US20070071610A1 - Method for controlling the drive motor of a positive displacement vaccum pump - Google Patents

Method for controlling the drive motor of a positive displacement vaccum pump Download PDF

Info

Publication number
US20070071610A1
US20070071610A1 US10/580,128 US58012804A US2007071610A1 US 20070071610 A1 US20070071610 A1 US 20070071610A1 US 58012804 A US58012804 A US 58012804A US 2007071610 A1 US2007071610 A1 US 2007071610A1
Authority
US
United States
Prior art keywords
inlet pressure
drive motor
speed
range
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US10/580,128
Other languages
English (en)
Inventor
Michael Holzemer
Frank Schonborn
Karl-Heinz Ronthaler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Assigned to LEYBOLD VAKUUM GMBH reassignment LEYBOLD VAKUUM GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HOLZEMER, MICHAEL, RONTHALER, KARL-HEINZ, SCHONBORN, FRANK
Publication of US20070071610A1 publication Critical patent/US20070071610A1/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00—Motor parameters
    • F04B2203/04—Motor parameters of linear electric motors
    • F04B2203/0409—Linear speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/01—Pressure before the pump inlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2207/00—External parameters
    • F04B2207/02—External pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/12—Kind or type gaseous, i.e. compressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2270/00—Control
    • F05B2270/30—Control parameters, e.g. input parameters
    • F05B2270/301—Pressure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps

Definitions

  • the invention relates to a method for controlling a drive motor of a positive displacement vacuum pump, and to a positive displacement vacuum pump comprising a drive motor control.
  • Positive displacement vacuum pumps are, for example, membrane pumps, rotary vane pumps, piston pumps or Roots pumps, and are frequently used as fore vacuum pumps in combination with a high vacuum pump.
  • a special feature of these positive displacement vacuum pumps is that the final pressure attainable by said pumps, i.e. the fore vacuum pressure, is speed-dependent to a high extent, wherein the speed must be high at high inlet pressures, and must be low at low inlet pressures for attaining an optimum suction capacity. This can be explained by the fact that at low inlet pressures filling of the suction space takes place at a relatively slow rate due to the small difference between inlet pressure and suction pressure in the working chamber. This results in a poor filling level of the positive displacement vacuum pump at low inlet pressures, which filling level can only be improved by extending the opening times of the inlet valve, i.e. a speed reduction.
  • a positive displacement vacuum pump which is operated, in dependence on an inlet pressure value, at two different speeds, namely at a high speed for evacuation purposes, and at a low speed for reaching the lowest final pressure possible. Relatively much time is required between the beginning of the pumping process and reaching of the final pressure.
  • a method for controlling a drive motor of a positive displacement vacuum pump comprises the method steps of storing a pressure-speed curve, determining the inlet pressure value, determining the speed value from the curve, and operating the drive motor at the determined speed value.
  • a curve is stored in which a single constant upper speed value n 1 is associated with inlet pressure values p larger than or equal to an upper limit pressure p 1 , and which comprises an alteration range for inlet pressure values p smaller than the upper limit pressure p 1 , wherein in the alteration range different speed values n v are associated with the inlet pressure values p.
  • the inlet pressure value p is permanently determined, the associated speed n is determined from the inlet pressure value p of the curve, and the drive motor is operated at the determined speed n. While at high inlet pressure values p above the upper limit value p 1 the drive motor is operated at a maximum constant speed n 1 , a corresponding speed value n v is approximately continuously associated for speeds above the upper limit value p 1 in dependence on the inlet pressure value p. In this manner, the effective suction capacity of the positive displacement pump can be kept at the highest level possible for each inlet pressure value. Thus, the time between beginning of evacuation and reaching of the final pressure is decreased. By adapting the speed to the inlet pressure value, the required drive energy and, due to the lower average speed level, the wear are reduced. Thereby, the maintenance and operating costs are reduced, and thus the efficiency of the positive displacement vacuum pump is improved.
  • the curve comprises a lower range for inlet pressure values p smaller than or equal to a lower limit pressure p 2 , wherein a single constant lower speed value n 2 is associated with the lower range, and the alteration range is limited to inlet pressure values p larger than the lower limit pressure range p 2 .
  • the curve thus comprises both an upper pressure range of constant speed and a lower pressure range of constant speed, as well as an alteration range of non-constant speed between said two ranges.
  • Such a curve is, for example, necessary and useful for fore vacuum pumps which need a given minimum speed for pumping action since below the minimum speed no pumping capacity can be attained, in particular due to backflow losses. This applies, for example, to oil-sealed rotary vane pumps.
  • the positive displacement vacuum pump is always operated above a speed at which the pumping function is still guaranteed even at very low inlet pressures.
  • the curve comprises, instead of an upper range, a lower range for inlet pressure values p smaller than or equal to a lower limit pressure p 2 , wherein a single constant lower speed n 2 is associated with the lower range.
  • decreasing speeds n v are associated with decreasing inlet pressure values p, i.e. low speed values n v are associated with low inlet pressure values p.
  • the upper limit pressure p 1 ranges between 20 mbar and 1 mbar
  • the lower pressure p 2 ranges between 1.0 mbar and 0.005 mbar, wherein the upper limit pressure p 1 is larger than the lower limit pressure p 2 .
  • the upper constant speed value n 1 ranges between 2,200 and 1,000 rpm
  • the lower constant speed value n 2 ranges between 300 and 1,300 rpm, wherein the upper constant speed value n 1 is larger than the lower constant speed value n 2 .
  • the positive displacement pump is a fore vacuum pump arranged upstream of a high vacuum pump, and the inlet pressure value p is the suction-side pressure of the high vacuum pump.
  • the inlet pressure value p thus is the pressure in the recipient evacuated by the high vacuum pump.
  • the inlet pressure value p may also be the fore vacuum pressure immediately before the inlet of the fore vacuum pump.
  • the inlet pressure-speed curve is saved in a characteristic diagram storage.
  • a corresponding speed n is associated with each inlet pressure value p.
  • the drive motor is an asynchronous motor driven by a correspondingly driven frequency converter.
  • the drive motor may also be configured as a synchronous motor.
  • the positive displacement vacuum pump comprises a drive motor, an inlet pressure sensor and a drive motor control which controls the speed n of the drive motor in dependence on the inlet pressure value p determined by the inlet pressure sensor.
  • the drive motor control comprises a storage for storing a curve that indicates a respective speed n of the drive motor for the inlet pressure values p of the inlet pressure sensor, wherein the curve comprises two ranges: the first range is an upper range for inlet pressure values p larger than or equal to an upper limit pressure p 1 , with a single constant upper speed value n 1 being associated with said first range.
  • the second range is an alteration range for inlet pressure values p smaller than the upper limit pressure p 1 , wherein in the alteration range different speed values n v are associated with the inlet pressure values p.
  • the drive motor control comprises a processor which has connected therewith the inlet pressure sensor and evaluates the signals from the inlet pressure sensor.
  • the evaluated inlet pressure sensor signals can be supplied to a pressure indicator associated with the positive displacement vacuum pump.
  • the inlet pressure sensor signals are thus not only evaluated by the drive motor control with regard to controlling the drive motor, but also converted into an indication format, and finally supplied to an indicator associated with the vacuum pump.
  • a separate evaluating and indicating device for indicating the inlet pressure is not required.
  • FIG. 1 shows a schematic representation of a pump assembly comprising a positive displacement vacuum pump according to the invention configured as a fore vacuum pump, and a high vacuum pump, and
  • FIG. 2 shows an inlet pressure-speed curve according to which the speed of the drive motor of the positive displacement vacuum pump is controlled.
  • FIG. 1 schematically shows a pump assembly 10 for generating a high vacuum in a recipient 12 .
  • a pump assembly 10 for generating a high vacuum in a recipient 12 .
  • two pumps are arranged in series, namely a high vacuum pump 14 , for example a turbomolecular pump, and a positive displacement vacuum pump 16 configured as a fore vacuum pump, for example a membrane, piston or rotary vane pump.
  • a high vacuum pump 14 for example a turbomolecular pump
  • a positive displacement vacuum pump 16 configured as a fore vacuum pump, for example a membrane, piston or rotary vane pump.
  • the positive displacement vacuum pump 16 essentially comprises a pump device 18 having a displacement body arranged in a pumping chamber, a drive motor 20 for driving the pump device 18 , and a drive motor control 22 for controlling and supplying energy to the drive motor 20 .
  • the drive motor 20 is configured as a synchronous motor.
  • the pump assembly 10 comprises two inlet pressure sensors 24 , 26 , wherein one of the inlet pressure sensors 24 determines the fore vacuum pressure immediately at the inlet of the positive displacement vacuum pump 16 , and the other inlet pressure sensor 26 determines the high vacuum pressure sure in the recipient 12 .
  • Both inlet pressure sensors 24 , 26 are connected with a processor 28 of the drive motor control 22 , said processor 28 being continuously supplied with inlet pressure values p by the inlet pressure sensors 24 , 26 .
  • the drive motor control 22 further comprises a frequency converter 30 driven by the processor 28 , and is connected with the drive motor 20 .
  • the inlet pressure sensor 24 associated with the positive displacement vacuum pump 16 may be integrated in the positive displacement vacuum pump 16 .
  • the processor 28 comprises a characteristic diagram storage for saving a curve 32 in which a respective speed n of the drive motor 20 is associated with inlet pressure values p.
  • the curve 32 comprises an upper range 34 extending from the atmospheric pressure of 1,013 mbar to an upper limit pressure p 1 of 10 mbar.
  • a single constant upper speed value n 1 is associated with the upper range 34 of the curve 32 .
  • the curve 32 comprises an alteration range 36 in which various speed values n v are associated with the inlet pressure values p.
  • decreasing speeds n v are associated with decreasing inlet pressure values p.
  • a different speed value n v is associated with each inlet pressure value p.
  • the curve 32 further comprises a lower range 38 for inlet pressure values p smaller than or equal to the lower limit pressure p 2 .
  • a single speed value n 2 is associated with all inlet pressure values p.
  • the upper speed value n 1 is approximately 1,800 rpm, and the lower speed value n 2 is 500 rpm.
  • the upper speed value n 1 is, for example, 2,100 rpm, and the lower speed value n 2 is 1,000 rpm.
  • the high vacuum pressure serves as the inlet pressure value p which is supplied by the inlet pressure sensor 26 arranged at the recipient 12 and on the suction side of the high vacuum pump 14 .
  • the fore vacuum pressure of the inlet pressure sensor 24 may be used for determining the inlet pressure values p.
  • the shape of the curve 32 , the limit pressures p 1 and p 2 , and the upper and lower speed values n 1 and n 2 are determined in test series for establishing for each inlet pressure value p a drive motor 20 speed at which a maximum effective suction capacity of the positive displacement pump 16 is attained.
  • the determined curve is subsequently stored in the characteristic diagram storage of the processor 28 .
  • the drive motor control 22 determines, from the curve 32 saved in the characteristic diagram storage, the speed n of the drive motor 20 in dependence on the high vacuum inlet pressure value p.
  • the determined speed value n is fed to the frequency converter 30 which generates corresponding rotating fields in the stator coils of the drive motor 20 configured as asynchronous or synchronous motor, and operates the motor at the determined speed. In this manner, the positive displacement pump 16 can always be operated at the maximum effective suction capacity.
  • the processor 28 of the drive motor control 22 further carries out evaluation and conversion of the signals from the inlet pressure sensor 24 into an indication format.
  • the inlet pressures converted into the indication format are supplied to an indicating device arranged at the positive displacement vacuum pump 16 , for example at the housing of the drive motor control 22 .
  • the indicating device may further be used for speed indication.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
US10/580,128 2003-11-20 2004-11-05 Method for controlling the drive motor of a positive displacement vaccum pump Abandoned US20070071610A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10354205.1 2003-11-20
DE10354205A DE10354205A1 (de) 2003-11-20 2003-11-20 Verfahren zur Steuerung eines Antriebsmotors einer Vakuum-Verdrängerpumpe
PCT/EP2004/012529 WO2005050021A1 (de) 2003-11-20 2004-11-05 Verfahren zur steuerung eines antriebsmotors einer vakuum-verdrängerpumpe

Publications (1)

Publication Number Publication Date
US20070071610A1 true US20070071610A1 (en) 2007-03-29

Family

ID=34609147

Family Applications (1)

Application Number Title Priority Date Filing Date
US10/580,128 Abandoned US20070071610A1 (en) 2003-11-20 2004-11-05 Method for controlling the drive motor of a positive displacement vaccum pump

Country Status (8)

Country Link
US (1) US20070071610A1 (ko)
EP (1) EP1697639B1 (ko)
JP (1) JP4553262B2 (ko)
KR (1) KR20060097741A (ko)
CN (1) CN100460676C (ko)
CA (1) CA2546063A1 (ko)
DE (2) DE10354205A1 (ko)
WO (1) WO2005050021A1 (ko)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080101962A1 (en) * 2006-10-28 2008-05-01 Pfeiffer Vacuum Gmbh Vacuum pump
EP3067560A1 (de) * 2015-03-12 2016-09-14 Pfeiffer Vacuum GmbH Vakuumpumpe sowie Verfahren zum Betrieb einer Scrollpumpe oder einer Vakuumpumpe mit wenigstens zwei Pumpstufen
US20170214352A1 (en) * 2014-07-30 2017-07-27 Ksb Aktiengesellschaft Method for Controlling the Motor of a Synchronous Reluctance Motor for a Pump and Pump Comprising a Synchronous Reluctance Motor
EP3578825A3 (en) * 2018-06-05 2020-05-06 Ebara Corporation Control device, control system, control method, program and machine learning device
US10690129B2 (en) 2010-11-17 2020-06-23 Ksb Aktiengesellschaft Method and control device for variable rotational speed control of a displacement pump unit and displacement pump arrangement
US11078916B2 (en) 2017-08-04 2021-08-03 Pfeiffer Vacuum Gmbh Vacuum pump
WO2022090191A1 (en) * 2020-10-28 2022-05-05 Leybold Gmbh Method for operating a scroll vacuum pump
CN114787517A (zh) * 2019-12-19 2022-07-22 莱宝法国有限责任公司 润滑剂密封真空泵、润滑剂过滤器和方法

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4737770B2 (ja) * 2006-09-12 2011-08-03 アネスト岩田株式会社 真空ポンプの運転制御装置および方法
ATE552423T1 (de) 2010-02-12 2012-04-15 Allweiler Ag Betriebssteuerungsvorrichtung für eine verdrängerpumpe, pumpensystem und verfahren zum betreiben eines solchen
DE102011050017A1 (de) * 2011-04-29 2012-10-31 Allweiler Gmbh Steuermittel zum Ansteuern eines Frequenzumrichters sowie Ansteuerverfahren
CN102278310A (zh) * 2011-07-14 2011-12-14 温州市欧弗斯机械有限公司 智能调节真空系统
DE102017203474A1 (de) * 2017-03-03 2018-09-06 KSB SE & Co. KGaA Verfahren zur Regelung einer drehzahlvariablen Umwälzpumpe sowie Umwälzpumpe
GB2603892A (en) * 2021-02-03 2022-08-24 Edwards Ltd Pump apparatus and system
DE102022100843A1 (de) 2022-01-14 2023-07-20 VON ARDENNE Asset GmbH & Co. KG Verfahren, Steuervorrichtung, Speichermedium und Vakuumanordnung
CN116641881B (zh) * 2023-04-25 2024-01-23 北京通嘉宏瑞科技有限公司 真空泵控制方法、装置、计算机设备和存储介质

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3788076A (en) * 1972-03-20 1974-01-29 Parker Hannifin Corp Hydraulic system with series wound pump drive motor
US4158290A (en) * 1977-05-11 1979-06-19 Eaton Corporation Electro-hydraulic controller
US4174724A (en) * 1977-07-11 1979-11-20 Borg-Warner Corporation Flow valve
US4728869A (en) * 1985-12-18 1988-03-01 Anicon, Inc. Pulsewidth modulated pressure control system for chemical vapor deposition apparatus
US5795328A (en) * 1994-10-28 1998-08-18 Iolab Corporation Vacuum system and a method of operating a vacuum system
US5947692A (en) * 1997-10-30 1999-09-07 Baxter International Inc. Peristaltic pump controller with scale factor that varies as a step function of pump inlet pressure
US5971725A (en) * 1996-10-08 1999-10-26 Varian, Inc. Vacuum pumping device
US6045331A (en) * 1998-08-10 2000-04-04 Gehm; William Fluid pump speed controller
US20010041139A1 (en) * 1999-03-24 2001-11-15 Eugene P. Sabini Apparatus and method for controlling a pump system
US6375431B1 (en) * 1999-11-17 2002-04-23 Teijin Seiki Co., Ltd. Evacuating apparatus
US6419455B1 (en) * 1999-04-07 2002-07-16 Alcatel System for regulating pressure in a vacuum chamber, vacuum pumping unit equipped with same
US6425883B1 (en) * 1998-05-08 2002-07-30 Circuit Tree Medical, Inc. Method and apparatus for controlling vacuum as a function of ultrasonic power in an ophthalmic phaco aspirator
US6537033B2 (en) * 2000-04-11 2003-03-25 Western Dairies Incorporation Open loop control apparatus for vacuum controlled systems
US6539714B1 (en) * 2002-03-19 2003-04-01 Cummins, Inc. System for estimating turbocharger rotational speed
US20030206805A1 (en) * 2000-04-14 2003-11-06 Bishop Michael B. Variable speed hydraulic pump

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3828608A1 (de) * 1988-08-23 1990-03-08 Alcatel Hochvakuumtechnik Gmbh Vakuumpumpvorrichtung
CN2118836U (zh) * 1992-05-12 1992-10-14 沈太福 一种新型可调式真空泵
JPH0968169A (ja) * 1995-08-31 1997-03-11 Hitachi Constr Mach Co Ltd 建設機械の油圧駆動装置
DE19816241C1 (de) * 1998-04-11 1999-10-28 Vacuubrand Gmbh & Co Membran- oder Kolbenpumpe oder kombinierte Membran-/Kolbenpumpe mit Einrichtung zur druckabhängigen Reduzierung der Schöpfraumvergrößerungsgeschwindigkeit
DE10023523C1 (de) * 2000-05-13 2001-12-13 Vacuubrand Gmbh & Co Kg Anlaufsteuerung für eine Membran- und/oder Kolbenvakuumpumpe
JP4109405B2 (ja) * 2000-05-19 2008-07-02 日立建機株式会社 建設機械のエンジン制御装置
DE10043783A1 (de) * 2000-09-06 2002-03-14 Leybold Vakuum Gmbh Verfahren und Vorrichtung zur Regelung des Vakuums in einer Kammer
DE10222130B4 (de) * 2002-05-17 2007-06-06 Knf Neuberger Gmbh Verfahren zur Erzeugung eines Vakuums

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3788076A (en) * 1972-03-20 1974-01-29 Parker Hannifin Corp Hydraulic system with series wound pump drive motor
US4158290A (en) * 1977-05-11 1979-06-19 Eaton Corporation Electro-hydraulic controller
US4174724A (en) * 1977-07-11 1979-11-20 Borg-Warner Corporation Flow valve
US4728869A (en) * 1985-12-18 1988-03-01 Anicon, Inc. Pulsewidth modulated pressure control system for chemical vapor deposition apparatus
US5795328A (en) * 1994-10-28 1998-08-18 Iolab Corporation Vacuum system and a method of operating a vacuum system
US5971725A (en) * 1996-10-08 1999-10-26 Varian, Inc. Vacuum pumping device
US5947692A (en) * 1997-10-30 1999-09-07 Baxter International Inc. Peristaltic pump controller with scale factor that varies as a step function of pump inlet pressure
US6425883B1 (en) * 1998-05-08 2002-07-30 Circuit Tree Medical, Inc. Method and apparatus for controlling vacuum as a function of ultrasonic power in an ophthalmic phaco aspirator
US6045331A (en) * 1998-08-10 2000-04-04 Gehm; William Fluid pump speed controller
US20010041139A1 (en) * 1999-03-24 2001-11-15 Eugene P. Sabini Apparatus and method for controlling a pump system
US6419455B1 (en) * 1999-04-07 2002-07-16 Alcatel System for regulating pressure in a vacuum chamber, vacuum pumping unit equipped with same
US6375431B1 (en) * 1999-11-17 2002-04-23 Teijin Seiki Co., Ltd. Evacuating apparatus
US6537033B2 (en) * 2000-04-11 2003-03-25 Western Dairies Incorporation Open loop control apparatus for vacuum controlled systems
US20030206805A1 (en) * 2000-04-14 2003-11-06 Bishop Michael B. Variable speed hydraulic pump
US6539714B1 (en) * 2002-03-19 2003-04-01 Cummins, Inc. System for estimating turbocharger rotational speed

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080101962A1 (en) * 2006-10-28 2008-05-01 Pfeiffer Vacuum Gmbh Vacuum pump
US10690129B2 (en) 2010-11-17 2020-06-23 Ksb Aktiengesellschaft Method and control device for variable rotational speed control of a displacement pump unit and displacement pump arrangement
US20170214352A1 (en) * 2014-07-30 2017-07-27 Ksb Aktiengesellschaft Method for Controlling the Motor of a Synchronous Reluctance Motor for a Pump and Pump Comprising a Synchronous Reluctance Motor
US10033320B2 (en) * 2014-07-30 2018-07-24 Ksb Aktiengesellschaft Method for controlling the motor of a synchronous reluctance motor for a pump and pump comprising a synchronous reluctance motor
EP3067560A1 (de) * 2015-03-12 2016-09-14 Pfeiffer Vacuum GmbH Vakuumpumpe sowie Verfahren zum Betrieb einer Scrollpumpe oder einer Vakuumpumpe mit wenigstens zwei Pumpstufen
US11078916B2 (en) 2017-08-04 2021-08-03 Pfeiffer Vacuum Gmbh Vacuum pump
EP3578825A3 (en) * 2018-06-05 2020-05-06 Ebara Corporation Control device, control system, control method, program and machine learning device
US11396876B2 (en) 2018-06-05 2022-07-26 Ebara Corporation Control device, control system, control method, recording medium and machine learning device
CN114787517A (zh) * 2019-12-19 2022-07-22 莱宝法国有限责任公司 润滑剂密封真空泵、润滑剂过滤器和方法
WO2022090191A1 (en) * 2020-10-28 2022-05-05 Leybold Gmbh Method for operating a scroll vacuum pump

Also Published As

Publication number Publication date
WO2005050021A1 (de) 2005-06-02
JP4553262B2 (ja) 2010-09-29
DE502004009187D1 (de) 2009-04-30
JP2007511703A (ja) 2007-05-10
EP1697639A1 (de) 2006-09-06
CN1882782A (zh) 2006-12-20
DE10354205A1 (de) 2005-06-23
KR20060097741A (ko) 2006-09-14
CA2546063A1 (en) 2005-06-02
EP1697639B1 (de) 2009-03-18
CN100460676C (zh) 2009-02-11

Similar Documents

Publication Publication Date Title
US20070071610A1 (en) Method for controlling the drive motor of a positive displacement vaccum pump
US6796215B1 (en) Membrane pump
JP5424550B2 (ja) 真空ポンプおよびその運転方法
US20080085207A1 (en) Oil-flooded screw compressor with axial-thrust balancing device
NO323484B1 (no) Fortrengningsmaskin for kompressible medier
US7670119B2 (en) Multistage vacuum pump and a pumping installation including such a pump
EP1101942A3 (en) Evacuating apparatus
CN107002681A (zh) 用于产生真空的泵送系统及利用此泵送系统的泵送方法
US9017040B2 (en) Roughing pump method for a positive displacement pump
KR100632689B1 (ko) 모터의 토크제어장치 및 방법
EP1477679A2 (en) Method of controlling a plurality of compressors
US10465686B2 (en) Vacuum pump system
WO2005061896A3 (en) Vacuum pump
US6379135B2 (en) Vacuum pumps
CN107002680A (zh) 用于产生真空的泵送系统及利用此泵送系统的泵送方法
EP0974756A3 (en) Vacuum pump and vacuum apparatus
US6709383B2 (en) Device for driving blood pumps
US5846066A (en) Vacuum pumps with claw-type rotor and roots-type rotor near the outlet
JP2023514643A (ja) 真空システムを作動させる方法
CN211420303U (zh) 一种用于镀铝膜真空抽压机的装置
CN209444561U (zh) 一种真空泵的节能控制装置
JPH05215089A (ja) 真空ポンプ
JPH04272492A (ja) 多段メカニカルブースタポンプ
KR20010081399A (ko) 진공펌프 특성 변환 시스템

Legal Events

Date Code Title Description
AS Assignment

Owner name: LEYBOLD VAKUUM GMBH, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:HOLZEMER, MICHAEL;SCHONBORN, FRANK;RONTHALER, KARL-HEINZ;REEL/FRAME:017929/0271

Effective date: 20060517

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION