JP2015135839A - 半導体装置、固体撮像装置、および撮像装置 - Google Patents
半導体装置、固体撮像装置、および撮像装置 Download PDFInfo
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Abstract
【解決手段】第1の基板10、第2の基板20は、半導体層100,200と、信号を伝送する配線111,211が形成され、半導体層100,200と重なる配線層110,210と、を有する。接続部30は、複数の基板の隣接する2枚の基板を電気的に接続する。樹脂層40は、複数の基板の隣接する2枚の基板の間に配置され、接続部30の表面の少なくとも一部を覆う。第1の開口部501は、第1の基板10の半導体層100に形成され、第1の基板10の配線層110を露出させる。第1の基板10の主面に正対する方向に見た第1の開口部501の形状が五角形以上の多角形または円である。
【選択図】図1
Description
まず、本発明の第1の実施形態を説明する。本実施形態では、本発明を、半導体装置の一例である固体撮像装置に適用した例を説明する。
次に、本発明の第2の実施形態を説明する。本実施形態では、本発明を、半導体装置の一例である固体撮像装置に適用した例を説明する。
次に、本発明の第3の実施形態を説明する。本実施形態では、本発明を、固体撮像装置を有する撮像装置に適用した例を説明する。
20,21 第2の基板
30 接続部
40 樹脂層
50,51 パッド領域
60 ワイヤー
61 スタッドバンプ
70 画素部
71 垂直走査回路
72 列処理回路
73 水平走査回路
74 出力アンプ
81 レンズ
82 撮像部
83 画像処理部
84 表示部
85 駆動制御部
86 レンズ制御部
87 カメラ制御部
88 カメラ操作部
89 メモリカード
100,105,200,205 半導体層
101 光電変換部
110,115,210,215 配線層
111,211 配線
112,212 ビア
300,301 接続電極
302 バンプ
500,510 開口部
501,511 第1の開口部
502,512 第2の開口部
700 画素
701 電流源
702 信号線
703 垂直信号線
Claims (8)
- 半導体層と、
信号を伝送する配線が形成され、前記半導体層と重なる配線層と、
を有する複数の基板であって、それぞれの基板が主面を横切る方向に離れて重なり、前記複数の基板の両端のいずれかに位置する基板であるエッジ基板の前記半導体層と、前記エッジ基板に隣接する基板との間に前記エッジ基板の前記配線層が配置される前記複数の基板と、
前記複数の基板の隣接する2枚の基板を電気的に接続する接続部と、
前記複数の基板の隣接する2枚の基板の間に配置され、前記接続部の表面の少なくとも一部を覆う樹脂層と、
前記エッジ基板の前記半導体層に形成され、前記エッジ基板の前記配線層を露出させる第1の開口部であって、前記エッジ基板の主面に正対する方向に見た形状が五角形以上の多角形または円である前記第1の開口部と、
を有する半導体装置。 - 前記エッジ基板の主面に正対する方向に見た場合に前記第1の開口部の中心から前記第1の開口部の複数の角部のそれぞれまでの距離が同一である請求項1に記載の半導体装置。
- 前記エッジ基板の主面に正対する方向に見た前記第1の開口部の形状が五角形以上の正多角形である請求項1に記載の半導体装置。
- 前記エッジ基板の前記配線層に、前記第1の開口部と少なくとも一部が重なるように形成され、前記配線を露出させる第2の開口部であって、前記エッジ基板の主面に正対する方向に見た形状が五角形以上の多角形または円である前記第2の開口部をさらに有する請求項1に記載の半導体装置。
- 前記多角形の全ての内角が90度以上である請求項1に記載の半導体装置。
- 請求項1に記載の半導体装置を有し、
前記エッジ基板の前記半導体層に、光を信号に変換する光電変換部が形成され、
前記エッジ基板とは異なる基板の前記半導体層および前記配線層に、前記光電変換部で生成された信号を処理する信号処理部が形成されている固体撮像装置。 - 請求項1に記載の半導体装置を有し、
前記エッジ基板とは異なる基板の前記半導体層に、光を信号に変換する光電変換部が形成され、
前記エッジ基板の前記半導体層および前記配線層に、前記光電変換部で生成された信号を処理する信号処理部が形成されている固体撮像装置。 - 請求項6または請求項7に記載の固体撮像装置を有する撮像装置。
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JP2014005596A JP2015135839A (ja) | 2014-01-16 | 2014-01-16 | 半導体装置、固体撮像装置、および撮像装置 |
PCT/JP2015/050617 WO2015108024A1 (ja) | 2014-01-16 | 2015-01-13 | 半導体装置、固体撮像装置、および撮像装置 |
US15/172,865 US20160284754A1 (en) | 2014-01-16 | 2016-06-03 | Semiconductor device, solid-state imaging device, and imaging apparatus |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2017130660A (ja) * | 2016-01-19 | 2017-07-27 | 三星電子株式会社Samsung Electronics Co.,Ltd. | Tsv構造体を有した多重積層素子 |
JP2018060879A (ja) * | 2016-10-04 | 2018-04-12 | ラピスセミコンダクタ株式会社 | 半導体装置 |
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JP5966048B1 (ja) * | 2015-04-09 | 2016-08-10 | 株式会社フジクラ | 撮像モジュール及び内視鏡 |
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