JP4645398B2 - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
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Description
このボンディングパッドのため半導体装置が大きくなるという問題を改善するために、図37に示す特許文献1に開示された技術が提案されている。この特許文献1のものによれば、能動回路上にポリイミド層を介してボンディングパッドを形成するとともに接続孔によりボンディングパッドと能動回路とを電気的に接続した後、ボンディングパッドにワイヤをボンディングするというものであり、この結果として、能動回路領域の周辺部に配置されたボンディングパッドを削減できるというものである。
ボンディングパッドのため半導体装置が大きくなるという基本的な問題の改善に加え、ボンディング衝撃によりボンディングパッドと能動回路との接続部での接続不良が発生するという特許文献1の不具合を改善するために、図38に示すような特許文献2に開示された技術が提案されている。
以下、添付図面を参照しつつ、本発明の実施例を説明する。
図1は、本発明に係る能動回路上に配置されたボンディングパッド部の第1の実施例を示す模式的な平面図である。また、図2は図1中A−A´線で示す部分の模式的な断面図である。
図5は、本発明に係る能動回路上に配置されたボンディングパッド部の第2の実施例を示す模式的な断面図である。
本発明に係る第3の実施例の能動回路上に配置されたボンディングパッド部の模式的な断面図を図6に示す。
本発明に係る第4の実施例の能動回路上に配置されたボンディングパッド部の模式的な断面図を図7に示すとともに図7中のB部の詳細図を図8に示す。
本発明に係る第5の実施例の能動回路上に配置されたボンディングパッド部の模式的な断面図を図9に示すとともに図9中のC部の拡大断面例を図10に示す。
図11は、本発明に係る能動回路上に配置されたボンディングパッド部の第6の実施例を示す模式的な平面図である。また、図12は第6の実施例を示す模式的な平面図11のD−D´での断面図である。
図13は、本発明に係る能動回路上に配置されたボンディングパッド部の第7の実施例を示す模式的な平面図である。また、図14は第7の実施例を示す模式的な平面図13のE−E´での断面図であり、図15は図14中のF部の拡大断面例を示す。
本発明による第1の実施例と第2の実施例の製造方法について、第1の実施例を例に図16から図20を参照しつつ第1の実施方法を説明する。
本発明による第3の実施例と第7の実施例の製造方法について、第7の実施例を例に図21から図29を参照しつつ第2の実施方法を説明する。
本発明による第4の実施例と第7の実施例に対する別の製造方法について、第7の実施例を例に図30から図36を参照しつつ第3の実施方法を説明する。
Claims (15)
- 半導体基板の表面に設けられた能動回路と、
前記能動回路が機能するよう接続された第1の配線と、
前記第1の配線で結線された前記能動回路を被覆した層間絶縁層の上面に設けられ、前記層間絶縁層の一部に設けられた第1の接続孔を介して前記第1の配線と接続された第2の配線と、
前記層間絶縁層上に形成され平面構造において複数の開口を持つ衝撃吸収梁と、
前記第2の配線および前記衝撃吸収梁を設けた前記能動回路を保護するよう前記衝撃吸収梁上に形成された保護膜と、
前記衝撃吸収梁上を十分に被覆するよう前記保護膜上に形成された厚いパッド電極と、
前記厚いパッド電極の上面および全側面を被覆し且つその一部が前記保護膜に設けられた第2の接続孔を介して前記第2の配線と接続された被覆金属配線層と、
前記能動回路を被覆し且つ前記衝撃吸収梁上に形成された前記厚いパッド電極へのボンディング接続時に必要な領域を開口した保護樹脂層と
を備えたことを特徴とする半導体装置。 - 前記厚いパッド電極の膜厚が、前記衝撃吸収梁を被覆する前記保護膜の表面段差以上の膜厚であることを特徴とする請求項1に記載の半導体装置。
- 前記厚いパッド電極が、アルミ合金,銅,ニッケル,クロム,タングステン,チタン,チタン窒化膜,チタンタングステンのいずれか、または、これらのうちの2以上のものの積層膜で構成されていることを特徴とする請求項1または請求項2に記載の半導体装置。
- 前記被覆金属配線層が、アルミ,アルミ合金,金のいずれか,アルミまたはアルミ合金とチタン,チタン窒化膜,チタンタングステンのいずれかの積層膜で構成されていることを特徴とする請求項1から請求項3のいずれかに記載の半導体装置。
- 半導体基板の表面に設けられた能動回路と、
前記能動回路が機能するよう接続された第1の配線と、
前記第1の配線で結線された前記能動回路を被覆した層間絶縁層の上面に設けられ、前記層間絶縁層の一部に設けられた第1の接続孔を介して前記第1の配線と接続された第2の配線と、
前記層間絶縁層上に形成され平面構造において複数の開口を持つ衝撃吸収梁と、
前記第2の配線および前記衝撃吸収梁を設けた前記能動回路を保護するよう前記衝撃吸収梁上に形成された保護膜と、
前記保護膜上に形成され、前記保護膜との密着性を向上するための密着強化金属層と、
厚いパッド電極を形成するために前記密着強化金属層上に形成されたシード電極層を介して前記衝撃吸収梁上を十分に被覆するよう前記保護膜上に形成された厚いパッド電極と、
前記厚いパッド電極の上面および全側面を被覆し且つその一部が前記密着強化金属層と前記シード電極層とを介して保護膜に設けられた第2の接続孔により前記第2の配線と接続された被覆金属配線層と、
前記能動回路を被覆し且つ前記衝撃吸収梁上に形成された前記厚いパッド電極へのボンディング接続時に必要な領域を開口した保護樹脂層と
を備えたことを特徴とする半導体装置。 - 半導体基板の表面に設けられた能動回路と、
前記能動回路が機能するよう接続された第1の配線と、
前記第1の配線で結線された前記能動回路を被覆した層間絶縁層の上面に設けられ、前記層間絶縁層の一部に設けられた第1の接続孔を介して前記第1の配線と接続された第2の配線と、
前記層間絶縁層上に形成され平面構造において複数の開口を持つ衝撃吸収梁と、
前記第2の配線および前記衝撃吸収梁を設けた前記能動回路を保護するよう前記衝撃吸収梁上に形成された保護膜と、
前記保護膜との密着性を向上するために前記保護膜上に形成された密着強化金属層を介して前記衝撃吸収梁上を十分に被覆するよう前記保護膜上に形成された厚いパッド電極と、
前記厚いパッド電極の上面および全側面を被覆し且つその一部が密着強化金属層を介して保護膜に設けられた第2の接続孔により前記第2の配線と接続された被覆金属配線層と、
前記能動回路を被覆し且つ前記衝撃吸収梁上に形成された前記厚いパッド電極へのボンディング接続時に必要な領域を開口した保護樹脂層と
を備えたことを特徴とする半導体装置。 - 前記シード電極層および前記厚いパッド電極を、前記密着強化金属層と前記被覆金属配線層により封止することを特徴とする請求項6に記載の半導体装置。
- 前記密着強化金属層が、チタン,チタン窒化膜,チタンタングステンのいずれか、または、これらのうちの2以上のものの積層膜で構成されていることを特徴とする請求項5から請求項7のいずれかに記載の半導体装置。
- 前記シード電極層の材質と前記厚いパッド電極の材質が、同一材質であることを特徴とする請求項5から請求項8のいずれかに記載の半導体装置。
- 前記厚いパッド電極の材質が銅であり、その膜厚が前記衝撃吸収梁を被覆する前記保護膜の表面段差以上の膜厚であることを特徴とする請求項5から請求項9のいずれかに記載の半導体装置。
- 前記被覆金属配線層が、上層がアルミまたはアルミ合金で構成され、下層がチタン,チタン窒化膜,チタンタングステンのいずれかで構成した積層膜であることを特徴とする請求項5から請求項10のいずれかに記載の半導体装置。
- 前記衝撃吸収梁の開口形状が円形であることを特徴とする請求項1、5、6のいずれかに記載の半導体装置。
- 前記衝撃吸収梁の開口形状が多角形であることを特徴とする請求項1、5、6のいずれかに記載の半導体装置。
- 前記衝撃吸収梁の材質が、前記第2の配線の材質と同じであることを特徴とする請求項1、5、6のいずれかに記載の半導体装置。
- 前記衝撃吸収梁の主となる材質が、アルミまたはアルミ合金であることを特徴とする請求項1、5、6のいずれかに記載の半導体装置。
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JP5520465B2 (ja) * | 2008-09-30 | 2014-06-11 | 京セラクリスタルデバイス株式会社 | ウェハの金属材料埋込装置及びウェハの金属材料埋込方法 |
JP5368046B2 (ja) * | 2008-09-30 | 2013-12-18 | 京セラクリスタルデバイス株式会社 | ウェハの金属材料埋込装置 |
EP2444999A4 (en) * | 2009-06-18 | 2012-11-14 | Rohm Co Ltd | SEMICONDUCTOR DEVICE |
JP2015135839A (ja) * | 2014-01-16 | 2015-07-27 | オリンパス株式会社 | 半導体装置、固体撮像装置、および撮像装置 |
DE112016005768B4 (de) * | 2015-12-18 | 2023-03-16 | Rohm Co., Ltd. | Halbleiterbauteil |
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