JP4553262B2 - 真空容積式ポンプの駆動モータを制御するための方法 - Google Patents

真空容積式ポンプの駆動モータを制御するための方法 Download PDF

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Publication number
JP4553262B2
JP4553262B2 JP2006540230A JP2006540230A JP4553262B2 JP 4553262 B2 JP4553262 B2 JP 4553262B2 JP 2006540230 A JP2006540230 A JP 2006540230A JP 2006540230 A JP2006540230 A JP 2006540230A JP 4553262 B2 JP4553262 B2 JP 4553262B2
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JP
Japan
Prior art keywords
inlet pressure
drive motor
value
pressure value
curve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006540230A
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English (en)
Japanese (ja)
Other versions
JP2007511703A (ja
Inventor
ヘルツェマー ミヒャエル
シェーンボルン フランク
ロンターラー カール−ハインツ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of JP2007511703A publication Critical patent/JP2007511703A/ja
Application granted granted Critical
Publication of JP4553262B2 publication Critical patent/JP4553262B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00—Motor parameters
    • F04B2203/04—Motor parameters of linear electric motors
    • F04B2203/0409—Linear speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/01—Pressure before the pump inlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2207/00—External parameters
    • F04B2207/02—External pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/12—Kind or type gaseous, i.e. compressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2270/00—Control
    • F05B2270/30—Control parameters, e.g. input parameters
    • F05B2270/301—Pressure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
JP2006540230A 2003-11-20 2004-11-05 真空容積式ポンプの駆動モータを制御するための方法 Expired - Fee Related JP4553262B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10354205A DE10354205A1 (de) 2003-11-20 2003-11-20 Verfahren zur Steuerung eines Antriebsmotors einer Vakuum-Verdrängerpumpe
PCT/EP2004/012529 WO2005050021A1 (de) 2003-11-20 2004-11-05 Verfahren zur steuerung eines antriebsmotors einer vakuum-verdrängerpumpe

Publications (2)

Publication Number Publication Date
JP2007511703A JP2007511703A (ja) 2007-05-10
JP4553262B2 true JP4553262B2 (ja) 2010-09-29

Family

ID=34609147

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006540230A Expired - Fee Related JP4553262B2 (ja) 2003-11-20 2004-11-05 真空容積式ポンプの駆動モータを制御するための方法

Country Status (8)

Country Link
US (1) US20070071610A1 (ko)
EP (1) EP1697639B1 (ko)
JP (1) JP4553262B2 (ko)
KR (1) KR20060097741A (ko)
CN (1) CN100460676C (ko)
CA (1) CA2546063A1 (ko)
DE (2) DE10354205A1 (ko)
WO (1) WO2005050021A1 (ko)

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* Cited by examiner, † Cited by third party
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JP4737770B2 (ja) * 2006-09-12 2011-08-03 アネスト岩田株式会社 真空ポンプの運転制御装置および方法
DE102006050943B4 (de) * 2006-10-28 2020-04-16 Pfeiffer Vacuum Gmbh Vakuumpumpe und Verfahren zum Betrieb derselben
ATE552423T1 (de) 2010-02-12 2012-04-15 Allweiler Ag Betriebssteuerungsvorrichtung für eine verdrängerpumpe, pumpensystem und verfahren zum betreiben eines solchen
DE102011086572B4 (de) 2010-11-17 2019-08-14 KSB SE & Co. KGaA Verfahren und Regelvorrichtung zur drehzahlvariablen Regelung eines Verdrängerpumpenaggregates sowie Verdrängerpumpenanordnung
DE102011050017A1 (de) * 2011-04-29 2012-10-31 Allweiler Gmbh Steuermittel zum Ansteuern eines Frequenzumrichters sowie Ansteuerverfahren
CN102278310A (zh) * 2011-07-14 2011-12-14 温州市欧弗斯机械有限公司 智能调节真空系统
DE102014214952A1 (de) * 2014-07-30 2016-02-04 Ksb Aktiengesellschaft Verfahren zur Motorsteuerung eines Synchron-Reluktanzmotors für eine Pumpe und Pumpe mit Synchron-Reluktanzmotor
EP3067560B1 (de) * 2015-03-12 2020-11-18 Pfeiffer Vacuum GmbH Vakuumpumpe mit wenigstens einer Pumpstufe
DE102017203474A1 (de) * 2017-03-03 2018-09-06 KSB SE & Co. KGaA Verfahren zur Regelung einer drehzahlvariablen Umwälzpumpe sowie Umwälzpumpe
EP3438460B1 (de) * 2017-08-04 2024-03-20 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP7019513B2 (ja) 2018-06-05 2022-02-15 株式会社荏原製作所 制御装置、制御システム、制御方法、プログラム及び機械学習装置
GB2592573A (en) * 2019-12-19 2021-09-08 Leybold France S A S Lubricant-sealed vacuum pump, lubricant filter and method.
DE102020128369A1 (de) * 2020-10-28 2022-04-28 Leybold Gmbh Verfahren zum Betrieb einer Scroll-Pumpe sowie Scroll-Pumpe
GB2603892A (en) * 2021-02-03 2022-08-24 Edwards Ltd Pump apparatus and system
DE102022100843A1 (de) 2022-01-14 2023-07-20 VON ARDENNE Asset GmbH & Co. KG Verfahren, Steuervorrichtung, Speichermedium und Vakuumanordnung
CN116641881B (zh) * 2023-04-25 2024-01-23 北京通嘉宏瑞科技有限公司 真空泵控制方法、装置、计算机设备和存储介质

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US3788076A (en) * 1972-03-20 1974-01-29 Parker Hannifin Corp Hydraulic system with series wound pump drive motor
US4091617A (en) * 1977-05-11 1978-05-30 Eaton Corporation Hydraulic controller
US4174724A (en) * 1977-07-11 1979-11-20 Borg-Warner Corporation Flow valve
US4728869A (en) * 1985-12-18 1988-03-01 Anicon, Inc. Pulsewidth modulated pressure control system for chemical vapor deposition apparatus
DE3828608A1 (de) * 1988-08-23 1990-03-08 Alcatel Hochvakuumtechnik Gmbh Vakuumpumpvorrichtung
CN2118836U (zh) * 1992-05-12 1992-10-14 沈太福 一种新型可调式真空泵
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JPH0968169A (ja) * 1995-08-31 1997-03-11 Hitachi Constr Mach Co Ltd 建設機械の油圧駆動装置
IT1288737B1 (it) * 1996-10-08 1998-09-24 Varian Spa Dispositivo di pompaggio da vuoto.
US5947692A (en) * 1997-10-30 1999-09-07 Baxter International Inc. Peristaltic pump controller with scale factor that varies as a step function of pump inlet pressure
DE19816241C1 (de) * 1998-04-11 1999-10-28 Vacuubrand Gmbh & Co Membran- oder Kolbenpumpe oder kombinierte Membran-/Kolbenpumpe mit Einrichtung zur druckabhängigen Reduzierung der Schöpfraumvergrößerungsgeschwindigkeit
US6425883B1 (en) * 1998-05-08 2002-07-30 Circuit Tree Medical, Inc. Method and apparatus for controlling vacuum as a function of ultrasonic power in an ophthalmic phaco aspirator
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JP2001207984A (ja) * 1999-11-17 2001-08-03 Teijin Seiki Co Ltd 真空排気装置
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Also Published As

Publication number Publication date
WO2005050021A1 (de) 2005-06-02
DE502004009187D1 (de) 2009-04-30
JP2007511703A (ja) 2007-05-10
US20070071610A1 (en) 2007-03-29
EP1697639A1 (de) 2006-09-06
CN1882782A (zh) 2006-12-20
DE10354205A1 (de) 2005-06-23
KR20060097741A (ko) 2006-09-14
CA2546063A1 (en) 2005-06-02
EP1697639B1 (de) 2009-03-18
CN100460676C (zh) 2009-02-11

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