JP4732716B2 - 搬送装置及びその制御方法並びに真空処理装置 - Google Patents

搬送装置及びその制御方法並びに真空処理装置 Download PDF

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Publication number
JP4732716B2
JP4732716B2 JP2004191946A JP2004191946A JP4732716B2 JP 4732716 B2 JP4732716 B2 JP 4732716B2 JP 2004191946 A JP2004191946 A JP 2004191946A JP 2004191946 A JP2004191946 A JP 2004191946A JP 4732716 B2 JP4732716 B2 JP 4732716B2
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JP
Japan
Prior art keywords
arm
drive
arms
link mechanism
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2004191946A
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English (en)
Japanese (ja)
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JP2006013371A (ja
Inventor
展史 南
健二 吾郷
崇文 川口
土志夫 小池
純平 湯山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP2004191946A priority Critical patent/JP4732716B2/ja
Priority to TW094119880A priority patent/TW200603965A/zh
Priority to KR1020050054049A priority patent/KR101205754B1/ko
Priority to CN200510081127A priority patent/CN100584546C/zh
Priority to US11/167,584 priority patent/US7645112B2/en
Publication of JP2006013371A publication Critical patent/JP2006013371A/ja
Application granted granted Critical
Publication of JP4732716B2 publication Critical patent/JP4732716B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20329—Joint between elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Dynamo-Electric Clutches, Dynamo-Electric Brakes (AREA)
JP2004191946A 2004-06-29 2004-06-29 搬送装置及びその制御方法並びに真空処理装置 Expired - Fee Related JP4732716B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2004191946A JP4732716B2 (ja) 2004-06-29 2004-06-29 搬送装置及びその制御方法並びに真空処理装置
TW094119880A TW200603965A (en) 2004-06-29 2005-06-15 Transportation device, its control method, and vacuum processing apparatus
KR1020050054049A KR101205754B1 (ko) 2004-06-29 2005-06-22 반송장치 및 그 제어방법 그리고 진공처리장치
CN200510081127A CN100584546C (zh) 2004-06-29 2005-06-28 移送装置及其控制方法以及真空处理装置
US11/167,584 US7645112B2 (en) 2004-06-29 2005-06-28 Transport apparatus, control method for the same, and vacuum processing system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004191946A JP4732716B2 (ja) 2004-06-29 2004-06-29 搬送装置及びその制御方法並びに真空処理装置

Publications (2)

Publication Number Publication Date
JP2006013371A JP2006013371A (ja) 2006-01-12
JP4732716B2 true JP4732716B2 (ja) 2011-07-27

Family

ID=35505939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004191946A Expired - Fee Related JP4732716B2 (ja) 2004-06-29 2004-06-29 搬送装置及びその制御方法並びに真空処理装置

Country Status (5)

Country Link
US (1) US7645112B2 (enExample)
JP (1) JP4732716B2 (enExample)
KR (1) KR101205754B1 (enExample)
CN (1) CN100584546C (enExample)
TW (1) TW200603965A (enExample)

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US10086511B2 (en) 2003-11-10 2018-10-02 Brooks Automation, Inc. Semiconductor manufacturing systems
KR100841741B1 (ko) * 2007-04-04 2008-06-27 주식회사 싸이맥스 진공처리장치
US7946800B2 (en) * 2007-04-06 2011-05-24 Brooks Automation, Inc. Substrate transport apparatus with multiple independently movable articulated arms
US8752449B2 (en) * 2007-05-08 2014-06-17 Brooks Automation, Inc. Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
WO2009003193A1 (en) 2007-06-27 2008-12-31 Brooks Automation, Inc. Position feedback for self bearing motor
US9752615B2 (en) 2007-06-27 2017-09-05 Brooks Automation, Inc. Reduced-complexity self-bearing brushless DC motor
US8823294B2 (en) 2007-06-27 2014-09-02 Brooks Automation, Inc. Commutation of an electromagnetic propulsion and guidance system
CN101855811B (zh) 2007-06-27 2013-11-20 布鲁克斯自动化公司 具有提升能力和减少的齿槽特性的电机定子
US8283813B2 (en) 2007-06-27 2012-10-09 Brooks Automation, Inc. Robot drive with magnetic spindle bearings
JP5332142B2 (ja) * 2007-06-29 2013-11-06 株式会社Ｉｈｉ 浮上搬送装置
JP2011514652A (ja) 2007-07-17 2011-05-06 ブルックス オートメーション インコーポレイテッド チャンバ壁に一体化されたモータを伴う基板処理装置
JPWO2009034795A1 (ja) * 2007-09-10 2010-12-24 株式会社アルバック 基板搬送ロボット、真空処理装置
KR100980283B1 (ko) * 2008-02-12 2010-09-06 주식회사 뉴파워 프라즈마 기판 이송 장치 및 이를 구비한 기판 처리 시스템
JP5212624B2 (ja) * 2008-06-24 2013-06-19 日本精工株式会社 多軸モータ
KR101205364B1 (ko) * 2010-05-13 2012-11-28 삼성중공업 주식회사 탈부착형 ４절 링크기구 구동장치를 갖는 산업용 로봇
JP2012015272A (ja) * 2010-06-30 2012-01-19 Ulvac Japan Ltd 処理装置及び搬送装置
CN102554909A (zh) * 2010-12-15 2012-07-11 沈阳新松机器人自动化股份有限公司 一种平面多关节型机器人手臂组件
US8918203B2 (en) 2011-03-11 2014-12-23 Brooks Automation, Inc. Substrate processing apparatus
US10476354B2 (en) 2011-09-16 2019-11-12 Persimmon Technologies Corp. Robot drive with isolated optical encoder
US20130069450A1 (en) 2011-09-16 2013-03-21 Persimmon Technologies, Corp. Robot Drive With Passive Rotor
JP5845061B2 (ja) * 2011-11-07 2016-01-20 ヤマハ発動機株式会社 クリーンロボット
CN103192384B (zh) * 2013-03-11 2015-08-19 上海交通大学 一种集成旋转变压器的静态真空轴系装置
CN103410561B (zh) * 2013-08-14 2015-09-16 山西潞安环保能源开发股份有限公司常村煤矿 自移式皮带机尾
CN105328713B (zh) * 2015-11-16 2018-05-22 合肥欣奕华智能机器有限公司 一种机械臂及搬运机器人
JP7519923B2 (ja) * 2021-01-12 2024-07-22 東京エレクトロン株式会社 基板搬送装置、基板搬送方法、および基板処理システム
KR102307690B1 (ko) * 2021-06-25 2021-10-05 (주) 티로보틱스 진공 챔버에서 기판을 이송하기 위한 기판 이송 로봇
CN116332060A (zh) * 2022-12-28 2023-06-27 湖南中联重科应急装备有限公司 折叠臂架、折叠臂架控制方法、臂架总成及工程车辆
KR20260001348A (ko) * 2024-06-27 2026-01-05 현대모비스 주식회사 매니퓰레이터 로봇

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WO1994023911A1 (en) * 1993-04-16 1994-10-27 Brooks Automation, Inc. Articulated arm transfer device
JP3204115B2 (ja) * 1996-01-25 2001-09-04 ダイキン工業株式会社 ワーク搬送ロボット
US6102164A (en) * 1996-02-28 2000-08-15 Applied Materials, Inc. Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers
US5954840A (en) * 1996-06-13 1999-09-21 Genmark Automation Universally tiltable Z axis drive arm
JPH10249757A (ja) 1997-03-18 1998-09-22 Komatsu Ltd 搬送用ロボット
US6191510B1 (en) * 1997-12-19 2001-02-20 3M Innovative Properties Company Internally damped stator, rotor, and transformer and a method of making
JPH11198070A (ja) * 1998-01-12 1999-07-27 Shin Meiwa Ind Co Ltd 搬送装置
JP2000042952A (ja) * 1998-07-27 2000-02-15 Hitachi Ltd 搬送装置及び搬送方法
US6464448B1 (en) * 1998-09-01 2002-10-15 Brooks Automation, Inc. Substrate transport apparatus
US20010033788A1 (en) * 1998-09-03 2001-10-25 Pietrantonio Antonio F. Dual multitran robot arm
US6485250B2 (en) * 1998-12-30 2002-11-26 Brooks Automation Inc. Substrate transport apparatus with multiple arms on a common axis of rotation
JP2001118905A (ja) * 1999-10-20 2001-04-27 Hitachi Ltd 搬送方法及び搬送装置
JP4489999B2 (ja) 2000-10-24 2010-06-23 株式会社アルバック 搬送装置及び真空処理装置
US7036207B2 (en) * 2001-03-02 2006-05-02 Encap Motor Corporation Stator assembly made from a plurality of toroidal core segments and motor using same
JP4207530B2 (ja) * 2002-10-28 2009-01-14 東京エレクトロン株式会社 被処理体の搬送機構

Also Published As

Publication number Publication date
TWI371357B (enExample) 2012-09-01
JP2006013371A (ja) 2006-01-12
KR101205754B1 (ko) 2012-11-28
CN100584546C (zh) 2010-01-27
KR20060049652A (ko) 2006-05-19
US20050286993A1 (en) 2005-12-29
TW200603965A (en) 2006-02-01
US7645112B2 (en) 2010-01-12
CN1715007A (zh) 2006-01-04

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