company Limiting propagation of thin film failures in an inkjet printhead
US6106096A (en) * 1997-12-15 2000-08-22 Lexmark International, Inc. Printhead stress relief
US6474780B1 (en) * 1998-04-16 2002-11-05 Canon Kabushiki Kaisha Liquid discharge head, cartridge having such head, liquid discharge apparatus provided with such cartridge, and method for manufacturing liquid discharge heads
US5998288A (en) * 1998-04-17 1999-12-07 Advanced Micro Devices, Inc. Ultra thin spacers formed laterally adjacent a gate conductor recessed below the upper surface of a substrate
JP2002261277A (ja) * 2001-03-06 2002-09-13 Toshiba Corp 半導体装置及びその製造方法
US6740536B2 (en) * 2001-10-26 2004-05-25 Hewlett-Packard Develpment Corporation, L.P. Devices and methods for integrated circuit manufacturing

Also Published As

Publication number Publication date
CN101444993B (zh) 2011-04-13
US20030207477A1 (en) 2003-11-06
DE60231462D1 (de) 2009-04-23
EP1306214A2 (en) 2003-05-02
EP1306214B1 (en) 2009-03-11
US6740536B2 (en) 2004-05-25
TWI315904B (en) 2009-10-11
EP1306214A3 (en) 2004-03-03
US20030080362A1 (en) 2003-05-01
CN101444993A (zh) 2009-06-03
CN1442901B (zh) 2012-05-09
TW200802716A (en) 2008-01-01
US7004558B2 (en) 2006-02-28
KR100962888B1 (ko) 2010-06-10
CN1442901A (zh) 2003-09-17
KR20030035950A (ko) 2003-05-09
JP2003218353A (ja) 2003-07-31
TWI324813B (en) 2010-05-11

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