CA2546063A1 - Method for controlling the drive motor of a positive-displacement vacuum pump - Google Patents

Method for controlling the drive motor of a positive-displacement vacuum pump Download PDF

Info

Publication number
CA2546063A1
CA2546063A1 CA002546063A CA2546063A CA2546063A1 CA 2546063 A1 CA2546063 A1 CA 2546063A1 CA 002546063 A CA002546063 A CA 002546063A CA 2546063 A CA2546063 A CA 2546063A CA 2546063 A1 CA2546063 A1 CA 2546063A1
Authority
CA
Canada
Prior art keywords
inlet pressure
speed
drive motor
range
curve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002546063A
Other languages
English (en)
French (fr)
Inventor
Michael Hoelzemer
Frank Schoenborn
Karl-Heinz Ronthaler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2546063A1 publication Critical patent/CA2546063A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00—Motor parameters
    • F04B2203/04—Motor parameters of linear electric motors
    • F04B2203/0409—Linear speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/01—Pressure before the pump inlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2207/00—External parameters
    • F04B2207/02—External pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/12—Kind or type gaseous, i.e. compressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2270/00—Control
    • F05B2270/30—Control parameters, e.g. input parameters
    • F05B2270/301—Pressure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
CA002546063A 2003-11-20 2004-11-05 Method for controlling the drive motor of a positive-displacement vacuum pump Abandoned CA2546063A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10354205.1 2003-11-20
DE10354205A DE10354205A1 (de) 2003-11-20 2003-11-20 Verfahren zur Steuerung eines Antriebsmotors einer Vakuum-Verdrängerpumpe
PCT/EP2004/012529 WO2005050021A1 (de) 2003-11-20 2004-11-05 Verfahren zur steuerung eines antriebsmotors einer vakuum-verdrängerpumpe

Publications (1)

Publication Number Publication Date
CA2546063A1 true CA2546063A1 (en) 2005-06-02

Family

ID=34609147

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002546063A Abandoned CA2546063A1 (en) 2003-11-20 2004-11-05 Method for controlling the drive motor of a positive-displacement vacuum pump

Country Status (8)

Country Link
US (1) US20070071610A1 (ko)
EP (1) EP1697639B1 (ko)
JP (1) JP4553262B2 (ko)
KR (1) KR20060097741A (ko)
CN (1) CN100460676C (ko)
CA (1) CA2546063A1 (ko)
DE (2) DE10354205A1 (ko)
WO (1) WO2005050021A1 (ko)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4737770B2 (ja) * 2006-09-12 2011-08-03 アネスト岩田株式会社 真空ポンプの運転制御装置および方法
DE102006050943B4 (de) * 2006-10-28 2020-04-16 Pfeiffer Vacuum Gmbh Vakuumpumpe und Verfahren zum Betrieb derselben
ATE552423T1 (de) * 2010-02-12 2012-04-15 Allweiler Ag Betriebssteuerungsvorrichtung für eine verdrängerpumpe, pumpensystem und verfahren zum betreiben eines solchen
EP2640973B1 (de) * 2010-11-17 2018-10-03 KSB SE & Co. KGaA Verfahren und regelvorrichtung zur drehzahlvariablen regelung eines verdrängerpumpenaggregates sowie verdrängerpumpenanordnung
DE102011050017A1 (de) 2011-04-29 2012-10-31 Allweiler Gmbh Steuermittel zum Ansteuern eines Frequenzumrichters sowie Ansteuerverfahren
CN102278310A (zh) * 2011-07-14 2011-12-14 温州市欧弗斯机械有限公司 智能调节真空系统
DE102014214952A1 (de) 2014-07-30 2016-02-04 Ksb Aktiengesellschaft Verfahren zur Motorsteuerung eines Synchron-Reluktanzmotors für eine Pumpe und Pumpe mit Synchron-Reluktanzmotor
EP3067560B1 (de) * 2015-03-12 2020-11-18 Pfeiffer Vacuum GmbH Vakuumpumpe mit wenigstens einer Pumpstufe
DE102017203474A1 (de) * 2017-03-03 2018-09-06 KSB SE & Co. KGaA Verfahren zur Regelung einer drehzahlvariablen Umwälzpumpe sowie Umwälzpumpe
EP3438460B1 (de) 2017-08-04 2024-03-20 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP7019513B2 (ja) * 2018-06-05 2022-02-15 株式会社荏原製作所 制御装置、制御システム、制御方法、プログラム及び機械学習装置
GB2592573A (en) * 2019-12-19 2021-09-08 Leybold France S A S Lubricant-sealed vacuum pump, lubricant filter and method.
DE102020128369A1 (de) * 2020-10-28 2022-04-28 Leybold Gmbh Verfahren zum Betrieb einer Scroll-Pumpe sowie Scroll-Pumpe
GB2603892A (en) * 2021-02-03 2022-08-24 Edwards Ltd Pump apparatus and system
DE102022100843A1 (de) 2022-01-14 2023-07-20 VON ARDENNE Asset GmbH & Co. KG Verfahren, Steuervorrichtung, Speichermedium und Vakuumanordnung
CN116641881B (zh) * 2023-04-25 2024-01-23 北京通嘉宏瑞科技有限公司 真空泵控制方法、装置、计算机设备和存储介质

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3788076A (en) * 1972-03-20 1974-01-29 Parker Hannifin Corp Hydraulic system with series wound pump drive motor
US4091617A (en) * 1977-05-11 1978-05-30 Eaton Corporation Hydraulic controller
US4174724A (en) * 1977-07-11 1979-11-20 Borg-Warner Corporation Flow valve
US4728869A (en) * 1985-12-18 1988-03-01 Anicon, Inc. Pulsewidth modulated pressure control system for chemical vapor deposition apparatus
DE3828608A1 (de) * 1988-08-23 1990-03-08 Alcatel Hochvakuumtechnik Gmbh Vakuumpumpvorrichtung
CN2118836U (zh) * 1992-05-12 1992-10-14 沈太福 一种新型可调式真空泵
US5624394A (en) * 1994-10-28 1997-04-29 Iolab Corporation Vacuum system and a method of operating a vacuum system
JPH0968169A (ja) * 1995-08-31 1997-03-11 Hitachi Constr Mach Co Ltd 建設機械の油圧駆動装置
IT1288737B1 (it) * 1996-10-08 1998-09-24 Varian Spa Dispositivo di pompaggio da vuoto.
US5947692A (en) * 1997-10-30 1999-09-07 Baxter International Inc. Peristaltic pump controller with scale factor that varies as a step function of pump inlet pressure
DE19816241C1 (de) * 1998-04-11 1999-10-28 Vacuubrand Gmbh & Co Membran- oder Kolbenpumpe oder kombinierte Membran-/Kolbenpumpe mit Einrichtung zur druckabhängigen Reduzierung der Schöpfraumvergrößerungsgeschwindigkeit
US6425883B1 (en) * 1998-05-08 2002-07-30 Circuit Tree Medical, Inc. Method and apparatus for controlling vacuum as a function of ultrasonic power in an ophthalmic phaco aspirator
US6045331A (en) * 1998-08-10 2000-04-04 Gehm; William Fluid pump speed controller
US6464464B2 (en) * 1999-03-24 2002-10-15 Itt Manufacturing Enterprises, Inc. Apparatus and method for controlling a pump system
ATE280406T1 (de) * 1999-04-07 2004-11-15 Cit Alcatel Druckregelvorrichtung für eine vakuumkammer, und eine mit einer solchen vorrichtung versehenen vakuumpumpeinheit
JP2001207984A (ja) * 1999-11-17 2001-08-03 Teijin Seiki Co Ltd 真空排気装置
US6537033B2 (en) * 2000-04-11 2003-03-25 Western Dairies Incorporation Open loop control apparatus for vacuum controlled systems
US6863502B2 (en) * 2000-04-14 2005-03-08 Actuant Corporation Variable speed hydraulic pump
DE10023523C1 (de) * 2000-05-13 2001-12-13 Vacuubrand Gmbh & Co Kg Anlaufsteuerung für eine Membran- und/oder Kolbenvakuumpumpe
JP4109405B2 (ja) * 2000-05-19 2008-07-02 日立建機株式会社 建設機械のエンジン制御装置
DE10043783A1 (de) * 2000-09-06 2002-03-14 Leybold Vakuum Gmbh Verfahren und Vorrichtung zur Regelung des Vakuums in einer Kammer
US6539714B1 (en) * 2002-03-19 2003-04-01 Cummins, Inc. System for estimating turbocharger rotational speed
DE10222130B4 (de) * 2002-05-17 2007-06-06 Knf Neuberger Gmbh Verfahren zur Erzeugung eines Vakuums

Also Published As

Publication number Publication date
WO2005050021A1 (de) 2005-06-02
DE502004009187D1 (de) 2009-04-30
US20070071610A1 (en) 2007-03-29
EP1697639A1 (de) 2006-09-06
JP2007511703A (ja) 2007-05-10
JP4553262B2 (ja) 2010-09-29
EP1697639B1 (de) 2009-03-18
CN1882782A (zh) 2006-12-20
CN100460676C (zh) 2009-02-11
KR20060097741A (ko) 2006-09-14
DE10354205A1 (de) 2005-06-23

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Legal Events

Date Code Title Description
EEER Examination request
FZDE Discontinued
FZDE Discontinued

Effective date: 20121105