JP2008512073A - リニア超音波圧電モータ - Google Patents
リニア超音波圧電モータ Download PDFInfo
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- JP2008512073A JP2008512073A JP2007528622A JP2007528622A JP2008512073A JP 2008512073 A JP2008512073 A JP 2008512073A JP 2007528622 A JP2007528622 A JP 2007528622A JP 2007528622 A JP2007528622 A JP 2007528622A JP 2008512073 A JP2008512073 A JP 2008512073A
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- Prior art keywords
- piezoelectric motor
- motor according
- piezoelectric
- resonance plate
- plate
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- 230000005284 excitation Effects 0.000 claims description 28
- 239000000463 material Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 230000000295 complement effect Effects 0.000 claims description 2
- 230000002441 reversible effect Effects 0.000 claims description 2
- 238000002604 ultrasonography Methods 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000010363 phase shift Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/002—Driving devices, e.g. vibrators using only longitudinal or radial modes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/005—Mechanical details, e.g. housings
- H02N2/0065—Friction interface
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/0075—Electrical details, e.g. drive or control circuits or methods
- H02N2/008—Means for controlling vibration frequency or phase, e.g. for resonance tracking
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Lens Barrels (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Abstract
Description
Claims (11)
- プレート状の長方形の共振板と摩擦接触状態にあって、上記摩擦の面は上記共振板の長手方向の狭い側面の少なくとも一方によって具現される移動エレメントと、上記共振板の長手方向の広い側面に配置される、音響振動を生成するための電極とを備えるリニア超音波圧電モータであって、
音響振動を生成するための発生器は、上記共振板を対称的に横断する平面に対して非対称に配置され、かつ励振されると非対称空間定在波を発生させる対向する2つの電極を備えることを特徴とするリニア超音波の圧電モータ。 - 音響振動を生成するための発生器は上記対称的に横断する平面の両側面に供給され、上記発生器は上記移動エレメントの動作方向を反転させるために別々に制御されることを特徴とする、請求項1記載の圧電モータ。
- 上記発生器は共通の背後電極を有することを特徴とする、請求項2記載の圧電モータ。
- 上記長手方向の狭い側面の少なくとも一方は案内溝、案内チャネルまたは案内レールを備えることを特徴とする、請求項1から3のいずれか1項に記載の圧電モータ。
- 上記案内溝、上記案内チャネルまたは上記案内レールは耐摩耗性のコーティングを有する、または耐摩耗性の材料で製造されることを特徴とする、請求項4記載の圧電モータ。
- 上記移動エレメントは、上記長手方向の狭い側面へ機械的かつ機能的に接続されるばね挟みとして具現されることを特徴とする請求項1から5のいずれか1項に記載の圧電モータ。
- 上記ばね挟みはU字形またはV字形であって自由な脚で摩擦エレメントを運び、上記摩擦エレメントは上記案内溝、案内チャネルまたは案内レールの各々との相補形状を有することを特徴とする、請求項4または6記載の圧電モータ。
- 上記ばね挟みの脚は、具体的にはレンズである移動エレメントのホルダとして形成される取付け部分または取付けセクションを含むことを特徴とする、請求項7記載の圧電モータ。
- 上記共振板は単一の圧電体で製造されることを特徴とする、請求項1から8のいずれか1項に記載の圧電モータ。
- 上記共振板は非圧電材料で構成され、上記音響振動を生成するための発生器は上記共振板へ機械的に固定されて接続されることを特徴とする、請求項1から9のいずれか1項に記載の圧電モータ。
- 請求項1から10のいずれか1項に記載された特徴を備えるリニア超音波の圧電モータを電気的に作動させるための方法であって、
励振源は、固定動作周波数を有する電流フィードバック自動調整型発生器として具現され、上記動作周波数は、非対称空間定在波の励振を引き起こす圧電振動子の共振周波数によって予め定義されることを特徴とする方法。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102004042767 | 2004-09-03 | ||
DE102004050108 | 2004-10-14 | ||
DE102004059429A DE102004059429B4 (de) | 2004-09-03 | 2004-12-09 | Linearer Ultraschall-Piezomotor |
PCT/EP2005/004236 WO2006027031A1 (de) | 2004-09-03 | 2005-04-20 | Linearer ultraschallmotor |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008512073A true JP2008512073A (ja) | 2008-04-17 |
JP4617359B2 JP4617359B2 (ja) | 2011-01-26 |
Family
ID=36011712
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007528622A Active JP4617359B2 (ja) | 2004-09-03 | 2005-04-20 | リニア超音波圧電モータ |
Country Status (6)
Country | Link |
---|---|
US (1) | US7834518B2 (ja) |
EP (1) | EP1656705B1 (ja) |
JP (1) | JP4617359B2 (ja) |
AT (1) | ATE401669T1 (ja) |
DE (2) | DE102004059429B4 (ja) |
WO (1) | WO2006027031A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101216963B1 (ko) | 2011-09-09 | 2012-12-31 | 주식회사 아이비기술 | 향상된 변위를 제공하는 돔형 압전 모터 |
KR101216964B1 (ko) | 2011-09-09 | 2012-12-31 | 주식회사 아이비기술 | 향상된 변위를 제공하는 돔형 압전 모터 |
JP2013509849A (ja) * | 2009-11-02 | 2013-03-14 | フィジック インストゥルメント(ピーアイ)ゲーエムベーハー アンド ツェーオー.カーゲー | アクチュエータ |
KR101624856B1 (ko) | 2014-04-24 | 2016-05-27 | (주)하이소닉 | 렌즈 구동을 위한 피에조 액추에이터 및 피에조 액추에이터를 이용한 휴대단말기용 카메라 모듈 |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005039357B4 (de) * | 2005-03-21 | 2007-07-12 | Physik Instrumente (Pi) Gmbh & Co. Kg | Optische Objektivbaugruppe |
DE102005053018A1 (de) | 2005-10-21 | 2007-04-26 | Physik Instrumente (Pi) Gmbh & Co. Kg | Präzisionsminiaturultraschalllinearmotor |
DE102006025991B4 (de) * | 2006-06-02 | 2012-02-23 | Physik Instrumente (Pi) Gmbh & Co. Kg | Selbsterregender Niederspannungscontroller zur Steuerung eines oder mehrerer Ultraschallmikromotoren |
DE202007005708U1 (de) | 2007-02-28 | 2007-08-09 | Physik Instrumente (Pi) Gmbh & Co. Kg | Linearer Ultraschall-Piezomotor |
DE102008023478A1 (de) | 2007-11-08 | 2009-05-14 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultraschalllinearantrieb mit hohlzylindrischem Oszillator |
TWI408888B (zh) * | 2008-08-07 | 2013-09-11 | Ind Tech Res Inst | 超音波線性馬達 |
DE202008017518U1 (de) | 2008-08-29 | 2009-11-26 | Inac Computer Gmbh | Stellkondensator |
DE102009043901A1 (de) | 2008-08-29 | 2010-05-20 | Inac Computer Gmbh | Stellkondensator |
DE202009004388U1 (de) | 2009-03-28 | 2009-06-18 | Physik Instrumente (Pi) Gmbh & Co. Kg | Schlossvorrichtung |
JP5429141B2 (ja) * | 2010-01-19 | 2014-02-26 | Tdk株式会社 | 圧電アクチュエータ及び圧電アクチュエータの製造方法 |
KR101676786B1 (ko) * | 2010-02-26 | 2016-11-16 | 삼성전자주식회사 | 압전 모터 |
JP5810303B2 (ja) * | 2010-04-06 | 2015-11-11 | パナソニックIpマネジメント株式会社 | 駆動装置 |
DE102011075985B4 (de) | 2011-05-17 | 2018-02-22 | Physik Instrumente (Pi) Gmbh & Co. Kg | Inverter |
JP6010997B2 (ja) * | 2012-04-18 | 2016-10-19 | セイコーエプソン株式会社 | 圧電モーター、駆動回路及び駆動方法 |
DE102012022146A1 (de) | 2012-11-12 | 2014-05-15 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultraschallaktor für einen linearen Ultraschallmotor sowie linearer Ultraschallmotor mit einem Ultraschallaktor |
KR101662126B1 (ko) * | 2014-05-02 | 2016-10-05 | 주식회사 엠플러스 | 진동발생장치 |
CN104439892B (zh) * | 2014-12-09 | 2017-08-11 | 苏州科技大学 | 一种单激励超声椭圆振动挤压加工装置 |
FR3095910A1 (fr) | 2019-05-06 | 2020-11-13 | Telemaq | Moteur piézoélectrique à onde progressive à résolution micrométrique |
DE102019218655B4 (de) * | 2019-11-29 | 2023-07-27 | Physik Instrumente (Pi) Gmbh & Co. Kg | Läufer für Ultraschallmotoren mit höherer Längs- als Querbiegesteifigkeit |
CN114244181B (zh) * | 2021-11-18 | 2024-05-17 | 北京大学 | 一种高功率密度压电驱动器及压电马达 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS59204477A (ja) * | 1983-05-04 | 1984-11-19 | Nippon Kogaku Kk <Nikon> | 超音波モーターの駆動制御回路 |
JPH06141564A (ja) * | 1992-10-28 | 1994-05-20 | Nikon Corp | 波動循環型アクチュエータ |
US20030052573A1 (en) * | 2001-06-12 | 2003-03-20 | Physik-Instrumente (Pi) Gmbh & Co. Kg | Piezoelectric adjusting element |
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JPH02285974A (ja) * | 1989-04-25 | 1990-11-26 | Canon Inc | 振動波モータ |
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WO2001041228A1 (de) * | 1999-11-29 | 2001-06-07 | Creaholic Sa | Piezoelektrischer antrieb |
JP2001238473A (ja) | 2000-02-23 | 2001-08-31 | Minolta Co Ltd | 弾性表面波モータ |
US6747394B2 (en) * | 2002-06-19 | 2004-06-08 | Piezomotor Uppsala Ab | Near-resonance electromechanical motor |
DE102004024656A1 (de) * | 2004-05-18 | 2005-12-08 | Physik Instrumente (Pi) Gmbh & Co. Kg | Piezoelektrischer Ultraschallmotor |
DE502005004590D1 (de) * | 2004-11-15 | 2008-08-14 | Physik Instr Pi Gmbh & Co Kg | Linearer ultraschallmotor |
US7315108B2 (en) * | 2005-03-30 | 2008-01-01 | Konica Minolta Opto, Inc. | Driving device |
-
2004
- 2004-12-09 DE DE102004059429A patent/DE102004059429B4/de active Active
-
2005
- 2005-04-20 DE DE502005004710T patent/DE502005004710D1/de active Active
- 2005-04-20 JP JP2007528622A patent/JP4617359B2/ja active Active
- 2005-04-20 EP EP05734871A patent/EP1656705B1/de active Active
- 2005-04-20 WO PCT/EP2005/004236 patent/WO2006027031A1/de active IP Right Grant
- 2005-04-20 AT AT05734871T patent/ATE401669T1/de not_active IP Right Cessation
- 2005-04-20 US US11/659,741 patent/US7834518B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS59204477A (ja) * | 1983-05-04 | 1984-11-19 | Nippon Kogaku Kk <Nikon> | 超音波モーターの駆動制御回路 |
JPH06141564A (ja) * | 1992-10-28 | 1994-05-20 | Nikon Corp | 波動循環型アクチュエータ |
US20030052573A1 (en) * | 2001-06-12 | 2003-03-20 | Physik-Instrumente (Pi) Gmbh & Co. Kg | Piezoelectric adjusting element |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013509849A (ja) * | 2009-11-02 | 2013-03-14 | フィジック インストゥルメント(ピーアイ)ゲーエムベーハー アンド ツェーオー.カーゲー | アクチュエータ |
US9082959B2 (en) | 2009-11-02 | 2015-07-14 | Physik Instrumente (Pi) Gmbh & Co. Kg | Actuator |
KR101216963B1 (ko) | 2011-09-09 | 2012-12-31 | 주식회사 아이비기술 | 향상된 변위를 제공하는 돔형 압전 모터 |
KR101216964B1 (ko) | 2011-09-09 | 2012-12-31 | 주식회사 아이비기술 | 향상된 변위를 제공하는 돔형 압전 모터 |
KR101624856B1 (ko) | 2014-04-24 | 2016-05-27 | (주)하이소닉 | 렌즈 구동을 위한 피에조 액추에이터 및 피에조 액추에이터를 이용한 휴대단말기용 카메라 모듈 |
Also Published As
Publication number | Publication date |
---|---|
WO2006027031A1 (de) | 2006-03-16 |
DE502005004710D1 (de) | 2008-08-28 |
EP1656705B1 (de) | 2008-07-16 |
US20090009032A1 (en) | 2009-01-08 |
DE102004059429A1 (de) | 2006-03-30 |
JP4617359B2 (ja) | 2011-01-26 |
US7834518B2 (en) | 2010-11-16 |
EP1656705A1 (de) | 2006-05-17 |
ATE401669T1 (de) | 2008-08-15 |
DE102004059429B4 (de) | 2006-07-27 |
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