CN100584546C - 移送装置及其控制方法以及真空处理装置 - Google Patents

移送装置及其控制方法以及真空处理装置 Download PDF

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Publication number
CN100584546C
CN100584546C CN200510081127A CN200510081127A CN100584546C CN 100584546 C CN100584546 C CN 100584546C CN 200510081127 A CN200510081127 A CN 200510081127A CN 200510081127 A CN200510081127 A CN 200510081127A CN 100584546 C CN100584546 C CN 100584546C
Authority
CN
China
Prior art keywords
aforementioned
arm
transfer device
linkage
handover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN200510081127A
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English (en)
Chinese (zh)
Other versions
CN1715007A (zh
Inventor
南展史
吾乡健二
川口崇文
小池土志夫
汤山纯平
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Ulvac Inc
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Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of CN1715007A publication Critical patent/CN1715007A/zh
Application granted granted Critical
Publication of CN100584546C publication Critical patent/CN100584546C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20329—Joint between elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Dynamo-Electric Clutches, Dynamo-Electric Brakes (AREA)
CN200510081127A 2004-06-29 2005-06-28 移送装置及其控制方法以及真空处理装置 Expired - Lifetime CN100584546C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP191946/04 2004-06-29
JP2004191946A JP4732716B2 (ja) 2004-06-29 2004-06-29 搬送装置及びその制御方法並びに真空処理装置

Publications (2)

Publication Number Publication Date
CN1715007A CN1715007A (zh) 2006-01-04
CN100584546C true CN100584546C (zh) 2010-01-27

Family

ID=35505939

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200510081127A Expired - Lifetime CN100584546C (zh) 2004-06-29 2005-06-28 移送装置及其控制方法以及真空处理装置

Country Status (5)

Country Link
US (1) US7645112B2 (enExample)
JP (1) JP4732716B2 (enExample)
KR (1) KR101205754B1 (enExample)
CN (1) CN100584546C (enExample)
TW (1) TW200603965A (enExample)

Cited By (1)

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WO2014139293A1 (zh) * 2013-03-11 2014-09-18 上海交通大学 一种集成旋转变压器的静态真空轴系装置

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KR100841741B1 (ko) * 2007-04-04 2008-06-27 주식회사 싸이맥스 진공처리장치
US7946800B2 (en) * 2007-04-06 2011-05-24 Brooks Automation, Inc. Substrate transport apparatus with multiple independently movable articulated arms
US8752449B2 (en) * 2007-05-08 2014-06-17 Brooks Automation, Inc. Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
WO2009003193A1 (en) 2007-06-27 2008-12-31 Brooks Automation, Inc. Position feedback for self bearing motor
US9752615B2 (en) 2007-06-27 2017-09-05 Brooks Automation, Inc. Reduced-complexity self-bearing brushless DC motor
US8823294B2 (en) 2007-06-27 2014-09-02 Brooks Automation, Inc. Commutation of an electromagnetic propulsion and guidance system
CN101855811B (zh) 2007-06-27 2013-11-20 布鲁克斯自动化公司 具有提升能力和减少的齿槽特性的电机定子
US8283813B2 (en) 2007-06-27 2012-10-09 Brooks Automation, Inc. Robot drive with magnetic spindle bearings
JP5332142B2 (ja) * 2007-06-29 2013-11-06 株式会社Ｉｈｉ 浮上搬送装置
JP2011514652A (ja) 2007-07-17 2011-05-06 ブルックス オートメーション インコーポレイテッド チャンバ壁に一体化されたモータを伴う基板処理装置
JPWO2009034795A1 (ja) * 2007-09-10 2010-12-24 株式会社アルバック 基板搬送ロボット、真空処理装置
KR100980283B1 (ko) * 2008-02-12 2010-09-06 주식회사 뉴파워 프라즈마 기판 이송 장치 및 이를 구비한 기판 처리 시스템
JP5212624B2 (ja) * 2008-06-24 2013-06-19 日本精工株式会社 多軸モータ
KR101205364B1 (ko) * 2010-05-13 2012-11-28 삼성중공업 주식회사 탈부착형 ４절 링크기구 구동장치를 갖는 산업용 로봇
JP2012015272A (ja) * 2010-06-30 2012-01-19 Ulvac Japan Ltd 処理装置及び搬送装置
CN102554909A (zh) * 2010-12-15 2012-07-11 沈阳新松机器人自动化股份有限公司 一种平面多关节型机器人手臂组件
US8918203B2 (en) 2011-03-11 2014-12-23 Brooks Automation, Inc. Substrate processing apparatus
US10476354B2 (en) 2011-09-16 2019-11-12 Persimmon Technologies Corp. Robot drive with isolated optical encoder
US20130069450A1 (en) 2011-09-16 2013-03-21 Persimmon Technologies, Corp. Robot Drive With Passive Rotor
JP5845061B2 (ja) * 2011-11-07 2016-01-20 ヤマハ発動機株式会社 クリーンロボット
CN103410561B (zh) * 2013-08-14 2015-09-16 山西潞安环保能源开发股份有限公司常村煤矿 自移式皮带机尾
CN105328713B (zh) * 2015-11-16 2018-05-22 合肥欣奕华智能机器有限公司 一种机械臂及搬运机器人
JP7519923B2 (ja) * 2021-01-12 2024-07-22 東京エレクトロン株式会社 基板搬送装置、基板搬送方法、および基板処理システム
KR102307690B1 (ko) * 2021-06-25 2021-10-05 (주) 티로보틱스 진공 챔버에서 기판을 이송하기 위한 기판 이송 로봇
CN116332060A (zh) * 2022-12-28 2023-06-27 湖南中联重科应急装备有限公司 折叠臂架、折叠臂架控制方法、臂架总成及工程车辆
KR20260001348A (ko) * 2024-06-27 2026-01-05 현대모비스 주식회사 매니퓰레이터 로봇

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WO1994023911A1 (en) * 1993-04-16 1994-10-27 Brooks Automation, Inc. Articulated arm transfer device
JP3204115B2 (ja) * 1996-01-25 2001-09-04 ダイキン工業株式会社 ワーク搬送ロボット
US6102164A (en) * 1996-02-28 2000-08-15 Applied Materials, Inc. Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers
US5954840A (en) * 1996-06-13 1999-09-21 Genmark Automation Universally tiltable Z axis drive arm
JPH10249757A (ja) 1997-03-18 1998-09-22 Komatsu Ltd 搬送用ロボット
US6191510B1 (en) * 1997-12-19 2001-02-20 3M Innovative Properties Company Internally damped stator, rotor, and transformer and a method of making
JPH11198070A (ja) * 1998-01-12 1999-07-27 Shin Meiwa Ind Co Ltd 搬送装置
JP2000042952A (ja) * 1998-07-27 2000-02-15 Hitachi Ltd 搬送装置及び搬送方法
US6464448B1 (en) * 1998-09-01 2002-10-15 Brooks Automation, Inc. Substrate transport apparatus
US20010033788A1 (en) * 1998-09-03 2001-10-25 Pietrantonio Antonio F. Dual multitran robot arm
US6485250B2 (en) * 1998-12-30 2002-11-26 Brooks Automation Inc. Substrate transport apparatus with multiple arms on a common axis of rotation
JP2001118905A (ja) * 1999-10-20 2001-04-27 Hitachi Ltd 搬送方法及び搬送装置
JP4489999B2 (ja) 2000-10-24 2010-06-23 株式会社アルバック 搬送装置及び真空処理装置
US7036207B2 (en) * 2001-03-02 2006-05-02 Encap Motor Corporation Stator assembly made from a plurality of toroidal core segments and motor using same
JP4207530B2 (ja) * 2002-10-28 2009-01-14 東京エレクトロン株式会社 被処理体の搬送機構

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014139293A1 (zh) * 2013-03-11 2014-09-18 上海交通大学 一种集成旋转变压器的静态真空轴系装置

Also Published As

Publication number Publication date
TWI371357B (enExample) 2012-09-01
JP2006013371A (ja) 2006-01-12
KR101205754B1 (ko) 2012-11-28
KR20060049652A (ko) 2006-05-19
JP4732716B2 (ja) 2011-07-27
US20050286993A1 (en) 2005-12-29
TW200603965A (en) 2006-02-01
US7645112B2 (en) 2010-01-12
CN1715007A (zh) 2006-01-04

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