JP4580266B2 - Ｘ線検査装置、ｘ線検査方法およびｘ線検査プログラム - Google Patents

Ｘ線検査装置、ｘ線検査方法およびｘ線検査プログラム Download PDF

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Publication number
JP4580266B2
JP4580266B2 JP2005110815A JP2005110815A JP4580266B2 JP 4580266 B2 JP4580266 B2 JP 4580266B2 JP 2005110815 A JP2005110815 A JP 2005110815A JP 2005110815 A JP2005110815 A JP 2005110815A JP 4580266 B2 JP4580266 B2 JP 4580266B2
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inspection
ray
image
wiring pattern
target product
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Japanese (ja)
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JP2006292465A (ja
JP2006292465A5 (enExample
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篤司 寺本
貴行 村越
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Nagoya Electric Works Co Ltd
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Nagoya Electric Works Co Ltd
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JP2005110815A 2005-04-07 2005-04-07 Ｘ線検査装置、ｘ線検査方法およびｘ線検査プログラム Expired - Lifetime JP4580266B2 (ja)

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JP2005110815A JP4580266B2 (ja) 2005-04-07 2005-04-07 Ｘ線検査装置、ｘ線検査方法およびｘ線検査プログラム

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JP2005110815A JP4580266B2 (ja) 2005-04-07 2005-04-07 Ｘ線検査装置、ｘ線検査方法およびｘ線検査プログラム

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JP2007228918A Division JP4610590B2 (ja) 2007-09-04 2007-09-04 Ｘ線検査装置、ｘ線検査方法およびｘ線検査プログラム

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JP2006292465A JP2006292465A (ja) 2006-10-26
JP2006292465A5 JP2006292465A5 (enExample) 2007-10-18
JP4580266B2 true JP4580266B2 (ja) 2010-11-10

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Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4650076B2 (ja) * 2005-04-20 2011-03-16 パナソニック株式会社 回路パターン検査装置及び回路パターン検査方法
JP5271514B2 (ja) * 2007-07-09 2013-08-21 名古屋電機工業株式会社 多層配線基板の放射線検査方法および放射線検査装置ならびに放射線検査方法を実現する放射線検査プログラム
JP5493360B2 (ja) * 2009-01-08 2014-05-14 オムロン株式会社 Ｘ線検査方法、ｘ線検査装置およびｘ線検査プログラム
JP5444718B2 (ja) 2009-01-08 2014-03-19 オムロン株式会社 検査方法、検査装置および検査用プログラム
JP2011095227A (ja) * 2009-11-02 2011-05-12 Saki Corp:Kk 被検査体の放射線検査装置
JP5223876B2 (ja) * 2010-03-12 2013-06-26 オムロン株式会社 Ｘ線検査装置、ｘ線検査方法、ｘ線検査プログラムおよびｘ線検査システム
JP6946516B1 (ja) * 2020-05-22 2021-10-06 名古屋電機工業株式会社 Ｘ線検査装置、ｘ線検査方法およびｘ線検査プログラム
JPWO2024117099A1 (enExample) * 2022-12-01 2024-06-06
JP2025074798A (ja) * 2023-10-30 2025-05-14 オムロン株式会社 検査システム、検査装置、検査方法及びプログラム

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4591103B2 (ja) * 2005-02-08 2010-12-01 パナソニック株式会社 Ｘ線ｃｔ検査装置及びｘ線ｃｔ検査方法
JP4631460B2 (ja) * 2005-02-18 2011-02-16 パナソニック株式会社 Ｘ線検査方法
JP4910378B2 (ja) * 2005-03-01 2012-04-04 株式会社デンソー Ｘ線検査装置及びｘ線検査方法

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JP2006292465A (ja) 2006-10-26

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