EP1697639B1 - Verfahren zur steuerung eines antriebsmotors einer vakuum-verdrängerpumpe - Google Patents

Verfahren zur steuerung eines antriebsmotors einer vakuum-verdrängerpumpe Download PDF

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Publication number
EP1697639B1
EP1697639B1 EP04818757A EP04818757A EP1697639B1 EP 1697639 B1 EP1697639 B1 EP 1697639B1 EP 04818757 A EP04818757 A EP 04818757A EP 04818757 A EP04818757 A EP 04818757A EP 1697639 B1 EP1697639 B1 EP 1697639B1
Authority
EP
European Patent Office
Prior art keywords
inlet pressure
speed
drive motor
range
curve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP04818757A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1697639A1 (de
Inventor
Michael HÖLZEMER
Frank SCHÖNBORN
Karl-Heinz Ronthaler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH, Leybold Vacuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1697639A1 publication Critical patent/EP1697639A1/de
Application granted granted Critical
Publication of EP1697639B1 publication Critical patent/EP1697639B1/de
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00—Motor parameters
    • F04B2203/04—Motor parameters of linear electric motors
    • F04B2203/0409—Linear speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/01—Pressure before the pump inlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2207/00—External parameters
    • F04B2207/02—External pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/12—Kind or type gaseous, i.e. compressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2270/00—Control
    • F05B2270/30—Control parameters, e.g. input parameters
    • F05B2270/301—Pressure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps

Definitions

  • the invention relates to a method for controlling a drive motor of a vacuum positive displacement pump and to a vacuum positive displacement pump with a control of its drive motor.
  • Vacuum positive displacement pumps are for example diaphragm pumps, rotary vane pumps, piston pumps or Roots pumps and are often used as backing pumps in combination with a high vacuum pump.
  • a special feature of the mentioned vacuum positive displacement pumps is that the final pressure which can be reached by them, that is to say the backing pressure, is largely dependent on the speed, the speed being high Input pressures must be high and low at low input pressures to achieve optimum pumping speed. This can be explained by the fact that at low inlet pressures due to the small difference between inlet pressure and suction pressure in the working space, the filling of the suction chamber is relatively slow. This results in a low degree of filling of the vacuum positive displacement pump at low input pressures, which can be improved only by extending the opening times of the intake valve, ie by reducing the speed.
  • the object of the invention is in contrast to provide a method or a vacuum positive displacement pump with which or with which the final pressure can be reached faster.
  • the inventive method according to claim 1 for controlling a drive motor of a vacuum positive displacement pump comprises the steps of storing a pressure-speed curve, determining the input pressure value, speed value determination from the curve and operation of the drive motor with the determined speed value.
  • a curve is stored in which a single constant upper speed value n 1 is assigned for input pressure values p equal to or greater than an upper limit pressure p 1 , and which has a range of change for input pressure values p smaller than the upper limit pressure p 1 , where the change range are assigned to the input pressure values p different rotational speed values n v .
  • the input pressure value p is constantly determined, the assigned speed n is determined from the input pressure value p in the curve, and the drive motor is operated at the determined speed n. While at high input pressure values p above the upper limit pressure p 1 of the drive motor is operated at a maximum constant speed n 1 , for rotational speeds below the upper limit pressure p 1 as a function of the input pressure value p is almost continuously a corresponding speed value n v assigned. In this way, the effective pumping speed of the positive displacement pump can be maintained at the highest possible level for each input pressure value. This shortens the time from the beginning of the evacuation to the final pressure. By adjusting the speed to the input pressure value, the required drive energy and, due to the lower average speed level, the wear is reduced. As a result, the maintenance and operating costs are reduced, thus improving the efficiency of the vacuum positive displacement pump.
  • the curve has a lower range for input pressure values p less than or equal to a lower limit pressure p 2 , with the lower range associated with a single constant lower speed value n 2 and the range of change to input pressure values p greater than the lower limit pressure range p 2 is limited.
  • the curve thus has both an upper pressure range of constant rotational speed and a lower pressure range of constant rotational speed and, between the two ranges mentioned, a range of change of non-constant rotational speed.
  • Such a curve is necessary and useful, for example, for roughing pumps, which require a certain minimum speed for a pumping action, since there is no pumping action below the minimum speed, in particular due to backflow losses. This applies, for example, to oil-sealed rotary vane pumps. This ensures that the vacuum positive displacement pump is always operated above a speed at which the pumping function is still guaranteed even at very low input pressures.
  • the curve in contrast to the method claim 1 instead of an upper range on a lower range for input pressure values p less than or equal to a lower limit pressure p 2 , wherein the lower portion is associated with a single constant lower speed n 2 .
  • falling speeds n v are associated with decreasing input pressure values p in the change range, ie low speed values n v are associated with low input pressure values p.
  • the upper limit pressure p 1 is preferably between 20 mbar and 1 mbar, and the lower limit pressure p 2 is between 1.0 mbar and 0.005 mbar, the upper limit pressure p 1 being greater than the lower limit pressure p 2 .
  • the upper constant speed value n 1 is between 2,200 and 1,000 rpm and the lower constant speed value n 2 is between 300 and 1,300 rpm, the upper constant speed value n 1 being greater than the lower constant Speed value n is 2 .
  • the positive displacement pump is a backing pump upstream of a high vacuum pump
  • the inlet pressure value p is the suction side pressure of the high vacuum pump.
  • the inlet pressure value p is thus the pressure in the recipient evacuated by the high vacuum pump.
  • the input pressure value p may also be the pre-vacuum pressure immediately before the input of the backing pump.
  • the input pressure-speed curve is stored in a map memory.
  • each input pressure value p is assigned a corresponding speed n.
  • the drive motor is an asynchronous motor, which is driven by a correspondingly controlled frequency converter.
  • the drive motor can also be designed as a synchronous motor.
  • the vacuum displacement pump has a drive motor, an input pressure sensor and a drive motor control, which controls the rotational speed n of the drive motor as a function of the input pressure value p determined by the input pressure sensor.
  • the drive motor controller has a memory in which a curve is stored, which indicates a rotational speed n of the drive motor for input pressure values p of the input pressure sensor, the curve having two regions: the first region is an upper region for Input pressure values p greater than or equal to an upper limit pressure p 1 , which is assigned a single constant upper speed value n 1 .
  • the second range is a range of change for input pressure values p smaller than the upper limit pressure p 1 , wherein in the change range, the input pressure values p are assigned different rotational speed values n v .
  • the drive motor controller has a processor to which the input pressure sensor is connected and which evaluates the signals of the input pressure sensor.
  • the evaluated input pressure sensor signals can be supplied to a vacuum display associated with the vacuum displacement pump.
  • the input pressure sensor signals are thus evaluated by the drive motor control not only with regard to the control of the drive motor, but also converted into a display format and finally fed to a display associated with the vacuum pump. This eliminates the need for a separate evaluation and display device for displaying the input pressure.
  • FIG. 1 schematically a pump assembly 10 is shown, which serves to generate a high vacuum in a recipient 12.
  • a pump assembly 10 which serves to generate a high vacuum in a recipient 12.
  • two pumps are connected in series, namely a high vacuum pump 14, for example a turbomolecular pump, and a vacuum displacement pump 16 as a backing pump, for example a diaphragm, piston or rotary vane pump.
  • a high vacuum pump 14 for example a turbomolecular pump
  • a vacuum displacement pump 16 as a backing pump, for example a diaphragm, piston or rotary vane pump.
  • the vacuum displacement pump 16 essentially has a pump device 18 with a displacer in a pump chamber, a drive motor 20 for driving the pump device 18 and a drive motor controller 22 for controlling and powering the drive motor 20.
  • the drive motor 20 is designed as a synchronous motor.
  • the pump assembly 10 has two input pressure sensors 24,26, wherein the one input pressure sensor 24, the backing pressure directly at the inlet of the vacuum displacement pump 16 determined and the other input pressure sensor 26 determines the high vacuum pressure in the recipient 12. Both input pressure sensors 24, 26 are connected to a processor 28 of the drive motor controller 22 to which they continuously supply input pressure values p.
  • the drive motor controller 22 further includes a frequency converter 30, which is driven by the processor 28 and connected to the drive motor 20.
  • the input pressure sensor 24 assigned to the vacuum displacement pump 16 can also be integrated into the vacuum displacement pump 16.
  • the processor 28 has a map memory, in which a curve 32 is stored, in the input pressure values p in each case a speed n of the drive motor 20 is assigned.
  • the curve 32 has an upper region 34 which extends from the atmospheric pressure of 1013 mbar up to an upper limit pressure p 1 of 10 mbar.
  • the upper area 34 of the curve 32 is assigned a single constant upper speed value n 1 .
  • the curve 32 has a change range 36, in which the input pressure values p are assigned different rotational speed values n v .
  • falling speeds n v are assigned to the falling input pressure values p.
  • Each input pressure value p is assigned a different speed value n v in the change range 36.
  • the curve 32 also has a lower region 38 for input pressure values p less than or equal to the lower limit pressure p 2 . In the lower region 38 of the curve 32, all input pressure values p are assigned a single rotational speed value n 2 .
  • the upper speed value n 1 is for example about 1,800 rpm and the lower speed value n is 2,500 rpm.
  • the upper speed value n 1 is, for example, 2,100 rpm and the lower speed value n 2 is 1,000 rpm.
  • the input pressure value p used is the high-vacuum pressure which is supplied by the inlet pressure sensor 26 arranged on the recipient 12 and on the suction side of the high-vacuum pump 14.
  • the fore-vacuum pressure of the inlet pressure sensor 24 can also be used to determine the inlet pressure values p.
  • the course of the curve 32, the limit pressures p 1 and p 2 and the upper and lower speed values n 1 and n 2 are determined by series of experiments to determine a speed of the drive motor 20 for each input pressure value p, in which a maximum effective pumping capacity of the positive displacement pump 16 is achieved.
  • the determined curve is then stored in the map memory of the processor 28.
  • the speed n of the drive motor 20 is determined by the drive motor controller 22 as a function of the high-vacuum inlet pressure value p from the curve 32 stored in the map memory.
  • the determined speed value n is output to the frequency converter 30, generates the corresponding rotating fields in the stator coils of the formed asynchronous or synchronous motor drive motor 20 and the determined speed operates. In this way, the positive displacement pump 16 can always be operated with the maximum effective pumping speed.
  • the processor 28 of the drive motor controller 22 also takes over the evaluation and conversion of the signals of the input pressure sensor 24 in a display format.
  • the input pressures converted to the display format are supplied to a display device disposed on the vacuum positive displacement pump 16, for example, the housing of the drive motor controller 22.
  • the display device may also be used to display the rotational speed.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP04818757A 2003-11-20 2004-11-05 Verfahren zur steuerung eines antriebsmotors einer vakuum-verdrängerpumpe Not-in-force EP1697639B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10354205A DE10354205A1 (de) 2003-11-20 2003-11-20 Verfahren zur Steuerung eines Antriebsmotors einer Vakuum-Verdrängerpumpe
PCT/EP2004/012529 WO2005050021A1 (de) 2003-11-20 2004-11-05 Verfahren zur steuerung eines antriebsmotors einer vakuum-verdrängerpumpe

Publications (2)

Publication Number Publication Date
EP1697639A1 EP1697639A1 (de) 2006-09-06
EP1697639B1 true EP1697639B1 (de) 2009-03-18

Family

ID=34609147

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04818757A Not-in-force EP1697639B1 (de) 2003-11-20 2004-11-05 Verfahren zur steuerung eines antriebsmotors einer vakuum-verdrängerpumpe

Country Status (8)

Country Link
US (1) US20070071610A1 (ko)
EP (1) EP1697639B1 (ko)
JP (1) JP4553262B2 (ko)
KR (1) KR20060097741A (ko)
CN (1) CN100460676C (ko)
CA (1) CA2546063A1 (ko)
DE (2) DE10354205A1 (ko)
WO (1) WO2005050021A1 (ko)

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ATE552423T1 (de) 2010-02-12 2012-04-15 Allweiler Ag Betriebssteuerungsvorrichtung für eine verdrängerpumpe, pumpensystem und verfahren zum betreiben eines solchen
DE102011086572B4 (de) 2010-11-17 2019-08-14 KSB SE & Co. KGaA Verfahren und Regelvorrichtung zur drehzahlvariablen Regelung eines Verdrängerpumpenaggregates sowie Verdrängerpumpenanordnung
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Also Published As

Publication number Publication date
US20070071610A1 (en) 2007-03-29
CN1882782A (zh) 2006-12-20
CA2546063A1 (en) 2005-06-02
CN100460676C (zh) 2009-02-11
JP4553262B2 (ja) 2010-09-29
DE10354205A1 (de) 2005-06-23
EP1697639A1 (de) 2006-09-06
KR20060097741A (ko) 2006-09-14
DE502004009187D1 (de) 2009-04-30
WO2005050021A1 (de) 2005-06-02
JP2007511703A (ja) 2007-05-10

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