JP4594305B2 - インプリント・リソグラフィ・プロセスにおける倍率拡大及びゆがみを補正するためのシステム - Google Patents

インプリント・リソグラフィ・プロセスにおける倍率拡大及びゆがみを補正するためのシステム Download PDF

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JP4594305B2
JP4594305B2 JP2006518977A JP2006518977A JP4594305B2 JP 4594305 B2 JP4594305 B2 JP 4594305B2 JP 2006518977 A JP2006518977 A JP 2006518977A JP 2006518977 A JP2006518977 A JP 2006518977A JP 4594305 B2 JP4594305 B2 JP 4594305B2
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actuator arm
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JP2007535121A5 (enExample
JP2007535121A (ja
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チョイ，ビュン−ジン
スリニーヴァッサン，シトルガタ・ヴイ
メイッスル，マリオ・ジェイ
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モレキュラー・インプリンツ・インコーポレーテッド
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/003—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor characterised by the choice of material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
    • B81C1/0046—Surface micromachining, i.e. structuring layers on the substrate using stamping, e.g. imprinting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
    • B29C2043/023—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface having a plurality of grooves
    • B29C2043/025—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface having a plurality of grooves forming a microstructure, i.e. fine patterning

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  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
JP2006518977A 2003-07-09 2004-07-08 インプリント・リソグラフィ・プロセスにおける倍率拡大及びゆがみを補正するためのシステム Expired - Lifetime JP4594305B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/616,294 US7150622B2 (en) 2003-07-09 2003-07-09 Systems for magnification and distortion correction for imprint lithography processes
PCT/US2004/022454 WO2005006076A2 (en) 2003-07-09 2004-07-08 Systems for magnification and distortion correction for imprint lithography processes

Publications (3)

Publication Number Publication Date
JP2007535121A JP2007535121A (ja) 2007-11-29
JP2007535121A5 JP2007535121A5 (enExample) 2010-04-22
JP4594305B2 true JP4594305B2 (ja) 2010-12-08

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006518977A Expired - Lifetime JP4594305B2 (ja) 2003-07-09 2004-07-08 インプリント・リソグラフィ・プロセスにおける倍率拡大及びゆがみを補正するためのシステム

Country Status (8)

Country Link
US (1) US7150622B2 (enExample)
EP (1) EP1642170A4 (enExample)
JP (1) JP4594305B2 (enExample)
KR (1) KR20060034694A (enExample)
CN (1) CN1871103A (enExample)
MY (1) MY137556A (enExample)
TW (1) TW200522155A (enExample)
WO (1) WO2005006076A2 (enExample)

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