TW200603965A - Transportation device, its control method, and vacuum processing apparatus - Google Patents

Transportation device, its control method, and vacuum processing apparatus

Info

Publication number
TW200603965A
TW200603965A TW094119880A TW94119880A TW200603965A TW 200603965 A TW200603965 A TW 200603965A TW 094119880 A TW094119880 A TW 094119880A TW 94119880 A TW94119880 A TW 94119880A TW 200603965 A TW200603965 A TW 200603965A
Authority
TW
Taiwan
Prior art keywords
driving
transport
driving shafts
transportation device
processing apparatus
Prior art date
Application number
TW094119880A
Other languages
English (en)
Chinese (zh)
Other versions
TWI371357B (enExample
Inventor
Hirofumi Minami
Kenji Ago
Takafumi Kawaguchi
Toshio Koike
Junpei Yuyama
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of TW200603965A publication Critical patent/TW200603965A/zh
Application granted granted Critical
Publication of TWI371357B publication Critical patent/TWI371357B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20329—Joint between elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Dynamo-Electric Clutches, Dynamo-Electric Brakes (AREA)
TW094119880A 2004-06-29 2005-06-15 Transportation device, its control method, and vacuum processing apparatus TW200603965A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004191946A JP4732716B2 (ja) 2004-06-29 2004-06-29 搬送装置及びその制御方法並びに真空処理装置

Publications (2)

Publication Number Publication Date
TW200603965A true TW200603965A (en) 2006-02-01
TWI371357B TWI371357B (enExample) 2012-09-01

Family

ID=35505939

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094119880A TW200603965A (en) 2004-06-29 2005-06-15 Transportation device, its control method, and vacuum processing apparatus

Country Status (5)

Country Link
US (1) US7645112B2 (enExample)
JP (1) JP4732716B2 (enExample)
KR (1) KR101205754B1 (enExample)
CN (1) CN100584546C (enExample)
TW (1) TW200603965A (enExample)

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US10086511B2 (en) 2003-11-10 2018-10-02 Brooks Automation, Inc. Semiconductor manufacturing systems
KR100841741B1 (ko) * 2007-04-04 2008-06-27 주식회사 싸이맥스 진공처리장치
US7946800B2 (en) * 2007-04-06 2011-05-24 Brooks Automation, Inc. Substrate transport apparatus with multiple independently movable articulated arms
US8752449B2 (en) * 2007-05-08 2014-06-17 Brooks Automation, Inc. Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
WO2009003193A1 (en) 2007-06-27 2008-12-31 Brooks Automation, Inc. Position feedback for self bearing motor
US9752615B2 (en) 2007-06-27 2017-09-05 Brooks Automation, Inc. Reduced-complexity self-bearing brushless DC motor
US8823294B2 (en) 2007-06-27 2014-09-02 Brooks Automation, Inc. Commutation of an electromagnetic propulsion and guidance system
CN101855811B (zh) 2007-06-27 2013-11-20 布鲁克斯自动化公司 具有提升能力和减少的齿槽特性的电机定子
US8283813B2 (en) 2007-06-27 2012-10-09 Brooks Automation, Inc. Robot drive with magnetic spindle bearings
JP5332142B2 (ja) * 2007-06-29 2013-11-06 株式会社Ｉｈｉ 浮上搬送装置
JP2011514652A (ja) 2007-07-17 2011-05-06 ブルックス オートメーション インコーポレイテッド チャンバ壁に一体化されたモータを伴う基板処理装置
JPWO2009034795A1 (ja) * 2007-09-10 2010-12-24 株式会社アルバック 基板搬送ロボット、真空処理装置
KR100980283B1 (ko) * 2008-02-12 2010-09-06 주식회사 뉴파워 프라즈마 기판 이송 장치 및 이를 구비한 기판 처리 시스템
JP5212624B2 (ja) * 2008-06-24 2013-06-19 日本精工株式会社 多軸モータ
KR101205364B1 (ko) * 2010-05-13 2012-11-28 삼성중공업 주식회사 탈부착형 ４절 링크기구 구동장치를 갖는 산업용 로봇
JP2012015272A (ja) * 2010-06-30 2012-01-19 Ulvac Japan Ltd 処理装置及び搬送装置
CN102554909A (zh) * 2010-12-15 2012-07-11 沈阳新松机器人自动化股份有限公司 一种平面多关节型机器人手臂组件
US8918203B2 (en) 2011-03-11 2014-12-23 Brooks Automation, Inc. Substrate processing apparatus
US10476354B2 (en) 2011-09-16 2019-11-12 Persimmon Technologies Corp. Robot drive with isolated optical encoder
US20130069450A1 (en) 2011-09-16 2013-03-21 Persimmon Technologies, Corp. Robot Drive With Passive Rotor
JP5845061B2 (ja) * 2011-11-07 2016-01-20 ヤマハ発動機株式会社 クリーンロボット
CN103192384B (zh) * 2013-03-11 2015-08-19 上海交通大学 一种集成旋转变压器的静态真空轴系装置
CN103410561B (zh) * 2013-08-14 2015-09-16 山西潞安环保能源开发股份有限公司常村煤矿 自移式皮带机尾
CN105328713B (zh) * 2015-11-16 2018-05-22 合肥欣奕华智能机器有限公司 一种机械臂及搬运机器人
JP7519923B2 (ja) * 2021-01-12 2024-07-22 東京エレクトロン株式会社 基板搬送装置、基板搬送方法、および基板処理システム
KR102307690B1 (ko) * 2021-06-25 2021-10-05 (주) 티로보틱스 진공 챔버에서 기판을 이송하기 위한 기판 이송 로봇
CN116332060A (zh) * 2022-12-28 2023-06-27 湖南中联重科应急装备有限公司 折叠臂架、折叠臂架控制方法、臂架总成及工程车辆
KR20260001348A (ko) * 2024-06-27 2026-01-05 현대모비스 주식회사 매니퓰레이터 로봇

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WO1994023911A1 (en) * 1993-04-16 1994-10-27 Brooks Automation, Inc. Articulated arm transfer device
JP3204115B2 (ja) * 1996-01-25 2001-09-04 ダイキン工業株式会社 ワーク搬送ロボット
US6102164A (en) * 1996-02-28 2000-08-15 Applied Materials, Inc. Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers
US5954840A (en) * 1996-06-13 1999-09-21 Genmark Automation Universally tiltable Z axis drive arm
JPH10249757A (ja) 1997-03-18 1998-09-22 Komatsu Ltd 搬送用ロボット
US6191510B1 (en) * 1997-12-19 2001-02-20 3M Innovative Properties Company Internally damped stator, rotor, and transformer and a method of making
JPH11198070A (ja) * 1998-01-12 1999-07-27 Shin Meiwa Ind Co Ltd 搬送装置
JP2000042952A (ja) * 1998-07-27 2000-02-15 Hitachi Ltd 搬送装置及び搬送方法
US6464448B1 (en) * 1998-09-01 2002-10-15 Brooks Automation, Inc. Substrate transport apparatus
US20010033788A1 (en) * 1998-09-03 2001-10-25 Pietrantonio Antonio F. Dual multitran robot arm
US6485250B2 (en) * 1998-12-30 2002-11-26 Brooks Automation Inc. Substrate transport apparatus with multiple arms on a common axis of rotation
JP2001118905A (ja) * 1999-10-20 2001-04-27 Hitachi Ltd 搬送方法及び搬送装置
JP4489999B2 (ja) 2000-10-24 2010-06-23 株式会社アルバック 搬送装置及び真空処理装置
US7036207B2 (en) * 2001-03-02 2006-05-02 Encap Motor Corporation Stator assembly made from a plurality of toroidal core segments and motor using same
JP4207530B2 (ja) * 2002-10-28 2009-01-14 東京エレクトロン株式会社 被処理体の搬送機構

Also Published As

Publication number Publication date
TWI371357B (enExample) 2012-09-01
JP2006013371A (ja) 2006-01-12
KR101205754B1 (ko) 2012-11-28
CN100584546C (zh) 2010-01-27
KR20060049652A (ko) 2006-05-19
JP4732716B2 (ja) 2011-07-27
US20050286993A1 (en) 2005-12-29
US7645112B2 (en) 2010-01-12
CN1715007A (zh) 2006-01-04

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