JP4617359B2 - リニア超音波圧電モータ - Google Patents
リニア超音波圧電モータ Download PDFInfo
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- JP4617359B2 JP4617359B2 JP2007528622A JP2007528622A JP4617359B2 JP 4617359 B2 JP4617359 B2 JP 4617359B2 JP 2007528622 A JP2007528622 A JP 2007528622A JP 2007528622 A JP2007528622 A JP 2007528622A JP 4617359 B2 JP4617359 B2 JP 4617359B2
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- piezoelectric
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- piezoelectric motor
- resonance plate
- motor
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- 230000005284 excitation Effects 0.000 claims description 29
- 239000000463 material Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 230000000295 complement effect Effects 0.000 claims description 2
- 230000002441 reversible effect Effects 0.000 claims description 2
- 238000002604 ultrasonography Methods 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000010363 phase shift Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/002—Driving devices, e.g. vibrators using only longitudinal or radial modes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/005—Mechanical details, e.g. housings
- H02N2/0065—Friction interface
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/0075—Electrical details, e.g. drive or control circuits or methods
- H02N2/008—Means for controlling vibration frequency or phase, e.g. for resonance tracking
Description
Claims (10)
- プレート形状の長方形の共振板(5)と摩擦接触状態にあって、上記摩擦の面(13)は上記共振板(5)の長手方向の狭い側面(11)の少なくとも一方によって形成される移動エレメント(4)と、上記共振板(5)の長手方向の広い側面(9,10)に配置される対向する電極(7,8)と、前記共振板(5)と電極(7,8)とで形成され且つ音響振動を生成する発生器(6)とを備え、前記発生器(6)を複数個備え、当該複数個の発生器(6)のそれぞれは、前記共振板(5)と対称的に交差する平面(S)に対して非対象に配置され、かつ、前記電極(7,8)が電気励振源(18)に接続される、リニア超音波の圧電モータであって、
前記発生器(6)は、前記対称的に交差する平面(S)の両側にそれぞれ配置され、それぞれの動作方向のための音響振動を生成し、
前記複数の発生器(6)は、切換スイッチ手段(19)によって別々に制御され、前記移動エレメント(4)の動作方向を反転させ、かつ、前記音響振動が非対称空間定在波を形成することを特徴とするリニア超音波の圧電モータ。 - 前記複数の発生器(6)は、1つの共通の電極(8)を有する、請求項1記載の圧電モータ。
- 前記長手方向の狭い側面(11)の少なくとも一方は、案内溝、案内チャネルまたは案内レール(12,30)を備える、請求項1または2記載の圧電モータ。
- 上記案内溝、上記案内チャネルまたは上記案内レール(12,30)は耐摩耗性のコーティング(14)を有する、または耐摩耗性の材料で製造されることを特徴とする、請求項3記載の圧電モータ。
- 上記移動エレメント(4)は、上記長手方向の狭い側面(11)へ機械的かつ機能的に接続されるばね挟み(17)として具現されることを特徴とする請求項1から4のいずれか1項に記載の圧電モータ。
- 上記ばね挟み(17)はU字形またはV字形であって自由な脚で摩擦エレメント(16)を運び、上記摩擦エレメント(16)は上記案内溝、案内チャネルまたは案内レール(12,30)の各々との相補形状を有することを特徴とする、請求項5記載の圧電モータ。
- 上記ばね挟み(17)の脚は、具体的にはレンズ(36)である移動エレメントのホルダ(37)として形成される取付け部分または取付けセクションを含むことを特徴とする、請求項6記載の圧電モータ。
- 上記共振板(5)は単一の圧電体で製造されることを特徴とする、請求項1から7のいずれか1項に記載の圧電モータ。
- 上記共振板(5)は非圧電材料で構成され、上記音響振動を生成するための複数の発生器(6)は上記共振板(5)へ機械的に固定されて接続されることを特徴とする、請求項1から8のいずれか1項に記載の圧電モータ。
- 請求項1から9のいずれか1項に記載されたリニア超音波の圧電モータを電気的に作動させるための方法であって、
励振源(18)は、固定動作周波数(Fa)を有する電流フィードバック自動調整型発生器として具現され、上記動作周波数(Fa)は、非対称空間定在波の励振を引き起こす圧電振動子の共振周波数によって予め定義され、
前記固定動作周波数(Fa)が、以下で定義される、
(数1) Fa=m・N/L
(式中、L=共振板の長さ、N=周波数定数、m=定在波の次数である)
ことを特徴とする方法。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102004042767 | 2004-09-03 | ||
DE102004050108 | 2004-10-14 | ||
DE102004059429A DE102004059429B4 (de) | 2004-09-03 | 2004-12-09 | Linearer Ultraschall-Piezomotor |
PCT/EP2005/004236 WO2006027031A1 (de) | 2004-09-03 | 2005-04-20 | Linearer ultraschallmotor |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008512073A JP2008512073A (ja) | 2008-04-17 |
JP4617359B2 true JP4617359B2 (ja) | 2011-01-26 |
Family
ID=36011712
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007528622A Active JP4617359B2 (ja) | 2004-09-03 | 2005-04-20 | リニア超音波圧電モータ |
Country Status (6)
Country | Link |
---|---|
US (1) | US7834518B2 (ja) |
EP (1) | EP1656705B1 (ja) |
JP (1) | JP4617359B2 (ja) |
AT (1) | ATE401669T1 (ja) |
DE (2) | DE102004059429B4 (ja) |
WO (1) | WO2006027031A1 (ja) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE202005021150U1 (de) * | 2005-03-21 | 2007-04-05 | Physik Instrumente (Pi) Gmbh & Co. Kg | Optische Objektivbaugruppe |
DE102005053018A1 (de) * | 2005-10-21 | 2007-04-26 | Physik Instrumente (Pi) Gmbh & Co. Kg | Präzisionsminiaturultraschalllinearmotor |
DE102006025991B4 (de) * | 2006-06-02 | 2012-02-23 | Physik Instrumente (Pi) Gmbh & Co. Kg | Selbsterregender Niederspannungscontroller zur Steuerung eines oder mehrerer Ultraschallmikromotoren |
DE202007005708U1 (de) | 2007-02-28 | 2007-08-09 | Physik Instrumente (Pi) Gmbh & Co. Kg | Linearer Ultraschall-Piezomotor |
DE102008023478A1 (de) * | 2007-11-08 | 2009-05-14 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultraschalllinearantrieb mit hohlzylindrischem Oszillator |
TWI408888B (zh) * | 2008-08-07 | 2013-09-11 | Ind Tech Res Inst | 超音波線性馬達 |
DE102009043901A1 (de) | 2008-08-29 | 2010-05-20 | Inac Computer Gmbh | Stellkondensator |
DE202008017518U1 (de) | 2008-08-29 | 2009-11-26 | Inac Computer Gmbh | Stellkondensator |
DE202009004388U1 (de) | 2009-03-28 | 2009-06-18 | Physik Instrumente (Pi) Gmbh & Co. Kg | Schlossvorrichtung |
DE102009051395A1 (de) * | 2009-11-02 | 2011-05-05 | Physik Instrumente (Pi) Gmbh & Co. Kg | Aktuator |
JP5429141B2 (ja) * | 2010-01-19 | 2014-02-26 | Tdk株式会社 | 圧電アクチュエータ及び圧電アクチュエータの製造方法 |
KR101676786B1 (ko) * | 2010-02-26 | 2016-11-16 | 삼성전자주식회사 | 압전 모터 |
JP5810303B2 (ja) * | 2010-04-06 | 2015-11-11 | パナソニックIpマネジメント株式会社 | 駆動装置 |
DE102011075985B4 (de) | 2011-05-17 | 2018-02-22 | Physik Instrumente (Pi) Gmbh & Co. Kg | Inverter |
KR101216963B1 (ko) | 2011-09-09 | 2012-12-31 | 주식회사 아이비기술 | 향상된 변위를 제공하는 돔형 압전 모터 |
KR101216964B1 (ko) | 2011-09-09 | 2012-12-31 | 주식회사 아이비기술 | 향상된 변위를 제공하는 돔형 압전 모터 |
JP6010997B2 (ja) * | 2012-04-18 | 2016-10-19 | セイコーエプソン株式会社 | 圧電モーター、駆動回路及び駆動方法 |
DE102012022146A1 (de) | 2012-11-12 | 2014-05-15 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultraschallaktor für einen linearen Ultraschallmotor sowie linearer Ultraschallmotor mit einem Ultraschallaktor |
KR101624856B1 (ko) | 2014-04-24 | 2016-05-27 | (주)하이소닉 | 렌즈 구동을 위한 피에조 액추에이터 및 피에조 액추에이터를 이용한 휴대단말기용 카메라 모듈 |
KR101662126B1 (ko) * | 2014-05-02 | 2016-10-05 | 주식회사 엠플러스 | 진동발생장치 |
CN104439892B (zh) * | 2014-12-09 | 2017-08-11 | 苏州科技大学 | 一种单激励超声椭圆振动挤压加工装置 |
FR3095910A1 (fr) | 2019-05-06 | 2020-11-13 | Telemaq | Moteur piézoélectrique à onde progressive à résolution micrométrique |
DE102019218655B4 (de) * | 2019-11-29 | 2023-07-27 | Physik Instrumente (Pi) Gmbh & Co. Kg | Läufer für Ultraschallmotoren mit höherer Längs- als Querbiegesteifigkeit |
Family Cites Families (20)
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JPS59204477A (ja) * | 1983-05-04 | 1984-11-19 | Nippon Kogaku Kk <Nikon> | 超音波モーターの駆動制御回路 |
US4630941A (en) * | 1984-02-21 | 1986-12-23 | International Business Machines Corp. | Tubular squeeze bearing apparatus with rotational restraint |
JPS63213482A (ja) | 1987-02-27 | 1988-09-06 | Nec Corp | 超音波モ−タ |
JPH02285974A (ja) * | 1989-04-25 | 1990-11-26 | Canon Inc | 振動波モータ |
JPH06141564A (ja) | 1992-10-28 | 1994-05-20 | Nikon Corp | 波動循環型アクチュエータ |
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US5665918A (en) * | 1994-12-26 | 1997-09-09 | Canon Kabushiki Kaisha | Linear vibration actuator utilizing combined bending and longitudinal vibration modes |
JP3807513B2 (ja) * | 1996-02-05 | 2006-08-09 | オリンパス株式会社 | 超音波リニアモータ |
JPH10243668A (ja) * | 1997-02-24 | 1998-09-11 | Nikon Corp | 振動アクチュエータ |
JPH10337057A (ja) * | 1997-06-02 | 1998-12-18 | Minolta Co Ltd | 駆動装置 |
DE19945042C2 (de) * | 1999-06-30 | 2002-12-19 | Pi Ceramic Gmbh Keramische Tec | Piezoelektrischer Antrieb, insbesondere piezoelektrischer Motor sowie Schaltungsanordnung zum Betreiben eines piezoelektrischen Motors |
US6768245B2 (en) * | 1999-11-29 | 2004-07-27 | Creaholic Sa | Piezoelectric drive |
JP2001238473A (ja) * | 2000-02-23 | 2001-08-31 | Minolta Co Ltd | 弾性表面波モータ |
DE10154526B4 (de) * | 2001-06-12 | 2007-02-08 | Physik Instrumente (Pi) Gmbh & Co | Piezoelektrisches Stellelement |
US6747394B2 (en) * | 2002-06-19 | 2004-06-08 | Piezomotor Uppsala Ab | Near-resonance electromechanical motor |
DE102004024656A1 (de) * | 2004-05-18 | 2005-12-08 | Physik Instrumente (Pi) Gmbh & Co. Kg | Piezoelektrischer Ultraschallmotor |
EP1812975B1 (de) * | 2004-11-15 | 2008-07-02 | Physik Instrumente (PI) GmbH & Co. KG | Linearer ultraschallmotor |
US7315108B2 (en) * | 2005-03-30 | 2008-01-01 | Konica Minolta Opto, Inc. | Driving device |
-
2004
- 2004-12-09 DE DE102004059429A patent/DE102004059429B4/de active Active
-
2005
- 2005-04-20 US US11/659,741 patent/US7834518B2/en active Active
- 2005-04-20 AT AT05734871T patent/ATE401669T1/de not_active IP Right Cessation
- 2005-04-20 JP JP2007528622A patent/JP4617359B2/ja active Active
- 2005-04-20 WO PCT/EP2005/004236 patent/WO2006027031A1/de active IP Right Grant
- 2005-04-20 DE DE502005004710T patent/DE502005004710D1/de active Active
- 2005-04-20 EP EP05734871A patent/EP1656705B1/de active Active
Also Published As
Publication number | Publication date |
---|---|
JP2008512073A (ja) | 2008-04-17 |
DE102004059429A1 (de) | 2006-03-30 |
EP1656705A1 (de) | 2006-05-17 |
WO2006027031A1 (de) | 2006-03-16 |
EP1656705B1 (de) | 2008-07-16 |
ATE401669T1 (de) | 2008-08-15 |
DE502005004710D1 (de) | 2008-08-28 |
DE102004059429B4 (de) | 2006-07-27 |
US20090009032A1 (en) | 2009-01-08 |
US7834518B2 (en) | 2010-11-16 |
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R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |