JP4715652B2 - 圧電振動片 - Google Patents

圧電振動片 Download PDF

Info

Publication number
JP4715652B2
JP4715652B2 JP2006181525A JP2006181525A JP4715652B2 JP 4715652 B2 JP4715652 B2 JP 4715652B2 JP 2006181525 A JP2006181525 A JP 2006181525A JP 2006181525 A JP2006181525 A JP 2006181525A JP 4715652 B2 JP4715652 B2 JP 4715652B2
Authority
JP
Japan
Prior art keywords
electrode
piezoelectric
vibrating
thin film
vibrating piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006181525A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008011348A5 (enrdf_load_stackoverflow
JP2008011348A (ja
Inventor
隆 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2006181525A priority Critical patent/JP4715652B2/ja
Publication of JP2008011348A publication Critical patent/JP2008011348A/ja
Publication of JP2008011348A5 publication Critical patent/JP2008011348A5/ja
Application granted granted Critical
Publication of JP4715652B2 publication Critical patent/JP4715652B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2006181525A 2006-06-30 2006-06-30 圧電振動片 Expired - Fee Related JP4715652B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006181525A JP4715652B2 (ja) 2006-06-30 2006-06-30 圧電振動片

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006181525A JP4715652B2 (ja) 2006-06-30 2006-06-30 圧電振動片

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010098563A Division JP2010206821A (ja) 2010-04-22 2010-04-22 圧電振動片

Publications (3)

Publication Number Publication Date
JP2008011348A JP2008011348A (ja) 2008-01-17
JP2008011348A5 JP2008011348A5 (enrdf_load_stackoverflow) 2009-07-16
JP4715652B2 true JP4715652B2 (ja) 2011-07-06

Family

ID=39069118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006181525A Expired - Fee Related JP4715652B2 (ja) 2006-06-30 2006-06-30 圧電振動片

Country Status (1)

Country Link
JP (1) JP4715652B2 (enrdf_load_stackoverflow)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5316748B2 (ja) * 2008-03-28 2013-10-16 セイコーエプソン株式会社 振動片の製造方法
TW201032470A (en) 2008-10-24 2010-09-01 Seiko Epson Corp Bending vibration piece, bending vibrator, and piezoelectric device
JP5381149B2 (ja) * 2009-02-20 2014-01-08 セイコーエプソン株式会社 振動片および振動子
JP2010226609A (ja) * 2009-03-25 2010-10-07 Seiko Epson Corp 振動片および振動子
JP2011004035A (ja) 2009-06-17 2011-01-06 Seiko Epson Corp 屈曲振動片および屈曲振動片の製造方法
JP2011082945A (ja) 2009-09-08 2011-04-21 Seiko Epson Corp 屈曲振動片、屈曲振動子、および電子デバイス
JP2012147347A (ja) * 2011-01-14 2012-08-02 Seiko Epson Corp 振動片、振動子、発振器及び電子機器
JP5685962B2 (ja) 2011-02-02 2015-03-18 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
US8581669B2 (en) 2011-02-02 2013-11-12 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
JP5923862B2 (ja) * 2011-03-18 2016-05-25 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
JP6482169B2 (ja) 2013-07-19 2019-03-13 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器及び移動体
JP6435596B2 (ja) 2013-08-09 2018-12-12 セイコーエプソン株式会社 振動素子、振動デバイス、電子機器、および移動体

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5851686B2 (ja) * 1976-09-03 1983-11-17 セイコーインスツルメンツ株式会社 音叉型水晶振動子
JPS5343490A (en) * 1976-10-01 1978-04-19 Seiko Instr & Electronics Ltd Tuning fork type crystal vibrator
JPS5851687B2 (ja) * 1976-10-22 1983-11-17 セイコーインスツルメンツ株式会社 音叉型水晶振動子
JPS56136016A (en) * 1980-03-26 1981-10-23 Seiko Instr & Electronics Ltd Tuning fork type piezoelectric oscillator
JP3736257B2 (ja) * 2000-02-07 2006-01-18 セイコーエプソン株式会社 振動子及び角速度検出装置
JP3767303B2 (ja) * 2000-02-22 2006-04-19 セイコーエプソン株式会社 角速度検出装置
JP3972790B2 (ja) * 2001-11-27 2007-09-05 松下電器産業株式会社 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ
JP3791485B2 (ja) * 2002-06-04 2006-06-28 株式会社村田製作所 音叉形振動子およびそれを用いた振動ジャイロおよびそれを用いた電子装置および音叉形振動子の製造方法
JP4507578B2 (ja) * 2003-12-10 2010-07-21 株式会社村田製作所 角速度センサ
JP2005345416A (ja) * 2004-06-07 2005-12-15 Murata Mfg Co Ltd 角速度センサ

Also Published As

Publication number Publication date
JP2008011348A (ja) 2008-01-17

Similar Documents

Publication Publication Date Title
JP4715652B2 (ja) 圧電振動片
CN102035499B (zh) 振动片、振子、振荡器以及电子设备
JP4211578B2 (ja) 圧電振動片とその製造方法、ならびに圧電デバイスおよび圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
JP4442521B2 (ja) 圧電振動片および圧電デバイス
JP5168002B2 (ja) 振動子及び発振器
JP5617392B2 (ja) 振動片、振動子及び発振器
CN102340291B (zh) 弯曲振动片、振子、振荡器以及电子设备
WO2004064252A1 (ja) 圧電振動片と圧電振動片を利用した圧電デバイス、ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
JP4214412B2 (ja) 圧電振動片と圧電デバイスならびにジャイロセンサ
JP5531319B2 (ja) 水晶振動子と水晶ユニットと水晶発振器の各製造方法
JP2011151780A (ja) 屈曲振動片、振動デバイス及び電子機器
US11824521B2 (en) Vibration substrate having a pair of holding portions and a beam portion connecting the holding portions, vibrator, and vibrator unit
JP3941736B2 (ja) 水晶振動片とその製造方法及び水晶振動片を利用した水晶デバイス、ならびに水晶デバイスを利用した携帯電話装置および水晶デバイスを利用した電子機器
JP2008205888A (ja) 圧電振動片の製造方法及び圧電振動素子
JP2010206821A (ja) 圧電振動片
JP2014165910A (ja) 振動片、振動子、発振器、電子機器及び移動体
JP4784168B2 (ja) 圧電振動片および圧電デバイス
JP2009100076A (ja) 圧電振動片
JP2007158566A (ja) 圧電振動片および圧電デバイス
JP2011254351A (ja) 圧電振動片、圧電振動子および圧電発振器
JP4548077B2 (ja) 水晶振動片および水晶振動子の製造方法
JP6064342B2 (ja) 振動片および電子機器
JP4222288B2 (ja) 圧電振動片および圧電デバイス
WO2019188078A1 (ja) 振動素子
JP4697190B2 (ja) 水晶振動子と水晶ユニットの各製造方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090602

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20090602

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100223

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100422

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100720

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20101019

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20110118

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110118

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20110118

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20110126

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20110301

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20110314

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140408

Year of fee payment: 3

LAPS Cancellation because of no payment of annual fees