US20070071610A1 - Method for controlling the drive motor of a positive displacement vaccum pump - Google Patents
Method for controlling the drive motor of a positive displacement vaccum pump Download PDFInfo
- Publication number
- US20070071610A1 US20070071610A1 US10/580,128 US58012804A US2007071610A1 US 20070071610 A1 US20070071610 A1 US 20070071610A1 US 58012804 A US58012804 A US 58012804A US 2007071610 A1 US2007071610 A1 US 2007071610A1
- Authority
- US
- United States
- Prior art keywords
- inlet pressure
- drive motor
- speed
- range
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
- F04B49/065—Control using electricity and making use of computers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
- F04B37/16—Means for nullifying unswept space
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2203/00—Motor parameters
- F04B2203/04—Motor parameters of linear electric motors
- F04B2203/0409—Linear speed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2205/00—Fluid parameters
- F04B2205/01—Pressure before the pump inlet
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2207/00—External parameters
- F04B2207/02—External pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2210/00—Working fluid
- F05B2210/10—Kind or type
- F05B2210/12—Kind or type gaseous, i.e. compressible
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2270/00—Control
- F05B2270/30—Control parameters, e.g. input parameters
- F05B2270/301—Pressure
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
Definitions
- the invention relates to a method for controlling a drive motor of a positive displacement vacuum pump, and to a positive displacement vacuum pump comprising a drive motor control.
- Positive displacement vacuum pumps are, for example, membrane pumps, rotary vane pumps, piston pumps or Roots pumps, and are frequently used as fore vacuum pumps in combination with a high vacuum pump.
- a special feature of these positive displacement vacuum pumps is that the final pressure attainable by said pumps, i.e. the fore vacuum pressure, is speed-dependent to a high extent, wherein the speed must be high at high inlet pressures, and must be low at low inlet pressures for attaining an optimum suction capacity. This can be explained by the fact that at low inlet pressures filling of the suction space takes place at a relatively slow rate due to the small difference between inlet pressure and suction pressure in the working chamber. This results in a poor filling level of the positive displacement vacuum pump at low inlet pressures, which filling level can only be improved by extending the opening times of the inlet valve, i.e. a speed reduction.
- a positive displacement vacuum pump which is operated, in dependence on an inlet pressure value, at two different speeds, namely at a high speed for evacuation purposes, and at a low speed for reaching the lowest final pressure possible. Relatively much time is required between the beginning of the pumping process and reaching of the final pressure.
- a method for controlling a drive motor of a positive displacement vacuum pump comprises the method steps of storing a pressure-speed curve, determining the inlet pressure value, determining the speed value from the curve, and operating the drive motor at the determined speed value.
- a curve is stored in which a single constant upper speed value n 1 is associated with inlet pressure values p larger than or equal to an upper limit pressure p 1 , and which comprises an alteration range for inlet pressure values p smaller than the upper limit pressure p 1 , wherein in the alteration range different speed values n v are associated with the inlet pressure values p.
- the inlet pressure value p is permanently determined, the associated speed n is determined from the inlet pressure value p of the curve, and the drive motor is operated at the determined speed n. While at high inlet pressure values p above the upper limit value p 1 the drive motor is operated at a maximum constant speed n 1 , a corresponding speed value n v is approximately continuously associated for speeds above the upper limit value p 1 in dependence on the inlet pressure value p. In this manner, the effective suction capacity of the positive displacement pump can be kept at the highest level possible for each inlet pressure value. Thus, the time between beginning of evacuation and reaching of the final pressure is decreased. By adapting the speed to the inlet pressure value, the required drive energy and, due to the lower average speed level, the wear are reduced. Thereby, the maintenance and operating costs are reduced, and thus the efficiency of the positive displacement vacuum pump is improved.
- the curve comprises a lower range for inlet pressure values p smaller than or equal to a lower limit pressure p 2 , wherein a single constant lower speed value n 2 is associated with the lower range, and the alteration range is limited to inlet pressure values p larger than the lower limit pressure range p 2 .
- the curve thus comprises both an upper pressure range of constant speed and a lower pressure range of constant speed, as well as an alteration range of non-constant speed between said two ranges.
- Such a curve is, for example, necessary and useful for fore vacuum pumps which need a given minimum speed for pumping action since below the minimum speed no pumping capacity can be attained, in particular due to backflow losses. This applies, for example, to oil-sealed rotary vane pumps.
- the positive displacement vacuum pump is always operated above a speed at which the pumping function is still guaranteed even at very low inlet pressures.
- the curve comprises, instead of an upper range, a lower range for inlet pressure values p smaller than or equal to a lower limit pressure p 2 , wherein a single constant lower speed n 2 is associated with the lower range.
- decreasing speeds n v are associated with decreasing inlet pressure values p, i.e. low speed values n v are associated with low inlet pressure values p.
- the upper limit pressure p 1 ranges between 20 mbar and 1 mbar
- the lower pressure p 2 ranges between 1.0 mbar and 0.005 mbar, wherein the upper limit pressure p 1 is larger than the lower limit pressure p 2 .
- the upper constant speed value n 1 ranges between 2,200 and 1,000 rpm
- the lower constant speed value n 2 ranges between 300 and 1,300 rpm, wherein the upper constant speed value n 1 is larger than the lower constant speed value n 2 .
- the positive displacement pump is a fore vacuum pump arranged upstream of a high vacuum pump, and the inlet pressure value p is the suction-side pressure of the high vacuum pump.
- the inlet pressure value p thus is the pressure in the recipient evacuated by the high vacuum pump.
- the inlet pressure value p may also be the fore vacuum pressure immediately before the inlet of the fore vacuum pump.
- the inlet pressure-speed curve is saved in a characteristic diagram storage.
- a corresponding speed n is associated with each inlet pressure value p.
- the drive motor is an asynchronous motor driven by a correspondingly driven frequency converter.
- the drive motor may also be configured as a synchronous motor.
- the positive displacement vacuum pump comprises a drive motor, an inlet pressure sensor and a drive motor control which controls the speed n of the drive motor in dependence on the inlet pressure value p determined by the inlet pressure sensor.
- the drive motor control comprises a storage for storing a curve that indicates a respective speed n of the drive motor for the inlet pressure values p of the inlet pressure sensor, wherein the curve comprises two ranges: the first range is an upper range for inlet pressure values p larger than or equal to an upper limit pressure p 1 , with a single constant upper speed value n 1 being associated with said first range.
- the second range is an alteration range for inlet pressure values p smaller than the upper limit pressure p 1 , wherein in the alteration range different speed values n v are associated with the inlet pressure values p.
- the drive motor control comprises a processor which has connected therewith the inlet pressure sensor and evaluates the signals from the inlet pressure sensor.
- the evaluated inlet pressure sensor signals can be supplied to a pressure indicator associated with the positive displacement vacuum pump.
- the inlet pressure sensor signals are thus not only evaluated by the drive motor control with regard to controlling the drive motor, but also converted into an indication format, and finally supplied to an indicator associated with the vacuum pump.
- a separate evaluating and indicating device for indicating the inlet pressure is not required.
- FIG. 1 shows a schematic representation of a pump assembly comprising a positive displacement vacuum pump according to the invention configured as a fore vacuum pump, and a high vacuum pump, and
- FIG. 2 shows an inlet pressure-speed curve according to which the speed of the drive motor of the positive displacement vacuum pump is controlled.
- FIG. 1 schematically shows a pump assembly 10 for generating a high vacuum in a recipient 12 .
- a pump assembly 10 for generating a high vacuum in a recipient 12 .
- two pumps are arranged in series, namely a high vacuum pump 14 , for example a turbomolecular pump, and a positive displacement vacuum pump 16 configured as a fore vacuum pump, for example a membrane, piston or rotary vane pump.
- a high vacuum pump 14 for example a turbomolecular pump
- a positive displacement vacuum pump 16 configured as a fore vacuum pump, for example a membrane, piston or rotary vane pump.
- the positive displacement vacuum pump 16 essentially comprises a pump device 18 having a displacement body arranged in a pumping chamber, a drive motor 20 for driving the pump device 18 , and a drive motor control 22 for controlling and supplying energy to the drive motor 20 .
- the drive motor 20 is configured as a synchronous motor.
- the pump assembly 10 comprises two inlet pressure sensors 24 , 26 , wherein one of the inlet pressure sensors 24 determines the fore vacuum pressure immediately at the inlet of the positive displacement vacuum pump 16 , and the other inlet pressure sensor 26 determines the high vacuum pressure sure in the recipient 12 .
- Both inlet pressure sensors 24 , 26 are connected with a processor 28 of the drive motor control 22 , said processor 28 being continuously supplied with inlet pressure values p by the inlet pressure sensors 24 , 26 .
- the drive motor control 22 further comprises a frequency converter 30 driven by the processor 28 , and is connected with the drive motor 20 .
- the inlet pressure sensor 24 associated with the positive displacement vacuum pump 16 may be integrated in the positive displacement vacuum pump 16 .
- the processor 28 comprises a characteristic diagram storage for saving a curve 32 in which a respective speed n of the drive motor 20 is associated with inlet pressure values p.
- the curve 32 comprises an upper range 34 extending from the atmospheric pressure of 1,013 mbar to an upper limit pressure p 1 of 10 mbar.
- a single constant upper speed value n 1 is associated with the upper range 34 of the curve 32 .
- the curve 32 comprises an alteration range 36 in which various speed values n v are associated with the inlet pressure values p.
- decreasing speeds n v are associated with decreasing inlet pressure values p.
- a different speed value n v is associated with each inlet pressure value p.
- the curve 32 further comprises a lower range 38 for inlet pressure values p smaller than or equal to the lower limit pressure p 2 .
- a single speed value n 2 is associated with all inlet pressure values p.
- the upper speed value n 1 is approximately 1,800 rpm, and the lower speed value n 2 is 500 rpm.
- the upper speed value n 1 is, for example, 2,100 rpm, and the lower speed value n 2 is 1,000 rpm.
- the high vacuum pressure serves as the inlet pressure value p which is supplied by the inlet pressure sensor 26 arranged at the recipient 12 and on the suction side of the high vacuum pump 14 .
- the fore vacuum pressure of the inlet pressure sensor 24 may be used for determining the inlet pressure values p.
- the shape of the curve 32 , the limit pressures p 1 and p 2 , and the upper and lower speed values n 1 and n 2 are determined in test series for establishing for each inlet pressure value p a drive motor 20 speed at which a maximum effective suction capacity of the positive displacement pump 16 is attained.
- the determined curve is subsequently stored in the characteristic diagram storage of the processor 28 .
- the drive motor control 22 determines, from the curve 32 saved in the characteristic diagram storage, the speed n of the drive motor 20 in dependence on the high vacuum inlet pressure value p.
- the determined speed value n is fed to the frequency converter 30 which generates corresponding rotating fields in the stator coils of the drive motor 20 configured as asynchronous or synchronous motor, and operates the motor at the determined speed. In this manner, the positive displacement pump 16 can always be operated at the maximum effective suction capacity.
- the processor 28 of the drive motor control 22 further carries out evaluation and conversion of the signals from the inlet pressure sensor 24 into an indication format.
- the inlet pressures converted into the indication format are supplied to an indicating device arranged at the positive displacement vacuum pump 16 , for example at the housing of the drive motor control 22 .
- the indicating device may further be used for speed indication.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Control Of Positive-Displacement Pumps (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10354205.1 | 2003-11-20 | ||
DE10354205A DE10354205A1 (de) | 2003-11-20 | 2003-11-20 | Verfahren zur Steuerung eines Antriebsmotors einer Vakuum-Verdrängerpumpe |
PCT/EP2004/012529 WO2005050021A1 (de) | 2003-11-20 | 2004-11-05 | Verfahren zur steuerung eines antriebsmotors einer vakuum-verdrängerpumpe |
Publications (1)
Publication Number | Publication Date |
---|---|
US20070071610A1 true US20070071610A1 (en) | 2007-03-29 |
Family
ID=34609147
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/580,128 Abandoned US20070071610A1 (en) | 2003-11-20 | 2004-11-05 | Method for controlling the drive motor of a positive displacement vaccum pump |
Country Status (8)
Country | Link |
---|---|
US (1) | US20070071610A1 (ko) |
EP (1) | EP1697639B1 (ko) |
JP (1) | JP4553262B2 (ko) |
KR (1) | KR20060097741A (ko) |
CN (1) | CN100460676C (ko) |
CA (1) | CA2546063A1 (ko) |
DE (2) | DE10354205A1 (ko) |
WO (1) | WO2005050021A1 (ko) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080101962A1 (en) * | 2006-10-28 | 2008-05-01 | Pfeiffer Vacuum Gmbh | Vacuum pump |
EP3067560A1 (de) * | 2015-03-12 | 2016-09-14 | Pfeiffer Vacuum GmbH | Vakuumpumpe sowie Verfahren zum Betrieb einer Scrollpumpe oder einer Vakuumpumpe mit wenigstens zwei Pumpstufen |
US20170214352A1 (en) * | 2014-07-30 | 2017-07-27 | Ksb Aktiengesellschaft | Method for Controlling the Motor of a Synchronous Reluctance Motor for a Pump and Pump Comprising a Synchronous Reluctance Motor |
EP3578825A3 (en) * | 2018-06-05 | 2020-05-06 | Ebara Corporation | Control device, control system, control method, program and machine learning device |
US10690129B2 (en) | 2010-11-17 | 2020-06-23 | Ksb Aktiengesellschaft | Method and control device for variable rotational speed control of a displacement pump unit and displacement pump arrangement |
US11078916B2 (en) | 2017-08-04 | 2021-08-03 | Pfeiffer Vacuum Gmbh | Vacuum pump |
WO2022090191A1 (en) * | 2020-10-28 | 2022-05-05 | Leybold Gmbh | Method for operating a scroll vacuum pump |
CN114787517A (zh) * | 2019-12-19 | 2022-07-22 | 莱宝法国有限责任公司 | 润滑剂密封真空泵、润滑剂过滤器和方法 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4737770B2 (ja) * | 2006-09-12 | 2011-08-03 | アネスト岩田株式会社 | 真空ポンプの運転制御装置および方法 |
ATE552423T1 (de) * | 2010-02-12 | 2012-04-15 | Allweiler Ag | Betriebssteuerungsvorrichtung für eine verdrängerpumpe, pumpensystem und verfahren zum betreiben eines solchen |
DE102011050017A1 (de) | 2011-04-29 | 2012-10-31 | Allweiler Gmbh | Steuermittel zum Ansteuern eines Frequenzumrichters sowie Ansteuerverfahren |
CN102278310A (zh) * | 2011-07-14 | 2011-12-14 | 温州市欧弗斯机械有限公司 | 智能调节真空系统 |
DE102017203474A1 (de) * | 2017-03-03 | 2018-09-06 | KSB SE & Co. KGaA | Verfahren zur Regelung einer drehzahlvariablen Umwälzpumpe sowie Umwälzpumpe |
GB2603892A (en) * | 2021-02-03 | 2022-08-24 | Edwards Ltd | Pump apparatus and system |
DE102022100843A1 (de) | 2022-01-14 | 2023-07-20 | VON ARDENNE Asset GmbH & Co. KG | Verfahren, Steuervorrichtung, Speichermedium und Vakuumanordnung |
CN116641881B (zh) * | 2023-04-25 | 2024-01-23 | 北京通嘉宏瑞科技有限公司 | 真空泵控制方法、装置、计算机设备和存储介质 |
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US3788076A (en) * | 1972-03-20 | 1974-01-29 | Parker Hannifin Corp | Hydraulic system with series wound pump drive motor |
US4158290A (en) * | 1977-05-11 | 1979-06-19 | Eaton Corporation | Electro-hydraulic controller |
US4174724A (en) * | 1977-07-11 | 1979-11-20 | Borg-Warner Corporation | Flow valve |
US4728869A (en) * | 1985-12-18 | 1988-03-01 | Anicon, Inc. | Pulsewidth modulated pressure control system for chemical vapor deposition apparatus |
US5795328A (en) * | 1994-10-28 | 1998-08-18 | Iolab Corporation | Vacuum system and a method of operating a vacuum system |
US5947692A (en) * | 1997-10-30 | 1999-09-07 | Baxter International Inc. | Peristaltic pump controller with scale factor that varies as a step function of pump inlet pressure |
US5971725A (en) * | 1996-10-08 | 1999-10-26 | Varian, Inc. | Vacuum pumping device |
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-
2003
- 2003-11-20 DE DE10354205A patent/DE10354205A1/de not_active Withdrawn
-
2004
- 2004-11-05 WO PCT/EP2004/012529 patent/WO2005050021A1/de active Application Filing
- 2004-11-05 KR KR1020067012266A patent/KR20060097741A/ko not_active Application Discontinuation
- 2004-11-05 CN CNB2004800342164A patent/CN100460676C/zh not_active Expired - Fee Related
- 2004-11-05 US US10/580,128 patent/US20070071610A1/en not_active Abandoned
- 2004-11-05 DE DE502004009187T patent/DE502004009187D1/de active Active
- 2004-11-05 CA CA002546063A patent/CA2546063A1/en not_active Abandoned
- 2004-11-05 EP EP04818757A patent/EP1697639B1/de not_active Not-in-force
- 2004-11-05 JP JP2006540230A patent/JP4553262B2/ja not_active Expired - Fee Related
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Publication number | Priority date | Publication date | Assignee | Title |
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US3788076A (en) * | 1972-03-20 | 1974-01-29 | Parker Hannifin Corp | Hydraulic system with series wound pump drive motor |
US4158290A (en) * | 1977-05-11 | 1979-06-19 | Eaton Corporation | Electro-hydraulic controller |
US4174724A (en) * | 1977-07-11 | 1979-11-20 | Borg-Warner Corporation | Flow valve |
US4728869A (en) * | 1985-12-18 | 1988-03-01 | Anicon, Inc. | Pulsewidth modulated pressure control system for chemical vapor deposition apparatus |
US5795328A (en) * | 1994-10-28 | 1998-08-18 | Iolab Corporation | Vacuum system and a method of operating a vacuum system |
US5971725A (en) * | 1996-10-08 | 1999-10-26 | Varian, Inc. | Vacuum pumping device |
US5947692A (en) * | 1997-10-30 | 1999-09-07 | Baxter International Inc. | Peristaltic pump controller with scale factor that varies as a step function of pump inlet pressure |
US6425883B1 (en) * | 1998-05-08 | 2002-07-30 | Circuit Tree Medical, Inc. | Method and apparatus for controlling vacuum as a function of ultrasonic power in an ophthalmic phaco aspirator |
US6045331A (en) * | 1998-08-10 | 2000-04-04 | Gehm; William | Fluid pump speed controller |
US20010041139A1 (en) * | 1999-03-24 | 2001-11-15 | Eugene P. Sabini | Apparatus and method for controlling a pump system |
US6419455B1 (en) * | 1999-04-07 | 2002-07-16 | Alcatel | System for regulating pressure in a vacuum chamber, vacuum pumping unit equipped with same |
US6375431B1 (en) * | 1999-11-17 | 2002-04-23 | Teijin Seiki Co., Ltd. | Evacuating apparatus |
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US6539714B1 (en) * | 2002-03-19 | 2003-04-01 | Cummins, Inc. | System for estimating turbocharger rotational speed |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080101962A1 (en) * | 2006-10-28 | 2008-05-01 | Pfeiffer Vacuum Gmbh | Vacuum pump |
US10690129B2 (en) | 2010-11-17 | 2020-06-23 | Ksb Aktiengesellschaft | Method and control device for variable rotational speed control of a displacement pump unit and displacement pump arrangement |
US20170214352A1 (en) * | 2014-07-30 | 2017-07-27 | Ksb Aktiengesellschaft | Method for Controlling the Motor of a Synchronous Reluctance Motor for a Pump and Pump Comprising a Synchronous Reluctance Motor |
US10033320B2 (en) * | 2014-07-30 | 2018-07-24 | Ksb Aktiengesellschaft | Method for controlling the motor of a synchronous reluctance motor for a pump and pump comprising a synchronous reluctance motor |
EP3067560A1 (de) * | 2015-03-12 | 2016-09-14 | Pfeiffer Vacuum GmbH | Vakuumpumpe sowie Verfahren zum Betrieb einer Scrollpumpe oder einer Vakuumpumpe mit wenigstens zwei Pumpstufen |
US11078916B2 (en) | 2017-08-04 | 2021-08-03 | Pfeiffer Vacuum Gmbh | Vacuum pump |
EP3578825A3 (en) * | 2018-06-05 | 2020-05-06 | Ebara Corporation | Control device, control system, control method, program and machine learning device |
US11396876B2 (en) | 2018-06-05 | 2022-07-26 | Ebara Corporation | Control device, control system, control method, recording medium and machine learning device |
CN114787517A (zh) * | 2019-12-19 | 2022-07-22 | 莱宝法国有限责任公司 | 润滑剂密封真空泵、润滑剂过滤器和方法 |
WO2022090191A1 (en) * | 2020-10-28 | 2022-05-05 | Leybold Gmbh | Method for operating a scroll vacuum pump |
Also Published As
Publication number | Publication date |
---|---|
WO2005050021A1 (de) | 2005-06-02 |
DE502004009187D1 (de) | 2009-04-30 |
CA2546063A1 (en) | 2005-06-02 |
EP1697639A1 (de) | 2006-09-06 |
JP2007511703A (ja) | 2007-05-10 |
JP4553262B2 (ja) | 2010-09-29 |
EP1697639B1 (de) | 2009-03-18 |
CN1882782A (zh) | 2006-12-20 |
CN100460676C (zh) | 2009-02-11 |
KR20060097741A (ko) | 2006-09-14 |
DE10354205A1 (de) | 2005-06-23 |
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