JP4608856B2 - ウエーハの研磨方法 - Google Patents
ウエーハの研磨方法 Download PDFInfo
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- JP4608856B2 JP4608856B2 JP2003278970A JP2003278970A JP4608856B2 JP 4608856 B2 JP4608856 B2 JP 4608856B2 JP 2003278970 A JP2003278970 A JP 2003278970A JP 2003278970 A JP2003278970 A JP 2003278970A JP 4608856 B2 JP4608856 B2 JP 4608856B2
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- Prior art keywords
- polishing
- wafer
- silica
- abrasive
- slurry
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- 238000005498 polishing Methods 0.000 title claims description 215
- 238000000034 method Methods 0.000 title claims description 58
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 151
- 239000000377 silicon dioxide Substances 0.000 claims description 71
- 230000007547 defect Effects 0.000 claims description 51
- 239000002245 particle Substances 0.000 claims description 47
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 claims description 44
- 239000004744 fabric Substances 0.000 claims description 24
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 16
- 229910052710 silicon Inorganic materials 0.000 claims description 16
- 239000010703 silicon Substances 0.000 claims description 16
- 239000003795 chemical substances by application Substances 0.000 claims description 13
- 239000012670 alkaline solution Substances 0.000 claims description 8
- 238000010979 pH adjustment Methods 0.000 claims description 5
- 239000004745 nonwoven fabric Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 87
- 239000002002 slurry Substances 0.000 description 59
- 239000011734 sodium Substances 0.000 description 18
- 150000007530 organic bases Chemical class 0.000 description 15
- 150000003839 salts Chemical class 0.000 description 11
- 239000007787 solid Substances 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 8
- 239000000654 additive Substances 0.000 description 7
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 230000002776 aggregation Effects 0.000 description 6
- 235000011114 ammonium hydroxide Nutrition 0.000 description 6
- 238000000227 grinding Methods 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 125000001453 quaternary ammonium group Chemical group 0.000 description 6
- 230000000996 additive effect Effects 0.000 description 5
- 238000004220 aggregation Methods 0.000 description 5
- 238000007517 polishing process Methods 0.000 description 5
- 238000011084 recovery Methods 0.000 description 5
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 4
- 239000000908 ammonium hydroxide Substances 0.000 description 4
- 239000008119 colloidal silica Substances 0.000 description 4
- 239000006185 dispersion Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000003002 pH adjusting agent Substances 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 4
- 239000011550 stock solution Substances 0.000 description 4
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 239000003082 abrasive agent Substances 0.000 description 3
- 150000001412 amines Chemical class 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910001385 heavy metal Inorganic materials 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- GLUUGHFHXGJENI-UHFFFAOYSA-N Piperazine Chemical compound C1CNCCN1 GLUUGHFHXGJENI-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000007865 diluting Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000011835 investigation Methods 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910000029 sodium carbonate Inorganic materials 0.000 description 2
- VDZOOKBUILJEDG-UHFFFAOYSA-M tetrabutylammonium hydroxide Chemical compound [OH-].CCCC[N+](CCCC)(CCCC)CCCC VDZOOKBUILJEDG-UHFFFAOYSA-M 0.000 description 2
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 2
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 2
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 1
- 238000004438 BET method Methods 0.000 description 1
- 241000255789 Bombyx mori Species 0.000 description 1
- 238000010306 acid treatment Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- NDKBVBUGCNGSJJ-UHFFFAOYSA-M benzyltrimethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)CC1=CC=CC=C1 NDKBVBUGCNGSJJ-UHFFFAOYSA-M 0.000 description 1
- 239000002738 chelating agent Substances 0.000 description 1
- 239000013626 chemical specie Substances 0.000 description 1
- OEYIOHPDSNJKLS-UHFFFAOYSA-N choline Chemical compound C[N+](C)(C)CCO OEYIOHPDSNJKLS-UHFFFAOYSA-N 0.000 description 1
- 229960001231 choline Drugs 0.000 description 1
- -1 containing silica Chemical compound 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000007518 final polishing process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- WJLUBOLDZCQZEV-UHFFFAOYSA-M hexadecyl(trimethyl)azanium;hydroxide Chemical compound [OH-].CCCCCCCCCCCCCCCC[N+](C)(C)C WJLUBOLDZCQZEV-UHFFFAOYSA-M 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000003456 ion exchange resin Substances 0.000 description 1
- 229920003303 ion-exchange polymer Polymers 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000012643 polycondensation polymerization Methods 0.000 description 1
- 235000019353 potassium silicate Nutrition 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 235000019832 sodium triphosphate Nutrition 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- LPSKDVINWQNWFE-UHFFFAOYSA-M tetrapropylazanium;hydroxide Chemical compound [OH-].CCC[N+](CCC)(CCC)CCC LPSKDVINWQNWFE-UHFFFAOYSA-M 0.000 description 1
- QVOFCQBZXGLNAA-UHFFFAOYSA-M tributyl(methyl)azanium;hydroxide Chemical compound [OH-].CCCC[N+](C)(CCCC)CCCC QVOFCQBZXGLNAA-UHFFFAOYSA-M 0.000 description 1
- JAJRRCSBKZOLPA-UHFFFAOYSA-M triethyl(methyl)azanium;hydroxide Chemical compound [OH-].CC[N+](C)(CC)CC JAJRRCSBKZOLPA-UHFFFAOYSA-M 0.000 description 1
- UNXRWKVEANCORM-UHFFFAOYSA-N triphosphoric acid Chemical compound OP(O)(=O)OP(O)(=O)OP(O)(O)=O UNXRWKVEANCORM-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02024—Mirror polishing
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Description
線状欠陥に対する研磨剤(特に粒径、形状、分散性)の影響について確認した結果を示す。研磨剤中に含まれる固形分として、Na水ガラスをイオン交換し活性ケイ酸を得、これを加熱することによって縮重合させたシリカゾルを使用した。これに純水やpH調整の為のNaOHを添加し、固形成分(シリカ)濃度が50%の研磨剤を用意した。更にこの研磨剤にトリポリリン酸を添加した。
以下に本発明のウエーハの研磨方法によってシリコンウエーハを研磨した場合を説明する。エッチング済みの直径200mmウエーハに対して1次、2次、仕上げの3段の片面研磨を行った。この1次、2次研磨に本発明の研磨方法を適用した。
1次研磨では研磨装置として、図1に示したようなバッチ式のワックスマウント方式の片面研磨装置を用いた。研磨条件としては、不織布タイプの研磨布(アスカーC硬度60)を用い、研磨圧が30kPaとして、シリコンウエーハの表面を約10μm研磨した。これらの研磨条件は1次研磨といわれる研磨条件に相当する研磨である。直径200mmのシリコンウエーハを1バッチ5枚で行い20バッチ研磨した。
2次研磨でも研磨装置としては図1に示したような形態の片面研磨装置を用いた。研磨条件としては、1次研磨されたウエーハ表面を不織布タイプの研磨布(アスカーC硬度80)を用い、研磨圧が20kPaとして、シリコン表面を約1.5μm研磨した。これらの研磨条件は2次研磨といわれる研磨条件に相当する研磨である。
実施例3と同じ条件で研磨剤にTMAHを添加しておらず、シリカの形状がいびつな研磨剤を使用し研磨した。
Claims (11)
- 回転可能なウエーハ保持板にウエーハを保持し、回転可能な定盤に貼付された研磨布に研磨剤を供給するとともに前記ウエーハと研磨布を摺接させてウエーハ表面を研磨する方法において、研磨剤として略球形状でありかつ略均一に分散されたシリカを主成分とし、更にテトラメチルアンモニウムハイドロオキサイドを含有しかつ前記シリカの分散状態での平均粒子径が5nm〜10nmであるとともに最大粒子径が12nm以下であるアルカリ溶液を用いて研磨し、突起状の線状欠陥の発生を防止するようにしたことを特徴とするウエーハの研磨方法。
- 前記アルカリ溶液のpHが10〜13であることを特徴とする請求項1記載のウエーハの研磨方法。
- 前記アルカリ溶液のpH調整にNa2CO3が用いられていることを特徴とする請求項1又は2記載のウエーハの研磨方法。
- 前記テトラメチルアンモニウムハイドロオキサイドを、使用する研磨剤の溶解限界まで添加することを特徴とする請求項1〜3のいずれか1項記載のウエーハの研磨方法。
- 前記ウエーハがシリコンウエーハであることを特徴とする請求項1〜4のいずれか1項記載のウエーハの研磨方法。
- 鏡面研磨工程の粗研磨工程(1次研磨及び2次研磨工程)で実施されることを特徴とする請求項1〜5のいずれか1項記載のウエーハの研磨方法。
- 前記粗研磨工程が2次研磨工程であることを特徴とする請求項6記載のウエーハの研磨方法。
- 前記シリカを2%〜20重量%の濃度で使用することを特徴とする請求項1〜7のいずれか1項記載のウエーハの研磨方法。
- 不織布タイプの研磨布を使用し研磨することを特徴とする請求項1〜8のいずれか1項記載のウエーハの研磨方法。
- 前記研磨布の硬度(アスカーC硬度)が50以上であることを特徴とする請求項1〜9のいずれか1項記載のウエーハの研磨方法。
- 前記ウエーハの研磨代が1μm以上となるように研磨することを特徴とする請求項1〜10のいずれか1項記載のウエーハの研磨方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003278970A JP4608856B2 (ja) | 2003-07-24 | 2003-07-24 | ウエーハの研磨方法 |
US10/565,879 US20060246724A1 (en) | 2003-07-24 | 2004-07-08 | Method for polishing wafer |
CNB2004800210714A CN100392820C (zh) | 2003-07-24 | 2004-07-08 | 晶片的研磨方法 |
PCT/JP2004/009731 WO2005010966A1 (ja) | 2003-07-24 | 2004-07-08 | ウエーハの研磨方法 |
KR1020057022401A KR101092884B1 (ko) | 2003-07-24 | 2005-11-23 | 웨이퍼 연마방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003278970A JP4608856B2 (ja) | 2003-07-24 | 2003-07-24 | ウエーハの研磨方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005045102A JP2005045102A (ja) | 2005-02-17 |
JP4608856B2 true JP4608856B2 (ja) | 2011-01-12 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2003278970A Expired - Fee Related JP4608856B2 (ja) | 2003-07-24 | 2003-07-24 | ウエーハの研磨方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20060246724A1 (ja) |
JP (1) | JP4608856B2 (ja) |
KR (1) | KR101092884B1 (ja) |
CN (1) | CN100392820C (ja) |
WO (1) | WO2005010966A1 (ja) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200717635A (en) | 2005-09-06 | 2007-05-01 | Komatsu Denshi Kinzoku Kk | Polishing method for semiconductor wafer |
JP4796807B2 (ja) * | 2005-09-06 | 2011-10-19 | Sumco Techxiv株式会社 | 半導体ウェハの研磨方法 |
US20080020680A1 (en) * | 2006-07-24 | 2008-01-24 | Cabot Microelectronics Corporation | Rate-enhanced CMP compositions for dielectric films |
EP2100666A4 (en) * | 2006-12-04 | 2013-03-27 | Nomura Micro Science Kk | PROCESS FOR PURIFYING A CHEMICAL ADDITIONED WITH A CHELATING AGENT |
JP4696086B2 (ja) | 2007-02-20 | 2011-06-08 | 信越半導体株式会社 | シリコン単結晶ウエーハの仕上げ研磨方法及びシリコン単結晶ウエーハ |
US8465805B2 (en) * | 2007-10-25 | 2013-06-18 | Walter Henry Huber | Glass veneer on ceramics |
JP5289877B2 (ja) * | 2007-10-31 | 2013-09-11 | 花王株式会社 | 磁気ディスク基板用研磨液組成物 |
JP5297695B2 (ja) * | 2008-05-30 | 2013-09-25 | Sumco Techxiv株式会社 | スラリー供給装置及び同装置を用いる半導体ウェーハの研磨方法 |
DE102008053610B4 (de) * | 2008-10-29 | 2011-03-31 | Siltronic Ag | Verfahren zum beidseitigen Polieren einer Halbleiterscheibe |
DE102009047926A1 (de) * | 2009-10-01 | 2011-04-14 | Siltronic Ag | Verfahren zum Polieren von Halbleiterscheiben |
DE102009058436A1 (de) * | 2009-12-16 | 2011-01-20 | Siltronic Ag | Verfahren zur beidseitigen Politur einer Halbleiterscheibe |
CN102198610B (zh) * | 2011-04-18 | 2014-08-20 | 武汉飞米思科技有限公司 | 陶瓷复杂表面镜面抛光方法 |
JP2013004839A (ja) * | 2011-06-20 | 2013-01-07 | Shin Etsu Handotai Co Ltd | シリコンウェーハの研磨方法 |
KR101303183B1 (ko) * | 2012-07-03 | 2013-09-09 | 한국기계연구원 | 알루미늄기지복합재료의 3차원 미세조직 관찰방법 |
JP6295052B2 (ja) * | 2013-09-26 | 2018-03-14 | 株式会社フジミインコーポレーテッド | 研磨用組成物、研磨用組成物の製造方法およびシリコンウエハ製造方法 |
CN103847032B (zh) * | 2014-03-20 | 2016-01-06 | 德清晶辉光电科技有限公司 | 一种大直径超薄石英晶片的生产工艺 |
US10035929B2 (en) * | 2015-11-30 | 2018-07-31 | Taiwan Semiconductor Manufacturing Co., Ltd. | pH-adjuster free chemical mechanical planarization slurry |
US10683439B2 (en) * | 2018-03-15 | 2020-06-16 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Polishing composition and method of polishing a substrate having enhanced defect inhibition |
WO2020145121A1 (ja) * | 2019-01-10 | 2020-07-16 | コニカミノルタ株式会社 | 研磨剤の再生方法及び研磨剤リサイクル処理システム |
CN110509173A (zh) * | 2019-09-04 | 2019-11-29 | 天津中环领先材料技术有限公司 | 一种抛光液回收装置及其控制方法 |
CN117245458A (zh) * | 2023-11-16 | 2023-12-19 | 山东有研艾斯半导体材料有限公司 | 一种硅片的中抛光方法、硅片及其制备方法 |
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US6322600B1 (en) * | 1997-04-23 | 2001-11-27 | Advanced Technology Materials, Inc. | Planarization compositions and methods for removing interlayer dielectric films |
KR100574259B1 (ko) * | 1999-03-31 | 2006-04-27 | 가부시끼가이샤 도꾸야마 | 연마제 및 연마 방법 |
US20020197935A1 (en) * | 2000-02-14 | 2002-12-26 | Mueller Brian L. | Method of polishing a substrate |
DE10058305A1 (de) * | 2000-11-24 | 2002-06-06 | Wacker Siltronic Halbleitermat | Verfahren zur Oberflächenpolitur von Siliciumscheiben |
JP2002252189A (ja) * | 2001-02-26 | 2002-09-06 | Mitsubishi Materials Silicon Corp | 半導体ウェーハ用研磨液 |
JP3804009B2 (ja) * | 2001-10-01 | 2006-08-02 | 触媒化成工業株式会社 | 研磨用シリカ粒子分散液、その製造方法および研磨材 |
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JPS6374911A (ja) * | 1986-09-19 | 1988-04-05 | Shin Etsu Chem Co Ltd | 微細球状シリカの製造法 |
JPH11111657A (ja) * | 1997-09-30 | 1999-04-23 | Nec Corp | 研磨液および研磨方法 |
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JP2005045102A (ja) | 2005-02-17 |
KR20060062028A (ko) | 2006-06-09 |
CN1826684A (zh) | 2006-08-30 |
CN100392820C (zh) | 2008-06-04 |
US20060246724A1 (en) | 2006-11-02 |
WO2005010966A1 (ja) | 2005-02-03 |
KR101092884B1 (ko) | 2011-12-12 |
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